公开(公告)号：US08796791B2

公开(公告)日：2014-08-05

申请号：US13888920

申请日：2013-05-07

申请人： Axel Franke ,  Patrick Wellner ,  Lars Tebje

发明人： Axel Franke ,  Patrick Wellner ,  Lars Tebje

IPC分类号： G01P15/08

CPC分类号： B81B3/0075 ,  B81C1/00626 ,  B81C1/00674 ,  B81C2201/0112 ,  B81C2201/014 ,  B81C2203/0109

摘要： Measures are proposed by which the design freedom is significantly increased in the case of the implementation of the micromechanical structure of the MEMS element of a component, which includes a carrier for the MEMS element and a cap for the micromechanical structure of the MEMS element, the MEMS element being mounted on the carrier via a standoff structure. The MEMS element is implemented in a layered structure, and the micromechanical structure of the MEMS element extends over at least two functional layers of this layered structure, which are separated from one another by at least one intermediate layer.

摘要翻译： 提出的措施是，在实现元件的MEMS元件的微机械结构的情况下，设计自由度显着增加，其包括用于MEMS元件的载体和用于MEMS元件的微机械结构的盖， MEMS元件通过支架结构安装在载体上。 MEMS元件以分层结构实现，并且MEMS元件的微机械结构在该分层结构的至少两个功能层上延伸，所述功能层通过至少一个中间层彼此分离。

公开(公告)号：US20110012219A1

公开(公告)日：2011-01-20

申请号：US12680503

申请日：2007-09-28

申请人： Yen Hua Lin ,  Rihui He ,  Lingling Wu ,  Lauren Palmateer ,  David Heald

发明人： Yen Hua Lin ,  Rihui He ,  Lingling Wu ,  Lauren Palmateer ,  David Heald

IPC分类号： H01L31/0203 ,  H01L31/18

CPC分类号： B81C1/00285 ,  B81C1/00674

摘要： A MEMS device may be package with a desiccant to provide a moisture-free environment. In order to avoid undesirable effects on the MEMS device, the desiccant may be selected or treated so as to be compatible with a particular MEMS device. This treatment may include baking of the desiccant to as to cause outgassing of moisture or other undesirable material. The structure of the MEMS device may also be altered to improve compatibility with particular desiccants.

摘要翻译： MEMS器件可以用干燥剂包装以提供无湿度的环境。 为了避免对MEMS器件的不期望的影响，可以选择或处理干燥剂以便与特定的MEMS器件兼容。 这种处理可以包括烘烤干燥剂，以引起除湿或其它不期望的物质。 还可以改变MEMS器件的结构，以改善与特定干燥剂的相容性。

公开(公告)号：US20050164016A1

公开(公告)日：2005-07-28

申请号：US10918287

申请日：2004-08-13

申请人： Daniel Branagan ,  Timothy Hyde ,  James Fincke

发明人： Daniel Branagan ,  Timothy Hyde ,  James Fincke

IPC分类号： B32B15/04 ,  B81C1/00 ,  C23C14/16 ,  C23C14/58

CPC分类号： C23C14/16 ,  B81B7/0029 ,  B81C1/00674 ,  C22C33/00 ,  C22C33/003 ,  C22C45/02 ,  C23C14/5806 ,  Y10T428/24917 ,  Y10T428/263 ,  Y10T428/31

摘要： The invention includes methods of forming a metallic coating on a substrate which contains silicon. A metallic glass layer is formed over a silicon surface of the substrate. The invention includes methods of protecting a silicon substrate. The substrate is provided within a deposition chamber along with a deposition target. Material from the deposition target is deposited over at least a portion of the silicon substrate to form a protective layer or structure which contains metallic glass. The metallic glass comprises iron and one or more of B, Si, P and C. The invention includes structures which have a substrate containing silicon and a metallic layer over the substrate. The metallic layer contains less than or equal to about 2 weight % carbon and has a hardness of at least 9.2 GPa. The metallic layer can have an amorphous microstructure or can be devitrified to have a nanocrystalline microstructure.

摘要翻译： 本发明包括在含有硅的衬底上形成金属涂层的方法。 在衬底的硅表面上形成金属玻璃层。 本发明包括保护硅衬底的方法。 衬底与沉积靶一起设置在沉积室内。 来自沉积靶的材料沉积在硅衬底的至少一部分上以形成包含金属玻璃的保护层或结构。 金属玻璃包括铁和B，Si，P和C中的一种或多种。本发明包括在衬底上具有含硅和金属层的衬底的结构。 金属层含有小于或等于约2重量％的碳，并且具有至少9.2GPa的硬度。 金属层可以具有无定形微观结构，或者可以失透以具有纳米晶体微观结构。

公开(公告)号：US06921680B2

公开(公告)日：2005-07-26

申请号：US10331319

申请日：2002-12-30

申请人： Roger A. Robbins

发明人： Roger A. Robbins

IPC分类号： B81C99/00 ,  H01L21/00

CPC分类号： B81C1/00674 ,  B81C1/00944

摘要： A nebulization system, which creates a uniform fog of tiny suspended liquid droplets, to lubricate the surfaces of MEMS devices. These droplets fall over the edge of a baffle and are then mixed with an umbrella-like sheet of N2 turbulation gas to generate a uniform cloud of droplets that fill a passivation chamber. The MEMS device is then positioned in this uniform cloud of lubricant droplets for a specified amount of time, thereby uniformly lubricating all the surfaces of the device. The system uses a laser monitoring approach to control the uniformity of the lubricant cloud by providing feedback to the system to control the flow of gases. The system also equalizes the pressure around the sample device seal to prevent gases from entering or exiting the chamber and thereby influencing the environment inside the chamber.

公开(公告)号：US20030129782A1

公开(公告)日：2003-07-10

申请号：US10331319

申请日：2002-12-30

发明人： Roger A. Robbins

IPC分类号： H01L021/00

CPC分类号： B81C1/00674 ,  B81C1/00944

摘要： A nebulization system, which creates a uniform fog of tiny suspended liquid droplets, to lubricate the surfaces of MEMS devices. These droplets fall over the edge of a baffle and are then mixed with an umbrella-like sheet of N2 turbulation gas to generate a uniform cloud of droplets that fill a passivation chamber. The MEMS device is then positioned in this uniform cloud of lubricant droplets for a specified amount of time, thereby uniformly lubricating all the surfaces of the device. The system uses a laser monitoring approach to control the uniformity of the lubricant cloud by providing feedback to the system to control the flow of gases. The system also equalizes the pressure around the sample device seal to prevent gases from entering or exiting the chamber and thereby influencing the environment inside the chamber.

摘要翻译： 雾化系统产生微小悬浮液滴的均匀雾，以润滑MEMS器件的表面。 这些液滴落在挡板的边缘上，然后与N 2混浊气体的伞状片混合，以产生填充钝化室的均匀云滴。 然后将MEMS器件定位在该均匀的润滑剂液滴中一段特定的时间，从而均匀润滑器件的所有表面。 该系统使用激光监测方法来控制润滑剂云的均匀性，通过向系统提供反馈来控制气体的流动。 该系统还使样品装置密封周围的压力相等，以防止气体进入或离开室，从而影响室内的环境。

公开(公告)号：US20170267517A1

公开(公告)日：2017-09-21

申请号：US15250519

申请日：2016-08-29

申请人： KABUSHIKI KAISHA TOSHIBA

发明人： Akira FUJIMOTO ,  Naofumi NAKAMURA ,  Tamio IKEHASHI

IPC分类号： B81B3/00 ,  B81C1/00

CPC分类号： B81B3/0075 ,  B81B2201/0221 ,  B81B2201/0235 ,  B81B2203/0307 ,  B81B2203/0315 ,  B81B2207/015 ,  B81C1/00293 ,  B81C1/00674 ,  B81C2201/0123 ,  B81C2201/0132 ,  B81C2201/053 ,  B81C2203/0136 ,  B81C2203/0145

摘要： According to one embodiment, an electronic device includes a base region, an element portion located on the base region, the element portion including a movable portion, and a protective film overlying the element portion and forming a cavity on an inner side of the protective film. The protective film includes a first protective layer and a second protective layer located on the first protective layer. A hole extends in a direction parallel to a main surface of the base region, and the second protective layer covers the hole.

公开(公告)号：US20170088415A1

公开(公告)日：2017-03-30

申请号：US14872123

申请日：2015-09-30

申请人： MEMS DRIVE, INC.

发明人： ROMAN GUTIERREZ ,  TONY TANG ,  XIAOLEI LIU ,  GUIQIN WANG ,  MATTHEW NG

IPC分类号： B81B7/00 ,  B81C1/00

CPC分类号： H01L21/76816 ,  B81B3/0045 ,  B81B7/0029 ,  B81B2203/0353 ,  B81C1/00674 ,  B81C1/00682 ,  B81C2201/0112 ,  B81C2201/0135 ,  H01L21/768 ,  H01L21/76898 ,  H01L23/485 ,  H01L2924/00 ,  H01L2924/00014 ,  H01L2924/0002 ,  H01L2924/1461 ,  H01L2924/181

摘要： A system and method for manipulating the structural characteristics of a MEMS device include etching a plurality of holes into the surface of a MEMS device, wherein the plurality of holes comprise one or more geometric shapes determined to provide specific structural characteristics desired in the MEMS device.

公开(公告)号：US09423591B2

公开(公告)日：2016-08-23

申请号：US14058814

申请日：2013-10-21

申请人： HOKUYO AUTOMATIC CO., LTD.

发明人： Toshihiro Mori ,  Norihiro Asada ,  Kazuo Takai

IPC分类号： G02B26/10 ,  G02B7/182 ,  F16F1/14 ,  H02K33/02 ,  G02B26/08 ,  B81C1/00

CPC分类号： G02B7/1821 ,  B81B2201/042 ,  B81B2203/0154 ,  B81C1/00674 ,  F16F1/14 ,  G02B26/0833 ,  H02K33/02 ,  H02P25/032

摘要： A metal elastic member to be used for beams 4 for supporting a movable unit 3 at respective ends with respect to a fixed unit 2 in a miniature machine including at least one movable unit 3, the fixed unit 2 and the beams 4 , and capable of swinging the movable unit about an axis P with the beams 4 serving as torsional rotation axes, includes a metal bar 4a having a predetermined length, a fixed unit pad 4b that is provided at a first end of the metal bar 4a and is fixed to the fixed unit 2, and a movable unit pad 4c formed on the other end side of the metal bar 4a and fixed to the movable unit 3. At least the metal bar 4a is molded to have a sectional area of 1 mm2 or less by using a physical or chemical processing method excluding a mechanical processing method and swings the movable unit 3 within a frequency of 150 Hz to 500 Hz.

摘要翻译： 一种用于在包括至少一个可移动单元3，固定单元2和梁4的微型机器中相对于固定单元2在相应端部处支撑可移动单元3的梁4的金属弹性构件，并且能够 以能够作为扭转轴的梁4围绕轴线P摆动可动单元包括具有预定长度的金属棒4a，固定单元垫4b设置在金属棒4a的第一端并固定到 固定单元2和形成在金属棒4a的另一端侧并固定到可移动单元3的可移动单元垫4c。至少金属棒4a通过使用金属棒4a成型为具有1mm 2以下的截面积 物理或化学处理方法，不包括机械处理方法，并且在150Hz至500Hz的频率内摆动可移动单元3。

公开(公告)号：US09212048B2

公开(公告)日：2015-12-15

申请号：US13890363

申请日：2013-05-09

申请人： Johannes Classen ,  Heribert Weber ,  Mirko Hattass ,  Daniel Christoph Meisel

发明人： Johannes Classen ,  Heribert Weber ,  Mirko Hattass ,  Daniel Christoph Meisel

IPC分类号： B81B3/00 ,  B81C1/00

CPC分类号： B81B3/0075 ,  B81B2207/07 ,  B81B2207/096 ,  B81C1/00238 ,  B81C1/00674 ,  B81C2203/0109 ,  H01L2224/16225 ,  H01L2924/19105

摘要： A hybridly integrated component includes an ASIC element having a processed front side, a first MEMS element having a micromechanical structure extending over the entire thickness of the first MEMS substrate, and a first cap wafer mounted over the micromechanical structure of the first MEMS element. At least one structural element of the micromechanical structure of the first MEMS element is deflectable, and the first MEMS element is mounted on the processed front side of the ASIC element such that a gap exists between the micromechanical structure and the ASIC element. A second MEMS element is mounted on the rear side of the ASIC element. The micromechanical structure of the second MEMS element extends over the entire thickness of the second MEMS substrate and includes at least one deflectable structural element.

摘要翻译： 混合集成部件包括具有经处理的前侧的ASIC元件，具有在第一MEMS基板的整个厚度上延伸的微机械结构的第一MEMS元件和安装在第一MEMS元件的微机械结构上的第一盖晶片。 第一MEMS元件的微机械结构的至少一个结构元件是可偏转的，并且第一MEMS元件安装在ASIC元件的经处理的正面上，使得在微机械结构和ASIC元件之间存在间隙。 第二个MEMS元件安装在ASIC元件的后侧。 第二MEMS元件的微机械结构在第二MEMS基板的整个厚度上延伸，并且包括至少一个可偏转的结构元件。

公开(公告)号：US20130285166A1

公开(公告)日：2013-10-31

申请号：US13869692

申请日：2013-04-24

申请人： Johannes Classen

发明人： Johannes Classen

IPC分类号： B81B3/00 ,  B81C1/00

CPC分类号： B81B3/004 ,  B81B3/0018 ,  B81B3/0075 ,  B81B7/008 ,  B81C1/00134 ,  B81C1/00246 ,  B81C1/00261 ,  B81C1/00674 ,  B81C3/001 ,  B81C2203/0109 ,  B81C2203/0735 ,  B81C2203/0771 ,  H01L24/13 ,  H01L2224/11 ,  H01L2224/48463

摘要： Hybrid integrated components including an MEMS element and an ASIC element are described, whose capacitor system allows both signal detection with comparatively high sensitivity and sensitive activation of the micromechanical structure of the MEMS element. The hybrid integrated component includes an MEMS element having a micromechanical structure which extends over the entire thickness of the MEMS substrate. At least one structural element of this micromechanical structure is deflectable and is operationally linked to at least one capacitor system, which includes at least one movable electrode and at least one stationary electrode. Furthermore, the component includes an ASIC element having at least one electrode of the capacitor system. The MEMS element is mounted on the ASIC element, so that there is a gap between the micromechanical structure and the surface of the ASIC element. According to the invention, at least one electrode of the capacitor system is separated from the layered structure of the ASIC element and instead mechanically and electrically connected to the deflectable structural element of the MEMS element, so that this electrode functions as a movable electrode of the capacitor system.

摘要翻译： 描述了包括MEMS元件和ASIC元件的混合集成部件，其电容器系统允许具有较高灵敏度的信号检测和MEMS元件的微机械结构的敏感激活。 混合集成部件包括具有在MEMS基板的整个厚度上延伸的微机械结构的MEMS元件。 该微机械结构的至少一个结构元件是可偏转的并且可操作地连接至至少一个电容器系统，其包括至少一个可移动电极和至少一个固定电极。 此外，该部件包括具有电容器系统的至少一个电极的ASIC元件。 MEMS元件安装在ASIC元件上，使得微机械结构和ASIC元件的表面之间存在间隙。 根据本发明，电容器系统的至少一个电极与ASIC元件的分层结构分离，而是机械地和电连接到MEMS元件的可偏转结构元件，使得该电极用作可移动电极 电容器系统。