公开(公告)号：US07245420B2

公开(公告)日：2007-07-17

申请号：US11654780

申请日：2007-01-18

Applicant: Sergei V. Govorkov ,  Gongxue Hua ,  Timur Misuryaev ,  Alexander O. Wiessner ,  Thomas Schmidt ,  Rainer Paetzel

Inventor： Sergei V. Govorkov ,  Gongxue Hua ,  Timur Misuryaev ,  Alexander O. Wiessner ,  Thomas Schmidt ,  Rainer Paetzel

IPC: H01S3/00 ,  G02B27/14

CPC classification number: G03F7/7055 ,  H01S3/0057 ,  H01S3/0835 ,  H01S3/235

Abstract: The lifetime of optical components used in deep-UV (DUV) excimer laser systems, including systems in a MOPA configuration, can be increased by reducing the intensity of pulses incident upon these components. In one approach, an output pulse can be “stretched” in order to reduce the peak power of the pulse. A pulse stretching component can be used, which can be mounted outside the laser enclosure with a horizontal beam path in order to provide a delay line with a minimum impact on the laser system footprint. The horizontal beam path also can minimize the number of optical components in the arm containing the high power beam. A beamsplitting prism can be used with the delay line to avoid the rapid degradation of coatings otherwise exposed to intense UV beams. The prism can expand the beam in the delay line in order to minimize beam intensity and losses due to reflection.

公开(公告)号：US07079565B2

公开(公告)日：2006-07-18

申请号：US10727718

申请日：2003-12-04

Applicant: Igor Bragin ,  Vadim Berger ,  Oleg Melnikov ,  Konstantin Aab ,  Juergen Baumler

Inventor： Igor Bragin ,  Vadim Berger ,  Oleg Melnikov ,  Konstantin Aab ,  Juergen Baumler

IPC: H01S3/097

CPC classification number: H01S3/038 ,  H01S3/09713 ,  H01S3/225

Abstract: Arcing can be minimized in a discharge chamber of an excimer or molecular fluorine laser system by utilizing an improved electrode structure. An electrode structure can include at least one ceramic spoiler positioned near the discharge region of the electrode. An insulating ceramic spoiler can reduce the effective area over which arcing can occur, and can reduce the likelihood of arcing by improving the flow of gas between the electrodes, such as by allowing for design flexibility and reducing the necessary height of a nose portion used to control the discharge area of the electrode. An improved blower design, which can utilize improved bearings and a dry film lubricant, can help to circulate the laser gas between the electrode structures, such as at a speed of at least 30 m/s in order to operate the laser at repetition rates of 4 kHz or higher.

Abstract translation: 通过利用改进的电极结构，在准分子或分子氟激光系统的放电室中可以使电弧最小化。 电极结构可以包括位于电极的放电区附近的至少一个陶瓷扰流板。 绝缘陶瓷扰流板可以减少可能发生电弧的有效面积，并且可以通过改善电极之间的气体流动来减少电弧的可能性，例如通过允许设计灵活性并减少用于 控制电极的放电面积。 可以使用改进的轴承和干膜润滑剂的改进的鼓风机设计可以帮助在电极结构之间循环激光气体，例如以至少30m / s的速度循环，以便以重复的速率操作激光 4 kHz或更高。

公开(公告)号：US06987790B2

公开(公告)日：2006-01-17

申请号：US10776137

申请日：2004-02-11

Applicant: Sergei V. Govorkov ,  Rainer Paetzel ,  Igor Bragin ,  Rainer Desor ,  Andreas Targsdorf ,  Andriy Knysh

Inventor： Sergei V. Govorkov ,  Rainer Paetzel ,  Igor Bragin ,  Rainer Desor ,  Andreas Targsdorf ,  Andriy Knysh

IPC: H01S3/22 ,  H01S3/223 ,  H01S3/097

CPC classification number: H01S3/225 ,  H01S3/09713 ,  H01S3/2366

Abstract: Precise timing control can be obtained for a gas discharge laser, such as an excimer or molecular fluorine laser, using a timed trigger ionization. Instead of using a standard approach to control the timing of the emission or amplification of an optical pulse using the discharge of the main electrodes, the timing of which can only be controlled to within about 10 ns, a trigger ionization pulse applied subsequent to the charging of the main electrodes can be used to control the timing of the discharge, thereby decreasing the timing variations to about 1 ns. Since ionization of the laser gas can consume relatively small amounts of energy, such a circuit can be based on a fast, high-voltage, solid state switch that is virtually free of jitter. Trigger ionization also can be used to synchronize the timing of dual chambers in a MOPA configuration. In one such approach, ionization trigger can include at least a portion of the optical pulse from the oscillator in a MOPA configuration.

Abstract translation: 使用定时触发电离可以为气体放电激光器（例如准分子激光或分子氟激光）获得准确的时序控制。 代替使用标准方法来控制使用主电极的放电的光脉冲的发射或放大的定时，其定时只能被控制在约10ns内，在充电之后施加的触发电离脉冲 的主电极可以用于控制放电的定时，从而将定时变化减小到大约1ns。 由于激光气体的离子化可以消耗相对少量的能量，所以这种电路可以基于实际上没有抖动的快速，高电压的固态开关。 触发电离也可用于同步MOPA配置中双室的时序。 在一种这样的方法中，电离触发可以包括来自MOPA配置中的来自振荡器的光脉冲的至少一部分。

公开(公告)号：US06970492B2

公开(公告)日：2005-11-29

申请号：US10438240

申请日：2003-05-14

Applicant: Sergei V. Govorkov ,  Gongxue Hua

Inventor： Sergei V. Govorkov ,  Gongxue Hua

IPC: H01S3/00 ,  H01S3/034 ,  H01S3/225 ,  H01S3/22 ,  H01S3/08

CPC classification number: H01S3/225 ,  H01S3/0014 ,  H01S3/034 ,  H01S3/2258

Abstract: A beam parameter monitoring unit for coupling with an excimer or molecular fluorine (F2) laser resonator that produces an output beam having a wavelength below 200 nm includes an on-line laser pulse energy detector. This, in turn, allows output pulse energy stabilization to the same degree of accuracy, which is crucial for stability of exposure dose and other process parameters in microlithography and industrial applications.

Abstract translation: 用于与产生具有低于200nm的波长的输出光束的准分子或分子氟（F 2 N 2）激光谐振器耦合的光束参数监测单元包括在线激光脉冲能量检测器。 这反过来又允许输出脉冲能量稳定达到相同的准确度，这对于微光刻和工业应用中的曝光剂量和其它工艺参数的稳定性至关重要。

公开(公告)号：US20030210715A1

公开(公告)日：2003-11-13

申请号：US10354945

申请日：2003-01-29

Applicant: Lambda Physik AG.

Inventor： Peter Lokai ,  Thomas Schroeder ,  Juergen Kleinschmidt ,  Uwe Stamm ,  Klaus Wolfgang Vogler

IPC: H01S003/10 ,  H01S003/22 ,  H01S003/223 ,  H01S003/08

CPC classification number: H01S3/225 ,  H01S3/1392

Abstract: A tunable laser system includes a gain medium and an optical resonator for generating a laser beam, and a spectral narrowing and tuning unit within the resonator. A detection and control unit controls a relative wavelength of the laser system. A wavelength calibration module calibrates the detection and control unit. The module contains more than one species each having an optical transition line within the tuning spectrum of the laser. A beam portion of the narrowed emission from the laser is directed through the wavelength calibration module and a beam portion is directed through the detection and control unit when the laser beam is scanned through the optical transition line of each of the species within the module. The detection and control unit is monitored and calibrated during the scanning.

公开(公告)号：US20030058429A1

公开(公告)日：2003-03-27

申请号：US10218690

申请日：2002-08-12

Applicant: Lambda Physik AG

Inventor： Guido Schriever

IPC: G03B001/00

CPC classification number: B82Y10/00 ,  G01J1/429 ,  G03F7/70033 ,  G03F7/70558 ,  H01L31/02161 ,  H01L31/02162 ,  H01L31/02325 ,  H01L31/1037 ,  H01L31/108

Abstract: A detector for use with an EUV photon source emitting around 11-15 nm includes at least one multilayer mirror for reflecting the beam along an optical path include a detector element, a filter for reducing the bandwidth of the beam, and the detector element. The detector element preferably comprises a Si pn diodes with doped dead region and zero surface recombination or PtSi-nSi barrier for increasing the long term stability of the detector.

Abstract translation: 用于发射约11-15nm的EUV光子源的检测器包括用于沿着光路反射光束的至少一个多层反射镜，包括检测器元件，用于减小光束的带宽的滤波器和检测器元件。 检测器元件优选地包括具有掺杂死区和零表面复合的Si pn二极管或用于增加检测器的长期稳定性的PtSi-nSi屏障。

公开(公告)号：US20020159207A1

公开(公告)日：2002-10-31

申请号：US10174187

申请日：2002-06-17

Applicant: Lambda Physik AG.

Inventor： Kay Zimmerman ,  Ulrich Rebhan

IPC: H02H003/00

CPC classification number: F24F7/00 ,  B23K26/1435 ,  B23K26/1438

Abstract: A ventilation system for industrial laser systems is disclosed which can minimize the cooling air intake required during normal operation. Adequate ventilation is maintained even if the housing is opened. Various sensors monitor the condition of the cooling air and can increase the air intake if required for cooling or safety. Such a ventilation system is of particular advantage for exciter lasers in microlithography applications because the consumption of conditioned clean room air is controlled by the actual needs of the laser device.

Abstract translation: 公开了用于工业激光系统的通风系统，其可以使正常操作期间所需的冷却空气进入最小化。 即使外壳打开，仍保持足够的通风。 各种传感器监测冷却空气的状况，如果冷却或安全需要，可以增加进气口。 这种通风系统对于微光刻应用中的激光器激光器具有特别的优点，因为经过激光装置的实际需要来控制空气净化室空气的消耗。

公开(公告)号：US20020031160A1

公开(公告)日：2002-03-14

申请号：US09922222

申请日：2001-08-01

Applicant: Lambda Physik AG

Inventor： Rainer Desor

IPC: H01S003/22 ,  H01S003/223

CPC classification number: H01S3/225 ,  H01S3/0975

Abstract: Method and system provide a variable delay between the external trigger pulse for a laser system and the light pulse such that the total delay is maintained at a substantially constant level and the overall delay between the external trigger pulse of the laser system and the light pulse is not effected by the HV, temperature change or other parameters such as material properties. The variable delay may be implemented with digital delay lines.

Abstract translation: 方法和系统提供激光系统的外部触发脉冲与光脉冲之间的可变延迟，使得总延迟保持在基本上恒定的水平，并且激光系统的外部触发脉冲与光脉冲之间的总体延迟是 不受HV，温度变化或其他参数如材料性能的影响。 可以用数字延迟线实现可变延迟。

公开(公告)号：US20020021729A1

公开(公告)日：2002-02-21

申请号：US09923770

申请日：2001-08-06

Applicant: Lambda Physik AG

Inventor： Klaus Vogler

IPC: H01S003/22 ,  H01S003/223

CPC classification number: H01S3/223 ,  H01S3/036 ,  H01S3/038 ,  H01S3/08009 ,  H01S3/22 ,  H01S3/2258

Abstract: A molecular fluorine (F2) laser system includes a seed oscillator and power amplifier. The seed oscillator includes a laser tube including multiple electrodes therein which are connected to a discharge circuit. The laser tube is part of an optical resonator for generating a laser beam including a first line of multiple characteristic emission lines around 157 nm. The laser tube is filled with a gas mixture including molecular fluorine and a buffer gas. A low pressure seed radiation generating gas lamp is alternatively used. The gas mixture is at a pressure below that which results in the generation of a laser emission including the first line around 157 nm having a natural linewidth of less than 0.5 pm. The power amplifier amplifies the power of the beam emitted by the seed oscillator to a desired power for applications processing.

Abstract translation: 分子氟（F2）激光系统包括种子振荡器和功率放大器。 种子振荡器包括连接到放电电路的包括多个电极的激光管。 激光管是用于产生激光束的光学谐振器的一部分，该激光束包括大约157nm的多个特征发射线的第一线。 激光管中填充有分子氟和缓冲气体的气体混合物。 替代地使用低压种子辐射产生气体灯。 气体混合物的压力低于导致产生包括具有小于0.5μm的自然线宽的157nm附近的第一线的激光发射的压力。 功率放大器将由种子振荡器发射的光束的功率放大到期望的功率以进行应用处理。

公开(公告)号：US07158553B2

公开(公告)日：2007-01-02

申请号：US10776404

申请日：2004-02-11

Applicant: Sergei V. Govorkov ,  Alexander O. Wiessner ,  Rainer Paetzel ,  Igor Bragin

Inventor： Sergei V. Govorkov ,  Alexander O. Wiessner ,  Rainer Paetzel ,  Igor Bragin

IPC: H01S3/22

CPC classification number: H01S3/2366 ,  H01S3/10 ,  H01S3/225 ,  H01S3/2333

Abstract: Pulse parameters of a gas discharge laser system can be optimized and controlled for precision applications such as microlithography. Important laser pulse parameters typically vary in the beginning of a pulse burst, and the directionality of the output beam typically varies throughout the burst. In order to improve the performance of the laser system, the variation at the beginning of a pulse burst can be eliminated by extending the pulse pattern and shuttering the output during periods of significant parameter variation. A fast shutter such as an acousto-optical modulator can be used to prevent output during the burst transition processes. Elements such as acousto-optical cells also can be used in combination with a fast position sensor to steer the direction of the output beam, in order to adjust for variations in the direction of the beam between pulses in a burst.

Abstract translation: 可以优化和控制气体放电激光系统的脉冲参数，用于精密应用，如微光刻。 重要的激光脉冲参数通常在脉冲脉冲串的开始时变化，并且输出光束的方向性通常在整个脉冲串中变化。 为了提高激光系统的性能，可以通过在显着的参数变化期间延长脉冲模式并对输出进行快门来消除脉冲脉冲串开始时的变化。 诸如声光调制器之类的快门可用于在突发转换过程期间防止输出。 诸如声光单元的元件也可以与快速位置传感器组合使用以控制输出光束的方向，以便调整在脉冲串中的脉冲之间的波束方向上的变化。