公开(公告)号：US10381357B2

公开(公告)日：2019-08-13

申请号：US16043653

申请日：2018-07-24

Applicant: Micron Technology, Inc.

Inventor： Kamal M. Karda ,  Chandra Mouli ,  Srinivas Pulugurtha ,  Rajesh N. Gupta

IPC: H01L27/112 ,  H01L27/108 ,  H01L49/02 ,  G11C11/4074 ,  H01L29/08 ,  H01L27/11556 ,  H01L21/8234 ,  H01L21/84 ,  H01L21/8238 ,  H01L27/11582 ,  G11C11/408 ,  G11C5/14 ,  G11C5/06

Abstract: Some embodiments include a memory cell with two transistors and one capacitor. The transistors are a first transistor and a second transistor. The capacitor has a first node coupled with a source/drain region of the first transistor, and has a second node coupled with a source/drain region of the second transistor. The memory cell has a first body region adjacent the source/drain region of the first transistor, and has a second body region adjacent the source/drain region of the second transistor. A first body connection line couples the first body region of the memory cell to a first reference voltage. A second body connection line couples the second body region of the memory cell to a second reference voltage. The first and second reference voltages may be the same as one another, or may be different from one another.

公开(公告)号：US20190172517A1

公开(公告)日：2019-06-06

申请号：US16267087

申请日：2019-02-04

Applicant: Micron Technology, Inc.

Inventor： Sanh D. Tang ,  Kuo-Chen Wang ,  Martin C. Roberts ,  Diem Thy N. Tran ,  Hideki Gomi ,  Fredrick D. Fishburn ,  Srinivas Pulugurtha ,  Michel Koopmans ,  Eiji Hasunuma

IPC: G11C11/402 ,  G11C5/06 ,  H01L27/108

Abstract: Some embodiments include an assembly having active material structures arranged in an array having rows and columns. Each of the active material structures has a first side which includes a bit contact region, and has a second side which includes a cell contact region. Each of the bit contact regions is coupled with a first redistribution pad. Each of the cell contact regions is coupled with a second redistribution pad. The first redistribution pads are coupled with bitlines, and the second redistribution pads are coupled with programmable devices. Some embodiments include methods of forming memory arrays.

公开(公告)号：US09577092B2

公开(公告)日：2017-02-21

申请号：US14517261

申请日：2014-10-17

Applicant: Micron Technology, Inc.

Inventor： Kamal M. Karda ,  Rajesh N. Gupta ,  Srinivas Pulugurtha ,  Chandra V. Mouli ,  Wolfgang Mueller

IPC: H01L29/78 ,  G11C11/40 ,  H01L27/02 ,  H01L27/105 ,  H01L29/66 ,  H01L27/108

CPC classification number: H01L29/7827 ,  G11C11/40 ,  H01L27/0207 ,  H01L27/1052 ,  H01L27/10855 ,  H01L27/10873 ,  H01L27/10885 ,  H01L27/10891 ,  H01L29/66666

Abstract: Methods, apparatuses, and systems for providing a body connection to a vertical access device. The vertical access device may include a digit line extending along a substrate to a digit line contact pillar, a body connection line extending along the substrate to a body connection line contact pillar, a body region disposed on the body connection line, an electrode disposed on the body region, and a word line extending to form a gate to the body region. A method for operation includes applying a first voltage to the body connection line, and applying a second voltage to the word line to cause a conductive channel to form through the body region. A memory cell array may include a plurality of vertical access devices.

Abstract translation: 用于向垂直存取装置提供身体连接的方法，装置和系统。 垂直进入装置可以包括沿着基板延伸到数字线接触柱的数字线，沿着基板延伸到主体连接线接触柱的主体连接线，设置在主体连接线上的主体区域，设置在主体连接线上的电极 身体区域和延伸以形成到身体区域的门的字线。 一种操作方法包括：将第一电压施加到身体连接线，以及向该字线施加第二电压，以使导电通道通过身体区域形成。 存储单元阵列可以包括多个垂直存取装置。

公开(公告)号：US09373715B2

公开(公告)日：2016-06-21

申请号：US14075480

申请日：2013-11-08

Applicant: Micron Technology, Inc.

Inventor： Wolfgang Mueller ,  Sanh D. Tang ,  Sourabh Dhir ,  Srinivas Pulugurtha

IPC: H01L29/78 ,  G11C11/40 ,  H01L27/02 ,  H01L27/105 ,  H01L29/66 ,  H01L27/108

CPC classification number: H01L29/7827 ,  G11C11/40 ,  H01L27/0207 ,  H01L27/1052 ,  H01L27/10855 ,  H01L27/10873 ,  H01L27/10885 ,  H01L27/10891 ,  H01L29/66666

Abstract: A semiconductor device may include a memory array including vertical memory cells connected to a digit line, word lines, and a body connection line. A row or column of the memory array may include one or more pillars connected to the body connection line. A voltage may be applied to the body connection line through at least one pillar connected to the body connection line. Application of the voltage to the body connection line may reduce floating body effects. Methods of forming a connection between at least one pillar and a voltage supply are disclosed. Semiconductor devices including such connections are also disclosed.

Abstract translation: 半导体器件可以包括存储器阵列，其包括连接到数字线，字线和主体连接线的垂直存储器单元。 存储器阵列的行或列可以包括连接到主体连接线的一个或多个支柱。 可以通过连接到主体连接线的至少一个支柱将电压施加到主体连接线。 施加电压到身体连接线可能会减少浮体效应。 公开了形成至少一个柱和电压源之间的连接的方法。 还公开了包括这种连接的半导体器件。

公开(公告)号：US20240381628A1

公开(公告)日：2024-11-14

申请号：US18659367

申请日：2024-05-09

Applicant: Micron Technology, Inc.

Inventor： Srinivas Pulugurtha ,  Anthony J. Kanago

IPC: H10B12/00

Abstract: A variety of applications can include a memory device having a memory array region on a memory die and a periphery to the memory array region on the memory die, where the periphery can include a fully depleted silicon-on-insulator (FDSOI) complementary metal-oxide-semiconductor (CMOS) device. A metal shield can be integrated in the memory array region, where the metal shield is structured as a shield to digit lines of the memory array. A metal body plate in the periphery can be structured as a back gate to the FDSOI CMOS device.

公开(公告)号：US11839073B2

公开(公告)日：2023-12-05

申请号：US17961282

申请日：2022-10-06

Applicant: Micron Technology, Inc.

Inventor： Srinivas Pulugurtha ,  Durai Vishak Nirmal Ramaswamy

IPC: G11C11/408 ,  H10B12/00 ,  G11C11/4097 ,  G11C11/4093 ,  G11C11/4091

CPC classification number: H10B12/50 ,  G11C11/4097 ,  H10B12/01 ,  G11C11/408 ,  G11C11/4091 ,  G11C11/4093

Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes a memory cell, first, second, and third data lines, and first and second access lines. Each of the first, second, and third data lines includes a length extending in a first direction. Each of the first and second access lines includes a length extending in a second direction. The memory cell includes a first transistor including a charge storage structure, and a first channel region electrically separated from the charge storage structure, and a second transistor including a second channel region electrically coupled to the charge storage structure. The first data line is electrically coupled to the first channel region. The second data line is electrically coupled to the first channel region. The third data line is electrically coupled to the second channel region, the second channel region being between the charge storage structure and the third data line. The first access line is located on a first level of the apparatus and separated from the first channel by a first dielectric. The second access line is located on a second level of the apparatus and separated from the second channel by a second dielectric. The charge storage structure is located on a level of the apparatus between the first and second levels.

公开(公告)号：US11581317B2

公开(公告)日：2023-02-14

申请号：US17362790

申请日：2021-06-29

Applicant: Micron Technology, Inc.

Inventor： Sanh D. Tang ,  Srinivas Pulugurtha ,  Richard J. Hill ,  Yunfei Gao ,  Nicholas R. Tapias ,  Litao Yang ,  Haitao Liu

IPC: H01L27/108

Abstract: Some embodiments include an integrated assembly having digit lines which extend along a first direction, and which are spaced from one another by intervening regions. Each of the intervening regions has a first width along a cross-section. Pillars extend upwardly from the digit lines; and the pillars include transistor channel regions extending vertically between upper and lower source/drain regions. Storage elements are coupled with the upper source/drain regions. Wordlines extend along a second direction which crosses the first direction. The wordlines include gate regions adjacent the channel regions. Shield lines are within the intervening regions and extend along the first direction. The shield lines may be coupled with at least one reference voltage node. Some embodiments include methods of forming integrated assemblies.

公开(公告)号：US11538809B2

公开(公告)日：2022-12-27

申请号：US17007327

申请日：2020-08-31

Applicant: Micron Technology, Inc.

Inventor： Kamal M. Karda ,  Deepak Chandra Pandey ,  Litao Yang ,  Srinivas Pulugurtha ,  Yunfei Gao ,  Haitao Liu

IPC: H01L27/108 ,  H01L29/06 ,  H01L29/423 ,  H01L29/786 ,  H01L29/66 ,  H01L49/02 ,  H01L21/02

Abstract: Systems, methods and apparatus are provided for an array of vertically stacked memory cells having horizontally oriented access devices having a first source/drain region and a second source drain region separated by a channel region, and gates opposing the channel region, vertically oriented access lines coupled to the gates and separated from a channel region by a gate dielectric. The memory cells have horizontally oriented storage nodes coupled to the second source/drain region and horizontally oriented digit lines coupled to the first source/drain regions. In one example, an insulator material is formed on a surface of the first source/drain region and a conductor material formed on the insulator material to form a metal insulator semiconductor (MIS) interface between the horizontally oriented digit lines and the first source/drain regions of the horizontally oriented access devices.

公开(公告)号：US20220077320A1

公开(公告)日：2022-03-10

申请号：US17017426

申请日：2020-09-10

Applicant: Micron Technology, Inc.

Inventor： Srinivas Pulugurtha ,  Litao Yang ,  Haitao Liu ,  Kamal M. Karda

IPC: H01L29/786 ,  H01L29/51 ,  H01L29/49 ,  H01L27/108 ,  H01L27/11514

Abstract: Some embodiments include integrated memory. The integrated memory includes a first series of first conductive structures and a second series of conductive structures. The first conductive structures extend along a first direction. The second conductive structures extend along a second direction which crosses the first direction. Pillars of semiconductor material extend upwardly from the first conductive structures. Each of the pillars includes a lower source/drain region, an upper source/drain region, and a channel region between the lower and upper source/drain regions. The lower source/drain regions are coupled with the first conductive structures. Insulative material is adjacent sidewall surfaces of the pillars. The insulative material includes ZrOx, where x is a number greater than 0. The second conductive structures include gating regions which are spaced from the channel regions by at least the insulative material. Storage elements are coupled with the upper source/drain regions.

公开(公告)号：US20220069082A1

公开(公告)日：2022-03-03

申请号：US16952774

申请日：2020-11-19

Applicant: Micron Technology, Inc.

Inventor： Srinivas Pulugurtha ,  Jaydip Guha ,  Scott E. Sills ,  Yi Fang Lee

IPC: H01L29/10 ,  H01L29/24 ,  H01L27/06 ,  H01L27/11502 ,  H01L27/108 ,  H01L21/8234

Abstract: Some embodiments include a transistor having an active region containing semiconductor material. The semiconductor material includes at least one element selected from Group 13 of the periodic table in combination with at least one element selected from Group 16 of the periodic table. The active region has a first region, a third region offset from the first region, and a second region between the first and third regions. A gating structure is operatively adjacent to the second region. A first carrier-concentration-gradient is within the first region, and a second carrier-concentration-gradient is within the third region. Some embodiments include methods of forming integrated assemblies.