摘要:
The present application discloses a method of manufacturing a semiconductor structure. According to at least one embodiment, a first etch stop layer is formed over a conductive feature and a substrate, and the conductive feature is positioned over the substrate. A second etch stop layer is formed over the first etch stop layer. A first etch is performed to form an opening in the second etch stop layer, and the opening exposes a portion of the first etch stop layer. A second etch is performed to extend the opening downwardly by removing a portion of the exposed first etch stop layer, and the extended opening exposes a portion of the conductive feature.
摘要:
A manufacturing method for a semiconductor device having a metal gate includes providing a substrate having at least a first semiconductor device formed thereon, forming a first gate trench in the first semiconductor device, forming a first work function metal layer in the first gate trench, and performing a decoupled plasma oxidation to the first work function metal layer.
摘要:
The present invention relates to a laminator with changeable rotation speed and heating temperature including a first roller set, a second roller set, a transmission gear set, a speed changing gear set, a first driving device, a second driving device, an input interface, a controller and a heating device. A user selects an option of the input interface according to film thickness. The controller determines rotation speed and heating temperature of the first roller set and the second roller set according to the option. Then the controller controls the second driving device to move the speed changing gear set to alter the engagement between the speed changing gear set and the transmission gear set, as to modulate the rotational speed of the first roller set and the second roller set.
摘要:
Semiconductor devices and methods for fabricating the same. The devices includes a substrate, a first etch stop layer, a dielectric layer, an opening, and an anti-diffusion layer. The first etch stop layer overlies the substrate. The dielectric layer overlies the first etch stop layer. The opening extends through the dielectric layer and the first etch stop layer, and exposes parts of the substrate. The anti-diffusion layer overlies at least sidewalls of the opening, preventing contamination molecule diffusion from at least the first etch stop layer, wherein the anti-diffusion layer is respectively denser than the first etch stop layer and the dielectric layer.
摘要:
A disc having a relief pattern and a transprint method thereof are provided. The transprint method for transprinting the relief pattern on a substrate of the disc includes the following steps. First, a transprint template is provided. A first surface of the transprint template has a complementary pattern corresponding to the relief pattern. Next, a pattern layer is formed on the substrate. Then, the transprint template is placed on and covers the pattern layer until the first surface of the transprint template closely contacts a second surface of the pattern layer, so that the relief pattern is formed on the second surface. Afterward, the pattern layer is cured by irradiation. Later, the transprint template is removed for exposing the second surface with the relief pattern.
摘要:
The invention relates to a computer system capable of automatically duplicating data into discs with automatically blank-disc-supplying. The invention can be implemented by software, hardware, or any of the combinations. Since the invention does not utilize a mechanical arm to move the discs, the structure of the invention saves space compared with a traditional disc duplicating machine; moreover, the cost is less than that of the prior art.
摘要:
A method of cleaning and drying a semiconductor wafer including inserting a semiconductor wafer into a chamber of a cleaning tool, spinning the semiconductor wafer in a range of about 300 revolutions per minute to about 1600 revolutions per minute, and simultaneously spraying the semiconductor wafer with de-ionized water and a mixture of isopropyl alcohol and nitrogen.
摘要:
A device includes a semiconductor substrate, a gate stack over the semiconductor substrate, and a stressor region having at least a portion in the semiconductor substrate and adjacent to the gate stack. The stressor region includes a first stressor region having a first p-type impurity concentration, a second stressor region over the first stressor region, wherein the second stressor region has a second p-type impurity concentration, and a third stressor region over the second stressor region. The third stressor region has a third p-type impurity concentration. The second p-type impurity concentration is lower than the first and the third p-type impurity concentrations.
摘要:
The present invention discloses a cooling system for an electronic rack, comprising: an electronic rack comprising at least one side wall; at least one electronic chassis comprising a top wall and at least one side wall and disposed inside the electronic rack for housing at least one modular electronics equipment comprising a plurality of electronic components and at least one stationary thermal interface arranged above the plurality of electronic components; a first detachable thermal interface arranged between the top wall of the at least one electronic chassis and the at least one modular electronic equipment; and at least one second detachable thermal interface arranged between the at least one side wall of the electronic rack and the at least one side wall of the at least one electronic chassis.
摘要:
A method for fabricating semiconductor device is disclosed. The method includes the steps of: providing a substrate having a transistor region and a resistor region; forming a shallow trench isolation (STI) on the substrate of the resistor region; forming a tank in the STI of the resistor region; and forming a resistor in the tank and on the surface of the STI adjacent to two sides of the tank.