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公开(公告)号:US20110156246A1
公开(公告)日:2011-06-30
申请号:US12796279
申请日:2010-06-08
申请人: Chien-Hua Chen , Teck-Chong Lee
发明人: Chien-Hua Chen , Teck-Chong Lee
CPC分类号: H01L28/40 , H01L21/486 , H01L23/49822 , H01L23/49827 , H01L23/642 , H01L23/645 , H01L2224/48091 , H01L2224/48227 , H01L2924/30107 , H01L2924/00014 , H01L2924/00
摘要: The present invention relates to a semiconductor package and a method for making the same. The semiconductor package includes a substrate, a first capacitor, a first protective layer, a first metal layer and a second protective layer. The substrate has at least one via structure. The first capacitor is disposed on a first surface of the substrate. The first protective layer encapsulates the first capacitor. The first metal layer is disposed on the first protective layer, and includes a first inductor. The second protective layer encapsulates the first inductor. Whereby, the first inductor, the first capacitor and the via structure are integrated into the semiconductor package, so that the size of the product is reduced.
摘要翻译: 半导体封装及其制造方法技术领域本发明涉及半导体封装及其制造方法。 半导体封装包括衬底,第一电容器,第一保护层,第一金属层和第二保护层。 衬底具有至少一个通孔结构。 第一电容器设置在基板的第一表面上。 第一保护层封装第一电容器。 第一金属层设置在第一保护层上,并且包括第一电感器。 第二保护层封装第一电感器。 由此,第一电感器,第一电容器和通孔结构被集成到半导体封装中,使得产品的尺寸减小。
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公开(公告)号:US09446590B2
公开(公告)日:2016-09-20
申请号:US14421975
申请日:2012-08-16
申请人: Chien-Hua Chen , Silam J. Choy , Brett E. Dahlgren
发明人: Chien-Hua Chen , Silam J. Choy , Brett E. Dahlgren
CPC分类号: B41J2/1433 , B41J2/14145 , B41J2/1603 , B41J2/1623 , B41J2/1629 , B41J2/1634 , B41J27/20 , B41J2002/14419 , Y10T428/24314
摘要: In one example, a method for making diagonal openings in photodefinable glass includes exposing part of a body of photodefinable glass to a beam of light oriented diagonally to a surface of the body at an angle of 5° or greater measured with respect to a normal to the surface of the body and removing some or all of the part of the body exposed to the light beam to form a diagonal opening in the body.
摘要翻译: 在一个实例中,用于在可光限定玻璃中制造斜开口的方法包括将可光限定玻璃体的一部分暴露于相对于正常对准的5°或更大的角度测量的5°或更大的角度对角定向到身体的表面的光束 身体的表面并且去除暴露于光束的身体的部分或全部部分以在体内形成对角线开口。
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13.
公开(公告)号:US09266326B2
公开(公告)日:2016-02-23
申请号:US14397333
申请日:2012-07-25
IPC分类号: B41J2/14 , B41J2/145 , H01L41/053 , H01L41/22 , B41J2/16
CPC分类号: B41J2/14201 , B41J2/145 , B41J2/1618 , B41J2/1623 , B41J2/1642 , B41J2/1646 , H01L41/053 , H01L41/0973 , H01L41/22 , H01L41/313 , Y10T29/42
摘要: In one example, a piezoelectric actuator includes a piezoelectric material, a first conductor on a first part of the piezoelectric material, and a membrane bonded to the first conductor with an adhesive. The first conductor has a root mean square surface roughness of at least 10 nm at the bonding interface with the membrane.
摘要翻译: 在一个示例中,压电致动器包括压电材料,压电材料的第一部分上的第一导体和用粘合剂结合到第一导体的膜。 第一导体在与膜的结合界面处具有至少10nm的均方根粗糙度。
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公开(公告)号:US08864289B2
公开(公告)日:2014-10-21
申请号:US13985393
申请日:2011-03-20
CPC分类号: G01V8/24 , B41J2/04558 , B41J2/04561 , B41J2/04586 , B41J2/125 , B41J2/16579 , B41J2/16585 , B41J2/2142 , B41J2/2146 , G01N21/53 , G01V8/16
摘要: A drop detector assembly is provided including an ejection element to eject a fluid drop, a light guide to selectively receive light scattered off of the fluid drop, and a light detector formed in the light guide to detect light received by the light guide.
摘要翻译: 提供一种液滴检测器组件,其包括用于喷射液滴的喷射元件,用于选择性地接收从液滴散射的光的光导;以及形成在光导中的光检测器,用于检测光导所接收的光。
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公开(公告)号:US08497577B2
公开(公告)日:2013-07-30
申请号:US11870306
申请日:2007-10-10
IPC分类号: H01L23/12
CPC分类号: B81B7/007 , H01L2924/16235
摘要: An apparatus includes a Micro Electrical Mechanical System (MEMS) having electrical contacts and a MEMS device in electrical communication with the electrical contacts. A lid is oriented over the MEMS device and not the electrical contacts. The lid has a base region and a top region, the base region being wider in dimension than the top region and oriented in closer proximity to the MEMS device than the top region.
摘要翻译: 一种装置包括具有电触头的微机电系统(MEMS)和与电触头电连通的MEMS装置。 盖子定位在MEMS器件上,而不是电触头。 盖子具有基部区域和顶部区域,基底区域的尺寸比顶部区域宽,并且被定向成比顶部区域更靠近MEMS装置。
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公开(公告)号:US08336981B2
公开(公告)日:2012-12-25
申请号:US12575943
申请日:2009-10-08
IPC分类号: B41J29/38
CPC分类号: B41J2/14153 , B41J2002/14354 , Y10T29/49401
摘要: A method of determining a healthy fluid ejection nozzle includes measuring changes in impedance across the nozzle as fluid passes through it. A printhead includes a metal probe that intersects an ink nozzle and an integrated circuit to sense a change in impedance across the nozzle through the metal probe.
摘要翻译: 确定健康的流体喷射喷嘴的方法包括测量流体穿过喷嘴时的阻抗的变化。 打印头包括与墨水喷嘴相交的金属探针和集成电路,用于感测通过金属探针穿过喷嘴的阻抗变化。
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公开(公告)号:US20120012963A1
公开(公告)日:2012-01-19
申请号:US13145493
申请日:2009-02-27
申请人: Zhuqing Zhang , Steve P. Hanson , Chien-Hua Chen
发明人: Zhuqing Zhang , Steve P. Hanson , Chien-Hua Chen
IPC分类号: H01L31/0216
CPC分类号: G02B5/284 , B81B2201/0292 , B81B2201/047 , B81C1/00888 , G02B1/11 , H01L2924/16235
摘要: In one embodiment, a method for making an optical micro device package includes: providing a substrate wafer having a plurality of solid state light sensors integrate therein; providing a transparent cover wafer coated with a material that alters the transparency characteristics of the cover wafer; forming a layer of light sensitive, photo definable adhesive material on the substrate wafer; selectively removing part of the layer of adhesive material in a pattern for a plurality of adhesive spacers between the substrate wafer and the cover wafer with each spacer surrounding a corresponding one of the light sensors; bonding the substrate wafer and the cover wafer together at the spacers to form a wafer assembly in which each spacer surrounds and seals a corresponding one of the light sensors within a cavity bounded by a spacer and the two wafers; and singulating individual device packages from the wafer assembly.
摘要翻译: 在一个实施例中,一种用于制造光学微器件封装的方法包括:提供具有集成在其中的多个固态光传感器的衬底晶片; 提供涂覆有改变覆盖晶片的透明特性的材料的透明盖晶片; 在衬底晶片上形成一层光敏的可光定义粘合剂材料; 在衬底晶片和覆盖晶片之间的多个粘合剂间隔物的图案中选择性地去除粘合剂材料层的一部分,每个间隔物环绕相应的一个光传感器; 将衬底晶片和覆盖晶片在间隔件处结合在一起以形成晶片组件,其中每个间隔件在由间隔件和两个晶片限定的空腔内围绕并密封相应的一个光传感器; 以及从晶片组件分离单个器件封装。
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公开(公告)号:US08039205B2
公开(公告)日:2011-10-18
申请号:US11948891
申请日:2007-11-30
申请人: Chien-Hua Chen , Xia feng Yang
发明人: Chien-Hua Chen , Xia feng Yang
IPC分类号: G03F7/20
CPC分类号: F04B43/046 , B01D57/02 , B01D61/18 , B01D63/081 , B01D63/088 , B01D67/003 , B01D2323/30 , B01D2323/50 , B01D2325/08 , B01J19/0093 , B01J2219/00783 , B01J2219/0081 , B01J2219/00833 , B01J2219/00853 , B01J2219/00873 , B01J2219/00891 , B01J2219/00909 , B01J2219/00912 , B01J2219/00943 , B01L3/502707 , B01L3/50273 , B01L3/502738 , B01L3/502753 , B01L7/525 , B01L2200/027 , B01L2200/10 , B01L2200/12 , B01L2300/0654 , B01L2300/0681 , B01L2300/1827 , B01L2400/0415 , B01L2400/0439 , B01L2400/0442 , B01L2400/0638 , B81B2201/058 , B81C1/00119 , F04B19/24 , G01N21/05 , G01N2021/0346 , Y10T436/11 , Y10T436/117497 , Y10T436/118339 , Y10T436/25 , Y10T436/25375 , Y10T436/2575
摘要: A method includes depositing a sacrificial material on a substrate, and depositing a polymer layer on the substrate and the sacrificial material. The method further includes removing the sacrificial material to at least partially define boundaries of at least one fluidic channel of a fluidic micro electromechanical system (MEM) device, the at least one fluidic channel is at least partially defined by a portion of the polymer layer and a portion of the substrate.
摘要翻译: 一种方法包括将牺牲材料沉积在基底上,以及在基底和牺牲材料上沉积聚合物层。 该方法还包括去除牺牲材料以至少部分地限定流体微机电系统(MEM)装置的至少一个流体通道的边界,所述至少一个流体通道至少部分地由聚合物层的一部分限定, 衬底的一部分。
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公开(公告)号:US07866364B2
公开(公告)日:2011-01-11
申请号:US11413333
申请日:2006-04-28
IPC分类号: G02B6/00
CPC分类号: H01L21/67092
摘要: A fabrication tool presses a first device surface against a second device surface after the first and the second device surfaces have been plasma activated, to bond the first device surface with the second device surface. The fabrication tool includes a bonding piston to exert force on the first device surface to press the first device surface against the second device surface. The fabrication tool also includes a pressure plate situated between the bonding piston and the first device surface. The fabrication tool further includes a mechanism to ensure that the force exerted by the bonding piston on the first device surface via the pressure plate is initially exerted at one or more first locations on the first device surface and subsequently exerted at one or more second locations on the first device surface.
摘要翻译: 在第一和第二装置表面已被等离子体激活之后,制造工具将第一装置表面压靠第二装置表面,以将第一装置表面与第二装置表面结合。 制造工具包括粘合活塞,以在第一装置表面施加力以将第一装置表面压靠第二装置表面。 制造工具还包括位于接合活塞和第一装置表面之间的压力板。 制造工具还包括机构,以确保由第一装置表面经由压板施加的结合活塞的力最初施加在第一装置表面上的一个或多个第一位置上,随后在一个或多个第二位置上施加 第一个设备表面。
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公开(公告)号:US20100230759A1
公开(公告)日:2010-09-16
申请号:US12647856
申请日:2009-12-28
申请人: Hsueh-An Yang , Pei-Chun Chen , Chien-Hua Chen
发明人: Hsueh-An Yang , Pei-Chun Chen , Chien-Hua Chen
IPC分类号: H01L23/48 , H01L27/092 , H01L21/768
CPC分类号: H01L21/76898
摘要: The present invention relates to a silicon chip having a through via and a method for making the same. The silicon chip includes a silicon substrate, a passivation layer, at least one electrical device and at least one through via. The passivation layer is disposed on a first surface of the silicon substrate. The electrical device is disposed in the silicon substrate, and exposed to a second surface of the silicon substrate. The through via includes a barrier layer and a conductor, and penetrates the silicon substrate and the passivation layer. A first end of the through via is exposed to the surface of the passivation layer, and a second end of the through via connects the electrical device. When a redistribution layer is formed on the surface of the passivation layer, the redistribution layer will not contact the silicon substrate, thus avoiding a short circuit. Therefore, a lower resolution process can be used, which results in low manufacturing cost and simple manufacturing process.
摘要翻译: 本发明涉及具有贯通孔的硅芯片及其制造方法。 硅芯片包括硅衬底,钝化层,至少一个电器件和至少一个通孔。 钝化层设置在硅衬底的第一表面上。 电气设备设置在硅衬底中,并暴露于硅衬底的第二表面。 通孔包括阻挡层和导体,并且穿透硅衬底和钝化层。 通孔的第一端暴露于钝化层的表面,通孔的第二端连接电气装置。 当在钝化层的表面上形成再分布层时,再分布层将不会接触硅衬底,从而避免短路。 因此,可以使用较低分辨率的工艺,这导致制造成本低和制造工艺简单。
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