公开(公告)号：US5937275A

公开(公告)日：1999-08-10

申请号：US809945

申请日：1997-10-27

Applicant: Horst Munzel ,  Michael Offenberg ,  Klaus Heyers ,  Bernhard Elsner ,  Markus Lutz ,  Helmut Skapa ,  Heinz-Georg Vossenberg ,  Nicholas Buchan ,  Eckhard Graf

Inventor： Horst Munzel ,  Michael Offenberg ,  Klaus Heyers ,  Bernhard Elsner ,  Markus Lutz ,  Helmut Skapa ,  Heinz-Georg Vossenberg ,  Nicholas Buchan ,  Eckhard Graf

IPC: G01P15/08 ,  H01L29/84 ,  G01L23/10 ,  G01P15/09

CPC classification number: G01P15/0802

Abstract: A method for producing acceleration sensors is proposed, in which a silicon layer that is deposited in an epitaxial application system is used. Above sacrificial layers (2) applied to the substrate (1), the material grows in the form of a polysilicon layer (6), which has a certain surface roughness. By application of a photoresist and by a wet etching process, this surface roughness is eliminated. Alternatively, chemical-mechanical smoothing is contemplated.

Abstract translation: PCT No.PCT / DE96 / 01236 Sec。 371日期1997年10月27日第 102（e）1997年10月27日PCT PCT 1996年7月9日PCT公布。 第WO97 / 04319号公报 日期1997年2月6日提出了一种用于制造加速度传感器的方法，其中使用沉积在外延应用系统中的硅层。 在施加到基板（1）的牺牲层（2）上方，材料以具有一定表面粗糙度的多晶硅层（6）的形式生长。 通过施加光致抗蚀剂和通过湿蚀刻工艺，可以消除该表面粗糙度。 或者，考虑化学机械平滑化。

公开(公告)号：US5631422A

公开(公告)日：1997-05-20

申请号：US550484

申请日：1995-10-30

Applicant: Peter Sulzberger ,  Michael Offenberg ,  Bernhard Elsner ,  Markus Lutz

Inventor： Peter Sulzberger ,  Michael Offenberg ,  Bernhard Elsner ,  Markus Lutz

IPC: G01P15/08 ,  G01P15/125 ,  H01L29/84 ,  H01G7/00

CPC classification number: G01P15/125 ,  G01P15/0802 ,  G01P2015/0814

Abstract: A sensor includes a first silicon layer, and a sensor element including at least one electrode structured from the first silicon layer. The sensor also includes at least one connecting element also structured from the first silicon layer. The connecting element has a doping less than the doping of the electrode. The sensor comprises at least one conductor track on the first silicon layer routed over the connecting element and coupled to the sensor element for supplying an external signal.

Abstract translation: 传感器包括第一硅层和包括由第一硅层构成的至少一个电极的传感器元件。 该传感器还包括至少一个也由第一硅层构成的连接元件。 连接元件的掺杂小于电极的掺杂。 传感器包括在连接元件上布线的第一硅层上的至少一个导体轨道，并且耦合到传感器元件以提供外部信号。

公开(公告)号：US5569852A

公开(公告)日：1996-10-29

申请号：US355760

申请日：1994-12-14

Applicant: Jiri Marek ,  Frank Bantien ,  Horst Muenzel ,  Michael Offenberg

Inventor： Jiri Marek ,  Frank Bantien ,  Horst Muenzel ,  Michael Offenberg

IPC: G01P15/08 ,  G01P15/125 ,  H01L29/84

CPC classification number: G01P15/125 ,  G01P15/0802 ,  G01P2015/0814

Abstract: A contacting of a capacitive accelerometer sensor of monocrystalline material is achieved by a capacitive accelerometer sensor having a structure etched out of a monocrystalline layer arranged on a substrate, including a seismic mass that is only joined to the substrate by suspension segments and executing a movement in its longitudinal direction in response to the occurrence of an acceleration of parallel, plate-like first fingers extending out from this mass at right angles to their longitudinal direction and of plate-like second fingers running parallel to the first fingers and anchored to the substrate. The first and second fingers form a capacitor arrangement. The suspension segments, which are anchored with their end region that is distant from the seismic mass to the substrate, and second fingers are electrically isolated, by an isolation strip, from the other remaining layer of monocrystalline material. A passivation layer extends over the isolation strip, and at least partially over the remaining layer. Conductors arranged on the passivation layer and serving as connecting leads for the capacitor arrangement extend across the isolation strip up to the connections of the capacitor arrangement, and are contacted there.

Abstract translation: 单晶材料的电容式加速度计传感器的接触是通过电容式加速度计传感器实现的，该传感器具有从布置在基底上的单晶层中蚀刻出的结构，包括仅通过悬挂段连接到基底的地震质量块， 其纵向方向响应于从该质量块与其纵向方向成直角地延伸的平行的板状第一指状物的加速度以及平行于第一指状物并且锚固到基底的板状第二指状物的加速度。 第一和第二指形成电容器布置。 将其远离地震质体的端部区域锚定到基底的悬挂段和第二指状物通过隔离带与另一个剩余的单晶材料层电隔离。 钝化层在隔离带上延伸，并且至少部分地覆盖剩余层。 布置在钝化层上并且用作电容器布置的连接引线的导体跨过隔离带延伸直到电容器装置的连接，并且在那里接触。

公开(公告)号：US08627719B2

公开(公告)日：2014-01-14

申请号：US12459993

申请日：2009-07-09

Applicant: Michael Offenberg ,  Michael Baus

Inventor： Michael Offenberg ,  Michael Baus

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01P2015/0831

Abstract: A micromechanical sensor element includes: a substrate; a first seismic mass suspended from the substrate, which is deflectable from a first rest position by an acceleration acting perpendicularly to a main plane of extension; and a second seismic mass, which is deflectable from a second rest position by the acceleration. At least a partial overlap is provided between the first seismic mass and the second seismic mass perpendicular to the main plane of extension.

Abstract translation: 微机械传感器元件包括：基板; 从衬底悬挂的第一个地震质量块，其通过垂直于主平面延伸的加速度从第一静止位置偏转; 以及第二地震质量块，其可以通过加速度从第二静止位置偏转。 在第一抗震块与垂直于主延伸平面的第二震震块之间至少提供部分重叠。

公开(公告)号：US20050230708A1

公开(公告)日：2005-10-20

申请号：US11028370

申请日：2005-01-03

Applicant: Frank Reichenbach ,  Stefan Pinter ,  Frank Henning ,  Hans Artmann ,  Helmut Baumann ,  Franz Laemer ,  Michael Offenberg ,  Georg Bischopink

Inventor： Frank Reichenbach ,  Stefan Pinter ,  Frank Henning ,  Hans Artmann ,  Helmut Baumann ,  Franz Laemer ,  Michael Offenberg ,  Georg Bischopink

IPC: B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  C30B1/00

CPC classification number: B81C1/00293 ,  B81B2201/0228 ,  B81B2207/095 ,  B81C2201/0115 ,  B81C2203/0136 ,  B81C2203/0145

Abstract: The invention relates to a sensor with at least one silicon-based micromechanical structure, which is integrated with a sensor chamber of a foundation wafer, and with at least one covering that covers the foundation wafer in the region of the sensor chamber, and to a method for producing a sensor. It is provided that in the sensor of the invention, the covering (13) comprises a first layer (32) (deposition layer) that is permeable to an etching medium and the reaction products, and a hermetically sealing second layer (34) (sealing layer) located above it, and that in the method of the invention, at least the sensor chamber (28) present in the foundation wafer (11) after the establishment of the structure (26) is filled with an oxide (30), in particular CVD oxide or porous oxide; the sensor chamber (28) is covered by a first layer (32) (deposition layer), in particular of polysilicon, that is transparent to an etching medium and the reaction products or is retroactively made transparent; the oxide (30) in the sensor chamber (28) is removed through the deposition layer (32) with the etching medium; and next, a second layer (34) (sealing layer), in particular of metal or an insulator, is applied to the deposition layer (32) and hermetically seals off the sensor chamber (28).

Abstract translation: 本发明涉及具有至少一个硅基微机械结构的传感器，其与基础晶片的传感器室结合，并且在传感器室的区域中具有覆盖基础晶片的至少一个覆盖物，以及至少一个 传感器的制造方法 设置在本发明的传感器中，覆盖物（13）包括可蚀刻介质和反应产物的第一层（沉积层）和密封的第二层（34）（密封 层），并且在本发明的方法中，在建立结构（26）之后，至少存在于基础晶片（11）中的传感器室（28）填充有氧化物（30），其中 特定的CVD氧化物或多孔氧化物; 传感器室（28）由对蚀刻介质和反应产物透明的或者具有回溯性的透明的第一层（32）（沉积层）（特别是多晶硅）覆盖; 传感器室（28）中的氧化物（30）通过蚀刻介质通过沉积层（32）去除; 接下来，将特别是金属或绝缘体的第二层（34）（密封层）施加到沉积层（32）并气密地密封传感器室（28）。

公开(公告)号：US6140709A

公开(公告)日：2000-10-31

申请号：US306181

申请日：1999-05-06

Applicant: Horst Muenzel ,  Michael Offenberg ,  Udo Bischof ,  Eckhard Graf ,  Markus Lutz

Inventor： Horst Muenzel ,  Michael Offenberg ,  Udo Bischof ,  Eckhard Graf ,  Markus Lutz

IPC: H01L23/12 ,  B81B7/00 ,  B81C1/00 ,  G01C19/56 ,  G01P15/08 ,  H01L21/60 ,  H01L23/48 ,  H01L29/40 ,  H01L25/52

CPC classification number: G01P15/0802 ,  B81C1/00301 ,  B81C1/00801 ,  G01C19/56 ,  H01L24/02 ,  B81B2207/07 ,  B81B2207/097 ,  B81C2201/014 ,  B81C2201/053 ,  H01L2224/0401 ,  H01L2924/01004 ,  H01L2924/01005 ,  H01L2924/01013 ,  H01L2924/01014 ,  H01L2924/01033 ,  H01L2924/01068 ,  H01L2924/01072 ,  H01L2924/01074

Abstract: A bonding pad structure, in particular for a micromechanical sensor, includes a substrate, an electrically insulating sacrificial layer provided on the substrate, a patterned conductor path layer buried in the sacrificial layer, a contact hole provided in the sacrificial layer, and a bonding pad base, composed of an electrically conductive material. The bonding pad base has a first region extending over the sacrificial layer, and a second layer in contact with the conductor path region and extending through the contact hole. A protective layer is provided at least temporarily on the sacrificial layer in a specific region beneath and around the bonding pad base to prevent underetching of the sacrificial layer beneath the bonding pad base during etching of the sacrificial layer in such a way that the substrate and/or the conductor path is exposed.

Abstract translation: 特别是用于微机械传感器的焊盘结构包括衬底，设置在衬底上的电绝缘牺牲层，埋在牺牲层中的图案化导体通路层，设置在牺牲层中的接触孔，以及焊盘 基底，由导电材料组成。 焊盘基部具有在牺牲层上延伸的第一区域，以及与导体路径区域接触并延伸穿过接触孔的第二层。 保护层至少临时地设置在接合焊盘基座的下面和周围的特定区域中的牺牲层上，以防止牺牲层在蚀刻牺牲层期间的牺牲层的去抛光，使得衬底和/ 或导体路径露出。

公开(公告)号：US5792675A

公开(公告)日：1998-08-11

申请号：US730257

申请日：1996-10-15

Applicant: Michael Offenberg

Inventor： Michael Offenberg

IPC: B81B3/00 ,  G01P15/08 ,  G01P15/125 ,  H01L49/00 ,  H01L21/00

CPC classification number: B81B3/0086 ,  B81B3/0035 ,  B81B3/0078 ,  B81C1/00595 ,  G01P15/0802 ,  G01P15/125 ,  B81B2201/0235 ,  B81B2203/0118 ,  B81B2203/0136 ,  B81C2201/0107 ,  B81C2201/0109 ,  B81C2201/016 ,  G01P2015/0814

Abstract: In an accelerometer sensor of crystalline material, whose components are composed partly of monocrystalline and partly of polycrystalline material, a band-shaped seismic mass preferably is composed of polycrystalline material, whose suspension by means of suspension segments of monocrystalline material at the end regions permits a movement in the longitudinal direction upon the occurrence of an acceleration. Parallel plates extend from this mass at right angles to their longitudinal direction and, together with additional plates, which run parallel to said plates and are anchored at a base, form a capacitor arrangement and are composed, in particular, of monocrystalline material. At least the monocrystalline material is doped to attain an electric conductivity. When lightly doped, the long and thin plates and suspension segments have a high conductivity, given a very small mechanical prestressing, and can easily be isotropically undercut. The polycrystalline formation of the seismic mass can be designed to be very wide and large by etching away an underlying sacrificial oxide.

Abstract translation: 在结晶材料的加速度传感器中，其部件部分由单晶组成，部分由多晶材料组成，带状地震质量体优选地由多晶材料组成，其结晶区域的单晶材料悬浮段的悬浮液允许 发生加速时的纵向移动。 平行板从该质量块垂直于其纵向方向延伸，并且与另外的板一起平行于所述板并锚定在基座上，形成电容器布置，并且特别地由单晶材料组成。 至少单晶材料被掺杂以获得导电性。 当轻掺杂时，长且薄的板和悬浮段具有高导电性，给定非常小的机械预应力，并且可以容易地各向同性地切削。 通过蚀刻掉潜在的牺牲氧化物，可以将地震块的多晶形成设计得非常宽和大。

公开(公告)号：US5578755A

公开(公告)日：1996-11-26

申请号：US348700

申请日：1994-12-02

Applicant: Michael Offenberg

Inventor： Michael Offenberg

IPC: B81B3/00 ,  G01P15/08 ,  G01P15/125 ,  H01L49/00

CPC classification number: B81B3/0086 ,  B81B3/0035 ,  B81B3/0078 ,  B81C1/00595 ,  G01P15/0802 ,  G01P15/125 ,  B81B2201/0235 ,  B81B2203/0118 ,  B81B2203/0136 ,  B81C2201/0107 ,  B81C2201/0109 ,  B81C2201/016 ,  G01P2015/0814

Abstract: In an accelerometer sensor of crystalline material, whose components are composed partly of monocrystalline and partly of polycrystalline material, a band-shaped seismic mass preferably is composed of polycrystalline material, whose suspension by means of suspension segments of monocrystalline material at the end regions permits a movement in the longitudinal direction upon the occurrence of an acceleration. Parallel plates extend from this mass at right angles to their longitudinal direction and, together with additional plates, which run parallel to said plates and are anchored at a base, form a capacitor arrangement and are composed, in particular, of monocrystalline material. At least the monocrystalline material is doped to attain an electric conductivity. When lightly doped, the long and thin plates and suspension segments have a high conductivity, given a very small mechanical prestressing, and can easily be isotropically undercut. The polycrystalline formation of the seismic mass can be designed to be very wide and large by etching away an underlying sacrificial oxide.

Abstract translation: 在结晶材料的加速度传感器中，其部件部分由单晶组成，部分由多晶材料组成，带状地震质量体优选地由多晶材料组成，其结晶区域的单晶材料悬浮段的悬浮液允许 发生加速时的纵向移动。 平行板从该质量块垂直于其纵向方向延伸，并且与另外的板一起平行于所述板并锚定在基座上，形成电容器布置，并且特别地由单晶材料组成。 至少单晶材料被掺杂以获得导电性。 当轻掺杂时，长且薄的板和悬浮段具有高导电性，给定非常小的机械预应力，并且可以容易地各向同性地切削。 通过蚀刻掉潜在的牺牲氧化物，可以将地震块的多晶形成设计得非常宽和大。

公开(公告)号：US5461917A

公开(公告)日：1995-10-31

申请号：US131821

申请日：1993-10-05

Applicant: Jiri Marek ,  Dietrich Schubert ,  Helmut Baumann ,  Horst Muenzel ,  Michael Offenberg ,  Martin Willmann

Inventor： Jiri Marek ,  Dietrich Schubert ,  Helmut Baumann ,  Horst Muenzel ,  Michael Offenberg ,  Martin Willmann

IPC: G01P15/02 ,  G01P15/08 ,  G01P15/125 ,  H01L29/84

CPC classification number: G01P15/0802 ,  G01P15/125 ,  G01P2015/0828

Abstract: An acceleration sensor and a method of making an acceleration sensor is described in which a movable sensor element is located in a hollow space formed in the middle of three silicon plates. During production, air can be removed from the hollow space through a hole in one of the two outer plates. The hole is then closed by an additional plate, which allows for a defined pressure to be set in the hollow space.

Abstract translation: 描述了一种加速度传感器和制造加速度传感器的方法，其中可移动传感器元件位于形成在三个硅板中间的中空空间中。 在生产过程中，空气可以通过两个外板中的一个的孔从中空空间移除。 然后孔被附加的板封闭，这允许将限定的压力设定在中空空间中。

公开(公告)号：US5310450A

公开(公告)日：1994-05-10

申请号：US900187

申请日：1992-06-17

Applicant: Michael Offenberg ,  Martin Willmann

Inventor： Michael Offenberg ,  Martin Willmann

IPC: G01P15/02 ,  G01P15/08 ,  H01L21/306 ,  B44C1/22 ,  C03C15/00

CPC classification number: G01P15/0802 ,  G01P2015/0828 ,  Y10S148/159

Abstract: A method of making acceleration sensors with integrated measurement of internal pressure includes connecting multiple plates to each other, thereby defining internal cavities. The tightness of these connections or bonds is checked and controlled during the manufacturing process. The plates define membrane portions adjacent each cavity, the membranes deforming in accordance with the internal pressure in the adjacent cavity. Preferably, the internal pressure of the sensor is measurable by detecting deformation of a sensor wall which defines a membrane.

Abstract translation: 制造具有内部压力的综合测量的加速度传感器的方法包括将多个板彼此连接，由此限定内部空腔。 在制造过程中检查和控制这些连接或粘合的紧密性。 板限定与每个腔相邻的膜部分，膜根据相邻腔中的内部压力而变形。 优选地，可以通过检测限定膜的传感器壁的变形来测量传感器的内部压力。