利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

24 条记录 (耗时 0.022 秒)

    Device for on-line control of output power of vacuum-UV laser
    11.
    发明授权
    Device for on-line control of output power of vacuum-UV laser 失效

    公开(公告)号：US06477192B2

    公开(公告)日：2002-11-05

    申请号：US09971802

    申请日：2001-10-03

    申请人： Sergei V. Govorkov ,  Gongxue Hua

    发明人： Sergei V. Govorkov ,  Gongxue Hua

    IPC分类号： H01S322

    CPC分类号： H01S3/225 ,  B23K26/12 ,  B23K26/128 ,  B23K26/705 ,  B23K2103/04 ,  G01J1/4257 ,  G03F7/70025 ,  G03F7/70558 ,  G03F7/70808 ,  H01S3/0014 ,  H01S3/134

    摘要： A beam delivery system for a laser emitting at a relevant wavelength of less than 200 nm is provided. The system includes a sealed enclosure connected to the laser and surrounding the path of the beam as it exits the laser resonator. The enclosure extends between the laser output coupler and a photodetector sensitive at the wavelength of the relevant laser emission. The interior of the enclosure, and thus the beam path between the output coupler and the detector, is substantially free of species that strongly photoabsorb radiation at the relevant laser emission wavelength. A beam splitting element diverts at least a portion of the beam for measurement by the detector. The beam splitting element preferably includes a beam splitting mirror, holographic beam sampler or diffraction grating. In addition, optics are preferably provided for filtering a visible portion of the diverted beam, so that substantially only a VUV portion of the diverted beam is received at the detector. The filtering optics preferably include a diffraction grating, holographic beam sampler or one or more dichroic mirrors.

    High damage threshold Q-switched CO2 laser
    13.
    发明申请
    High damage threshold Q-switched CO2 laser 审中-公开
    高损伤阈值Q开关CO2激光器

    公开(公告)号：US20080002751A1

    公开(公告)日：2008-01-03

    申请号：US11481887

    申请日：2006-07-06

    申请人： Gongxue Hua ,  Vernon Seguin ,  Leon A. Newman ,  Eric R. Mueller

    发明人： Gongxue Hua ,  Vernon Seguin ,  Leon A. Newman ,  Eric R. Mueller

    IPC分类号： H01S3/11 ,  H01S3/22

    CPC分类号： H01S3/2232 ,  H01S3/08054 ,  H01S3/08095 ,  H01S3/0813 ,  H01S3/0817 ,  H01S3/10046 ,  H01S3/115

    摘要： A thin film polarizer (TFP) and a half-wave CdTe electro-optical crystal are utilized to achieve a higher damage threshold in Q-switching CO2 lasers for material processing applications. Half-wave CdTe electro-optical modulators can be used without the arcing and corona problems typically associated with the higher drive voltage by placing low dielectric constant insulators (such as BeO) around the CdTe crystal. Doubling the voltage placed across a CdTe crystal enables the crystal to function as a half-wave phase retarder EO switch with the same dimensions as a crystal functioning as a quarter-wave EO modulator. These half-wave EO switches can be used with TFPs to shape the output pulses, as well as to direct alternate pulses of repetitively pulsed super pulsed slab lasers to alternate scanners, thereby doubling the output of laser hole drilling systems.

    摘要翻译： 利用薄膜偏振器（TFP）和半波长的CdTe电光晶体来实现用于材料加工应用的Q开关CO 2激光器的更高的损伤阈值。 通常在CdTe晶体周围放置低介电常数绝缘体（如BeO），可以使用半波长的CdTe电光调制器，而不会产生通常与较高驱动电压相关的电弧和电晕问题。 将跨越CdTe晶体的电压加倍使晶体能够作为与作为四分之一波长EO调制器的晶体相同尺寸的半波相位延迟器EO开关。 这些半波EO开关可与TFP一起使用，以形成输出脉冲，以及将重复脉冲的超脉冲平板激光器的交替脉冲引导到交替的扫描仪，从而使激光钻孔系统的输出加倍。

    Master-oscillator power-amplifier (MOPA) excimer or molecular fluorine laser system with long optics lifetime
    15.
    发明申请
    Master-oscillator power-amplifier (MOPA) excimer or molecular fluorine laser system with long optics lifetime 有权
    具有长光学寿命的主振荡器功率放大器（MOPA）准分子或分子氟激光系统

    公开(公告)号：US20050002425A1

    公开(公告)日：2005-01-06

    申请号：US10881103

    申请日：2004-06-30

    申请人： Sergei Govorkov ,  Gongxue Hua ,  Timur Misuryaev ,  Alexander Wiessner ,  Thomas Schmidt ,  Rainer Paetzel

    发明人： Sergei Govorkov ,  Gongxue Hua ,  Timur Misuryaev ,  Alexander Wiessner ,  Thomas Schmidt ,  Rainer Paetzel

    IPC分类号： H01S3/00 ,  H01S3/10 ,  H01S3/22

    CPC分类号： G03F7/7055 ,  H01S3/0057 ,  H01S3/0835 ,  H01S3/235

    摘要： The lifetime of optical components used in deep-UV (DUV) excimer laser systems, including systems in a MOPA configuration, can be increased by reducing the intensity of pulses incident upon these components. In one approach, an output pulse can be “stretched” in order to reduce the peak power of the pulse. A pulse stretching component can be used, which can be mounted outside the laser enclosure with a horizontal beam path in order to provide a delay line with a minimum impact on the laser system footprint. The horizontal beam path also can minimize the number of optical components in the arm containing the high power beam. A beamsplitting prism can be used with the delay line to avoid the rapid degradation of coatings otherwise exposed to intense UV beams. The prism can expand the beam in the delay line in order to minimize beam intensity and losses due to reflection.

    摘要翻译： 包括在MOPA配置中的系统的深UV（DUV）准分子激光系统中使用的光学部件的寿命可以通过降低入射到这些部件上的脉冲的强度来增加。 在一种方法中，输出脉冲可以被“拉伸”，以便降低脉冲的峰值功率。 可以使用脉冲拉伸部件，其可以安装在具有水平光束路径的激光外壳外部，以便提供对激光系统占地面积具有最小影响的延迟线。 水平光束路径还可以使包含高功率光束的臂中的光学部件的数量最小化。 分束棱镜可以与延迟线一起使用，以避免涂层的快速退化，否则暴露于强烈的UV光束。 棱镜可以在延迟线中扩展光束，以便最小化光束强度和由于反射引起的损耗。

    Device for on-line control of output power of vacuum-UV laser
    16.
    发明授权
    Device for on-line control of output power of vacuum-UV laser 失效

    公开(公告)号：US06442182B1

    公开(公告)日：2002-08-27

    申请号：US09598552

    申请日：2000-06-21

    申请人： Sergei V. Govorkov ,  Gongxue Hua

    发明人： Sergei V. Govorkov ,  Gongxue Hua

    IPC分类号： H01S313

    CPC分类号： H01S3/225 ,  B23K26/12 ,  B23K26/128 ,  B23K26/705 ,  B23K2103/04 ,  G01J1/4257 ,  G03F7/70025 ,  G03F7/70558 ,  G03F7/70808 ,  H01S3/0014 ,  H01S3/134

    摘要： A beam delivery system for a laser emitting at a relevant wavelength of less than 200 nm is provided. The system includes a sealed enclosure connected to the laser and surrounding the path of the beam as it exits the laser resonator. The enclosure extends between the laser output coupler and a photodetector sensitive at the wavelength of the relevant laser emission. The interior of the enclosure, and thus the beam path between the output coupler and the detector, is substantially free of species that strongly photoabsorb radiation at the relevant laser emission wavelength. A beam splitting element diverts at least a portion of the beam for measurement by the detector. The beam splitting element preferably includes a beam splitting mirror, holographic beam sampler or diffraction grating. In addition, optics are preferably provided for filtering a visible portion of the diverted beam, so that substantially only a VUV portion of the diverted beam is received at the detector. The filtering optics preferably include a diffraction grating, holographic beam sampler or one or more dichroic mirrors.

    Particle damage protection for high power CO2 slab laser mirrors
    17.
    发明授权
    Particle damage protection for high power CO2 slab laser mirrors 有权
    大功率CO2平板激光镜的粒子损伤保护

    公开(公告)号：US07889775B2

    公开(公告)日：2011-02-15

    申请号：US12487730

    申请日：2009-06-19

    申请人： Gongxue Hua

    发明人： Gongxue Hua

    IPC分类号： H01S3/22

    CPC分类号： H01S3/0346 ,  H01S3/0315 ,  H01S3/038 ,  H01S3/0401 ,  H01S3/09713 ,  H01S3/2232

    摘要： A CO2 gas discharge laser includes elongated planar live and ground electrodes vertically spaced and electrically insulated from each. The electrodes are spaced apart by ceramic spacer strips arranged along the edges of the electrodes. An auxiliary electrode is located at each end of the live electrode, co-planar with the live electrode, longitudinally spaced part from the live electrode vertically spaced apart from, but electrically connected to, the ground electrode. The auxiliary electrode has two raised portions spaced apart by a distance less than the distance between inside edges of the ceramic strips. The raised portions of the auxiliary electrode prevent erosion of the ceramic strips by laser radiation generated in the resonator when the laser is operating.

    摘要翻译： 二氧化碳气体放电激光器包括垂直间隔开并与之电隔离的细长平面带电和接地电极。 电极通过沿着电极边缘布置的陶瓷隔离片隔开。 辅助电极位于活电极的每个端部，与带电电极共平面，与从接地电极垂直间隔开但电连接的带电电极的纵向间隔开的部分。 辅助电极具有间隔开距离小于陶瓷条的内边缘之间的距离的两个凸起部分。 当激光器工作时，辅助电极的凸起部分防止在谐振器中产生的激光辐射对陶瓷带的侵蚀。

    RF SHIELDED, SERIES INDUCTOR, HIGH RF POWER IMPEDANCE MATCHING INTERCONNECTOR FOR CO2 SLAB LASER
    19.
    发明申请
    RF SHIELDED, SERIES INDUCTOR, HIGH RF POWER IMPEDANCE MATCHING INTERCONNECTOR FOR CO2 SLAB LASER 有权
    射频屏蔽，串联电感，高频功率阻抗匹配互连二氧化碳激光

    公开(公告)号：US20090004918A1

    公开(公告)日：2009-01-01

    申请号：US12051232

    申请日：2008-03-19

    申请人： ADRIAN PAPANIDE ,  Frederick W. Hauer ,  Leon A. Newman ,  Thomas V. Hennessey, JR. ,  Christian J. Shackleton ,  Joel Fontanella ,  Gongxue Hua

    发明人： ADRIAN PAPANIDE ,  Frederick W. Hauer ,  Leon A. Newman ,  Thomas V. Hennessey, JR. ,  Christian J. Shackleton ,  Joel Fontanella ,  Gongxue Hua

    IPC分类号： H01R13/66 ,  H03H7/38

    CPC分类号： H01S3/041 ,  H01R24/44 ,  H01R2103/00 ,  H01S3/02 ,  H01S3/032 ,  H01S3/038 ,  H01S3/04 ,  H01S3/0407 ,  H01S3/09702 ,  H01S3/09705 ,  H01S3/0971 ,  H01S3/2232 ,  H03H7/38

    摘要： A RF shielded, series inductor, high power impedance matching network interconnector is provided for connecting an RF power supply to electrodes contained in the shielded, hermetically sealed laser tube housing of a slab laser system. The impedance matching interconnector comprises a short length of co-axial conductor and an impedance matching network that includes two L shaped networks. The inner conductor of the co-axial conductor is connected between the power supply output and the impedance matching network. The outer conductor of the co-axial conductor is grounded. The co-axial conductor has an impedance characteristic to match the power supply output impedance. The first L-shaped network includes a first inductor having a first end connected to the inner conductor of the co-axial conductor and a first capacitor connected to the second end of the first inductor and a second plate connected to ground. The second L shaped network includes a second inductor having a first end connected to the common connection between the second end of the first inductor and the first plate of the first capacitor and a second capacitor having a first plate connected to the second end of the second inductor and a second plate connected to ground. The common connection between the second end of the second inductor and the first plate of the second capacitor is connected through the shielded, hermetically sealed laser tube housing to the electrodes of the slab laser system. The two L-shaped networks may be implemented in a “single capacitor” configuration for lower power applications or in a “multi-capacitor” configuration for higher power applications.

    摘要翻译： 提供RF屏蔽串联电感器，高功率阻抗匹配网络互连器，用于将RF电源连接到平板激光系统的屏蔽密封激光管外壳中包含的电极。 阻抗匹配互连器包括短长度的同轴导体和包括两个L形网络的阻抗匹配网络。 同轴导体的内导体连接在电源输出和阻抗匹配网络之间。 同轴导体的外导体接地。 同轴导体具有匹配电源输出阻抗的阻抗特性。 第一L形网络包括第一电感器，其具有连接到同轴导体的内导体的第一端和连接到第一电感器的第二端的第一电容器和连接到地的第二板。 第二L形网络包括第二电感器，第二电感器具有连接到第一电感器的第二端和第一电容器的第一板之间的公共连接的第一端和第二电容器，第二电容器具有连接到第二电感器的第二端的第一板 电感器和连接到地的第二板。 第二电感器的第二端和第二电容器的第一板之间的公共连接通过屏蔽密封的激光管外壳连接到板式激光系统的电极。 两个L形网络可以用于较低功率应用的“单电容器”配置或用于较高功率应用的“多电容器”配置中。