公开(公告)号：US09777388B2

公开(公告)日：2017-10-03

申请号：US14522809

申请日：2014-10-24

Applicant: GLOBALFOUNDRIES INC.

Inventor： Charles L. Arvin ,  Glen N. Biggs ,  Phillip W. Palmatier ,  Joseph C. Sorbello ,  Tracy A. Tong ,  Freddie Torres

IPC: C25D21/18 ,  C25D21/14

CPC classification number: C25D21/18 ,  C25D21/14

Abstract: Electroplating techniques including an electroplating system and a method for using the electroplating system are provided. The electroplating system has: an electroplating apparatus for electroplating a workpiece, the electroplating apparatus has an electroplating tank configured to contain a solution including target organics; a first reservoir configured to receive the solution including the target organics from the electroplating tank, and to hold the solution including the target organics; a foaming mechanism configured to, in the first reservoir, separate the target organics from the solution through foaming action such that the solution with a reduced concentration of the target organics is separated from a foam including the separated target organics; and a diverting mechanism configured to selectively feed the solution with the reduced concentration of the target organics to one of the first reservoir and the electroplating tank of the electroplating apparatus.

公开(公告)号：US20160307860A1

公开(公告)日：2016-10-20

申请号：US15191723

申请日：2016-06-24

Applicant: GLOBALFOUNDRIES INC.

Inventor： Charles L. Arvin ,  Harry D. Cox ,  Eric D. Perfecto ,  Thomas A. Wassick

IPC: H01L23/00 ,  H01L25/065 ,  H01L25/00 ,  H01L21/683

CPC classification number: H01L24/11 ,  H01L21/6835 ,  H01L21/76829 ,  H01L21/76838 ,  H01L21/76841 ,  H01L23/53228 ,  H01L23/53238 ,  H01L24/03 ,  H01L24/05 ,  H01L24/13 ,  H01L24/16 ,  H01L24/29 ,  H01L24/81 ,  H01L25/0657 ,  H01L25/50 ,  H01L2221/68327 ,  H01L2221/6834 ,  H01L2221/68381 ,  H01L2224/0345 ,  H01L2224/0346 ,  H01L2224/0347 ,  H01L2224/0361 ,  H01L2224/03849 ,  H01L2224/03912 ,  H01L2224/0401 ,  H01L2224/0558 ,  H01L2224/05611 ,  H01L2224/05647 ,  H01L2224/05655 ,  H01L2224/0566 ,  H01L2224/10145 ,  H01L2224/1146 ,  H01L2224/1147 ,  H01L2224/11849 ,  H01L2224/11901 ,  H01L2224/13005 ,  H01L2224/13006 ,  H01L2224/13016 ,  H01L2224/1308 ,  H01L2224/13111 ,  H01L2224/13147 ,  H01L2224/13155 ,  H01L2224/1316 ,  H01L2224/16145 ,  H01L2224/16238 ,  H01L2224/81191 ,  H01L2224/81193 ,  H01L2224/94 ,  H01L2225/06513 ,  H01L2924/01029 ,  H01L2924/01028 ,  H01L2924/00014 ,  H01L2924/013 ,  H01L2224/13164 ,  H01L2924/01026 ,  H01L2924/206 ,  H01L2924/01047

Abstract: A three dimensional multi-die package includes a first die and second die. The first die includes a contact attached to solder. The second die is thinned by adhesively attaching a handler to a top side of the second die and thinning a bottom side of the second die. The second die includes a multilayer contact of layered metallurgy that inhibits transfer of adhesive thereto. The layered metallurgy includes at least one layer that is wettable to the solder. The multilayer contact may include a Nickel layer, a Copper layer upon the Nickel layer, and a Nickel-Iron layer upon the Copper layer. The multilayer contact may also include a Nickel layer, a Copper-Tin layer upon the Nickel layer, and a Tin layer upon the Copper-Tin layer.

Abstract translation: 三维多管芯封装包括第一管芯和第二管芯。 第一个模具包括一个连接到焊料的触点。 通过将处理器粘合地附接到第二管芯的顶侧并使第二管芯的底侧变薄来减小第二管芯。 第二模具包括抑制粘合剂转移的层状冶金的多层接触。 层状冶金包括至少一层可润湿的焊料。 多层接触可以包括镍层，镍层上的铜层和铜层上的镍 - 铁层。 多层接触还可以包括镍层，镍层上的铜 - 锡层和在铜 - 锡层上的锡层。

公开(公告)号：US09379007B2

公开(公告)日：2016-06-28

申请号：US13874509

申请日：2013-05-01

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Charles L. Arvin ,  Kenneth Bird ,  Charles C. Goldsmith ,  Sung K. Kang ,  Minhua Lu ,  Clare J. McCarthy ,  Eric D. Perfecto ,  Srinivasa S. N. Reddy ,  Krystyna W. Semkow ,  Thomas A. Wassick

IPC: H01L21/321 ,  H01L21/768 ,  H01L23/00

CPC classification number: H01L21/7685 ,  H01L21/321 ,  H01L24/03 ,  H01L24/05 ,  H01L24/11 ,  H01L24/13 ,  H01L24/16 ,  H01L24/742 ,  H01L24/81 ,  H01L2224/0382 ,  H01L2224/0401 ,  H01L2224/11003 ,  H01L2224/11005 ,  H01L2224/1111 ,  H01L2224/1131 ,  H01L2224/11462 ,  H01L2224/1147 ,  H01L2224/1184 ,  H01L2224/11849 ,  H01L2224/11903 ,  H01L2224/13017 ,  H01L2224/13027 ,  H01L2224/13083 ,  H01L2224/13084 ,  H01L2224/131 ,  H01L2224/13111 ,  H01L2224/13147 ,  H01L2224/13155 ,  H01L2224/13157 ,  H01L2224/1316 ,  H01L2224/13562 ,  H01L2224/13566 ,  H01L2224/1357 ,  H01L2224/136 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2224/81191 ,  H01L2224/81801 ,  H01L2924/181 ,  H01L2924/01028 ,  H01L2924/014 ,  H01L2924/01047 ,  H01L2924/00012 ,  H01L2924/00014 ,  H01L2924/00

Abstract: Embodiments of the invention include a lead-free solder interconnect structure and methods for making a lead-free interconnect structure. The structure includes a semiconductor substrate having a last metal layer, a copper pedestal attached to the last metal layer, a barrier layer attached to the copper pedestal, a barrier protection layer attached to the barrier layer, and a lead-free solder layer contacting at least one side of the copper pedestal.

Abstract translation: 本发明的实施例包括无铅焊料互连结构和用于制造无铅互连结构的方法。 该结构包括具有最后金属层的半导体衬底，附着于最后金属层的铜基座，附着于铜基座的阻挡层，与阻挡层连接的阻挡保护层，以及与该阻挡层相接触的无铅焊料层 铜底座的最小一侧。

公开(公告)号：US20160056072A1

公开(公告)日：2016-02-25

申请号：US14467191

申请日：2014-08-25

Applicant: GLOBALFOUNDRIES, Inc.

Inventor： Charles L. Arvin ,  Harry D. Cox ,  Eric D. Perfecto ,  Thomas A. Wassick

IPC: H01L21/768 ,  H01L23/532

CPC classification number: H01L24/11 ,  H01L21/6835 ,  H01L21/76829 ,  H01L21/76838 ,  H01L21/76841 ,  H01L23/53228 ,  H01L23/53238 ,  H01L24/03 ,  H01L24/05 ,  H01L24/13 ,  H01L24/16 ,  H01L24/29 ,  H01L24/81 ,  H01L25/0657 ,  H01L25/50 ,  H01L2221/68327 ,  H01L2221/6834 ,  H01L2221/68381 ,  H01L2224/0345 ,  H01L2224/0346 ,  H01L2224/0347 ,  H01L2224/0361 ,  H01L2224/03849 ,  H01L2224/03912 ,  H01L2224/0401 ,  H01L2224/0558 ,  H01L2224/05611 ,  H01L2224/05647 ,  H01L2224/05655 ,  H01L2224/0566 ,  H01L2224/10145 ,  H01L2224/1146 ,  H01L2224/1147 ,  H01L2224/11849 ,  H01L2224/11901 ,  H01L2224/13005 ,  H01L2224/13006 ,  H01L2224/13016 ,  H01L2224/1308 ,  H01L2224/13111 ,  H01L2224/13147 ,  H01L2224/13155 ,  H01L2224/1316 ,  H01L2224/16145 ,  H01L2224/16238 ,  H01L2224/81191 ,  H01L2224/81193 ,  H01L2224/94 ,  H01L2225/06513 ,  H01L2924/01029 ,  H01L2924/01028 ,  H01L2924/00014 ,  H01L2924/013 ,  H01L2224/13164 ,  H01L2924/01026 ,  H01L2924/206 ,  H01L2924/01047

Abstract: A three dimensional multi-die package includes a first die and second die. The first die includes a contact attached to solder. The second die is thinned by adhesively attaching a handler to a top side of the second die and thinning a bottom side of the second die. The second die includes a multilayer contact of layered metallurgy that inhibits transfer of adhesive thereto. The layered metallurgy includes at least one layer that is wettable to the solder. The multilayer contact may include a Nickel layer, a Copper layer upon the Nickel layer, and a Nickel-Iron layer upon the Copper layer. The multilayer contact may also include a Nickel layer, a Copper-Tin layer upon the Nickel layer, and a Tin layer upon the Copper-Tin layer.

Abstract translation: 三维多管芯封装包括第一管芯和第二管芯。 第一个模具包括一个连接到焊料的触点。 通过将处理器粘合地附接到第二管芯的顶侧并使第二管芯的底侧变薄来减小第二管芯。 第二模具包括抑制粘合剂转移的层状冶金的多层接触。 层状冶金包括至少一层可润湿的焊料。 多层接触可以包括镍层，镍层上的铜层和铜层上的镍 - 铁层。 多层接触还可以包括镍层，镍层上的铜 - 锡层和在铜 - 锡层上的锡层。

公开(公告)号：US09689084B2

公开(公告)日：2017-06-27

申请号：US14284932

申请日：2014-05-22

Applicant: GLOBALFOUNDRIES INC.

Inventor： Charles L. Arvin ,  Harry D. Cox ,  Eric D. Perfecto

IPC: C25D21/12 ,  C25D17/10

CPC classification number: C25D5/18 ,  C25D17/10 ,  C25D21/12

Abstract: Disclosed are electrodeposition systems and methods wherein at least three electrodes are placed in a container containing a plating solution. The electrodes are connected to a polarity-switching unit and include a first electrode, a second electrode and a third electrode. The polarity-switching unit establishes a constant polarity state between the first and second electrodes in the solution during an active plating mode, wherein the first electrode has a negative polarity and the second electrode has a positive polarity, thereby allowing a plated layer to form on a workpiece at the first electrode. The polarity-switching unit further establishes an oscillating polarity state between the second and third electrodes during a non-plating mode (i.e., when the first electrode is removed from the plating solution), wherein the second electrode and the third electrode have opposite polarities that switch at regular, relatively fast, intervals, thereby limiting degradation of the second electrode and/or the plating solution.