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    Semiconductor acceleration sensor
    201.
    发明授权
    Semiconductor acceleration sensor 失效
    半导体加速度传感器

    公开(公告)号：US5844286A

    公开(公告)日：1998-12-01

    申请号：US773257

    申请日：1996-12-23

    Applicant: Yuji Hase

    Inventor： Yuji Hase

    IPC: B81C1/00 ,  G01P15/08 ,  G01P15/12 ,  G01P15/125 ,  G01P21/00 ,  H01L29/84 ,  H01L29/82

    CPC classification number: B81C1/00246 ,  G01P15/0802 ,  G01P15/12 ,  G01P15/125 ,  G01P21/00 ,  B81B2201/0235 ,  B81C2203/0136 ,  B81C2203/0145 ,  B81C2203/0714 ,  B81C2203/0735 ,  G01P2015/0828 ,  H01L2224/48091 ,  H01L2224/48247 ,  H01L2924/181

    Abstract: A semiconductor acceleration sensor of a single integral type has a semiconductor substrate, a first nitride layer, a first poly-silicon layer, a second nitride layer, a second poly-silicon layer, a third nitride layer and a third poly-silicon layer which are fabricated in order. A movable section is formed in a part of the second poly-silicon layer placed in a cavity enclosed and sealed by the first nitride layer, the first poly-silicon layer, the second nitride layer, the second poly-silicon layer, the third nitride layer and the third poly-silicon layer. A fabrication method of the semiconductor acceleration sensor of a single integral type is also disclosed.

    Abstract translation: 单一整体式的半导体加速度传感器具有半导体衬底，第一氮化物层，第一多晶硅层，第二氮化物层，第二多晶硅层，第三氮化物层和第三多晶硅层， 是按顺序制造的。 第一多晶硅层，第二氮化物层，第二多晶硅层，第三氮化物层，第一多晶硅层，第二氮化硅层，第二多晶硅层，第二氮化硅层， 层和第三多晶硅层。 还公开了一种整体型半导体加速度传感器的制造方法。

    Micromechanical sensor unit for detecting acceleration
    202.
    发明授权
    Micromechanical sensor unit for detecting acceleration 失效
    用于检测加速度的微机械传感器单元

    公开(公告)号：US5821419A

    公开(公告)日：1998-10-13

    申请号：US721564

    申请日：1996-09-26

    Applicant: Gerhard Mader ,  Jens Noetzel ,  Steffen Schulze

    Inventor： Gerhard Mader ,  Jens Noetzel ,  Steffen Schulze

    IPC: G01P15/00 ,  G01P15/08 ,  G01P15/135 ,  G01P21/00 ,  G01P1/02

    CPC classification number: G01P21/00 ,  G01P15/0802 ,  G01P15/135 ,  G01P2015/0817 ,  G01P2015/0828

    Abstract: A micromechanical sensor unit for detecting acceleration has pendulums each with a spiral spring and a seismic mass. Supports each being connected to a respective one of the pendulums, and position sensors, each two of the position sensors is associated with a respective one of the pendulums. Each position sensor and an associated pendulum form a switch with a defined triggering threshold and at least two switches respond to the same direction of acceleration. At least one switch is a safing sensor with a separate tap of a sensor signal.

    Abstract translation: 用于检测加速度的微机械传感器单元具有每个具有螺旋弹簧和地震块的摆锤。 支撑每个连接到相应的一个摆锤和位置传感器，每个位置传感器中的每一个与相应的一个摆锤相关联。 每个位置传感器和相关联的摆形成具有定义的触发阈值的开关，并且至少两个开关响应于相同的加速方向。 至少有一个开关是具有传感器信号的独立分接头的安全传感器。

    Semiconductor sensor including protective resin package
    203.
    发明授权
    Semiconductor sensor including protective resin package 失效
    半导体传感器包括保护树脂包装

    公开(公告)号：US5783748A

    公开(公告)日：1998-07-21

    申请号：US582055

    申请日：1996-01-02

    Applicant: Hiroshi Otani

    Inventor： Hiroshi Otani

    IPC: G01L9/00 ,  G01P1/02 ,  G01P15/08

    CPC classification number: G01L19/142 ,  G01L19/0084 ,  G01L19/148 ,  G01P1/02 ,  G01P1/023 ,  G01P15/08 ,  G01P2015/0828 ,  H01L2224/48091 ,  H01L2224/48227

    Abstract: A semiconductor sensor provided with a planar circuit board and a resin package for protecting the circuit board. Further, a sensing element is mounted on the circuit board and outer electrodes are attached to a side edge portion of the circuit board. Moreover, includes the resin package, a groove, in which the circuit board is disposed. Thus the semiconductor sensor can be easily fabricated. Consequently, the manufacturing cost of a product or sensor can be reduced.

    Abstract translation: 一种具有平面电路板和用于保护电路板的树脂封装的半导体传感器。 此外，感测元件安装在电路板上，外部电极附着到电路板的侧边缘部分。 此外，还包括树脂封装，设置电路板的槽。 因此，可以容易地制造半导体传感器。 因此，可以降低产品或传感器的制造成本。

    Surface type acceleration sensor
    206.
    发明授权
    Surface type acceleration sensor 失效
    表面加速度传感器

    公开(公告)号：US5659138A

    公开(公告)日：1997-08-19

    申请号：US538697

    申请日：1995-10-03

    Applicant: Hitoshi Iwata ,  Makoto Murate

    Inventor： Hitoshi Iwata ,  Makoto Murate

    IPC: B81B3/00 ,  G01P15/08 ,  G01P15/12 ,  H01L29/84

    CPC classification number: B81C1/00047 ,  G01P15/0802 ,  G01P15/123 ,  B81B2201/0235 ,  B81B2203/0118 ,  B81C2201/0115 ,  G01P2015/0828 ,  Y10S438/96

    Abstract: A surface type acceleration sensor includes a p-type single crystal silicon base plate, a cantilever functioning as a cantilever structure portion, and a plurality of strain gauges. The cantilever is disposed in a recess portion formed on the front face of the p-type single crystal silicon base plate so that the cantilever can be displaced in the upward and downward direction. The cantilever includes an epitaxial growth layer principally made of n-type single crystal silicon. The strain gauge is made of p-type silicon and formed on an upper face of the base end portion of the cantilever.

    Abstract translation: 表面型加速度传感器包括p型单晶硅基板，用作悬臂结构部分的悬臂和多个应变计。 悬臂设置在形成在p型单晶硅基板的正面上的凹部中，使得悬臂可以在向上和向下的方向上移位。 悬臂包括主要由n型单晶硅制成的外延生长层。 应变片由p型硅制成，并形成在悬臂的基端部的上表面上。

    Acceleration sensing device
    207.
    发明授权
    Acceleration sensing device 失效
    加速度传感装置

    公开(公告)号：US5614673A

    公开(公告)日：1997-03-25

    申请号：US552073

    申请日：1995-11-02

    Applicant: Masahiro Yamamoto

    Inventor： Masahiro Yamamoto

    IPC: G01P15/08 ,  G01P15/12 ,  G01P21/00

    CPC classification number: G01P21/00 ,  G01P15/122 ,  G01P2015/0828

    Abstract: An acceleration sensing device having a cantilevered acceleration sensing beam mounted at one of its ends on a base mounted on a package substrate. Strain caused by the movement of a weight disposed at a free end of the acceleration sensing beam is detected with a bridge circuit. When the base separates from the package substrate, an abnormal state sensing electrode of the weight comes into electrical contact with the package substrate, which is a ground terminal, so that an output from a differential amplifier of the bridge circuit is fixed to a low (or high) level, warning of the abnormal state.

    Abstract translation: 一种加速度感测装置，其具有安装在安装在封装基板上的基座的一端上的悬臂加速度感测梁。 通过桥接电路检测由设置在加速度感测波束的自由端的重物的移动引起的应变。 当基板与封装基板分离时，重物的异常状态感测电极与作为接地端子的封装基板电接触，使得桥式电路的差分放大器的输出固定为低（ 或高）水平，警告异常状态。

    Method of measuring the amplitude and frequency of an acceleration
    208.
    发明授权
    Method of measuring the amplitude and frequency of an acceleration 失效
    测量加速度的幅度和频率的方法

    公开(公告)号：US5610337A

    公开(公告)日：1997-03-11

    申请号：US401668

    申请日：1995-03-09

    Applicant: William E. Nelson

    Inventor： William E. Nelson

    IPC: G01P15/10 ,  G01C19/56 ,  G01P15/00 ,  G01P15/08 ,  G01P15/135 ,  G01P15/14 ,  G01P15/18 ,  G11C23/00 ,  G01D21/00

    CPC classification number: G01P15/0888 ,  G01P15/0802 ,  G01P15/135 ,  G01P15/18 ,  G01P2015/0828

    Abstract: A digital accelerometer manufactured from arrays 11a-11e of micro-mechanical sensing elements 12. The sensing elements 12 of different arrays 11a-11e are designed for detecting acceleration in a particular rotational or translational direction, such that their response to acceleration in other directions is minimized. Further, the sensing elements 12 have size and proof mass parameters that may be adjusted to vary their frequency response and sensitivity to amplitude of acceleration. Arrays 11a-11e of sensing elements 12 provide detection of a range of frequency levels and amplitudes at each frequency. At an appropriate frequency and amplitude of an applied acceleration, a sensing element 12 moves to contact an electrode 126, producing an electrical signal, which may be stored as a data bit. The sensing elements, when used in combination with memory 15 and processing devices 16, results in an intelligent accelerometer whose fabrication techniques are compatible with those used for the digital processing devices.

    Abstract translation: 由微机械感测元件12的阵列11a-11e制造的数字加速度计。不同阵列11a-11e的感测元件12被设计用于检测特定旋转或平移方向上的加速度，使得它们对其他方向上的加速度的响应是 最小化。 此外，感测元件12具有尺寸和验证质量参数，其可以被调节以改变其频率响应和对加速度幅度的灵敏度。 感测元件12的阵列11a-11e提供在每个频率处的频率水平和振幅范围的检测。 在施加的加速度的适当频率和幅度下，感测元件12移动以接触电极126，产生可以作为数据位存储的电信号。 感测元件当与存储器15和处理装置16组合使用时，导致智能加速度计，其制造技术与用于数字处理装置的制造技术相兼容。

    Piezoresistive force rebalance accelerometer
    209.
    发明授权
    Piezoresistive force rebalance accelerometer 失效
    压阻力平衡加速度计

    公开(公告)号：US5596144A

    公开(公告)日：1997-01-21

    申请号：US511215

    申请日：1995-08-04

    Applicant: Gregory D. Swanson

    Inventor： Gregory D. Swanson

    IPC: G01P15/12 ,  G01P15/13 ,  G01P15/125

    CPC classification number: G01P15/123 ,  G01P15/131 ,  G01P2015/0828

    Abstract: A motion sensor is provided for sensing motion or acceleration of a body, such as an accelerometer for use in an on-board automotive safety control system or navigational system. The motion sensor is a piezoresistive motion sensor that operates in a closed loop force rebalance mode. As such, the motion sensor may be considered a hybrid of piezoresistive sensors and capacitive force rebalance sensors. The sensor achieves this novel combination through a mechanically-biased proof mass that enables-the use of a single electrode for maintaining the proof mass in a null position during the operation of the sensor.

    Abstract translation: 提供了用于感测身体的运动或加速度的运动传感器，例如用于车载汽车安全控制系统或导航系统的加速度计。 运动传感器是在闭环力重新平衡模式下运行的压阻运动传感器。 因此，运动传感器可以被认为是压阻传感器和电容力重新平衡传感器的混合。 传感器通过机械偏置的质量检测器实现了这种新颖的组合，其能够在传感器的操作期间使用单个电极将检测质量保持在零位置。

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