Ultrananocrystalline diamond cantilever wide dynamic range acceleration/vibration/pressure sensor
    12.
    发明授权
    Ultrananocrystalline diamond cantilever wide dynamic range acceleration/vibration/pressure sensor 有权
    超晶体金刚石悬臂宽动态范围加速/振动/压力传感器

    公开(公告)号:US06422077B1

    公开(公告)日:2002-07-23

    申请号:US09543992

    申请日:2000-04-06

    IPC分类号: G01P1508

    摘要: An ultrananocrystalline diamond (UNCD) element formed in a cantilever configuration is used in a highly sensitive, ultra-small sensor for measuring acceleration, shock, vibration and static pressure over a wide dynamic range. The cantilever UNCD element may be used in combination with a single anode, with measurements made either optically or by capacitance. In another embodiment, the cantilever UNCD element is disposed between two anodes, with DC voltages applied to the two anodes. With a small AC modulated voltage applied to the UNCD cantilever element and because of the symmetry of the applied voltage and the anode-cathode gap distance in the Fowler-Nordheim equation, any change in the anode voltage ratio V1/N2 required to maintain a specified current ratio precisely matches any displacement of the UNCD cantilever element from equilibrium. By measuring changes in the anode voltage ratio required to maintain a specified current ratio, the deflection of the UNCD cantilever can be precisely determined. By appropriately modulating the voltages applied between the UNCD cantilever and the two anodes, or limit electrodes, precise independent measurements of pressure, uniaxial acceleration, vibration and shock can be made. This invention also contemplates a method for fabricating the cantilever UNCD structure for the sensor.

    摘要翻译: 在一个高灵敏度的超小型传感器中,采用悬臂结构形成的超微晶金刚石(UNCD)元件用于在宽动态范围内测量加速度,冲击,振动和静压力。 悬臂UNCD元件可以与单个阳极组合使用,测量光学或电容测量。 在另一个实施例中,悬臂UNCD元件设置在两个阳极之间,其中DC电压施加到两个阳极。 通过施加到UNCD悬臂元件的小的AC调制电压,并且由于Fowler-Nordheim方程中施加的电压和阳极 - 阴极间隙距离的对称性,维持指定的阳极电压比V1 / N2的任何变化 电流比精确匹配UNCD悬臂元件的任何位移与平衡。 通过测量维持指定电流比所需的阳极电压比的变化,可以精确地确定UNCD悬臂的偏转。 通过适当地调制在UNCD悬臂与两个阳极之间施加的电压或极限电极,可以精确地独立测量压力,单轴加速度,振动和冲击。 本发明还考虑了用于制造用于传感器的悬臂UNCD结构的方法。

    Catalytic nanoporous membranes
    13.
    发明授权
    Catalytic nanoporous membranes 有权
    催化纳米多孔膜

    公开(公告)号:US08518845B2

    公开(公告)日:2013-08-27

    申请号:US12610897

    申请日:2009-11-02

    摘要: A nanoporous catalytic membrane which displays several unique features Including pores which can go through the entire thickness of the membrane. The membrane has a higher catalytic and product selectivity than conventional catalysts. Anodic aluminum oxide (AAO) membranes serve as the catalyst substrate. This substrate is then subjected to Atomic Layer Deposition (ALD), which allows the controlled narrowing of the pores from 40 nm to 10 nm in the substrate by deposition of a preparatory material. Subsequent deposition of a catalytic layer on the inner surfaces of the pores reduces pore sizes to less than 10 nm and allows for a higher degree of reaction selectivity. The small pore sizes allow control over which molecules enter the pores, and the flow-through feature can allow for partial oxidation of reactant species as opposed to complete oxidation. A nanoporous separation membrane, produced by ALD is also provided for use in gaseous and liquid separations. The membrane has a high flow rate of material with 100% selectivity. Also provided is a method for producing a catalytic membrane having flow-through pores and discreet catalytic clusters adhering to the inside surfaces of the pores.

    摘要翻译: 纳米多孔催化膜,显示几个独特的特征包括可以穿过膜的整个厚度的孔。 该膜具有比常规催化剂更高的催化和产物选择性。 阳极氧化铝(AAO)膜用作催化剂底物。 然后将该衬底经受原子层沉积(ALD),其允许通过沉积预备材料在衬底中将孔的受控变窄从40nm至10nm。 随后在孔的内表面上沉积催化剂层将孔径减小到小于10nm,并允许较高程度的反应选择性。 小孔径允许控制哪些分子进入孔隙,而与完全氧化相反,流通特征可以允许反应物物质的部分氧化。 还提供由ALD生产的纳米多孔分离膜,用于气相和液体分离。 该膜具有高流速的材料,具有100%的选择性。 还提供了一种制备具有粘附到孔的内表面的流通孔和分散催化剂簇的催化膜的方法。

    ATOMIC LAYER DEPOSITION OF SUPER-CONDUCTING NIOBIUM SILICIDE
    15.
    发明申请
    ATOMIC LAYER DEPOSITION OF SUPER-CONDUCTING NIOBIUM SILICIDE 审中-公开
    超导硅酸钠的原子层沉积

    公开(公告)号:US20120219824A1

    公开(公告)日:2012-08-30

    申请号:US13036952

    申请日:2011-02-28

    IPC分类号: B05D5/12 B32B15/00

    摘要: A method of preparing a superconducting thin film of niobium silicide using atomic layer deposition (ALD) where the superconducting critical temperature of the film is controllable by modulating the thickness of the thin film. The film is formed by exposing a substrate within an ALD reactor to alternating exposures of a niobium halide (NbQx) and a reducing precursor, for example, disilane (Si2H6) or silane (SiH4). A number of ALD cycles are performed to obtain the film thickness and establish the desired superconducting critical temperature between 0.4 K and 3.1 K.

    摘要翻译: 使用原子层沉积(ALD)制备硅化铌超导薄膜的方法,其中膜的超导临界温度可通过调节薄膜的厚度来控制。 通过将ALD反应器内的基板暴露于铌卤化物(NbQ x)和还原性前体例如乙硅烷(Si 2 H 6)或硅烷(SiH 4)的交替曝光来形成膜。 执行多个ALD循环以获得膜厚度并建立在0.4K和3.1K之间的所需超导临界温度。

    Catalytic nanoporous membranes
    16.
    发明授权
    Catalytic nanoporous membranes 有权
    催化纳米多孔膜

    公开(公告)号:US07625840B2

    公开(公告)日:2009-12-01

    申请号:US10941800

    申请日:2004-09-14

    摘要: A nanoporous catalytic membrane which displays several unique features including pores which can go through the entire thickness of the membrane. The membrane has a higher catalytic and product selectivity than conventional catalysts. Anodic aluminum oxide (AAO) membranes serve as the catalyst substrate. This substrate is then subjected to Atomic Layer Deposition (ALD), which allows the controlled narrowing of the pores from 40 nm to 10 nm in the substrate by deposition of a preparatory material. Subsequent deposition of a catalytic layer on the inner surfaces of the pores reduces pore sizes to less than 10 nm and allows for a higher degree of reaction selectivity. The small pore sizes allow control over which molecules enter the pores, and the flow-through feature can allow for partial oxidation of reactant species as opposed to complete oxidation. A nanoporous separation membrane, produced by ALD is also provided for use in gaseous and liquid separations. The membrane has a high flow rate of material with 100% selectivity.

    摘要翻译: 纳米多孔催化膜,其显示出几个独特的特征,包括可以穿过膜的整个厚度的孔。 该膜具有比常规催化剂更高的催化和产物选择性。 阳极氧化铝(AAO)膜用作催化剂底物。 然后将该衬底经受原子层沉积(ALD),其允许通过沉积预备材料在衬底中将孔的受控变窄从40nm至10nm。 随后在孔的内表面上沉积催化剂层将孔径减小到小于10nm,并允许较高程度的反应选择性。 小孔径允许控制哪些分子进入孔隙,而与完全氧化相反,流通特征可以允许反应物物质的部分氧化。 还提供由ALD生产的纳米多孔分离膜,用于气相和液体分离。 该膜具有高流速的材料,具有100%的选择性。

    Ultrananocrystalline diamond cantilever wide dynamic range acceleration/vibration/pressure sensor
    17.
    发明授权
    Ultrananocrystalline diamond cantilever wide dynamic range acceleration/vibration/pressure sensor 有权
    超晶体金刚石悬臂宽动态范围加速/振动/压力传感器

    公开(公告)号:US06613601B1

    公开(公告)日:2003-09-02

    申请号:US10142814

    申请日:2002-05-09

    IPC分类号: H01L2100

    摘要: An ultrananocrystalline diamond (UNCD) element formed in a cantilever configuration is used in a highly sensitive, ultra-small sensor for measuring acceleration, shock, vibration and static pressure over a wide dynamic range. The cantilever UNCD element may be used in combination with a single anode, with measurements made either optically or by capacitance. In another embodiment, the cantilever UNCD element is disposed between two anodes, with DC voltages applied to the two anodes. With a small AC modulated voltage applied to the UNCD cantilever element and because of the symmetry of the applied voltage and the anode-cathode gap distance in the Fowler-Nordheim equation, any change in the anode voltage ratio V1/V2 required to maintain a specified current ratio precisely matches any displacement of the UNCD cantilever element from equilibrium. By measuring changes in the anode voltage ratio required to maintain a specified current ratio, the deflection of the UNCD cantilever can be precisely determined. By appropriately modulating the voltages applied between the UNCD cantilever and the two anodes, or limit electrodes, precise independent measurements of pressure, uniaxial acceleration, vibration and shock can be made. This invention also contemplates a method for fabricating the cantilever UNCD structure for the sensor.

    摘要翻译: 在一个高灵敏度的超小型传感器中,采用悬臂结构形成的超微晶金刚石(UNCD)元件用于在宽动态范围内测量加速度,冲击,振动和静压力。 悬臂UNCD元件可以与单个阳极组合使用,测量光学或电容测量。 在另一个实施例中,悬臂UNCD元件设置在两个阳极之间,其中DC电压施加到两个阳极。 通过施加到UNCD悬臂元件上的小的AC调制电压,并且由于Fowler-Nordheim方程中所施加的电压和阳极 - 阴极间隙距离的对称性,维持指定的所需的阳极电压比V1 / V2的任何变化 电流比精确匹配UNCD悬臂元件的任何位移与平衡。 通过测量维持指定电流比所需的阳极电压比的变化,可以精确地确定UNCD悬臂的偏转。 通过适当地调制在UNCD悬臂与两个阳极之间施加的电压或极限电极,可以精确地独立测量压力,单轴加速度,振动和冲击。 本发明还考虑了用于制造用于传感器的悬臂UNCD结构的方法。

    Method to decrease loss of aluminum and magnesium melts
    18.
    发明授权
    Method to decrease loss of aluminum and magnesium melts 失效
    减少铝和镁熔体损失的方法

    公开(公告)号:US06485541B1

    公开(公告)日:2002-11-26

    申请号:US09632873

    申请日:2000-08-04

    IPC分类号: C22B900

    摘要: A method to minimize oxidation of metal during melting processes is provided, the method comprising placing solid phase metal into a furnace environ-ment, transforming the solid-phase metal into molten metal phase having a molten metal surface, and creating a barrier between the surface and the environment. Also provided is a method for isolating the surface of molten metal from its environment, the method comprising confining the molten metal to a controlled atmos-phere, and imposing a floating substrate between the surface and the atmosphere.

    摘要翻译: 提供了一种在熔融过程中使金属氧化最小化的方法,该方法包括将固相金属放入炉内环境,将固相金属转化成具有熔融金属表面的熔融金属相,并在表面 和环境。 还提供了一种用于从其环境中分离熔融金属的表面的方法,该方法包括将熔融金属限制在受控的大气中,并在表面和大气之间施加浮动的基板。

    High efficiency direct detection of ions from resonance ionization of
sputtered atoms
    20.
    发明授权
    High efficiency direct detection of ions from resonance ionization of sputtered atoms 失效
    高效率直接检测溅射原子的共振电离离子

    公开(公告)号:US4633084A

    公开(公告)日:1986-12-30

    申请号:US691825

    申请日:1985-01-16

    摘要: A method and apparatus are provided for trace and other quantitative analysis with high efficiency of a component in a sample, with the analysis involving the removal by ion or other bombardment of a small quantity of ion and neutral atom groups from the sample, the conversion of selected neutral atom groups to photoions by laser initiated resonance ionization spectroscopy, the selective deflection of the photoions for separation from original ion group emanating from the sample, and the detection of the photoions as a measure of the quantity of the component. In some embodiments, the original ion group is accelerated prior to the RIS step for separation purposes. Noise and other interference are reduced by shielding the detector from primary and secondary ions and deflecting the photoions sufficiently to avoid the primary and secondary ions.

    摘要翻译: 提供了一种方法和装置,用于对样品中组分的高效率进行痕量和其他定量分析,分析涉及通过离子或其他轰击从样品中除去少量离子和中性原子团,转化为 选择的中性原子团通过激光引发的共振电离光谱法进行光致变色,用于与从样品发出的原始离子基团分离的光离子的选择性偏转,以及作为组分量的量度的光电离检测。 在一些实施方案中,在用于分离目的的RIS步骤之前加速原始离子组。 通过将检测器与初级和次级离子屏蔽,并充分偏转光照以避免初级和次级离子,降低了噪声和其他干扰。