APPARATUS AND METHOD FOR GRAPHENE WET TRANSFER
    14.
    发明申请
    APPARATUS AND METHOD FOR GRAPHENE WET TRANSFER 有权
    用于石墨转移的装置和方法

    公开(公告)号:US20170028692A1

    公开(公告)日:2017-02-02

    申请号:US15044586

    申请日:2016-02-16

    IPC分类号: B32B37/00 C01B31/04

    摘要: Disclosed is an apparatus for graphene wet transfer, which includes: a reservoir body having at least two reservoirs; a barrier structure located on the reservoir and having at least one separated space formed by barriers; and a substrate frame located below the barrier structure and having at least one substrate accommodation groove for accommodating a target substrate to which graphene is transferred. Here, each reservoir may be filled with a solution for a wet transfer process, and the graphene may be separately located in each separated space in a floating state in the solution.

    摘要翻译: 公开了一种用于石墨烯湿转移的装置,其包括:具有至少两个储存器的储存器主体; 阻挡结构,位于储存器上并且具有至少一个由屏障形成的分离空间; 以及位于所述阻挡结构下方的衬底框架,并具有用于容纳转印有石墨烯的目标衬底的至少一个衬底容纳槽。 这里,每个储存器可以填充用于湿转印工艺的溶液,并且石墨烯可以在溶液中以浮置状态分开地位于每个分离的空间中。

    APPARATUS AND METHOD FOR EXTREME ULTRAVIOLET SPECTROMETER CALIBRATION
    17.
    发明申请
    APPARATUS AND METHOD FOR EXTREME ULTRAVIOLET SPECTROMETER CALIBRATION 有权
    超声波紫外光谱仪校准的装置和方法

    公开(公告)号:US20150346029A1

    公开(公告)日:2015-12-03

    申请号:US14490948

    申请日:2014-09-19

    IPC分类号: G01J3/02 G01J3/28 G01J3/10

    摘要: Disclosed are herein an apparatus and method for extreme ultraviolet (EUV) spectroscope calibration. The apparatus for EUV spectroscope calibration includes an EUV generating module, an Al filter, a diffraction grating, a CCD camera, a spectrum conversion module, and a control module that compares a wavelength value corresponding to a maximum peak among peaks of the spectrum depending on the order of the EUV light converted from the spectrum conversion module with a predetermined reference wavelength value depending on an order of high-order harmonics to calculate a difference value with the closest reference wavelength value, and controls the spectrum depending on the order of the EUV light converted from the spectrum conversion module to be moved in a direction of wavelength axis by the calculated difference value. Thus, it is possible to accurately measure a wavelength of a spectrum of EUV light used in EUV exposure technology and mask inspection technology.

    摘要翻译: 本文公开了用于极紫外(EUV)分光仪校准的装置和方法。 用于EUV分光仪校准的装置包括EUV生成模块,Al滤光片,衍射光栅,CCD照相机,光谱转换模块和控制模块,该模块将与频谱峰值中的最大峰值对应的波长值与 根据高次谐波的顺序,从频谱转换模块转换成具有预定参考波长值的EUV光的顺序,以计算具有最接近参考波长值的差值,并根据EUV的顺序来控制光谱 从光谱转换模块转换为沿波长轴方向移动计算出的差值的光。 因此,可以精确地测量在EUV曝光技术和掩模检查技术中使用的EUV光的光谱的波长。

    APPARATUS FOR INFERRING PEDESTRIAN POSITION BASED ON PEDESTRIAN MOVEMENT DETECTION, AND METHOD THEREFOR
    18.
    发明申请
    APPARATUS FOR INFERRING PEDESTRIAN POSITION BASED ON PEDESTRIAN MOVEMENT DETECTION, AND METHOD THEREFOR 审中-公开
    基于PEDESTRIAN运动检测的感染PEDESTRIAN位置的装置及其方法

    公开(公告)号:US20150308831A1

    公开(公告)日:2015-10-29

    申请号:US14429162

    申请日:2013-09-12

    IPC分类号: G01C21/12 G01B21/00

    摘要: Disclosed are an apparatus for estimating a pedestrian position based on pedestrian motion recognition, and a method therefor. The method for estimating the pedestrian position based on pedestrian motion recognition includes recognizing a specific motion of a plurality of motions of the pedestrian, performing a unique pedestrian dead-reckoning (PDR) technique corresponding to the recognized specific motion among unique PDR techniques for each of the plurality of motions of the pedestrian, and estimating the pedestrian's position by the performed unique PDR technique.

    摘要翻译: 公开了一种基于行人运动识别来估计行人位置的装置及其方法。 基于行人运动识别的用于估计行人位置的方法包括识别行人的多个运动的特定运动,对于每个独立的PDR技术执行与识别的特定运动相对应的唯一的行人推算(PDR)技术 行人的多个运动,以及通过执行的独特的PDR技术来估计行人的位置。

    PULSE LASER APPARATUS
    20.
    发明申请
    PULSE LASER APPARATUS 有权
    脉冲激光装置

    公开(公告)号:US20150049775A1

    公开(公告)日:2015-02-19

    申请号:US14448227

    申请日:2014-07-31

    IPC分类号: H01S3/117

    摘要: Provided is a pulse laser apparatus for generating laser light. The apparatus includes a first mirror and a second mirror which are disposed at both ends of a resonator and configured to reflect the laser light, a gain medium disposed between the first and second mirrors and configured to amplify and output light incident from an outside, an etalon configured to adjust a pulse width of the laser light, and an acousto-optic modulator disposed between the first and second mirrors and configured to form a mode-locked and Q-switched signal from the laser light, in which some of the laser light is output through either the first or second mirror to outside the resonator.

    摘要翻译: 提供了一种用于产生激光的脉冲激光装置。 该装置包括:第一反射镜和第二反射镜,其设置在谐振器的两端并被配置为反射激光;增益介质,设置在第一和第二反射镜之间并且被配置为放大并输出从外部入射的光, 标准准则被配置为调整激光的脉冲宽度,以及声光调制器,其布置在第一和第二反射镜之间并被配置为从激光形成锁模和Q开关信号,其中一些激光 通过第一或第二反射镜输出到谐振器外部。