公开(公告)号：US07238582B2

公开(公告)日：2007-07-03

申请号：US11000092

申请日：2004-12-01

申请人： Hiromi Shimamoto ,  Takashi Uchino ,  Takeo Shiba ,  Kazuhiro Ohnishi ,  Yoichi Tamaki ,  Takashi Kobayashi ,  Toshiyuki Kikuchi ,  Takahide Ikeda

发明人： Hiromi Shimamoto ,  Takashi Uchino ,  Takeo Shiba ,  Kazuhiro Ohnishi ,  Yoichi Tamaki ,  Takashi Kobayashi ,  Toshiyuki Kikuchi ,  Takahide Ikeda

IPC分类号： H01L21/8222

CPC分类号： H01L27/0652 ,  H01L27/0688 ,  H01L28/20

摘要： The present invention provides a polycrystalline silicon conducting structure (e.g., a resistor) whose resistance value is controlled, and can be less variable and less dependent on temperature with respect to any resistant value, and a process of producing the same. Use is made of at least a two-layer structure including a first polycrystalline silicon layer of large crystal grain size and a second polycrystalline silicon layer of small crystal grain size, and the first polycrystalline silicon layer has a positive temperature dependence of resistance while the second polycrystalline silicon layer has a negative temperature dependence of resistance, or vice versa. Moreover, the polycrystalline silicon layer of large grain size can be formed by high dose ion implantation and annealing, or by depositing the layers by chemical vapor deposition at different temperatures so as to form large-grain and small-grain layers.

摘要翻译： 本发明提供了一种其电阻值被控制的多晶硅导电结构（例如电阻器），并且可以相对于任何电阻值而言可以变化较小并且对温度的依赖性较小，及其制造方法。 使用至少包括具有大晶粒尺寸的第一多晶硅层和小晶粒尺寸的第二多晶硅层的两层结构，并且第一多晶硅层具有正的温度对电阻的依赖性，而第二多晶硅层的第二 多晶硅层具有负电阻的温度依赖性，反之亦然。 此外，可以通过高剂量离子注入和退火，或者通过在不同温度下的化学气相沉积来沉积这些层，形成大晶粒和小晶粒层，可以形成大晶粒尺寸的多晶硅层。

公开(公告)号：US5726488A

公开(公告)日：1998-03-10

申请号：US243325

申请日：1994-05-16

申请人： Atsuo Watanabe ,  Yoshiaki Yazawa ,  Atsushi Hiraishi ,  Masataka Minami ,  Takahiro Nagano ,  Takahide Ikeda ,  Naohiro Momma

发明人： Atsuo Watanabe ,  Yoshiaki Yazawa ,  Atsushi Hiraishi ,  Masataka Minami ,  Takahiro Nagano ,  Takahide Ikeda ,  Naohiro Momma

IPC分类号： H01L21/8234 ,  H01L21/8238 ,  H01L21/8249 ,  H01L27/06 ,  H01L27/088 ,  H01L27/092 ,  H01L29/78 ,  H01L27/02

CPC分类号： H01L27/0623 ,  H01L21/8238 ,  H01L21/8249 ,  Y10S257/921

摘要： A semiconductor device has a well region formed in the surface of a substrate, and has functional portions such as MOSFET and bipolar transistor formed in the well region. The carrier concentration profile of the well region assumes the shape of a valley in the direction of depth thereof, and a minimum point thereof has a concentration of smaller than 5.times.10.sup.15 cm.sup.-3 and is located at a position within 1.6 .mu.m from the surface of the substrate. Preferably, the minimum point should have a concentration of greater than 5.times.10.sup.14 cm.sup.-3 but smaller than 5.times.10.sup.15 cm.sup.-3, and more preferably a concentration of greater than 1.times.10.sup.15 cm.sup.-3 but smaller than 5.times.10.sup.15 cm.sup.-3.

摘要翻译： 半导体器件具有在衬底的表面中形成的阱区，并且具有形成在阱区中的诸如MOSFET和双极晶体管的功能部分。 阱区域的载流子浓度分布呈深谷方向的谷状，其最小点浓度小于5×10 15 cm -3，位于距离其表面1.6m以内的位置 底物。 优选地，最小点应该具有大于5×10 14 cm -3但小于5×10 15 cm -3的浓度，更优选大于1×10 15 cm -3但小于5×10 15 cm -3的浓度。

公开(公告)号：US5619069A

公开(公告)日：1997-04-08

申请号：US458655

申请日：1995-06-02

申请人： Hiroyuki Ohta ,  Hideo Miura ,  Hiroo Masuda ,  Yoichi Tamaki ,  Takahide Ikeda ,  Asao Nishimura ,  Takashi Hashimoto

发明人： Hiroyuki Ohta ,  Hideo Miura ,  Hiroo Masuda ,  Yoichi Tamaki ,  Takahide Ikeda ,  Asao Nishimura ,  Takashi Hashimoto

IPC分类号： H01L29/73 ,  H01L21/331 ,  H01L21/8249 ,  H01L23/485 ,  H01L27/06 ,  H01L29/732 ,  H01L23/48

CPC分类号： H01L23/4855 ,  H01L23/485 ,  H01L2924/0002 ,  Y10S148/01 ,  Y10S148/124 ,  Y10S148/135

摘要： A bipolar device having a level difference between the contact area level of a base electrode and a base region in a silicon substrate, and the contact area level of an emitter electrode and an emitter region in the silicon substrate in the range of 0.03 .mu.m to 0.1 .mu.m by removing undesirable impurities from the emitter region and a predetermined horizontal distance between a sidewall and a device isolation film does not generate dislocation and show good electric characteristics.

摘要翻译： 具有硅基板中的基极的接触面积电平与基极区域之间的电平差的硅双极器件，以及硅基板的发射电极和发射极区域的接触面积电平为0.03μm〜 通过从发射极区域去除不需要的杂质并且侧壁和器件隔离膜之间的预定水平距离不产生位错并且显示出良好的电特性，0.1μm。

公开(公告)号：US5354699A

公开(公告)日：1994-10-11

申请号：US964824

申请日：1992-10-22

申请人： Takahide Ikeda ,  Kouichirou Yamada ,  Osamu Saito ,  Masanori Odaka ,  Nobuo Tamba ,  Katsumi Ogiue ,  Atsushi Hiraishi ,  Atsuo Watanabe ,  Mitsuru Hirao ,  Akira Fukami ,  Masayuki Ohayashi ,  Tadashi Kuramoto

发明人： Takahide Ikeda ,  Kouichirou Yamada ,  Osamu Saito ,  Masanori Odaka ,  Nobuo Tamba ,  Katsumi Ogiue ,  Atsushi Hiraishi ,  Atsuo Watanabe ,  Mitsuru Hirao ,  Akira Fukami ,  Masayuki Ohayashi ,  Tadashi Kuramoto

IPC分类号： H01L21/28 ,  H01L21/285 ,  H01L21/8249 ,  H01L27/06 ,  H01L21/265

CPC分类号： H01L21/28026 ,  H01L21/28525 ,  H01L21/8249 ,  H01L27/0623 ,  Y10S148/009

摘要： Disclosed is a bipolar-CMOS LSI manufactured by a simplified process and realizing a higher density of integration as well as a higher operating speed, in which a base lead-out electrode of a bipolar transistor and respective gate electrodes of a p-channel MISFET and an n-channel MISFET of CMOS transistors are made of an identical conductor film, and the conductor film of the gate electrode of the p-channel MISFET is of p-type, while that of the gate electrode of the n-channel MISFET is of n-type.

摘要翻译： 公开了通过简化的工艺制造的双极CMOS LSI，并实现更高的集成密度以及更高的工作速度，其中双极晶体管的基极引出电极和p沟道MISFET的各自的栅电极和 CMOS晶体管的n沟道MISFET由相同的导体膜制成，并且p沟道MISFET的栅电极的导体膜为p型，而n沟道MISFET的栅电极的导体膜为 n型。

公开(公告)号：US5049967A

公开(公告)日：1991-09-17

申请号：US631907

申请日：1990-12-21

申请人： Atsuo Watanabe ,  Takahide Ikeda ,  Kiyoshi Tsukuda ,  Mitsuru Hirao ,  Touji Mukai ,  Tatsuya Kamei

发明人： Atsuo Watanabe ,  Takahide Ikeda ,  Kiyoshi Tsukuda ,  Mitsuru Hirao ,  Touji Mukai ,  Tatsuya Kamei

IPC分类号： H01L27/08 ,  H01L21/8249 ,  H01L27/06 ,  H01L27/118 ,  H01L29/68 ,  H01L29/78

CPC分类号： H01L27/11896 ,  H01L21/8249 ,  H01L27/0623

摘要： An improved arrangement is provided for forming a bipolar transistor on a substrate with CMOS elements. All of the transistors (i.e., the bipolar, P-MOS and N-MOS) are formed in regions having gradually decreasing impurity concentrations from a surface toward the substrate. In addition, a buried layer is provided under each of the regions of decreasing impurity concentration in which the transistors are formed. These buried layers have a significantly higher impurity concentration than the portion of the region of decreasing impurity concentration which they are respectively adjacent to. Using this arrangement, punch-through is prevented and excellent electrical operating characteristics are provided for both the bipolar transistors and the CMOS elements.

公开(公告)号：US20050101097A1

公开(公告)日：2005-05-12

申请号：US11000092

申请日：2004-12-01

申请人： Hiromi Shimamoto ,  Takashi Uchino ,  Takeo Shiba ,  Kazuhiro Ohnishi ,  Yoichi Tamaki ,  Takashi Kobayashi ,  Toshiyuki Kikuchi ,  Takahide Ikeda

发明人： Hiromi Shimamoto ,  Takashi Uchino ,  Takeo Shiba ,  Kazuhiro Ohnishi ,  Yoichi Tamaki ,  Takashi Kobayashi ,  Toshiyuki Kikuchi ,  Takahide Ikeda

IPC分类号： H01C7/06 ,  H01L21/02 ,  H01L21/822 ,  H01L27/04 ,  H01L27/06 ,  H01L21/20 ,  H01L21/8222

CPC分类号： H01L27/0652 ,  H01L27/0688 ,  H01L28/20

摘要： The present invention provides a polycrystalline silicon conducting structure (e.g., a resistor) whose resistance value is controlled, and can be less variable and less dependent on temperature with respect to any resistant value, and a process of producing the same. Use is made of at least a two-layer structure including a first polycrystalline silicon layer of large crystal grain size and a second polycrystalline silicon layer of small crystal grain size, and the first polycrystalline silicon layer has a positive temperature dependence of resistance while the second polycrystalline silicon layer has a negative temperature dependence of resistance, or vice versa. Moreover, the polycrystalline silicon layer of large grain size can be formed by high dose ion implantation and annealing, or by depositing the layers by chemical vapor deposition at different temperatures so as to form large-grain and small-grain layers.

摘要翻译： 本发明提供了一种其电阻值被控制的多晶硅导电结构（例如电阻器），并且可以相对于任何电阻值而言可以变化较小并且对温度的依赖性较小，及其制造方法。 使用至少包括具有大晶粒尺寸的第一多晶硅层和小晶粒尺寸的第二多晶硅层的两层结构，并且第一多晶硅层具有正的温度对电阻的依赖性，而第二多晶硅层的第二 多晶硅层具有负电阻的温度依赖性，反之亦然。 此外，可以通过高剂量离子注入和退火，或者通过在不同温度下的化学气相沉积来沉积这些层，形成大晶粒和小晶粒层，可以形成大晶粒尺寸的多晶硅层。

公开(公告)号：US6133094A

公开(公告)日：2000-10-17

申请号：US123405

申请日：1998-07-28

申请人： Hiromi Shimamoto ,  Takashi Uchino ,  Takeo Shiba ,  Kazuhiro Ohnishi ,  Yoichi Tamaki ,  Takashi Kobayashi ,  Toshiyuki Kikuchi ,  Takahide Ikeda

发明人： Hiromi Shimamoto ,  Takashi Uchino ,  Takeo Shiba ,  Kazuhiro Ohnishi ,  Yoichi Tamaki ,  Takashi Kobayashi ,  Toshiyuki Kikuchi ,  Takahide Ikeda

IPC分类号： H01C7/06 ,  H01L21/02 ,  H01L21/822 ,  H01L27/04 ,  H01L27/06 ,  H01L21/336

CPC分类号： H01L27/0652 ,  H01L27/0688 ,  H01L28/20

摘要： The present invention provides a polycrystalline silicon conducting structure (e.g., a resistor) whose resistance value is controlled, and can be less variable and less dependent on temperature with respect to any resistant value, and a process of producing the same. Use is made of at least a two-layer structure including a first polycrystalline silicon layer of large crystal grain size and a second polycrystalline silicon layer of small crystal grain size, and the first polycrystalline silicon layer has a positive temperature dependence of resistance while the second polycrystalline layer has a negative temperature dependence of resistance, or vice versa. Moreover, the polycrystalline silicon layer of large grain size can be formed by high dose ion implantation and annealing, or by depositing the layers by chemical vapor deposition at different temperatures so as to form large-grain and small-grain layers.

摘要翻译： 本发明提供了一种其电阻值被控制的多晶硅导电结构（例如电阻器），并且可以相对于任何电阻值而言可以变化较小并且对温度的依赖性较小，及其制造方法。 使用至少包括具有大晶粒尺寸的第一多晶硅层和小晶粒尺寸的第二多晶硅层的两层结构，并且第一多晶硅层具有正的温度对电阻的依赖性，而第二多晶硅层的第二 多晶层具有负电阻的温度依赖性，反之亦然。 此外，可以通过高剂量离子注入和退火，或者通过在不同温度下的化学气相沉积来沉积这些层，形成大晶粒和小晶粒层，可以形成大晶粒尺寸的多晶硅层。

公开(公告)号：US5512497A

公开(公告)日：1996-04-30

申请号：US272312

申请日：1994-07-08

申请人： Takahide Ikeda ,  Kouichirou Yamada ,  Osamu Saito ,  Masanori Odaka ,  Nobuo Tamba ,  Katsumi Ogiue ,  Atsushi Hiraishi ,  Atsuo Watanabe ,  Mitsuru Hirao ,  Akira Fukami ,  Masayuki Ohayashi ,  Tadashi Kuramoto

发明人： Takahide Ikeda ,  Kouichirou Yamada ,  Osamu Saito ,  Masanori Odaka ,  Nobuo Tamba ,  Katsumi Ogiue ,  Atsushi Hiraishi ,  Atsuo Watanabe ,  Mitsuru Hirao ,  Akira Fukami ,  Masayuki Ohayashi ,  Tadashi Kuramoto

IPC分类号： H01L21/28 ,  H01L21/285 ,  H01L21/8249 ,  H01L27/06 ,  H01L21/265 ,  H01L21/8238

CPC分类号： H01L21/28026 ,  H01L21/28525 ,  H01L21/8249 ,  H01L27/0623 ,  Y10S148/009

摘要： Disclosed is a bipolar-CMOS LSI manufactured by a simplified process and realizing a higher density of integration as well as a higher operating speed, in which a base lead-out electrode of a bipolar transistor and respective gate electrodes of a p-channel MISFET and an n-channel MISFET of CMOS transistors are made of an identical conductor film, and the conductor film of the gate electrode of the p-channel MISFET is of p-type, while that of the gate electrode of the n-channel MISFET is of n-type.

摘要翻译： 公开了通过简化的工艺制造的双极CMOS LSI，并实现更高的集成密度以及更高的工作速度，其中双极晶体管的基极引出电极和p沟道MISFET的各自的栅电极和 CMOS晶体管的n沟道MISFET由相同的导体膜制成，并且p沟道MISFET的栅电极的导体膜为p型，而n沟道MISFET的栅电极的导体膜为 n型。

公开(公告)号：US5508549A

公开(公告)日：1996-04-16

申请号：US735948

申请日：1991-07-25

申请人： Atsuo Watanabe ,  Takahide Ikeda ,  Kiyoshi Tsukuda ,  Mitsuru Hirao ,  Touji Mukai ,  Tatsuya Kamei

发明人： Atsuo Watanabe ,  Takahide Ikeda ,  Kiyoshi Tsukuda ,  Mitsuru Hirao ,  Touji Mukai ,  Tatsuya Kamei

IPC分类号： H01L27/08 ,  H01L21/8249 ,  H01L27/06 ,  H01L27/118 ,  H01L29/68 ,  H01L29/78 ,  H01L27/02

CPC分类号： H01L27/11896 ,  H01L21/8249 ,  H01L27/0623

摘要： An improved arrangement is provided for forming a bipolar transistor on a substrate with CMOS elements. All of the transistors (i.e., the bipolar, P-MOS and N-MOS) are formed in regions having gradually decreasing impurity concentrations from the surface toward the substrate. In addition, a buried layer is provided under each of the regions of decreasing impurity concentration in which the transistors are formed. These buried layers have a significantly higher impurity concentration than the portion of the region of decreasing impurity concentration which they are respectively adjacent to. Using this arrangement, punch-through is prevented and excellent electrical operating characteristics are provided for both the bipolar transistors and the CMOS elements.

公开(公告)号：US4984200A

公开(公告)日：1991-01-08

申请号：US271309

申请日：1988-11-15

申请人： Ryuichi Saitoo ,  Osamu Saitoo ,  Takahide Ikeda ,  Mitsuru Hirao ,  Atsushi Hiraishi

发明人： Ryuichi Saitoo ,  Osamu Saitoo ,  Takahide Ikeda ,  Mitsuru Hirao ,  Atsushi Hiraishi

IPC分类号： G11C11/412 ,  H01L27/11

CPC分类号： G11C11/412 ,  H01L27/1112 ,  Y10S257/904 ,  Y10S257/906

摘要： Herein disclosed is a semiconductor integrated circuit device comprising a SRAM which is composed of a memory cell having its high resistance load element and power source voltage line connected with the information storage node of a flip-flop circuit through a conductive layer. At the same fabrication step as that of forming the plate electrode layer of a capacity element over the conductive layer formed on the portion of the information storage node through a dielectric film, an electric field shielding film for shielding the field effect of a data line is formed over the high resistance load element through an inter-layer insulation film.

摘要翻译： 这里公开了一种包括SRAM的半导体集成电路器件，SRAM由具有高电阻负载元件的存储单元和通过导电层与触发器电路的信息存储节点连接的电源电压线组成。 在与通过电介质膜形成在信息存储节的部分上的导电层上形成电容元件的平板电极层相同的制造步骤中，用于屏蔽数据线的场效应的电场屏蔽膜是 通过层间绝缘膜形成在高电阻负载元件上。