Electro-acoustic transducer with periodic ferroelectric polarization produced on a micromachined vertical structure
    159.
    发明授权
    Electro-acoustic transducer with periodic ferroelectric polarization produced on a micromachined vertical structure 有权
    在微机械垂直结构上产生的具有周期性铁电极化的电声换能器

    公开(公告)号:US09496847B2

    公开(公告)日:2016-11-15

    申请号:US14349579

    申请日:2012-10-05

    Abstract: A piezoelectric and ferroelectric bulk wave transducer operating at a predetermined frequency includes a block of substrate, having a first thickness and in a first material, and a piezoelectric and ferroelectric transduction plate, having a length, a width and a second thickness, and in a second piezoelectric material, first and second metal electrodes covering the plate in the direction of the length thereof. The plate has first and second ferroelectric domains with alternating polarizations, distributed along the length of the plate according to a periodic pattern of pitch. The plate is attached perpendicularly to the block so that the width of the plate and the first thickness of the block are the same direction. The first and second material, the first thickness of the block, the length, the width, the second thickness, the pitch of the plate are configured for generating and trapping bulk waves at the operating frequency of the transducer, guided between both electrodes.

    Abstract translation: 以预定频率工作的压电和铁电体波传感器包括具有第一厚度和第一材料的基片块,以及具有长度,宽度和第二厚度的压电和铁电转导板, 第二压电材料,在其长度方向上覆盖板的第一和第二金属电极。 板具有交替偏振的第一和第二铁电畴,根据间距的周期性图案沿着板的长度分布。 板垂直于块体连接,使得板的宽度和块的第一厚度是相同的方向。 第一和第二材料,块的第一厚度,长度,宽度,第二厚度,板的间距被配置为在两个电极之间引导的在换能器的工作频率处产生和捕获体波。

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