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公开(公告)号：US09039359B2
公开(公告)日：2015-05-26
申请号：US13336881
申请日：2011-12-23
Applicant: Lee Ervin
Inventor： Lee Ervin
CPC classification number: F01D1/18 , B81B5/00 , B81B2201/03 , B81B2201/034 , B81B2203/06 , F01D25/005 , F01D25/14 , F03B17/00 , Y02E10/20 , Y02E10/28
Abstract: A device for converting the kinetic energy of molecules into useful work includes an actuator configured to move within a fluid or gas due to collisions with the molecules of the fluid or gas. The actuator has dimensions that subject it to the Brownian motion of the surrounding molecules. The actuator utilizes objects having multiple surfaces where the different surfaces result in differing coefficients of restitution. The Brownian motion of surrounding molecules produce molecular impacts with the surfaces. Each surface then experiences relative differences in transferred energy from the kinetic collisions. The sum effect of the collisions produces net velocity in a desired direction. The controlled motion can be utilized in a variety of manners to perform work, such as generating electricity or transporting materials.
Abstract translation: 用于将分子的动能转化为有用功的装置包括致动器，其构造成由于与流体或气体的分子碰撞而在流体或气体内移动。 致动器具有使其受到周围分子的布朗运动的尺寸。 致动器利用具有多个表面的物体，其中不同的表面导致不同的恢复系数。 周围分子的布朗运动与表面产生分子冲击。 每个表面然后经历来自动力学碰撞的转移能量的相对差异。 碰撞的总和效应产生所需方向的净速度。 受控运动可以以各种方式用于执行工作，例如发电或运输材料。
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公开(公告)号：US20150008788A1
公开(公告)日：2015-01-08
申请号：US14185160
申请日：2014-02-20
Inventor： Mourad El-Gamal , Frederic Nabki , Paul-Vahe Cicek
CPC classification number: B81C1/00666 , B81B3/0021 , B81B7/008 , B81B2201/01 , B81B2201/0235 , B81B2201/0271 , B81B2201/03 , B81B2207/015 , B81B2207/03 , B81C1/00063 , B81C1/00246 , B81C1/00396 , B81C1/00587 , B81C2201/014 , B81C2201/0169 , B81C2201/0174 , B81C2203/0721 , B81C2203/0735
Abstract: A method of providing microelectromechanical structures (MEMS) that are compatible with silicon CMOS electronics is provided. The method providing for processes and manufacturing sequences limiting the maximum exposure of an integrated circuit upon which the MEMS is manufactured to below 350° C., and potentially to below 250° C., thereby allowing direct manufacturing of the MEMS devices onto electronics, such as Si CMOS circuits. The method further providing for the provisioning of MEMS devices with multiple non-conductive structural layers such as silicon carbide separated with small lateral gaps. Such silicon carbide structures offering enhanced material properties, increased environmental and chemical resilience whilst also allowing novel designs to be implemented taking advantage of the non-conductive material of the structural layer. The use of silicon carbide being beneficial within the formation of MEMS elements such as motors, gears, rotors, translation drives, etc where increased hardness reduces wear of such elements during operation.
Abstract translation: 提供了一种提供与硅CMOS电子器件兼容的微机电结构（MEMS）的方法。 该方法提供了将MEMS制造的集成电路的最大曝光限制在低于350℃并可能低于250℃的工艺和制造顺序，从而允许将MEMS器件直接制造到电子器件上，例如 作为Si CMOS电路。 该方法进一步提供具有多个非导电结构层的MEMS器件，例如用小的侧向间隙分离的碳化硅。 这种碳化硅结构提供增强的材料性能，增加环境和化学弹性，同时还允许利用结构层的非导电材料来实现新颖的设计。 在形成MEMS元件（例如马达，齿轮，转子，平移驱动器等）中使用碳化硅是有益的，其中增加的硬度降低了操作期间这些元件的磨损。
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13.发明授权公开(公告)号：US08887550B2
公开(公告)日：2014-11-18
申请号：US13345132
申请日：2012-01-06
Applicant: Ryan Supino , Eugen Cabuz , Burgess R. Johnson , Robert D. Horning
Inventor： Ryan Supino , Eugen Cabuz , Burgess R. Johnson , Robert D. Horning
CPC classification number: B81C1/00134 , B81B2201/03 , B81C2203/03 , G01D5/34 , G01P21/00 , Y10T29/49002
Abstract: Systems and methods for two degree of freedom dithering for micro-electro-mechanical system (MEMS) sensor calibration are provided. In one embodiment, a method for a device comprises forming a MEMS sensor layer, the MEMS sensor layer comprising a MEMS sensor and an in-plane rotator to rotate the MEMS sensor in the plane of the MEMS sensor layer. Further, the method comprises forming a first and second rotor layer and bonding the first rotor layer to a top surface and the second rotor layer to the bottom surface of the MEMS sensor layer, such that a first and second rotor portion of the first and second rotor layers connect to the MEMS sensor. Also, the method comprises separating the first and second rotor portions from the first and second rotor layers, wherein the first and second rotor portions and the MEMS sensor rotate about an in-plane axis of the MEMS sensor layer.
Abstract translation: 提供了用于微机电系统（MEMS）传感器校准的两自由度抖动的系统和方法。 在一个实施例中，用于器件的方法包括形成MEMS传感器层，所述MEMS传感器层包括MEMS传感器和面内旋转器以在MEMS传感器层的平面内旋转MEMS传感器。 此外，该方法包括形成第一转子层和第二转子层，并将第一转子层结合到顶表面，将第二转子层结合到MEMS传感器层的底表面，使得第一和第二转子部分的第一和第二转子部分 转子层连接到MEMS传感器。 此外，该方法包括从第一和第二转子层分离第一和第二转子部分，其中第一和第二转子部分和MEMS传感器围绕MEMS传感器层的面内轴线旋转。
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公开(公告)号：US08847143B2
公开(公告)日：2014-09-30
申请号：US13307432
申请日：2011-11-30
Applicant: Eugen Cabuz , Robert D. Horning , Ryan Supino , Burgess R. Johnson
Inventor： Eugen Cabuz , Robert D. Horning , Ryan Supino , Burgess R. Johnson
IPC: G01D5/34
CPC classification number: B81C1/00134 , B81B2201/03 , B81C2203/03 , G01D5/34 , G01P21/00 , Y10T29/49002
Abstract: Systems and methods for an encoder and control scheme are provided. In one embodiment, a micro-electromechanical system (MEMS) device comprises: a stator having a first marker and a second marker arranged on a surface of the stator to form a sensing pattern; a sweeping element that dithers in a plane parallel to the surface of the stator along a sweep path that crosses the first marker and a second marker; an overlap sense circuit operable to measure an area overlap between the sweeping element and the sensing pattern, wherein the overlap sense circuit generates a pulse train signal output that varies as a function of the area overlap.
Abstract translation: 提供了编码器和控制方案的系统和方法。 在一个实施例中，微机电系统（MEMS）装置包括：定子，其具有布置在定子的表面上的第一标记和第二标记，以形成感测图案; 扫掠元件，其沿着与穿过所述第一标记和第二标记的扫掠路径平行于所述定子的表面的平面中抖动; 重叠检测电路，其可操作以测量扫描元件和感测图案之间的区域重叠，其中重叠检测电路产生根据区域重叠而变化的脉冲串信号输出。
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公开(公告)号：US20120272730A1
公开(公告)日：2012-11-01
申请号：US13307432
申请日：2011-11-30
Applicant: Eugen Cabuz , Robert D. Horning , Ryan Supino , Burgess R. Johnson
Inventor： Eugen Cabuz , Robert D. Horning , Ryan Supino , Burgess R. Johnson
CPC classification number: B81C1/00134 , B81B2201/03 , B81C2203/03 , G01D5/34 , G01P21/00 , Y10T29/49002
Abstract: Systems and methods for an encoder and control scheme are provided. In one embodiment, a micro-electromechanical system (MEMS) device comprises: a stator having a first marker and a second marker arranged on a surface of the stator to form a sensing pattern; a sweeping element that dithers in a plane parallel to the surface of the stator along a sweep path that crosses the first marker and a second marker; an overlap sense circuit operable to measure an area overlap between the sweeping element and the sensing pattern, wherein the overlap sense circuit generates a pulse train signal output that varies as a function of the area overlap.
Abstract translation: 提供了编码器和控制方案的系统和方法。 在一个实施例中，微机电系统（MEMS）装置包括：定子，其具有布置在定子的表面上的第一标记和第二标记，以形成感测图案; 扫掠元件，其沿着与穿过所述第一标记和第二标记的扫掠路径平行于所述定子的表面的平面中抖动; 重叠检测电路，其可操作以测量扫描元件和感测图案之间的区域重叠，其中重叠检测电路产生根据区域重叠而变化的脉冲串信号输出。
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Patent Agency Ranking
公开(公告)号：US20120169068A1
公开(公告)日：2012-07-05
申请号：US13336881
申请日：2011-12-23
Applicant: Lee Ervin
Inventor： Lee Ervin
CPC classification number: F01D1/18 , B81B5/00 , B81B2201/03 , B81B2201/034 , B81B2203/06 , F01D25/005 , F01D25/14 , F03B17/00 , Y02E10/20 , Y02E10/28
Abstract: A device for converting the kinetic energy of molecules into useful work includes an actuator configured to move within a fluid or gas due to collisions with the molecules of the fluid or gas. The actuator has dimensions that subject it to the Brownian motion of the surrounding molecules. The actuator utilizes objects having multiple surfaces where the different surfaces result in differing coefficients of restitution. The Brownian motion of surrounding molecules produce molecular impacts with the surfaces. Each surface then experiences relative differences in transferred energy from the kinetic collisions. The sum effect of the collisions produces net velocity in a desired direction. The controlled motion can be utilized in a variety of manners to perform work, such as generating electricity or transporting materials.
Abstract translation: 用于将分子的动能转化为有用功的装置包括致动器，其构造成由于与流体或气体的分子碰撞而在流体或气体内移动。 致动器具有使其受到周围分子的布朗运动的尺寸。 致动器利用具有多个表面的物体，其中不同的表面导致不同的恢复系数。 周围分子的布朗运动与表面产生分子冲击。 每个表面然后经历来自动力学碰撞的转移能量的相对差异。 碰撞的总和效应产生所需方向的净速度。 受控运动可以以各种方式用于执行工作，例如发电或运输材料。
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公开(公告)号：US20240327201A1
公开(公告)日：2024-10-03
申请号：US18192576
申请日：2023-03-29
Applicant: Intel Corporation
Inventor： Numair Ahmed , Mohammad Mamunur Rahman , Suddhasattwa Nad , Sashi Kandanur , Darko Grujicic , Benjamin Duong , Srinivas Pietambaram , Tarek Ibrahim , Whitney Bryks
CPC classification number: B81B7/0048 , B81C1/00325 , G02B6/12004 , B81B2201/0228 , B81B2201/0264 , B81B2201/0271 , B81B2201/0278 , B81B2201/03 , B81B2201/045 , B81B2207/07 , B81B2207/096 , B81B2207/097
Abstract: MEMS dies embedded in glass cores of integrated circuit (IC) package substrates are disclosed. An example integrated circuit (IC) package includes a package substrate including a glass core, the example integrated circuit (IC) package also includes a micro electromechanical system (MEMS) die positioned in a cavity of the glass core.
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公开(公告)号：US11744158B2
公开(公告)日：2023-08-29
申请号：US17016941
申请日：2020-09-10
Applicant: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V. , Christian-Albrechts-Universitaet zu Kiel
Inventor： Bernhard Wagner , Fabian Lofink , Dirk Kaden , Simon Fichtner
IPC: H01L41/187 , H10N30/853 , B81B7/02 , H10N30/045 , H10N30/50 , H10N30/00 , H10N30/20
CPC classification number: H10N30/853 , B81B7/02 , H10N30/045 , H10N30/1051 , H10N30/2042 , H10N30/50 , B81B2201/03
Abstract: A ferroelectric material includes a mixed crystal having AlN and at least one nitride of a transition metal. The proportion of the nitride of the transition metal is selected such that a direction of an initial or spontaneous polarity of the ferroelectric material is switchable by applying a switchover voltage. The switchover voltage is below a breakdown voltage of the ferroelectric material.
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公开(公告)号：US11693295B2
公开(公告)日：2023-07-04
申请号：US16850867
申请日：2020-04-16
Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Inventor： Ting-Jung Chen , Shih-Wei Lin
CPC classification number: G03B13/36 , G02B7/09 , H04N23/67 , H10N30/03 , H10N30/07 , B81B2201/03 , G03B2205/0053 , H10N30/01
Abstract: In accordance with some embodiments, a method of forming an auto-focusing device is provided. The method includes forming a cantilever beam member. The cantilever beam member has a ring shape. The method further includes forming a piezoelectric member over the cantilever beam member. The method also includes forming a membrane over the cantilever beam member. The membrane has a first region and a second region. The first region has a planar surface, and the second region is located between the first region and an inner edge of the cantilever beam member and has a plurality of corrugation structures. In addition, the method includes applying a liquid optical medium over the membrane and sealing the liquid optical medium with a protection layer.
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公开(公告)号：US20180164241A1
公开(公告)日：2018-06-14
申请号：US15567632
申请日：2016-04-11
Applicant: Dan Haronian
Inventor： Dan Haronian
IPC: G01N27/26 , G01N31/22 , H01L41/113 , H02N2/18 , B81B3/00
CPC classification number: G01N27/26 , B81B3/0021 , B81B3/0064 , B81B7/008 , B81B2201/025 , B81B2201/03 , B81B2203/0136 , G01N27/4145 , G01N31/22 , H01L41/1136 , H02N1/08 , H02N2/18
Abstract: The present invention discloses, inter alia, a micro-electromechanical device (MEMD) for sensing and for harvesting electrical energy responsive to being subjected to mechanical forces, comprising at least one first conductive element fixedly mounted on a first support, wherein the at least one first conductive element is chargeable with electrons; and at least one second conductive element inertia-mounted on a second support such that the first and second supports are electrically isolated from each other.
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