公开(公告)号：US08304847B2

公开(公告)日：2012-11-06

申请号：US12092226

申请日：2005-11-01

申请人： Toshiaki Kaminaga ,  Masahide Hayashi ,  Katsumichi Ueyanagi ,  Kazunori Saito ,  Mutsuo Nishikawa

发明人： Toshiaki Kaminaga ,  Masahide Hayashi ,  Katsumichi Ueyanagi ,  Kazunori Saito ,  Mutsuo Nishikawa

IPC分类号： H01L29/02

CPC分类号： G01L15/00 ,  G01L19/0038 ,  G01L19/0084 ,  G01L19/0627 ,  G01L19/141 ,  G01L19/147 ,  H01L2224/05553 ,  H01L2224/45124 ,  H01L2224/45144 ,  H01L2224/48465 ,  H01L2924/01004 ,  H01L2924/01013 ,  H01L2924/01046 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/04941 ,  H01L2924/00

摘要： An object of the present invention is to solve problems in that aluminum electrodes, aluminum wires, and I/O terminals are corroded by corrosive gasses when a pressure of a pressure medium containing corrosive matters such as exhaust gas is measured with a semiconductor sensor; and improve not only the corrosion resistance of the sensor chip but also the corrosion resistance of the portion particularly functioning as the pressure receiver.Each of the aluminum electrodes that is likely to be corroded portions is prevented from being corroded by forming a titanium-tungsten layer and gold layer on the aluminum electrode. The connecting wires are prevented from being corroded by corrosive matters by using gold wires. The I/O terminals are also prevented from being corroded by applying gold plating.

摘要翻译： 本发明的一个目的是解决当用半导体传感器测量含有废气等腐蚀性物质的压力介质的压力时，铝电极，铝线和I / O端子被腐蚀性气体腐蚀的问题。 并且不仅提高了传感器芯片的耐腐蚀性，而且提高了作为压力容器特别起作用的部分的耐腐蚀性。 通过在铝电极上形成钛 - 钨层和金层，可以防止可能被腐蚀部分的每个铝电极被腐蚀。 通过使用金线防止连接线被腐蚀性物质腐蚀。 也可以通过镀金来防止I / O端子被腐蚀。

公开(公告)号：US08300897B2

公开(公告)日：2012-10-30

申请号：US12246550

申请日：2008-10-07

申请人： Akio Nagasaka ,  Takafumi Matsumura ,  Masahide Hayashi ,  Takafumi Miyatake ,  Naoto Miura ,  Harumi Kiyomizu

发明人： Akio Nagasaka ,  Takafumi Matsumura ,  Masahide Hayashi ,  Takafumi Miyatake ,  Naoto Miura ,  Harumi Kiyomizu

IPC分类号： G06K9/00 ,  G05B19/00

CPC分类号： G07C9/00158 ,  G07C9/00563

摘要： There is provided a finger-vein authentication apparatus including a light source for illuminating one surface of both side-surfaces of a fingertip of a finger with light, and an image sensor for imaging the other surface of the fingertip, the light source and the image sensor being positioned at both sides of a nail of the fingertip with the nail sandwiched therebetween, wherein a fingertip guidance jig for supporting the fingertip and a finger-root guidance jig for supporting a finger-root of the finger are disposed between the light source and the image sensor, a light-shielding unit being disposed on the light-source side, the light-shielding unit being used for shielding the illumination light such that the illumination light will not travel to a ball side of the finger.

摘要翻译： 提供了一种手指静脉认证装置，其包括用于用光照射手指的两个侧表面的一个表面的光源，以及用于对指尖的另一个表面，光源和图像进行成像的图像传感器 传感器位于指尖的指甲的两侧，夹在其间的指甲，其中，用于支撑指尖的指尖引导夹具和用于支撑手指根部的指根引导夹具设置在光源和 图像传感器，设置在光源侧的遮光单元，所述遮光单元用于屏蔽照明光，使得照明光不会移动到手指的球侧。

公开(公告)号：US20090092291A1

公开(公告)日：2009-04-09

申请号：US12246550

申请日：2008-10-07

申请人： Akio Nagasaka ,  Takafumi Matsumura ,  Masahide Hayashi ,  Takafumi Miyatake ,  Naoto Miura ,  Harumi Kiyomizu

发明人： Akio Nagasaka ,  Takafumi Matsumura ,  Masahide Hayashi ,  Takafumi Miyatake ,  Naoto Miura ,  Harumi Kiyomizu

IPC分类号： G06K9/00

CPC分类号： G07C9/00158 ,  G07C9/00563

摘要： There is provided a finger-vein authentication apparatus including a light source for illuminating one surface of both side-surfaces of a fingertip of a finger with light, and an image sensor for imaging the other surface of the fingertip, the light source and the image sensor being positioned at both sides of a nail of the fingertip with the nail sandwiched therebetween, wherein a fingertip guidance jig for supporting the fingertip and a finger-root guidance jig for supporting a finger-root of the finger are disposed between the light source and the image sensor, a light-shielding unit being disposed on the light-source side, the light-shielding unit being used for shielding the illumination light such that the illumination light will not travel to a ball side of the finger.

摘要翻译： 提供了一种手指静脉认证装置，其包括用于用光照射手指的两个侧表面的一个表面的光源，以及用于对指尖的另一个表面，光源和图像进行成像的图像传感器 传感器位于指尖的指甲的两侧，夹在其间的指甲，其中，用于支撑指尖的指尖引导夹具和用于支撑手指根部的指根引导夹具设置在光源和 图像传感器，设置在光源侧的遮光单元，所述遮光单元用于屏蔽照明光，使得照明光不会移动到手指的球侧。

公开(公告)号：US20080283997A1

公开(公告)日：2008-11-20

申请号：US12177210

申请日：2008-07-22

申请人： Hiromichi EBINE ,  Katsuhiko Kikuchi ,  Satoshi Shimada ,  Masahide Hayashi

发明人： Hiromichi EBINE ,  Katsuhiko Kikuchi ,  Satoshi Shimada ,  Masahide Hayashi

IPC分类号： H01L23/48

CPC分类号： H05K3/3442 ,  H01L2924/0002 ,  H05K3/202 ,  H05K3/284 ,  H05K2201/09036 ,  H05K2201/09745 ,  H05K2201/10636 ,  Y02P70/611 ,  Y02P70/613 ,  H01L2924/00

摘要： An electronic device requires an electronic component to be mounted for the purpose of static shielding. The mounting of such an electronic component raises a problem of avoiding thermal stresses and cracks generated due to the difference between the coefficients of linear expansion of component materials. A positioning recess, a joining-substance thickness ensuring recess, a joining-substance thickness ensuring projection, etc. are formed in a combined manner in an electronic component mount portion of each of leads, whereby spreading of cracks generated in the joining substance can be suppressed and reliability can be improved. Filling a sealing material so as to seal and restrain the electronic component mounted in the electronic component mount portion without leaving voids contributes to further suppressing spreading of cracks generated in the joining substance and ensuring more improved reliability of the joining substance.

摘要翻译： 电子设备需要为了静电屏蔽而安装电子部件。 这种电子部件的安装提出了避免由于部件材料的线性膨胀系数之间的差异而产生的热应力和裂纹的问题。 在各引线的电子部件安装部中，以组合的方式形成定位凹部，接合物质厚度确保凹部，接合物质厚度确保凹部等，由此在接合物质中产生的裂纹的扩散可以 可以提高抑制和可靠性。 填充密封材料以密封和限制安装在电子部件安装部分中的电子部件而不留空隙有助于进一步抑制在接合物质中产生的裂纹的扩散，并确保接合物质的可靠性更好。

公开(公告)号：US5441300A

公开(公告)日：1995-08-15

申请号：US978397

申请日：1992-11-18

申请人： Yoshihiro Yokota ,  Akira Koide ,  Masahiro Matsumoto ,  Masahide Hayashi

发明人： Yoshihiro Yokota ,  Akira Koide ,  Masahiro Matsumoto ,  Masahide Hayashi

IPC分类号： B60R21/0136 ,  B60R21/16 ,  B81B3/00 ,  G01P15/125 ,  G01P15/18 ,  B60R21/32

CPC分类号： G01P15/18 ,  G01P15/125 ,  G01P2015/0828 ,  G01P2015/084 ,  G01P2015/0842

摘要： A three-dimensional acceleration sensor capable of detecting a small acceleration value and even an acceleration value amounting up to 100G occurring in the event of a collision comprises a diaphragm for linking a frame and a massive part and diaphragms and beams for linking the massive part and a central part. These elements are formed by working a single crystalline silicon plate. Gaps between the massive part and opposing electrodes are changed by acceleration applied to the massive part. A circuit connected to terminals detects the changes in gaps as changes in capacitances and determines direction and level of the applied acceleration.

摘要翻译： 能够检测碰撞时发生的加速度小，加速度高达100G的三维加速度传感器包括用于连接框架和块状部件的隔膜以及用于连接块状部件的隔膜和梁 中心部分。 这些元件通过加工单晶硅板形成。 大块部件和相对电极之间的间隙由施加在大块部件上的加速度而改变。 连接到端子的电路检测间隙的变化，作为电容的变化，并确定施加的加速度的方向和水平。

公开(公告)号：US09568490B2

公开(公告)日：2017-02-14

申请号：US14383335

申请日：2012-03-19

申请人： Heewon Jeong ,  Masahide Hayashi ,  Kiyoko Yamanaka

发明人： Heewon Jeong ,  Masahide Hayashi ,  Kiyoko Yamanaka

IPC分类号： G01C19/00 ,  G01C19/02 ,  G01C19/5726 ,  G01C19/5762 ,  G01C19/5719

CPC分类号： G01P9/02 ,  G01C19/5719 ,  G01C19/5726 ,  G01C19/5762

摘要： Provided is an angular velocity sensor including a plurality of angular velocity detection units each outputting a different detection result, and including a common driving circuit to drive the angular velocity detection units. The angular velocity detection units of the angular velocity sensor of the present invention are configured to have different driving amplitudes when being driven by a driving signal at the same frequency.

摘要翻译： 提供了一种角速度传感器，其包括多个角速度检测单元，每个角速度检测单元输出不同的检测结果，并且包括用于驱动角速度检测单元的公共驱动电路。 本发明的角速度传感器的角速度检测单元被配置为当由相同频率的驱动信号驱动时具有不同的驱动振幅。

公开(公告)号：US09146253B2

公开(公告)日：2015-09-29

申请号：US13699235

申请日：2011-05-20

申请人： Takanori Aono ,  Kengo Suzuki ,  Akira Koide ,  Masahide Hayashi

发明人： Takanori Aono ,  Kengo Suzuki ,  Akira Koide ,  Masahide Hayashi

IPC分类号： G01P1/02 ,  G01P15/08 ,  B81C1/00 ,  G01C19/56 ,  G01P15/125 ,  G01C19/5783 ,  H01L23/00 ,  H01L23/31 ,  H01L21/56

CPC分类号： G01P15/0802 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2203/0315 ,  B81B2207/095 ,  B81C1/00293 ,  B81C2203/031 ,  G01C19/56 ,  G01C19/5783 ,  G01P15/125 ,  H01L21/561 ,  H01L23/315 ,  H01L24/94 ,  H01L2924/12042 ,  H01L2924/15788 ,  H01L2924/16235 ,  Y10T29/49146 ,  Y10T29/49826 ,  H01L2924/00

摘要： An acceleration sensor and an angular velocity sensor are sealed in respective pressure atmospheres suitable therefor in the process of a series of bonding steps, thereby improving the detection sensibilities of the sensors.A movable member 111 of an acceleration sensor 11 and a vibrator 121 of an angular velocity sensor 12 are fabricated on the same sensor wafer 10 with a wall 16 interposed therebetween. A cap wafer 20 is formed in which gaps 21, 22 corresponding to the movable member 111 of the acceleration sensor 11 and the vibrator 121 of the angular velocity sensor 12 are provided. Bumps 23 are disposed near the gap 22 of the angular velocity sensor 12. The acceleration sensor 11 is sealed at atmospheric pressure. Then, the angular velocity sensor 12 is subjected to high temperature and a high-load and is vacuum-sealed. Thereafter, cutting with a diamond grindstone and mounting of circuit substrates and a wiring substrate are performed to form a combined sensor.

摘要翻译： 加速度传感器和角速度传感器在一系列接合步骤的过程中被密封在适合于其的相应的压力环境中，从而提高传感器的检测灵敏度。 加速度传感器11的可动部件111和角速度传感器12的振动器121被制造在相同的传感器晶片10上，壁16插入其中。 形成盖片20，其中设置有与加速度传感器11的可动构件111对应的间隙21,22和角速度传感器12的振子121。 凸起23设置在角速度传感器12的间隙22附近。加速度传感器11在大气压下被密封。 然后，对角速度传感器12进行高温高负荷的真空密封。 此后，进行用金刚石磨石切割并安装电路基板和布线基板以形成组合的传感器。

公开(公告)号：US20130319075A1

公开(公告)日：2013-12-05

申请号：US13976372

申请日：2011-11-24

申请人： Daisuke Maeda ,  Heewon Jeong ,  Masahide Hayashi

发明人： Daisuke Maeda ,  Heewon Jeong ,  Masahide Hayashi

IPC分类号： G01P21/00

CPC分类号： G01P21/00 ,  G01C19/5776 ,  G01C21/16

摘要： Reliability and accuracy of a sensor are secured while adjustment cost of a sensor module is suppressed. A signal component analysis part 10 receives a signal output from a signal processing part 7 before passing through a low-pass filter 8, analyzes whether or not application of a fragile frequency with respect to a physical quantity is equal to or more than a threshold level, if the application of the fragile frequency is equal to or more than the threshold level, outputs output stop signals to output signal control parts 9, 16. The output signal control parts 9, 16 receive control signals output from the signal component analysis part 10, and outputs an acceleration signal and a physical quantity signal from which noise has been removed by the low-pass filters 8, 15 through the signal processing parts 7, 14.

摘要翻译： 确保传感器模块的调整成本得到抑制，从而确保传感器的可靠性和精度。 信号分量分析部分10在通过低通滤波器8之前接收从信号处理部分7输出的信号，分析相对于物理量的脆弱频率的施加是否等于或大于阈值水平 如果脆弱频率的应用等于或大于阈值电平，则将输出停止信号输出到输出信号控制部9,16。输出信号控制部9,16接收从信号分量分析部10输出的控制信号 并且通过信号处理部件7,14输出通过低通滤波器8,15除去噪声的加速度信号和物理量信号。

公开(公告)号：US20130285172A1

公开(公告)日：2013-10-31

申请号：US13991749

申请日：2011-11-22

申请人： Heewon Jeong ,  Masahide Hayashi ,  Kiyoko Yamanaka

发明人： Heewon Jeong ,  Masahide Hayashi ,  Kiyoko Yamanaka

IPC分类号： B81B3/00

CPC分类号： B81B3/0018 ,  G01C19/574 ,  G01P15/125 ,  G01P15/18

摘要： To provide a combined sensor that can detect a plurality of physical quantities. With the combined sensor, it is possible to realize, while maintaining performance, a reduction in size and a reduction in costs by increasing elements that can be shared among respective sensors. A weight M2 and a detection electrode DTE2 used in an angular-velocity detecting section are also used as a reference capacitive element of a Z-direction-acceleration detecting section configured to detect acceleration in a Z direction. That is, in the Z-direction-acceleration detecting section, a detection capacitive element including the weight M2 and the detection electrode DTE2 configuring the angular-velocity detecting section is used as a reference capacitive element for a detection capacitive element formed by a detection electrode DTE5 and a weight M4.

摘要翻译： 提供可以检测多个物理量的组合传感器。 利用组合的传感器，通过增加可在各个传感器之间共享的元件，可以在保持性能的同时实现尺寸的减小和成本的降低。 在角速度检测部中使用的重量M2和检测电极DTE2也被用作被配置为检测Z方向上的加速度的Z方向加速度检测部的基准电容元件。 也就是说，在Z方向加速度检测部中，使用包括权重M2的检测电容元件和构成角速度检测部的检测电极DTE2作为由检测电极形成的检测用电容元件的基准电容元件 DTE5和重量M4。

公开(公告)号：US20110209815A1

公开(公告)日：2011-09-01

申请号：US13028592

申请日：2011-02-16

申请人： Takanori AONO ,  Kengo Suzuki ,  Akira Koide ,  Masahide Hayashi

发明人： Takanori AONO ,  Kengo Suzuki ,  Akira Koide ,  Masahide Hayashi

IPC分类号： A63B39/00 ,  B23P17/04

CPC分类号： G01C19/56 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2207/096 ,  B81C1/00285 ,  B81C2203/0118 ,  B81C2203/035 ,  G01C19/5769 ,  G01C19/5783 ,  G01P15/0802 ,  G01P2015/0882 ,  H01L2224/48145 ,  H01L2224/73265 ,  H01L2224/92247 ,  H01L2924/181 ,  Y10T29/49005 ,  Y10T29/49007 ,  Y10T29/4908 ,  Y10T29/49171 ,  Y10T29/49176 ,  Y10T29/49826 ,  H01L2924/00012

摘要： A movable device of acceleration sensors and a vibration device of a gyroscope are formed on the same sensor wafer spaced apart from each other by a wall. A cap wafer having gaps corresponding to the movable mechanical components of the acceleration sensors and gyroscope is provided for the wafer and an adsorbent divided into a plurality of divisional portions is disposed in the gap for the gyroscope. After the sensor wafer and the cap wafer have been bonded together at a temperature of inactivation of the adsorbent and in an atmospheric pressure ambience of noble gas and activated gas, the adsorbent divisional portions are activated in sequence to adsorb the activated gas so as to adjust the pressure inside the gyroscope, thus manufacturing a combined sensor wafer.

摘要翻译： 加速度传感器的可移动装置和陀螺仪的振动装置形成在通过壁彼此间隔开的相同传感器晶片上。 为晶片提供具有与加速度传感器和陀螺仪的可移动机械部件相对应的间隙的盖片晶片，并且分离成多个分割部分的吸附剂设置在用于陀螺仪的间隙中。 在传感器晶片和盖晶片已经在吸附剂失活的温度下并且在惰性气体和活性气体的大气压氛围下结合在一起，吸附剂分段依次被激活以吸附活性气体，以便调节 陀螺仪内部的压力，从而制造组合的传感器晶片。