摘要:
A CVD method is to form a silicon nitride film on a target substrate (W). The method includes heating the substrate (W) accommodated in a process container (8), at a process temperature, and supplying a process gas including hexaethylamino-disilane gas and ammonia gas onto the substrate (W) heated at the process temperature, thereby depositing a silicon nitride film on the substrate (W).
摘要:
In a motor stator, teeth radially project from an annular stator core, and a plurality of slots formed between adjacent teeth are skewed. Phase windings alternately pass through slots having different skew directions, wherein the length of bridging portions, which do not contribute to generation of torque, is short and the length of the portions which are located in the slots, and which contribute to the generation of torque, is long. Further, the phase windings are bent at an obtuse angle at opposite ends of the bridging portions.
摘要:
The stator includes core back iron cores disposed on outer circumferential sides between a plurality of teeth iron cores disposed at regular intervals of a predetermined distance in a predetermined circumferential direction. A stator winding is disposed on inner circumferential sides between the plurality of teeth iron cores. The stator winding is constituted by a plurality of wire bundles each of which is a bundle of a predetermined number of electric wires and which are connected in parallel with one another. The wire bundles are set so that the number of electric wires constituting a wire bundle located on the inner circumferential side between adjacent teeth iron cores is smaller than the number of electric wires constituting a wire bundle located on the outer circumferential side. Hence, the ratio (L/A) of the circumferential length L of each wire bundle to the sectional area A thereof is set at a value in a predetermined allowable range.
摘要:
The frequency divider includes a first or prescaling counter which selects between first and second frequency division factors, in response to a first control signal, and then divides an input signal frequency responsive to the first control signal. A second and programmable counter frequency divides the output of the first or prescaling counter by a third frequency-division factor. A third and programmable counter frequency divides the output of the first counter by a fourth frequency-division factor which is smaller than the third frequency-division factor. A switching control circuit then converts the output of the third counter and supplies the converted signal to the first counter, as the first control signal. The digital frequency divider is suitable for use a part of a phase-locked loop frequency synthesizer.
摘要:
A film deposition apparatus includes a vacuum chamber into which first and second gases are sequentially supplied for a plural times, a rotation table including a first surface having a receiving area and rotating the receiving area inside the vacuum chamber, a first part supplying the first gas to a first region, a second part supplying the second gas to a second region separated from the first region in a peripheral direction of the rotation table via a separation region, a plasma gas part supplying a plasma generation gas into a plasma region inside the vacuum chamber, an antenna facing the first surface of the rotation table and generating plasma from the plasma generation gas inside a plasma space by inductive coupling, and a faraday shield being grounded and provided between the antenna and the plasma space and including slits aligned in a direction perpendicularly intersecting the antenna.
摘要:
There is provided an electronic device transfer apparatus which has an excellent capacity of transferring DUTs between trays.An electronic device transfer apparatus, which transfers DUTs between trays, includes a device conveying unit. The device conveying unit includes a plurality of shuttles which hold the DUTs, an endless first guide rail which guides the shuttles, and first to third feeders which move the shuttles on the first guide rail. The shuttles are movable on the first guide rail over the entire circumference of the rail.
摘要:
A swing arm (25) including a pivot portion (57) pivotally supported by a vehicle body frame (2) and an arm portion (100) extending from the pivot portion (57) towards a back side of a vehicle body. The arm portion (100) includes a box-shaped case (58) being integrally formed with the pivot portion (57) and having one side in a width direction of the vehicle body opened, and a case cover (59). A harness (64) pulled out from the motor (60) is fixedly supported on the case (58) side at a first position proximate to the motor (60), and extended to a control device (52) at a front side of the vehicle body from the arm portion (100) through a grommet (66, 67) arranged at a front wall (597) of the case cover (59) at a second position on the pivot portion (57) side.
摘要:
An air bag jacket includes a first portion corresponding to a breast and an upper back portion of a user in a wearing state and a second portion corresponding to a belly and a waist of the user in a wearing state. A recessed portion is cut upwardly from a skirt is formed in the second portion at a position corresponding to either a right or left side of the user. An inflator is arranged on the inside of the recessed portion.
摘要:
In a continuous paper duplex printer, during duplex printing, a printer controller provides image data for odd-numbered and even numbered pages to front surface and back surface image processing apparatuses respectively, and a printing engine prints an image of an odd-numbered page on the front of continuous paper and parallelly forms an image of an even-numbered page different from an even-numbered page subsequent to the odd-numbered page on the back of the front of the continuous paper based on the image data processed by the processing apparatuses. In the continuous paper duplex printer, during single sided printing, the printer controller provides image data for odd-numbered and even numbered pages to the processing apparatuses, but when the image data is provided to one of the processing apparatuses, blank page image data or a blank page instruction is provided to another one of the processing apparatuses.
摘要:
A plasma process apparatus for processing a substrate by using plasma including a vacuum chamber in which the processing of the substrate is performed, a turntable inside the vacuum chamber, the turntable having at least one substrate receiving area, a rotation mechanism rotating the turntable, a gas supplying part supplying plasma generation gas to the substrate receiving area, a main plasma generating part ionizing the plasma generation gas, being provided in a position opposite to a passing area of the substrate receiving area, and extending in a rod-like manner from a center portion of the turntable to an outer circumferential portion of the turntable, an auxiliary plasma generating part compensating for insufficient plasma of the main plasma generating part, the auxiliary plasma generating part being separated from the main plasma generating part in a circumferential direction of the vacuum chamber, and an evacuating part evacuating the vacuum chamber.