Method of polishing a silicon wafer
    28.
    发明授权
    Method of polishing a silicon wafer 有权
    抛光硅晶片的方法

    公开(公告)号:US08877643B2

    公开(公告)日:2014-11-04

    申请号:US13376259

    申请日:2010-05-28

    摘要: This invention is to provide a method of polishing a silicon wafer wherein a high flatness can be attained likewise the conventional polishing method and further the occurrence of defects due to the remaining of substances included in the polishing solution on the surface of the wafer can be suppressed as well as a polished silicon wafer. The method of polishing a silicon wafer by supplying a polishing solution containing abrasive grains onto a surface of a polishing pad and then relatively sliding the polishing pad to a silicon wafer to polish the surface of the silicon wafer, is characterized in that the number of abrasive grains included in the polishing solution is controlled to not more than 5×1013 grains/cm3.

    摘要翻译: 本发明提供一种抛光硅晶片的方法,其中可以获得与常规抛光方法相同的高平整度,并且还可以抑制由于在晶片表面上包含在抛光溶液中的物质残留而导致的缺陷的发生 以及抛光的硅晶片。 通过将含有磨粒的抛光溶液供给到抛光垫的表面上,然后将抛光垫相对滑动到硅晶片以抛光硅晶片的表面来研磨硅晶片的方法,其特征在于,研磨剂的数量 包含在抛光溶液中的晶粒被控制为不超过5×1013个颗粒/ cm3。

    METHOD OF POLISHING SILICON WAFER AS WELL AS SILICON WAFER
    29.
    发明申请
    METHOD OF POLISHING SILICON WAFER AS WELL AS SILICON WAFER 有权
    抛光硅波作为硅波的方法

    公开(公告)号:US20120080775A1

    公开(公告)日:2012-04-05

    申请号:US13376259

    申请日:2010-05-28

    IPC分类号: H01L21/306 H01L29/34

    摘要: This invention is to provide a method of polishing a silicon wafer wherein a high flatness can be attained likewise the conventional polishing method and further the occurrence of defects due to the remaining of substances included in the polishing solution on the surface of the wafer can be suppressed as well as a polished silicon wafer.The method of polishing a silicon wafer by supplying a polishing solution containing abrasive grains onto a surface of a polishing pad and then relatively sliding the polishing pad to a silicon wafer to polish the surface of the silicon wafer, is characterized in that the number of abrasive grains included in the polishing solution is controlled to not more than 5×1013 grains/cm3.

    摘要翻译: 本发明提供一种抛光硅晶片的方法,其中可以获得与常规抛光方法相同的高平整度,并且还可以抑制由于在晶片表面上包含在抛光溶液中的物质残留而导致的缺陷的发生 以及抛光的硅晶片。 通过将含有磨粒的抛光溶液供给到抛光垫的表面上,然后将抛光垫相对滑动到硅晶片以抛光硅晶片的表面来研磨硅晶片的方法,其特征在于,研磨剂的数量 包含在抛光溶液中的晶粒被控制为不超过5×1013个颗粒/ cm3。