公开(公告)号：US20020009256A1

公开(公告)日：2002-01-24

申请号：US09802929

申请日：2001-03-12

Applicant: MEMLINK LTD.

Inventor： Igal Chertkow ,  Anatoly Patlakh ,  Avi Messica

IPC: G02B006/35

CPC classification number: G02B6/3514 ,  B81B3/0021 ,  B81B2201/032 ,  B81B2201/045 ,  B81B2203/051 ,  B81B2203/056 ,  G02B6/266 ,  G02B6/353 ,  G02B6/3556 ,  G02B6/357 ,  G02B6/3584 ,  G02B6/3594 ,  G02B6/423 ,  G02B26/0841 ,  H01H2001/0084 ,  H04Q11/0005 ,  H04Q2011/0026 ,  H04Q2011/003 ,  H04Q2011/0056 ,  H04Q2011/0058

Abstract: A microelectromechanical (MEMS) device has a substrate, and at least one, generally planar moving element, such as an absorber or a mirror, disposed in parallel to the surface of the substrate. An actuator is operatively engageable with the moving element for selectively actuating the moving element between a series of successive, closely spaced positions in a plane horizontal to the surface of the substrate. The MEMS device may be effectively used as a variable attenuator and beam splitter. Various different actuators can be used. Preferably, the device is fabricated using a surface micromachining process.

Abstract translation: 微机电（MEMS）装置具有基板，以及平行于基板的表面设置的至少一个大致平面的移动元件，例如吸收体或反射镜。 致动器可操作地与所述移动元件接合，用于在与衬底的表面水平的平面中的一系列连续紧密间隔的位置之间选择性地致动所述移动元件。 MEMS器件可以有效地用作可变衰减器和分束器。 可以使用各种不同的致动器。 优选地，使用表面微加工工艺制造该装置。

公开(公告)号：US20020005976A1

公开(公告)日：2002-01-17

申请号：US09810333

申请日：2001-03-14

Inventor： Behrang Behin ,  Satinderpall Pannu

IPC: G02F001/03 ,  G02F001/07

CPC classification number: G02B6/357 ,  B81B3/0021 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/0136 ,  B81B2203/0181 ,  B81B2203/058 ,  B81C1/0015 ,  B81C1/00214 ,  B81C1/00396 ,  G02B6/3518 ,  G02B6/3524 ,  G02B6/3584 ,  G02B6/359 ,  G02B26/0833 ,  H02N1/008 ,  Y10T29/49005 ,  Y10T29/49126 ,  Y10T29/49155 ,  Y10T29/49156

Abstract: A multi-layer vertical comb-drive actuator includes a first comb structure having a plurality of first comb fingers and a second comb structure having a plurality of second comb fingers, wherein the first and second comb fingers are substantially interdigitated. The first and second comb fingers may include two or more stacked conductive layers electrically isolated from each other by an insulating layer or an air gap. Alternatively, either the first or second comb fingers may include only one conductive layer. An application of a voltage between the first and second comb fingers causes the second comb structure to move relative to the first comb structure. The present invention includes a 2D-gimble configuration to rotate a movable element along two axis.

Abstract translation: 多层垂直梳驱动致动器包括具有多个第一梳指的第一梳结构和具有多个第二梳指的第二梳结构，其中第一梳指和第二梳指基本相互交错。 第一和第二梳齿可以包括通过绝缘层或气隙彼此电隔离的两个或更多个堆叠的导电层。 或者，第一或第二梳齿可以仅包括一个导电层。 施加第一和第二梳齿之间的电压使得第二梳状结构相对于第一梳状结构移动。 本发明包括沿着两个轴线旋转可移动元件的2D柔性配置。

公开(公告)号：US20020003920A1

公开(公告)日：2002-01-10

申请号：US09800062

申请日：2001-03-05

Inventor： Dale C. Flanders

IPC: G02B006/35

CPC classification number: B81B3/0072 ,  B81B3/0008 ,  B81B2201/045 ,  G02B6/3518 ,  G02B6/3546 ,  G02B6/3564 ,  G02B6/357 ,  G02B6/358 ,  G02B6/3584 ,  G02B26/02 ,  G02B26/0816

Abstract: An optical switch device includes a rolling shutter or membrane attached at one of its edges to a substrate near an optical port in the substrate. The rolling shutter can assume one of two states. In a first closed state, the membrane is uncoiled onto the substrate over the port such that light directed at the port impinges on the shutter. In a second open state, the membrane is rolled up away from the port such that light directed at the port impinges on the port. In one embodiment, a mirror is formed on the membrane such that when the membrane is in the closed state over the substrate, light directed at the port is reflected by the mirror. In one configuration, the optical port includes a hole or aperture such light passed through the port without interference. The device can include a latch electrode the far end of the membrane such that when it is rolled out, it can be held in position by a latching voltage applied across the latch electrode and the substrate. Slits can be formed in the membrane to keep the mirror flat by relieving strain in the membrane and to allow gases in proximity to the device to pass through the membrane as it is activated. The shutter can include dimples to minimize the area of contact between the membrane and the substrate to reduce the probability of the two sticking together. The attachment edge of the membrane can be made shorter than its width to reduce distortions in the membrane to keep the mirror flat. A raised annular rim can be provided around the port such that when the shutter is held down over the port it is pulled taut and flat over the rim. This feature is also used to maintain flatness in the mirror. The switch device can be used as part of an array of optical switches.

Abstract translation: 一种光学开关装置包括将其一个边缘附接到衬底附近的光学端口的基板的卷帘门或薄膜。 滚动快门可以采取两种状态之一。 在第一关闭状态下，膜在端口上展开到基板上，使得指向端口的光照射在快门上。 在第二打开状态下，膜从端口卷起，使得指向端口的光照射在端口上。 在一个实施例中，在膜上形成反射镜，使得当膜在衬底上处于关闭状态时，指向端口的光被反射镜反射。 在一个配置中，光学端口包括孔或孔，这样的光通过端口而不受干扰。 该装置可以包括位于膜的远端的闩锁电极，使得当其被推出时，其可以通过施加在闩锁电极和基板上的锁存电压而保持就位。 可以在膜中形成狭缝，以通过减轻膜中的应变来保持反射镜平坦，并允许邻近装置的气体在被激活时通过膜。 快门可以包括凹坑以最小化膜和基底之间的接触面积，以减少两者粘在一起的可能性。 膜的附着边缘可以比其宽度短，以减少膜中的变形，以保持镜子平坦。 可以围绕端口设置凸起的环形边缘，使得当快门被按压在端口上时，其被拉紧并在边缘上平坦。 此功能也用于保持镜子的平整度。 开关器件可用作光开关阵列的一部分。

公开(公告)号：US20010034938A1

公开(公告)日：2001-11-01

申请号：US09810335

申请日：2001-03-14

Inventor： Behrang Behin ,  Satinderpall Pannu

IPC: H05K003/02 ,  H04R031/00

CPC classification number: G02B6/357 ,  B81B3/0021 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/0136 ,  B81B2203/0181 ,  B81B2203/058 ,  B81C1/0015 ,  B81C1/00214 ,  B81C1/00396 ,  G02B6/3518 ,  G02B6/3524 ,  G02B6/3584 ,  G02B6/359 ,  G02B26/0833 ,  H02N1/008 ,  Y10T29/49005 ,  Y10T29/49126 ,  Y10T29/49155 ,  Y10T29/49156

Abstract: A method of fabricating multi-layer vertical comb-drive actuator that includes a first comb structure having a plurality of first comb fingers and a second comb structure having a plurality of second comb fingers, wherein the first and second comb fingers are substantially interdigitated. The present invention includes masking and etching of a structure that contains these multiple layers, wherein the first and second comb fingers are simultaneously fabricated. The first and second comb fingers may include two or more stacked conductive layers electrically isolated from each other by an insulating layer or an air gap. Alternatively, either the first or second comb fingers may include only one conductive layer.

Abstract translation: 一种制造多层垂直梳状驱动致动器的方法，该致动器包括具有多个第一梳齿的第一梳结构和具有多个第二梳指的第二梳结构，其中第一和第二梳指基本上交错。 本发明包括掩蔽和蚀刻包含这些多层的结构，其中同时制造第一和第二梳齿。 第一和第二梳齿可以包括通过绝缘层或气隙彼此电隔离的两个或更多个堆叠的导电层。 或者，第一或第二梳齿可以仅包括一个导电层。

公开(公告)号：US20010033708A1

公开(公告)日：2001-10-25

申请号：US09799826

申请日：2001-03-05

Inventor： Carl O. Bozler ,  Steven Rabe ,  Dale C. Flanders ,  Peter S. Whitney

IPC: G02B006/35

CPC classification number: B81B3/0072 ,  B81B3/0008 ,  B81B2201/045 ,  G02B6/3518 ,  G02B6/3546 ,  G02B6/3564 ,  G02B6/357 ,  G02B6/358 ,  G02B6/3584 ,  G02B26/02 ,  G02B26/0816

Abstract: An optical switch device includes a rolling shutter or membrane attached at one of its edges to a substrate near an optical port in the substrate. The rolling shutter can assume one of two states. In a first closed state, the membrane is uncoiled onto the substrate over the port such that light directed at the port impinges on the shutter. In a second open state, the membrane is rolled up away from the port such that light directed at the port impinges on the port. In one embodiment, a mirror is formed on the membrane such that when the membrane is in the closed state over the substrate, light directed at the port is reflected by the mirror. In one configuration, the optical port includes a hole or aperture such light passed through the port without interference. The device can include a latch electrode the far end of the membrane such that when it is rolled out, it can be held in position by a latching voltage applied across the latch electrode and the substrate. Slits can be formed in the membrane to keep the mirror flat by relieving strain in the membrane and to allow gases in proximity to the device to pass through the membrane as it is activated. The shutter can include dimples to minimize the area of contact between the membrane and the substrate to reduce the probability of the two sticking together. The attachment edge of the membrane can be made shorter than its width to reduce distortions in the membrane to keep the mirror flat. A raised annular rim can be provided around the port such that when the shutter is held down over the port it is pulled taut and flat over the rim. This feature is also used to maintain flatness in the mirror. The switch device can be used as part of an array of optical switches.

Abstract translation: 一种光学开关装置包括将其一个边缘附接到衬底附近的光学端口的基板的卷帘门或薄膜。 滚动快门可以采取两种状态之一。 在第一关闭状态下，膜在端口上展开到基板上，使得指向端口的光照射在快门上。 在第二打开状态下，膜从端口卷起，使得指向端口的光照射在端口上。 在一个实施例中，在膜上形成反射镜，使得当膜在衬底上处于关闭状态时，指向端口的光被反射镜反射。 在一个配置中，光学端口包括孔或孔，这样的光通过端口而不受干扰。 该装置可以包括位于膜的远端的闩锁电极，使得当其被推出时，其可以通过施加在闩锁电极和基板上的锁存电压而保持就位。 可以在膜中形成狭缝，以通过减轻膜中的应变来保持反射镜平坦，并允许邻近装置的气体在被激活时通过膜。 快门可以包括凹坑以最小化膜和基底之间的接触面积，以减少两者粘在一起的可能性。 膜的附着边缘可以比其宽度短，以减少膜中的变形，以保持镜子平坦。 可以围绕端口设置凸起的环形边缘，使得当快门被按压在端口上时，其被拉紧并在边缘上平坦。 此功能也用于保持镜子的平整度。 开关器件可用作光开关阵列的一部分。

公开(公告)号：US06229640B1

公开(公告)日：2001-05-08

申请号：US09372265

申请日：1999-08-11

Applicant: Nan Zhang

Inventor： Nan Zhang

IPC: G02B2600

CPC classification number: G02B6/357 ,  B81B2201/033 ,  B81B2201/045 ,  B81C1/00182 ,  B81C2201/0109 ,  B81C2203/0136 ,  G02B6/3514 ,  G02B6/3518 ,  G02B6/3544 ,  G02B6/3584 ,  H02N1/008

Abstract: A MEMS-based optical switch having improved characteristics and methods for manufacturing the same are provided. In accordance with one embodiment, an optical switch includes a single comb drive actuator having a deflecting beam structure and a mirror coupled to the actuator. The mirror is capable of being moved between an extended position interposed between waveguide channels and a retracted position apart from the waveguide channels. The actuator applies a force capable of deflecting the beam structure and moving the mirror to one of the extended positions or the retracted position and the beam structure returns the mirror to the other of the extended position or the retracted position in the absence of the application of force.

Abstract translation: 提供了具有改进的特性的MEMS基光开关及其制造方法。 根据一个实施例，光学开关包括具有偏转梁结构的单个梳状驱动致动器和耦合到致动器的反射镜。 镜子能够在介于波导通道之间的延伸位置与离开波导通道的缩回位置之间移动。 致动器施加能够使梁结构偏转并且将反射镜移动到延伸位置或缩回位置中的一个的力，并且梁结构在没有应用的情况下将反射镜返回到延伸位置或缩回位置中的另一个 力。

公开(公告)号：US11726276B1

公开(公告)日：2023-08-15

申请号：US17391167

申请日：2021-08-02

Applicant: National Technology & Engineering Solutions of Sandia, LLC ,  The Texas A&M University System

Inventor： Michael Wood ,  Alejandro J. Grine ,  Darwin K. Serkland ,  Bryan James Kaehr ,  Andrew E. Hollowell ,  Gregory M. Peake ,  Alexander Ruyack ,  Sam Palermo

IPC: G02B6/42 ,  G02B6/43 ,  H04B10/40 ,  G02B6/293 ,  H04B10/50

CPC classification number: G02B6/4215 ,  G02B6/2934 ,  G02B6/4249 ,  G02B6/4295 ,  G02B6/43 ,  H04B10/40 ,  H04B10/503 ,  B81B2201/045

Abstract: A photonics transceiver is described herein, wherein the photonics transceiver exhibits improved areal bandwidth density and improved energy per bit consumption relative to conventional photonics transceivers. The photonics transceiver achieves an areal bandwidth density of at least 5 Tbps/mm2 with an energy consumption of less than 500 fJ/bit (sum of energy consumed for both a transmitted bit and a received bit). The photonics transceiver is a multi-chip module, where chips in the multi-chip module are tightly integrated with one another. The multi-chip module includes light source, photodetector, photonics, and control/logic chips. The photonics chip includes transparent conducting oxide integrated optical modulators and multiplexers and demultiplexers based on MEMS-tunable optical ring resonators.

公开(公告)号：US20170184840A1

公开(公告)日：2017-06-29

申请号：US15282870

申请日：2016-09-30

Applicant: Agiltron, Inc.

Inventor： Luzhong Yin ,  Jing Zhao

IPC: G02B26/02 ,  H02N10/00 ,  B81B3/00

CPC classification number: B81B3/0037 ,  B81B3/0024 ,  B81B2201/045 ,  B81B2203/0118 ,  B81B2203/0315 ,  B81B2203/0384 ,  B81B2203/051 ,  G02B26/02 ,  G02B26/023 ,  G02B26/04 ,  H02N2/043 ,  H02N10/00

Abstract: The present disclosure provides a displacement amplification structure and a method for controlling displacement. In one aspect, the displacement amplification structure of the present disclosure includes a first beam and a second beam substantially parallel to the first beam, an end of the first beam coupled to a fixture site, an end of the second beam coupled to a motion actuator, and a motion shutter coupled to an opposing end of the first and second beams. In response to a displacement of the motion actuator along an axis direction of the second beam, the motion shutter displaces a distance along a transversal direction substantially perpendicular to the axis direction.

公开(公告)号：US20160096729A1

公开(公告)日：2016-04-07

申请号：US14508342

申请日：2014-10-07

Applicant: Pixtronix, Inc.

Inventor： Javier Villarreal ,  Timothy Brosnihan ,  Chin-Yuan Ho ,  Hung-Chien Lin

IPC: B81C1/00 ,  B81B7/02 ,  G06T1/20 ,  B81B3/00

CPC classification number: G06T1/20 ,  B81B2201/045 ,  B81B2201/047 ,  B81B2203/0307 ,  B81C1/0019 ,  B81C2201/0108 ,  B81C2201/0132 ,  B81C2201/014 ,  B81C2201/0181 ,  G02B26/02

Abstract: This disclosure provides systems, methods and apparatus including processes that use two layers of resist, with a layer of etch stop material in between. The two layers of resist may be etched in separate processes to form devices having vias with sidewalls that extend through both layers of resist

Abstract translation: 本公开提供了包括使用两层抗蚀剂的工艺的系统，方法和设备，其间具有一层蚀刻停止材料。 可以在单独的工艺中蚀刻两层抗蚀剂，以形成具有延伸穿过两层抗蚀剂的侧壁的通路的器件

公开(公告)号：US09235046B2

公开(公告)日：2016-01-12

申请号：US13754548

申请日：2013-01-30

Applicant: Pixtronix, Inc.

Inventor： Javier Villarreal ,  Timothy J. Brosnihan ,  Jasper L. Steyn ,  Richard S. Payne ,  Stephen R. Lewis

IPC: G06F3/038 ,  G09G5/00 ,  G02B26/02 ,  G09G3/22 ,  B81B3/00

CPC classification number: G02B26/02 ,  B81B3/007 ,  B81B2201/045 ,  B81B2203/0163 ,  B81B2203/051 ,  B81C2201/053 ,  B81C2201/112 ,  G02B26/023 ,  G09G3/22

Abstract: This disclosure provides systems, methods and apparatus for providing relatively thinner and less stiff compliant beams for a shutter assembly. A protective coating is deposited and patterned over the shutter assembly before it is released from a sacrificial mold over which the shutter assembly is formed. Because some primary surfaces of the compliant beams are in contact with the sacrificial mold, these primary surfaces are not coated with the protective coating. Therefore, when the shutter assembly is finally released, the resulting compliant beams are relatively thinner and less stiff providing a reduction in an actuation voltage used to operate the shutter assembly. In some instances, the protective coating is patterned into discontinuous segments before release.

Abstract translation: 本公开提供了用于为快门组件提供相对较薄且较不硬的柔性梁的系统，方法和装置。 在从快门组件形成的牺牲模具释放之前，将保护涂层沉积并在其上形成图案。 由于柔性梁的一些主表面与牺牲模具接触，所以这些主表面没有涂覆保护涂层。 因此，当快门组件最终被释放时，所产生的柔性梁相对较薄并且较不硬，从而降低用于操作闸板组件的致动电压。 在一些情况下，保护性涂层在释放之前被图案化成不连续段。