DRIVING OF PIEZOELECTRICS FOR MEMS-BASED COOLING SYSTEMS

    公开(公告)号:US20230012794A1

    公开(公告)日:2023-01-19

    申请号:US17860564

    申请日:2022-07-08

    Abstract: A cooling system is described. The cooling system includes a support structure, a cooling element, and drive electronics. The cooling element has a central axis and is supported by the support structure at the central axis. First and second portions of the cooling element are on first and second sides of the central axis and unpinned. The first and second portions of the cooling element undergo vibrational motion when actuated to drive a fluid toward a heat-generating structure. The cooling element further has first and second piezoelectrics having opposite polarizations. The first piezoelectric is part of the first portion of the cooling element. The second piezoelectric is part of the second portion of the cooling element. The drive electronics drive the first and second portions of the cooling element using a single drive signal.

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