摘要:
An integrated circuit structure comprises a plurality of islands of semiconductor material (16-1 through 16-5) each island being separated from adjacent islands by a groove formed in annular shape around said island to laterally define the dimensions of each such island, an oxide (12, 14) formed over the surface of said grooves (13-1 through 13-6) and said islands and a selected glass (15) deposited on said oxide (14) in the grooves and over the top surface of said device, said glass having the property that it flows at a temperature beneath the temperature at which dopants in the islands of semiconductor material substantially redistribute, said selected glass (15) having a substantially flat top surface thereby to give said structure a substantially flat top surface.
摘要:
A data channel for a digital tester includes a random access local memory containing a main vector sequence, a subroutine vector sequence, and a test vector list. An index register is loaded with the address of the first vector in the list of vectors that is to be inserted as a variable into a vector stream. A sequence instruction selects the index register as the source of a test vector address when a variable vector is to be inserted into the vector stream at a point in a subroutine. The sequence instruction also resets the index register to a state which determines the address of the next variable to be inserted into the test vector pattern.
摘要:
A low temperature insulating glass for use in semiconductor devices comprises a mixture of germanium, silicon, oxygen and phosphorus. In the preferred embodiment, the glass comprises a mixture of about 40% to 55% silicon dioxide (SiO.sub.2), about 55% to 40% of germanium dioxide (GeO.sub.2) and from 1% to about 5% of phosphorus pentoxide (P.sub.2 O.sub.5), by mole percent.
摘要翻译:用于半导体器件的低温绝缘玻璃包括锗,硅,氧和磷的混合物。 在优选的实施方案中,玻璃包含约40%至55%的二氧化硅(SiO 2),约55%至40%的二氧化锗(GeO 2)和1%至约5%的五氧化二磷(P 2 O 5)的混合物, 按摩尔%计。
摘要:
A method for impregnating copper into aluminum interconnect lines on a semiconductor device is disclosed. In a first embodiment, an interconnect pattern is formed on an aluminum layer by etching while the aluminum is substantially free from copper, and the copper is thereafter introduced to the formed interconnect lines. In a second embodiment, copper is introduced to the aluminum layer prior to formation of the desired interconnect pattern. The copper-rich layer is removed from the areas to be etched prior to etching. The method facilitates chlorine plasma etching of the aluminum which is inhibited by the presence of copper. The method is also useful with various wet etching processes where the formation of a copper-rich layer is found to stabilize the aluminum layer during subsequent processing .
摘要:
A static bipolar random access memory cell includes first and second transistors formed in epitaxial silicon pockets 41 and 42 in a substrate. The collectors 19 and 19' and bases 15 and 15' of the transistors are interconnected with polycrystalline silicon 21 doped to match the conductivity types of the regions contacted. Undesired PN junctions 40 and 40' created thereby are shorted using an overlying layer of a metal silicide 25. In a region overlying the N conductivity type polycrystalline silicon 23 or 23', the metal silicide is removed and a PN junction 37 or 37' created by depositing P conductivity type polycrystalline silicon 35c or 35c'. If desired additional P type polycrystalline silicon 35a and 35b may be deposited across the surface of the epitaxial layer where the base regions of the two transistors are formed to reduce the base series resistance.
摘要:
A CMOS buffer for the dynamic translation of input signals at TTL levels to corresponding signals at CMOS levels. A reference voltage at a level between the 0.8 volt maximum TTL "0" input level and the 2.4 volt minimum "1" input level is generated by charge distribution between capacitors. This reference level is compared with an input signal level in a dynamic comparator comprised of a CMOS cross-coupled latch to produce output signals at CMOS levels that correspond to the TTL input signals.
摘要:
The disclosure relates to techniques for etching layered materials to produce features with beveled edges, for example, wells in silicon oxide layers employed in integrated circuit fabrication. An anisotropic etch may be employed to form wells with vertical walls in the silicon oxide layer, and an isotropic etch may be employed to bevel peripheral corners of the walls. In preferred embodiments, a double mask of a photoresist layer on an underlying thin film may be used to define the limits of the anisotropic and isotropic etches, respectively.
摘要:
Apparatus and method are described for rapid ball formation at the end of lead wire retained in the capillary wire holding tool of a ball bonding machine. A circuit is coupled between the cover gas shroud and lead wire for establishing controlled electrical discharge between the end of the bonding wire and the shroud, for melting and forming a ball. The circuit includes a DC power supply for delivering a positive polarity to the shroud and negative polarity to the lead wire for drawing a discharge of electrons from the end of the lead wire to the shroud. A capacitor is coupled in series with the DC power supply for receiving the electrical discharge. An impedance is also coupled in series for limiting the electrical discharge current. Charging of the capacitor limits and shapes the electrical arc discharge to a controlled pulse profile of short duration for rapid ball formation. An electronic gate is also used to control pulse duration. The rapid and controlled ball formation avoids necking or thinning of the lead wire which often occurs at the stem above the bonding ball.
摘要:
A simple six-transistor input buffer for generating and applying binary function test signals to associated circuitry in an integrated circuit package. The buffer recognizes three different voltage levels of an input signal that is applied to a single input test pin and generates three corresponding binary output signals that may be used for testing various functions of the associated circuitry.
摘要:
A method is disclosed of etching a refractory metal layer on a semiconductor structure comprising subjecting it to a mixture of a Lewis base and an oxidizing agent. In the preferred embodiment a method is described for etching a tungsten-titanium layer on a semiconductor structure by immersing it in a mixture of triethylamine and hydrogen peroxide.