公开(公告)号：US20130330920A1

公开(公告)日：2013-12-12

申请号：US13490059

申请日：2012-06-06

Applicant: Guojun Liu ,  Xianmin Tang ,  Anantha Subramani ,  Wei W. Wang

Inventor： Guojun Liu ,  Xianmin Tang ,  Anantha Subramani ,  Wei W. Wang

IPC: H01L21/283

CPC classification number: H01L21/76814 ,  H01L21/02063

Abstract: A high-frequency, hydrogen-based radio-frequency (RF) plasma is used to reduce a metal oxide and other contaminant disposed in an aperture that is formed in an ultra-low k dielectric material. Because the frequency of the plasma is at least about 40 MHz and the primary gas in the plasma is hydrogen, metal oxide can be advantageously removed without damaging the dielectric material.

Abstract translation: 使用高频，氢基射频（RF）等离子体来减少设置在形成于超低k电介质材料的孔中的金属氧化物和其它污染物。 由于等离子体的频率为至少约40MHz，等离子体中的初级气体为氢，所以可以有利地除去金属氧化物而不损坏电介质材料。

公开(公告)号：US20120296029A1

公开(公告)日：2012-11-22

申请号：US13461404

申请日：2012-05-01

Applicant: Guojun Liu ,  Dean Xiong

Inventor： Guojun Liu ,  Dean Xiong

IPC: C09D133/12 ,  C09D133/16 ,  B82Y30/00

CPC classification number: C08F293/005 ,  C01B33/18 ,  C08F8/20 ,  C08F265/06 ,  C08F297/02 ,  C08J3/12 ,  C09D5/1687 ,  C09D7/65 ,  C08F220/28 ,  C08F220/18 ,  C08F222/1006

Abstract: Fluorine-containing multifunctional microspheres and applications thereof are provided. There are provided multifunctional microspheres comprising polymer chains having a first portion and a second portion, wherein the first portion is anchored to the surface of the multifunctional microsphere via grafting, crosslinking or a combination thereof, and the second portion comprises at least one fluorinated group and at least one reactive functional group capable of forming a covalent bond with an adhesive, and uses thereof to prepare amphiphobic coatings on material surfaces. Also provided are multifunctional microspheres comprising two or more different types of such polymer chains, wherein the relative proportions of the different polymer chains may be tuned during preparation of the multifunctional microspheres.

Abstract translation: 提供含氟多功能微球及其应用。 提供了包含具有第一部分和第二部分的聚合物链的多功能微球，其中第一部分通过接枝，交联或其组合锚定到多官能微球的表面，第二部分包含至少一个氟化基团和 至少一个能够与粘合剂形成共价键的反应性官能团，以及其用于在材料表面上制备两性涂层的用途。 还提供了包含两种或更多种不同类型的这种聚合物链的多功能微球，其中可以在制备多功能微球期间调节不同聚合物链的相对比例。

公开(公告)号：US06237397B1

公开(公告)日：2001-05-29

申请号：US09413628

申请日：1999-10-06

Applicant: Ruth Shinar ,  Guojun Liu ,  Marc D. Porter

Inventor： Ruth Shinar ,  Guojun Liu ,  Marc D. Porter

IPC: G01N2902

CPC classification number: G01N29/022 ,  G01N2291/014 ,  G01N2291/0256 ,  G01N2291/02863 ,  G01N2291/0423 ,  G01N2291/0426 ,  G01N2291/0427

Abstract: An acoustic wave based-chemical sensor containing a crystal substrate and a coating of small particulate matter is disclosed. The small particulate matter can be graphite particles. Transducers are connected to the crystal substrate to generate an alternating potential across the crystal substrate, which in turn causes the crystal to resonate due to the converse piezoelectric effect. The coating absorbs the analyte, thus changing the mass of the sensor, and accordingly changing its resonant frequency. The transducers detect this change in resonant frequency to indicate that the analyte is present. The use of small particulate matter results in a coating having a large surface area which facilitates mass uptake of large amounts of VOCs, improved acoustic properties even with relatively thick coatings, and a high operational temperature range.

Abstract translation: 公开了一种包含晶体衬底和小颗粒物质涂层的基于声波的化学传感器。 小颗粒物可以是石墨颗粒。 传感器连接到晶体衬底以在晶体衬底之间产生交替电位，这又导致晶体由于相反的压电效应而谐振。 涂层吸收分析物，从而改变传感器的质量，从而改变其共振频率。 传感器检测谐振频率的这种变化，以表明分析物存在。 使用小的颗粒物质可形成具有大表面积的涂层，其有利于大量挥发性有机物的吸收，甚至在相对较厚的涂层和较高的操作温度范围内也改善了声学性能。

公开(公告)号：US20170339477A1

公开(公告)日：2017-11-23

申请号：US15416744

申请日：2017-01-26

Applicant: Kai Wang ,  Hu Chen ,  Guojun Liu

Inventor： Kai Wang ,  Hu Chen ,  Guojun Liu

IPC: H04R1/04 ,  H04R29/00 ,  B81B7/00 ,  H04R19/04

CPC classification number: H04R1/04 ,  B81B7/0087 ,  B81B2201/0257 ,  B81B2207/012 ,  H04R19/005 ,  H04R19/04 ,  H04R29/004 ,  H04R2201/003

Abstract: A MEMS microphone is disclosed. The MEMS microphone includes an encapsulation structure provided with an accommodation space; a MEMS chip for detecting sound signal accommodated in the accommodation space; an ASIC chip received in the accommodation space. The ASIC chip includes a signal processing module connected to MEMS chip for processing the sound signal detected by the MEMS chip and outputting the processed sound signal. The MEMS microphone further includes a temperature detection module for detecting temperature signal and outputting the temperature signal.

公开(公告)号：US20130105806A1

公开(公告)日：2013-05-02

申请号：US13286888

申请日：2011-11-01

Applicant: Guojun Liu ,  Shivkumar Chiruvolu ,  Weidong Li ,  Uma Srinivasan

Inventor： Guojun Liu ,  Shivkumar Chiruvolu ,  Weidong Li ,  Uma Srinivasan

IPC: H01L29/04 ,  H01L21/322 ,  H01L21/20

CPC classification number: H01L29/04 ,  H01L21/02104 ,  H01L21/02532 ,  H01L21/0259 ,  H01L21/02601 ,  H01L21/0262 ,  H01L21/02628 ,  H01L21/2225 ,  H01L21/2257 ,  H01L21/67115 ,  H01L31/028 ,  H01L31/035218 ,  H01L31/068 ,  H01L31/0682 ,  H01L31/1804 ,  Y02E10/547 ,  Y02P70/521

Abstract: Silicon nanoparticle inks provide a basis for the formation of desirable materials. Specifically, composites have been formed in thin layers comprising silicon nanoparticles embedded in an amorphous silicon matrix, which can be formed at relatively low temperatures. The composite material can be heated to form a nanocrystalline material having crystals that are non-rod shaped. The nanocrystalline material can have desirable electrical conductive properties, and the materials can be formed with a high dopant level. Also, nanocrystalline silicon pellets can be formed from silicon nanoparticles deposited form an ink in which the pellets can be relatively dense although less dense than bulk silicon. The pellets can be formed from the application of pressure and heat to a silicon nanoparticle layer.

Abstract translation: 硅纳米颗粒油墨为形成所需材料提供了基础。 具体地说，复合材料已经形成在包含可以在较低温度下形成的非晶硅基质中的硅纳米颗粒的薄层。 可以将复合材料加热以形成具有非棒状晶体的纳米晶体材料。 纳米晶体材料可以具有期望的导电性能，并且可以以高掺杂剂水平形成材料。 此外，纳米晶硅颗粒可以由沉积成油墨的硅纳米颗粒形成，其中颗粒可以相对致密，尽管比体硅密度小。 颗粒可以由压力和热量施加到硅纳米颗粒层上形成。

公开(公告)号：US20120264884A1

公开(公告)日：2012-10-18

申请号：US13445430

申请日：2012-04-12

Applicant: Guojun Liu ,  Dean Xiong

Inventor： Guojun Liu ,  Dean Xiong

IPC: C08F220/68

CPC classification number: D06M15/277 ,  C08F293/005 ,  C08F297/026 ,  C08F2438/01 ,  C09D153/00 ,  D06M15/3568 ,  D06M2200/10 ,  D06M2200/11 ,  D06M2200/12 ,  C08F220/22 ,  C08F2230/085 ,  C08F2220/302

Abstract: Provided are amphiphobic block copolymers, methods for preparing amphiphobic block copolymers, and applications thereof. Amphiphobic block copolymers can be used to prepare amphiphobic coatings on material surfaces, such as glass, printing paper or fabric. Amphiphobic block copolymers can also be used to coat particles, e.g., silica nanoparticles, which are then used to coat material surfaces. Such coated particles and uses thereof are also provided herein.

Abstract translation: 提供的是两性嵌段共聚物，制备疏水性嵌段共聚物的方法及其应用。 疏水性嵌段共聚物可用于在材料表面如玻璃，印刷纸或织物上制备两性涂层。 疏水性嵌段共聚物也可用于涂覆颗粒，例如二氧化硅纳米颗粒，然后将其用于涂覆材料表面。 这里也提供了这样的涂覆颗粒及其用途。

公开(公告)号：US20120024229A1

公开(公告)日：2012-02-02

申请号：US13195171

申请日：2011-08-01

Applicant: GUOJUN LIU ,  XIANMIN TANG ,  QIAN LUO ,  YONG CAO

Inventor： GUOJUN LIU ,  XIANMIN TANG ,  QIAN LUO ,  YONG CAO

IPC: C23C16/511 ,  H01F7/02

CPC classification number: H04M3/58 ,  H01F7/0278 ,  H01J37/3408 ,  H01J37/3461 ,  H04L65/1016 ,  H04M2207/18 ,  H04W48/20 ,  H04W60/00 ,  H04W76/10

Abstract: Magnetrons for use in physical vapor deposition (PVD) chambers and methods of use thereof are provided herein. In some embodiments, an apparatus may include a support member having an axis of rotation; a plurality of first magnets coupled to the support member on a first side of the axis of rotation and having a first polarity oriented in a first direction perpendicular to the support member; and a second magnet coupled to the support member on a second side of the axis of rotation opposite the first side and having a second polarity oriented in a second direction opposite the first direction. In some embodiments, the apparatus is capable of forming a magnetic field including one or more magnetic nulls that modulate local plasma uniformity in a physical vapor deposition (PVD) chamber.

Abstract translation: 本文提供了用于物理气相沉积（PVD）室的磁控管及其使用方法。 在一些实施例中，装置可以包括具有旋转轴线的支撑构件; 多个第一磁体，其在所述旋转轴线的第一侧上联接到所述支撑构件，并且具有在垂直于所述支撑构件的第一方向上定向的第一极性; 以及第二磁体，其在所述旋转轴线的与所述第一侧相反的第二侧上与所述支撑构件相耦合，并且具有在与所述第一方向相反的第二方向上定向的第二极性。 在一些实施例中，该装置能够形成包括调制物理气相沉积（PVD）室中的局部等离子体均匀性的一个或多个磁零点的磁场。

公开(公告)号：US06654470B1

公开(公告)日：2003-11-25

申请号：US09352730

申请日：1999-07-13

Applicant: John P. Dilger ,  Guojun Liu

Inventor： John P. Dilger ,  Guojun Liu

IPC: H04B1500

CPC classification number: G01N29/36 ,  G01N29/022 ,  G01N29/34 ,  G01N29/42 ,  G01N2291/014 ,  G01N2291/0256 ,  G01N2291/0422 ,  G01N2291/0426

Abstract: A sensor circuit for use in measuring concentrations of an analyte in a fluid is comprised of a BAW sensor, a voltage variable capacitor connected to the sensor, an input which supplies a bias warping dc voltage to the voltage variable capacitor, and a resonant oscillator circuit. The resonant oscillator circuit detects the fundamental frequency of the sensor and produces a resonant signal frequency. The bias warping dc voltage applied to the voltage variable capacitor warps the resonant frequency of the circuit away from inharmonic noise.

Abstract translation: 用于测量流体中分析物浓度的传感器电路由BAW传感器，连接到传感器的电压可变电容器，向电压可变电容器提供偏置翘曲直流电压的输入端以及谐振振荡器电路 。 谐振振荡电路检测传感器的基频并产生谐振信号频率。 施加到电压可变电容器的偏压扭曲直流电压使电路的谐振频率远离非谐波噪声。

公开(公告)号：US06534319B1

公开(公告)日：2003-03-18

申请号：US09413676

申请日：1999-10-06

Applicant: Guojun Liu

Inventor： Guojun Liu

IPC: G01N27416

CPC classification number: G01N29/036 ,  G01N1/2202 ,  G01N1/2226 ,  G01N1/24 ,  G01N33/0047 ,  G01N2001/2223 ,  G01N2001/2241 ,  G01N2001/242 ,  G01N2291/0257 ,  Y10S436/806 ,  Y10T436/19

Abstract: A chemical sensor utilizing a substrate and a fluoropolymer coating is disclosed. Transducers may be connected to the substrate to generate an alternating potential across the substrate, which in turn causes the substrate to resonate due to the converse piezoelectric effect. The polymer coating absorbs the analyte, thus changing the mass of the sensor, and accordingly changing its resonant frequency. The transducers detect this change in resonant frequency to indicate to the operator that the analyte is present. The use of amorphous copolymers of 2,2-bistrifluoromethyl-4,5-difluoro-1,3-dioxole (PDD), and tetrafluoroethylene (TFE) allows for improved sensitivity and responsiveness while also allowing for robust characteristics enabling the sensor to be used in a variety of environmental conditions.

Abstract translation: 公开了一种利用基底和含氟聚合物涂层的化学传感器。 传感器可以连接到衬底以在衬底上产生交替电位，这又导致衬底由于相反的压电效应而谐振。 聚合物涂层吸收分析物，从而改变传感器的质量，从而改变其共振频率。 传感器检测谐振频率的这种变化，以向操作者指示分析物存在。 使用2,2-双三氟甲基-4,5-二氟-1,3-二氧杂环戊烯（PDD）和四氟乙烯（TFE）的无定形共聚物可以提高灵敏度和响应性，同时还允许使用传感器的坚固特性 在各种环境条件下。

公开(公告)号：US06432362B1

公开(公告)日：2002-08-13

申请号：US09413401

申请日：1999-10-06

Applicant: Ruth Shinar ,  Guojun Liu ,  Marc D. Porter

Inventor： Ruth Shinar ,  Guojun Liu ,  Marc D. Porter

IPC: G01N2700

CPC classification number: G01N29/022 ,  G01N2291/014 ,  G01N2291/0212 ,  G01N2291/0222 ,  G01N2291/0256 ,  G01N2291/0423 ,  G01N2291/0426 ,  G01N2291/0427

Abstract: An acoustic wave based-chemical sensor utilizing a crystal substrate and a coating of at least two blended materials is disclosed. The blended materials comprise a combination of (a) a high glass transition temperature polymer or a material of high melting point, and (b) a low glass transition temperature polymer or a material having a low melting point. Transducers are connected to the crystal substrate to generate an alternating potential across the crystal substrate, which in turn causes the crystal to resonate due to the converse piezoelectric effect. The blended coating absorbs the analyte, thus changing the mass of the chemical sensor, and accordingly changing its resonant frequency. The transducers detect this change in resonant frequency to indicate that the analyte is present. The use of blended materials results in a thicker coating combining the preferred properties of the blend constituents, such as improved detection sensitivities, faster response times, less acoustic wave damping, and higher operational temperature ranges.

Abstract translation: 公开了一种使用晶体基底的基于声波的化学传感器和至少两种混合材料的涂层。 混合材料包括（a）高玻璃化转变温度聚合物或高熔点材料的组合，和（b）低玻璃化转变温度聚合物或具有低熔点的材料。 传感器连接到晶体衬底以在晶体衬底之间产生交替电位，这又导致晶体由于相反的压电效应而谐振。 混合涂层吸收分析物，从而改变化学传感器的质量，从而改变其共振频率。 传感器检测谐振频率的这种变化，以表明分析物存在。 混合材料的使用导致较厚的涂层结合混合物组分的优选性能，例如改进的检测灵敏度，更快的响应时间，更少的声波阻尼和更高的操作温度范围。