公开(公告)号：US5356034A

公开(公告)日：1994-10-18

申请号：US8552

申请日：1993-01-22

Applicant: Helmut Schlumberger

Inventor： Helmut Schlumberger

IPC: B05C5/00 ,  B01J4/02 ,  B01L3/02 ,  B01L99/00 ,  G01F11/02 ,  G01N1/00 ,  G01N1/14 ,  G01N1/16 ,  G01N1/18 ,  G01N1/20 ,  G01N35/10 ,  B67D5/08

CPC classification number: G01F11/021 ,  B01J4/02 ,  B01L3/0293 ,  G01F11/02 ,  G01N2035/1041

Abstract: Apparatus for proportioned feeding of an analysis fluid (7) onto a target (5), ejects fluid onto the target in small quantities pulse-wise out of a nozzle (2) through a nozzle outlet opening (3). The apparatus allows the precise proportioning of analysis fluid quanta which are substantially larger than in the case of the "drop on demand" methods commonly used to date for analysis fluids, but are smaller than the minimum doses achievable to date with diluters and dispensers. The apparatus includes a pressure chamber (1) in which the analysis fluid is held under pressure, and a valve unit (11) with a valve opening. A closing element is moved by a positioning element. The valve unit (11) is constructed so that the ejection of the fluid is supported by the movement of the closing element (13) during the closure of the valve opening (23).

Abstract translation: 用于将分析流体（7）成比例地供给到目标（5）上的装置，通过喷嘴出口（3）从喷嘴（2）中以脉冲方式将流体喷射到目标上。 该装置允许分析流体量子的精确配比，其大大比在分析流体通常使用的“按需滴下”方法的情况下更大，但是小于稀释剂和分配器迄今可达到的最小剂量。 该装置包括压力室（1），其中分析流体保持在压力下，以及具有阀开口的阀单元（11）。 闭合元件由定位元件移动。 阀单元（11）被构造成使得在阀开口（23）的关闭期间，通过关闭元件（13）的运动来支撑流体的排出。

公开(公告)号：US5252134A

公开(公告)日：1993-10-12

申请号：US708421

申请日：1991-05-31

Applicant: Craig M. Stauffer

Inventor： Craig M. Stauffer

IPC: B01J4/00 ,  B01J4/02 ,  B01J7/00 ,  C23C16/44 ,  C23C16/448 ,  C23C16/455 ,  F17C7/02 ,  F17C7/04 ,  F17C13/04 ,  G03F7/38 ,  C23C16/00

CPC classification number: B01J4/02 ,  C23C16/4485 ,  F17C13/04 ,  F17C7/02 ,  F17C7/04

Abstract: An integrated module with a heated reservoir to vaporize liquid for semiconductor processes with liquid sources is presented. Shut-off valves and a proportioning pressure valve for controlling the flow of the vapor from the reservoir are mounted on the module for simple conduction heating of the valves. A capacitance manometer also mounted to the module also has its own heating elements. Condensation of the vapor is avoided and consistence performance and reliability is obtained.

Abstract translation: 提出了一种具有加热容器的集成模块，用于使用液体源蒸发用于半导体工艺的液体。 截止阀和用于控制来自储存器的蒸汽流的比例压力阀安装在模块上用于阀的简单传导加热。 还安装在模块上的电容压力计也具有自己的加热元件。 避免蒸气的凝结，获得一致的性能和可靠性。

公开(公告)号：US5095938A

公开(公告)日：1992-03-17

申请号：US633714

申请日：1990-12-21

Applicant: Brevard S. Garrison

Inventor： Brevard S. Garrison

IPC: B01J4/02 ,  B01J19/00 ,  B01L99/00 ,  C40B60/14

CPC classification number: B01J4/02 ,  B01J19/0046 ,  B01L3/0293 ,  B01J2219/00286 ,  B01J2219/00306 ,  B01J2219/00398 ,  C40B60/14 ,  Y10T137/7836 ,  Y10T137/87249

Abstract: An injector for a fluid delivery system is provided to deliver precise volumes of a plurality of fluids in sequence to a treatment reservoir. The injector is in fluid communication with a positive displacement pump which accepts fluid from a fluid source. The injector includes a spring loaded plunger, an end of which contacts a diaphragm adapted to seal an injector inlet from an injector outlet. The end of the plunger is shaped to seat the diaphragm against the injector outlet and to position the diaphragm away from the injector inlet.

Abstract translation: 提供了一种用于流体输送系统的注射器，以将多个流体的精确体积依次递送到治疗储存器。 注射器与容积式泵同流体连通，容积式泵从流体源接收流体。 喷射器包括弹簧加载柱塞，其端部接触适于从喷射器出口密封喷射器入口的隔膜。 柱塞的端部成形为将隔膜固定在喷射器出口上，并将隔膜定位在远离注射器入口的位置。

公开(公告)号：US4941916A

公开(公告)日：1990-07-17

申请号：US171267

申请日：1988-03-21

Applicant: Jean Boutin ,  Pierre Brun ,  Airy-Pierre Lamaze

Inventor： Jean Boutin ,  Pierre Brun ,  Airy-Pierre Lamaze

IPC: C01G25/04 ,  B01D7/00 ,  B01J4/02 ,  C01F5/30 ,  C22B5/04 ,  C22B34/14 ,  F27D11/02

CPC classification number: B01J4/02 ,  B01D7/00 ,  C22B34/14 ,  C22B5/04

Abstract: The invention relates to a process and apparatus for the supply of a Kroll reactor with zirconium tetrachloride vapor, in which zirconium chloride powder is vaporized in a sublimator by heating power and the vapor obtained is passed into the reactor. Part of the heating power applied in the sublimator is supplied to the powder by an internal heating means, and the remainder of the heating power is supplied to the wall of the sublimator by an external heating means. The heating power of the internal heating means is used for the sublimation of the zirconium tetrachloride powder and the heating power of the external means is applied in order to compensate the heat losses of the wall of the sublimator. The apparatus for application of the method includes a means for measuring the wall temperature of the sublimator and a regulator sensitive to the variation of this temperature with respect to a nominal temperature and which is capable of modifying the power applied to the external and internal heating means, with the total power remaining constant for a fixed vapor flow rate.

Abstract translation: 本发明涉及一种用于向Kroll反应器供应四氯化锆蒸汽的方法和装置，其中氯化锆粉末通过加热动力在升华器中蒸发，并且所得的蒸汽进入反应器。 通过内部加热装置将施加在升华器中的加热功率的一部分供给到粉末，其余的加热功率通过外部加热装置供应到升华器的壁。 内部加热装置的加热功率用于四氯化锆粉末的升华，并且施加外部装置的加热功率以补偿升华器的壁的热损失。 用于该方法的装置包括用于测量升华器的壁温的装置和对该温度相对于标称温度的变化敏感的调节器，其能够改变施加到外部和内部加热装置的功率 ，总功率对于固定的蒸汽流速保持恒定。

公开(公告)号：US4916089A

公开(公告)日：1990-04-10

申请号：US240784

申请日：1988-09-02

Applicant: Jaap Van Suchtelen ,  Lodevicus J. Giling ,  Josephus E. M. Hogenkamp

Inventor： Jaap Van Suchtelen ,  Lodevicus J. Giling ,  Josephus E. M. Hogenkamp

IPC: C30B23/08 ,  B01J4/02 ,  B01L99/00 ,  C23C16/44 ,  C23C16/455 ,  C30B25/14 ,  H01L21/203 ,  H01L21/205

CPC classification number: C23C16/45523 ,  B01J4/02 ,  B01L3/0289 ,  C23C16/45561 ,  C30B25/14 ,  Y10S148/006 ,  Y10S148/057 ,  Y10S148/11 ,  Y10S148/169 ,  Y10S438/935

Abstract: In order, in the epitaxial production of semiconductor products and of articles provided with a layer, to be able to make the junction between the layers applied to the substrates atomically sharp, it is important to be able to change the gas mixture, to be introduced into a pulsed reactor or MBE reactor, rapidly, accurately and without losses in respect of quantity and of composition. To this purpose, each of the gases to be introduced into the reactor is conveyed to a separate gas pipette and thereafter the content of the gas pipette is cyclically passed, by means of a pressure differential, into the pulse reactor, with the composition of the mixture being changed per one or more cycles.

公开(公告)号：US4861560A

公开(公告)日：1989-08-29

申请号：US220512

申请日：1988-07-18

Applicant: Masahiko Nakajima

Inventor： Masahiko Nakajima

IPC: B01J4/00 ,  B01J4/02 ,  C01B13/02 ,  C01B21/02

CPC classification number: B01J4/02

Abstract: A liquid supply device comprises a sealed vessel containing a reactive liquid, a guide cylinder disposed to the inside of the sealed vessel, a piston adapted to slide along the inside of the guide cylinder depending on the change of the pressure in the sealed vessel, a spring for urging the piston toward the inside of the sealed vessel, a pressure-generating catalyst adapted to move into and out of the reactive liquid interlocking with the piston for decomposing the reaction liquid to evolve gases upon contact with the reactive liquid, and a delivery apparatus for sending out the reactive liquid out of the vessel due to the increase in the pressure inside the vessel upon evolution of the gas.The reactive liquid evolving gases is supplied continuously without using a pump or like other positive driving apparatus, but due to the pressure of gases evolved from the reaction solution per se, with no noisy mechanical sounds and operational energy.

Abstract translation: 液体供应装置包括容纳反应性液体的密封容器，设置在密封容器内部的引导筒，适于根据密封容器内的压力变化沿导向筒内部滑动的活塞， 用于将活塞推向密封容器的内部的弹簧，适于移动进入和流出与活塞互锁的反应液体的发生催化剂，用于分解反应液体以在与反应性液体接触时放出气体， 由于气体放出时由于容器内的压力增加而将反应性液体从容器中排出的装置。 反应性液体放出气体连续供给，不使用泵或类似的其他正驱动装置，而是由于从反应溶液本身放出的气体的压力，没有噪声的机械声音和操作能量。

公开(公告)号：US4830125A

公开(公告)日：1989-05-16

申请号：US218147

申请日：1988-07-13

Applicant: Takayoshi Aoki ,  Michinobu Kaimori ,  Akira Aikawa ,  Akira Urakami ,  Gen Nishimura ,  Tohru Koide ,  Osamu Ishimaru ,  Masao Takigawa ,  Fumio Shirai

Inventor： Takayoshi Aoki ,  Michinobu Kaimori ,  Akira Aikawa ,  Akira Urakami ,  Gen Nishimura ,  Tohru Koide ,  Osamu Ishimaru ,  Masao Takigawa ,  Fumio Shirai

IPC: B01F13/10 ,  B01F15/02 ,  B01F15/04 ,  B01J4/02 ,  B01J19/00 ,  D06B23/20

CPC classification number: B01F15/0445 ,  B01F13/1055 ,  B01F15/0231 ,  B01F15/0238 ,  B01F15/0254 ,  B01F15/026 ,  B01J19/004 ,  B01J4/02 ,  D06B23/205 ,  B01F2015/0221 ,  B01F2215/005

Abstract: A process and apparatus for automatically weighing and introducing chemicals are intended to automatically weigh the chemicals and introduce the chemicals into a treatment tank; the chemicals are injected into a chemical container and weighted, and then transported to a dissolving tank adjunct to the treatment tank, and then introduced into the dissolving tank. A control means is provided to put under its control the operations of injecting into a chemical container a desired amount of desired chemicals selected from among plural sorts of chemicals and driving a transportments and an introducing means automatically in association with this injecting operation.

公开(公告)号：US4610847A

公开(公告)日：1986-09-09

申请号：US602699

申请日：1984-04-23

Applicant: Leroy E. Hood ,  Michael W. Hunkapiller ,  William J. Dreyer ,  Rodney M. Hewick ,  Anton W. Stark

Inventor： Leroy E. Hood ,  Michael W. Hunkapiller ,  William J. Dreyer ,  Rodney M. Hewick ,  Anton W. Stark

IPC: B01J4/02 ,  B01J19/00 ,  C40B40/10 ,  C40B60/14 ,  G01N33/483 ,  G01N35/00 ,  G01N35/10 ,  B01J19/26 ,  G01N33/68

CPC classification number: G01N35/00 ,  B01J19/0046 ,  B01J4/02 ,  B01J2219/00283 ,  B01J2219/00286 ,  B01J2219/00398 ,  B01J2219/00418 ,  B01J2219/00423 ,  B01J2219/00495 ,  B01J2219/0059 ,  B01J2219/00596 ,  B01J2219/00686 ,  B01J2219/00689 ,  B01J2219/00695 ,  B01J2219/00725 ,  C40B40/10 ,  C40B60/14 ,  G01N35/1079

Abstract: Conversion flask for use is an apparatus for the sequential performance of chemical processes on a sample of chemical material. The flask includes at least three capillary tubes and a large bore tube extending into the interior thereof for the introduction and withdrawal of various fluids. The capillary tubes are constructed to introduce a plurality of fine bubbles into a liquid within the flask to agitate the liquid and accelerate drying, to impinge chemicals on the walls of the flask, and to produce a spray onto the interior walls of the flask in proximity to its upper end to wash down the interior walls of the flask.

Abstract translation: 用于使用的转炉是用于在化学材料样品上顺序执行化学过程的装置。 烧瓶包括至少三个毛细管和延伸到其内部的用于引入和取出各种流体的大孔管。 毛细管被构造成将多个细小气泡引入烧瓶内的液体中以搅拌液体并加速干燥，将化学物质撞击在烧瓶的壁上，并在接近的温度下在烧瓶的内壁上产生喷雾 到其上端以冲洗烧瓶的内壁。

公开(公告)号：US4603114A

公开(公告)日：1986-07-29

申请号：US602516

申请日：1984-04-20

Applicant: Leroy E. Hood ,  Michael W. Hunkapiller ,  William J. Dreyer ,  Rodney M. Hewick ,  Anton W. Stark

Inventor： Leroy E. Hood ,  Michael W. Hunkapiller ,  William J. Dreyer ,  Rodney M. Hewick ,  Anton W. Stark

IPC: B01J4/02 ,  B01J19/00 ,  C40B40/10 ,  C40B60/14 ,  G01N33/483 ,  G01N33/68 ,  G01N35/00 ,  G01N35/10 ,  G01N1/18 ,  G01N33/48

CPC classification number: G01N33/6818 ,  B01J19/0046 ,  B01J4/02 ,  G01N35/00 ,  B01J2219/00283 ,  B01J2219/00286 ,  B01J2219/00398 ,  B01J2219/00418 ,  B01J2219/00423 ,  B01J2219/00495 ,  B01J2219/0059 ,  B01J2219/00596 ,  B01J2219/00686 ,  B01J2219/00689 ,  B01J2219/00695 ,  B01J2219/00725 ,  C40B40/10 ,  C40B60/14 ,  G01N35/1079 ,  Y10T436/25

Abstract: An improved method for the sequential performance of chemical processes on a sample of chemical material wherein the sample is embedded in a solid matrix of fluid permeable material located within a reaction chamber and is sequentially subjected to a plurality of fluids passed through the chamber in a pressurized stream, causing chemical interaction between the sample and the fluids.

Abstract translation: 一种用于在化学材料样品上顺序执行化学过程的改进方法，其中样品被嵌入在位于反应室内的流体可渗透材料的固体基质中，并且依次经受多个流体通过加压室 流，导致样品和流体之间的化学相互作用。

公开(公告)号：US4418183A

公开(公告)日：1983-11-29

申请号：US320360

申请日：1981-11-12

Applicant: Albert C. Chiang

Inventor： Albert C. Chiang

IPC: B01J4/00 ,  B01J4/02 ,  B01J19/18 ,  C08F2/22 ,  C08F2/24

CPC classification number: B01J4/02 ,  B01J19/18 ,  B01J4/001 ,  C08F2/22 ,  B01J2219/00099

Abstract: A process for the preparation of emulsion polymers having a solid content of about 65% to about 80% is disclosed. The process comprises the step of adding a monomeric mixture to a reaction system maintained at a temperature of from about 60.degree. C. to about 90.degree. C., the monomer addition not exceeding an hourly rate of about one-fourth of the total monomer to be added, the mixture comprising monomers having a particle size of from about 10-100 microns, the system having therein an emulsifier and initiator at the time of the monomeric addition.

Abstract translation: 公开了一种制备固体含量为约65％至约80％的乳液聚合物的方法。 该方法包括将单体混合物加入到保持在约60℃至约90℃温度的反应体系中的步骤，单体添加量不超过总单体约1/4的小时，至 该混合物包含粒度为约10-100微米的单体，该体系在单体加成时具有乳化剂和引发剂。