Micro-electromechanical resonance device with periodic structure
    14.
    发明授权
    Micro-electromechanical resonance device with periodic structure 有权
    具有周期性结构的微机电共振装置

    公开(公告)号:US08212324B2

    公开(公告)日:2012-07-03

    申请号:US12419125

    申请日:2009-04-06

    CPC classification number: H03H9/02338 H03H9/02433 H03H9/2436 H03H9/2463

    Abstract: A Micro Electro Mechanical Systems resonance device includes a substrate, and an input electrode, connected to an alternating current source having an input frequency. The device also includes an output electrode, and at least one anchoring structure, connected to the substrate. The device further includes a vibratile structure connected to an anchoring structure by at least one junction, having a natural acoustic resonant frequency. The vibration under the effect of the input electrode, when it is powered, generates, on the output electrode, an alternating current wherein the output frequency is equal to the natural frequency. The vibratile structure and/or the anchoring structure includes a periodic structure. The periodic structure includes at least first and second zones different from each other, and corresponding respectively to first and second acoustic propagation properties.

    Abstract translation: 微机电系统谐振装置包括连接到具有输入频率的交流电源的基板和输入电极。 该装置还包括输出电极和连接到基板的至少一个锚定结构。 该装置还包括通过至少一个接头连接到锚固结构的振动结构,具有自然的声共振频率。 在输入电极的作用下,在输入电极的作用下的振动在输出电极上产生交流电流,其中输出频率等于固有频率。 振动结构和/或锚定结构包括周期性结构。 周期性结构至少包括彼此不同的第一和第二区,并且分别对应于第一和第二声学传播特性。

    MICRO-ELECTROMECHANICAL RESONANCE DEVICE WITH PERIODIC STRUCTURE
    16.
    发明申请
    MICRO-ELECTROMECHANICAL RESONANCE DEVICE WITH PERIODIC STRUCTURE 有权
    具有周期结构的微机电谐振器件

    公开(公告)号:US20090289314A1

    公开(公告)日:2009-11-26

    申请号:US12419125

    申请日:2009-04-06

    CPC classification number: H03H9/02338 H03H9/02433 H03H9/2436 H03H9/2463

    Abstract: A Micro Electro Mechanical Systems resonance device includes a substrate, and an input electrode, connected to an alternating current source having an input frequency. The device also includes an output electrode, and at least one anchoring structure, connected to the substrate. The device further includes a vibratile structure connected to an anchoring structure by at least one junction, having a natural acoustic resonant frequency. The vibration under the effect of the input electrode, when it is powered, generates, on the output electrode, an alternating current wherein the output frequency is equal to the natural frequency. The vibratile structure and/or the anchoring structure includes a periodic structure. The periodic structure includes at least first and second zones different from each other, and corresponding respectively to first and second acoustic propagation properties.

    Abstract translation: 微机电系统谐振装置包括连接到具有输入频率的交流电源的基板和输入电极。 该装置还包括输出电极和连接到基板的至少一个锚定结构。 该装置还包括通过至少一个接头连接到锚固结构的振动结构,具有自然的声共振频率。 在输入电极的作用下,在输入电极的作用下的振动在输出电极上产生交流电流,其中输出频率等于固有频率。 振动结构和/或锚定结构包括周期性结构。 周期性结构至少包括彼此不同的第一和第二区,并且分别对应于第一和第二声学传播特性。

    Switchable inductance
    18.
    发明授权
    Switchable inductance 有权
    可切换电感

    公开(公告)号:US07259649B2

    公开(公告)日:2007-08-21

    申请号:US10903896

    申请日:2004-07-30

    Abstract: A switchable inductance that can be formed in an integrated circuit, including a spiral interrupted between two first points connected to two terminals via two metallizations running one above the other, one of the two metallizations being deformable; a hollowing between the two metallizations; and a switching device capable of deforming the deformable metallization to separate or to put in contact said two metallizations.

    Abstract translation: 可以形成在集成电路中的可切换电感,包括通过两个金属化连接到两个端子的两个第一点之间中断的螺旋,一个在另一个之上运行,两个金属化之一可变形; 两个金属化之间的空心; 以及能够使可变形金属化变形以分离或接触所述两个金属化的开关装置。

    Electromechanical resonator and method for fabricating such a resonator
    19.
    发明授权
    Electromechanical resonator and method for fabricating such a resonator 有权
    机电谐振器及其制造方法

    公开(公告)号:US07196451B2

    公开(公告)日:2007-03-27

    申请号:US10895616

    申请日:2004-07-21

    CPC classification number: H03H9/2405 H03H2009/02511

    Abstract: An electromechanical resonator includes a monocrystalline-silicon substrate (S) provided with an active zone (ZA) delimited by an insulating region, a vibrating beam (10) anchored by at least one of its free ends on the insulating region and including a monocrystalline-silicon vibrating central part (12), and a control electrode (E) arranged above the beam and bearing on the active zone. The central part (12) of the beam is separated from the active zone (ZA) and from the control electrode (E).

    Abstract translation: 机电谐振器包括设置有由绝缘区限定的有源区(ZA)的单晶硅衬底(S),由绝缘区上的至少一个自由端锚定的振动束(10),并且包括单晶硅衬底 硅振动中心部分(12)和布置在梁的上方并且承载在活动区上的控制电极(E)。 光束的中心部分(12)与有源区(ZA)和控制电极(E)分离。

    Electronic component having a resonator and fabrication process
    20.
    发明授权
    Electronic component having a resonator and fabrication process 有权
    具有谐振器和制造工艺的电子部件

    公开(公告)号:US07180224B2

    公开(公告)日:2007-02-20

    申请号:US10815472

    申请日:2004-04-01

    Abstract: An electronic component (1) includes a substrate (2) and at least two piezoelectric resonators (3, 4) each having an active element (6, 9), a lower electrode (5, 8) and an upper electrode (7, 10). The lower electrode (5) of the first resonator (3) is made of a material that is different from that of the lower electrode (8) of the second resonator (4) such that the resonators exhibit different resonance frequencies.

    Abstract translation: 电子部件(1)包括基板(2)和至少两个各自具有有源元件(6,9),下电极(5,8)和上电极(7,10)的压电谐振器(3,4) )。 第一谐振器(3)的下电极(5)由不同于第二谐振器(4)的下电极(8)的材料制成,使得谐振器表现出不同的谐振频率。

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