公开(公告)号：US4820932A

公开(公告)日：1989-04-11

申请号：US58207

申请日：1987-06-04

Applicant: John W. V. Miller

Inventor： John W. V. Miller

IPC: G01N21/89 ,  G01N21/88

CPC classification number: G01N21/8903 ,  G01N2021/8887 ,  G01N2021/8896 ,  G01N2201/102

Abstract: A system for line scan processing video signals from a linear array of photoelectric cells so that the signals for individual cells and individual scan sweep are selectively utilized according to sweep number and cell numbers. A signal window is defined for each sweep individually at a predetermined cell for a beginning of the effective video signal and is terminated at another predetermined cell for the end of the effective video signal so that the video signal is processed for only that portion of each sweep covering the area of interest. In optical inspection of an article the significance of changes in the ratio of light intensity at particular cells from the background light intensity is adjusted by sweep and cell number so that such changes which are predictable in certain locations on the article must exceed threshold levels which are different than for other locations. This enables compensation in the inspection of a number of similar articles for regularly occurring marks on the areas of inspection for those articles.

Abstract translation: 一种用于线扫描处理来自光电单元的线性阵列的视频信号的系统，使得根据扫描数和单元号选择性地利用单个单元的信号和单独的扫描扫描。 在预定的单元处分别为每个扫描定义一个信号窗，用于开始有效的视频信号，并且在另一个预定的单元中终止有效的视频信号的结束，以使视频信号仅对每个扫描的那部分进行处理 涵盖感兴趣的领域。 在物品的光学检查中，通过扫描和细胞数来调整特定细胞的光强度与背景光强度之比的变化的重要性，使得在物品的某些位置可预测的这些变化必须超过阈值水平， 不同于其他地点。 这样可以在检查这些物品的检查领域时，对一些类似的物品进行定期检查的赔偿。

公开(公告)号：US20180114306A1

公开(公告)日：2018-04-26

申请号：US15714468

申请日：2017-09-25

Applicant: NuFlare Technology, Inc.

Inventor： Riki OGAWA

IPC: G06T7/00 ,  G02B5/30 ,  G02B27/10 ,  G02B15/15 ,  G02B27/09 ,  H04N5/225 ,  G06T5/50 ,  G01N21/956

CPC classification number: G06T7/001 ,  G01N21/956 ,  G01N21/95607 ,  G01N2021/8848 ,  G01N2021/8896 ,  G01N2021/95676 ,  G01N2201/0683 ,  G02B5/3025 ,  G02B5/3083 ,  G02B15/15 ,  G02B21/0092 ,  G02B27/0938 ,  G02B27/10 ,  G02B27/283 ,  G03F1/84 ,  G03F7/70491 ,  G06T5/50 ,  G06T2207/10148 ,  G06T2207/30148 ,  H04N5/2254 ,  H04N5/2258

Abstract: A polarized image acquisition apparatus includes a division type half-wave plate, located opposite to the mask substrate with respect to an objective lens and near an objective lens pupil position, to arrange P and S polarized waves of the transmitted light having passed through the objective lens to be mutually orthogonal, a Rochon prism to separate trajectories of P and S polarized waves, an imaging lens to form images of P and S polarized waves having passed through the Rochon prism at image formation positions different from each other, a mirror, in a case where one of P and S polarized waves is focused/formed at one of the different image formation positions, to reflect the other wave at the other position, a first sensor to capture an image of one of P and S polarized waves, and a second sensor to capture an image of the other wave.

公开(公告)号：US09891177B2

公开(公告)日：2018-02-13

申请号：US14506321

申请日：2014-10-03

Applicant: KLA-Tencor Corporation

Inventor： Jijen Vazhaeparambil ,  Guoheng Zhao ,  Daniel Kavaldjiev ,  Anatoly Romanovsky ,  Ivan Maleev ,  Christian Wolters ,  Stephen Biellak ,  Bret Whiteside ,  Donald Pettibone ,  Yung-Ho Alex Chuang ,  David W. Shortt

IPC: G01N21/88 ,  G01N21/95 ,  G06T7/00 ,  G01N21/956

CPC classification number: G01N21/8851 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/8887 ,  G01N2021/8896 ,  G01N2201/06113 ,  G01N2201/103 ,  G01N2201/12 ,  G06T7/0004 ,  G06T2207/10004 ,  G06T2207/30148

Abstract: A wafer scanning system includes imaging collection optics to reduce the effective spot size. Smaller spot size decreases the number of photons scattered by the surface proportionally to the area of the spot. Air scatter is also reduced. TDI is used to produce a wafer image based on a plurality of image signals integrated over the direction of linear motion of the wafer. An illumination system floods the wafer with light, and the task of creating the spot is allocated to the imaging collection optics.

公开(公告)号：US20160097727A1

公开(公告)日：2016-04-07

申请号：US14506321

申请日：2014-10-03

Applicant: KLA-Tencor Corporation

Inventor： Jijen Vazhaeparambil ,  Guoheng Zhao ,  Daniel Kavaldjiev ,  Anatoly Romanovsky ,  Ivan Maleev ,  Christian Wolters ,  Stephen Biellak ,  Bret Whiteside ,  Donald Pettibone ,  Yung-Ho Alex Chuang ,  David W. Shortt

IPC: G01N21/88 ,  G06T7/00 ,  G01N21/95

CPC classification number: G01N21/8851 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/8887 ,  G01N2021/8896 ,  G01N2201/06113 ,  G01N2201/103 ,  G01N2201/12 ,  G06T7/0004 ,  G06T2207/10004 ,  G06T2207/30148

Abstract: A wafer scanning system includes imaging collection optics to reduce the effective spot size. Smaller spot size decreases the number of photons scattered by the surface proportionally to the area of the spot. Air scatter is also reduced. TDI is used to produce a wafer image based on a plurality of image signals integrated over the direction of linear motion of the wafer. An illumination system floods the wafer with light, and the task of creating the spot is allocated to the imaging collection optics.

Abstract translation: 晶片扫描系统包括成像采集光学器件以减少有效光斑尺寸。 较小的斑点尺寸使得表面散射的光子数量与斑点的面积成比例地减小。 空气散射也减少。 TDI用于基于在晶片的线性运动方向上积分的多个图像信号产生晶片图像。 照明系统用光淹没晶片，创建光斑的任务被分配给成像采集光学元件。

公开(公告)号：US20150293034A1

公开(公告)日：2015-10-15

申请号：US14440029

申请日：2013-10-23

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Masami Makuuchi ,  Takahiro Jingu

IPC: G01N21/95 ,  G01J1/44

CPC classification number: G01N21/9501 ,  G01J1/44 ,  G01J2001/4238 ,  G01N21/8851 ,  G01N21/956 ,  G01N2021/8896

Abstract: To provide a technique for improving a detection precision of the inspection device. The inspection device 100 includes an irradiation unit 101 that irradiates a beam by pulse oscillation onto a surface of the sample from a laser light source, a detection unit 102 on which light from the surface of the sample by the irradiation is made incident to generate and output a detection signal, and a detection control unit 104 that generates a gate signal (G) for controlling an input/output of the detection unit 102 in synchronization with a timing of the pulse oscillation of the irradiation unit 101, and applies the gate signal (G) to the detection unit 102. The detection unit 102 allows the light to be made incident thereon at a timing in accordance with the gate signal (G), and generates and outputs a detection signal.

Abstract translation: 提供一种用于提高检查装置的检测精度的技术。 检查装置100包括：照射单元101，其通过脉冲振荡将光束从激光光源照射到样品的表面;检测单元102，通过照射使来自样品表面的光入射到其上， 输出检测信号;以及检测控制单元104，其与照射单元101的脉冲振荡的定时同步地生成用于控制检测单元102的输入/输出的栅极信号（G），并施加栅极信号 （G）发送到检测单元102.检测单元102允许在根据门信号（G）的定时使光入射到其上，并且产生并输出检测信号。

公开(公告)号：US09110033B2

公开(公告)日：2015-08-18

申请号：US12570527

申请日：2009-09-30

Applicant: Richard E. Bills ,  Neil Judell ,  Klaus R. Freischlad ,  James P. McNiven

Inventor： Richard E. Bills ,  Neil Judell ,  Klaus R. Freischlad ,  James P. McNiven

IPC: G01N21/88 ,  G01N21/21 ,  G01N21/47 ,  G01N21/55 ,  G01N21/95 ,  G01N21/956 ,  G06T7/00

CPC classification number: G01N21/9501 ,  G01N21/21 ,  G01N21/47 ,  G01N21/4738 ,  G01N21/474 ,  G01N21/55 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/95 ,  G01N21/956 ,  G01N2021/4707 ,  G01N2021/4711 ,  G01N2021/4792 ,  G01N2021/556 ,  G01N2021/8809 ,  G01N2021/8848 ,  G01N2021/8864 ,  G01N2021/8877 ,  G01N2021/8896 ,  G01N2201/0612 ,  G01N2201/105 ,  G06T7/0004 ,  G06T2207/30148 ,  Y10T29/49826

Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The optical collection and detection system features, in the front quartersphere, a light channel assembly for collecting light reflected from the surface of the workpiece, and a front collector and wing collectors for collecting light scattered from the surface, to greatly improve the measurement capabilities of the system. The light channel assembly has a switchable edge exclusion mask and a reflected light detection system for improved detection of the reflected light.

Abstract translation: 提供了表面检查系统，以及相关的部件和方法。 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 光学收集和检测系统在前四分之一区域中具有用于收集从工件表面反射的光的光通道组件，以及用于收集从表面散射的光的前收集器和翼收集器，以大大提高测量能力 系统。 光通道组件具有可切换的边缘排除掩模和用于改进反射光检测的反射光检测系统。

公开(公告)号：US20150012249A1

公开(公告)日：2015-01-08

申请号：US14378227

申请日：2013-01-21

Applicant: Hitachi Ltd.

Inventor： Wen Li ,  Hisaaki Kanai ,  Yutaka Uematsu ,  Masami Makuuchi

IPC: H04B1/10 ,  G01R29/26

CPC classification number: H04B1/1027 ,  G01N21/8851 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/8896 ,  G01R29/26 ,  H03G3/32

Abstract: In an environment in which signal-to-noise is poor, a method and a system configuration for power-saving, low-cost, and general minute signal detection are provided. The system includes a circuit that converts and amplifies an input signal, a nonlinear analog front-end circuit that determines the existence of a minute signal from the input signal and that outputs information on the existence of the same as an event signal, an analog-to-digital-conversion circuit that drives operation-mode control based on the event signal and performs analog-to-digital conversion on the converted-and-amplified input signal, a data-transfer circuit that drives the operation-mode control by the event signal and transfers the analog-to-digital converted signal, a digital-signal-processing circuit that drives the operation-mode control by the event signal and performs digital-signal processing on the signal transmitted from the data-transfer circuit and detects the signal, and a parameter-control circuit that controls a characteristic parameter of the nonlinear analog front-end circuit.

Abstract translation: 在信号噪声较差的环境中，提供了省电，低成本，一般的微小信号检测的方法和系统配置。 该系统包括转换和放大输入信号的电路，非线性模拟前端电路，其确定来自输入信号的微小信号的存在，并且输出关于存在与事件信号相同的信息;模拟 - 数字转换电路，其基于事件信号驱动操作模式控制，并对经转换和放大的输入信号执行模数转换，数据传输电路驱动事件的操作模式控制 信号并传送模数转换信号，数字信号处理电路，通过事件信号驱动操作模式控制，并对从数据传输电路发送的信号执行数字信号处理，并检测信号 以及控制非线性模拟前端电路的特性参数的参数控制电路。

公开(公告)号：US20130293879A1

公开(公告)日：2013-11-07

申请号：US13993888

申请日：2011-11-08

Applicant: Toshifumi Honda ,  Yukihiro Shibata ,  Atsushi Taniguchi

Inventor： Toshifumi Honda ,  Yukihiro Shibata ,  Atsushi Taniguchi

IPC: G01N21/95

CPC classification number: G01N21/00 ,  G01N21/8851 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/8896

Abstract: To process a signal from a plurality of detectors without being affected by a variation in the height of a substrate, and to detect more minute defects on the substrate, a defect inspection device is provided with a photoelectric converter having a plurality of rows of optical sensor arrays in each of first and second light-collecting/detecting unit and a processing unit for processing a detection signal from the first and the second light-collecting/detecting unit to determine the extent to which the positions of the focal points of the first and the second light-collecting/detecting unit are misaligned with respect to the surface of a test specimen, and processing the detection signal to correct a misalignment between the first and the second light-collecting/detecting unit, and the corrected detection signal outputted from the first and the second light-collecting/detecting unit are combined together to detect the defects on the test specimen.

Abstract translation: 为了处理来自多个检测器的信号而不受基板高度的变化的影响，并且在基板上检测更多的微小缺陷，缺陷检查装置设置有具有多行光学传感器的光电转换器 在第一和第二集光/检测单元中的每一个中的阵列，以及处理单元，用于处理来自第一和第二聚光/检测单元的检测信号，以确定第一和第二聚光/ 第二聚光/检测单元相对于试样的表面不对准，并且处理检测信号以校正第一和第二聚光/检测单元之间的未对准，并且校正的检测信号从 第一和第二聚光/检测单元组合在一起以检测试样上的缺陷。

公开(公告)号：US08374455B2

公开(公告)日：2013-02-12

申请号：US12808163

申请日：2008-12-12

Applicant: Stéphane Allegre ,  Loïc Sachot ,  Olivier Rabouille

Inventor： Stéphane Allegre ,  Loïc Sachot ,  Olivier Rabouille

IPC: G06K9/44

CPC classification number: G06T7/0004 ,  G01N21/8851 ,  G01N33/20 ,  G01N2021/8896 ,  G06T2207/10056 ,  G06T2207/20044 ,  G06T2207/30136

Abstract: The original image composed of pixels representing a sample of the alloy, the hydrides being represented by groupings of pixels (21), the method comprises steps of processing the image (1, 2, 3, 4, 5) to obtain the skeleton of the groupings of pixels (21′) contained in the image, the skeletonization step (5) being followed by a step (6, 10) of analysis pertaining to the groupings thus skeletonised. The analysis step allows the determination of the hydrogen content as well as the morphological study of the hydrides so as to determine their danger.

Abstract translation: 由表示合金样品的像素构成的原始图像，所述氢化物由像素（21）分组表示，所述方法包括以下步骤：处理所述图像（1,2,3,4,5）以获得所述图像的骨架 包含在图像中的像素（21'）的分组，骨架化步骤（5）之后是与由此剔除的分组有关的分析步骤（6,10）。 分析步骤允许确定氢含量以及氢化物的形态学研究，以确定其危险性。

公开(公告)号：US20130033705A1

公开(公告)日：2013-02-07

申请号：US13648124

申请日：2012-10-09

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Koichi TANIGUCHI ,  Masayuki OCHI ,  Shuichi CHIKAMATSU ,  Shigehisa NOZAWA

IPC: G01N21/956

CPC classification number: G01N21/9501 ,  G01N2021/8887 ,  G01N2021/8896 ,  G01N2201/1241

Abstract: An inspection device for inspecting defects of an inspection object including a light source for irradiating a luminous flux to the inspection object; an optical system for guiding reflected light from the inspection object; a photoelectric image sensor having a plurality of photoelectric cells arranged, for converting the light guided to detection signals; a detection signal transfer unit having channels each constituted by a signal correction unit, a converter and an image formation unit, and corresponding to each of a plurality of regions formed by dividing the photoelectric image sensor, respectively; and an image synthesis unit for forming an image of the surface of the object by synthesizing partial images outputted; the inspection device inspecting defects of the object by processing the synthesized image; whereby it becomes possible to correct a detection signal from said photoelectric cell close to a predetermined reference target value.

Abstract translation: 一种检查装置，用于检查包括用于向检查对象照射光通量的光源的检查对象的缺陷; 用于引导来自检查对象的反射光的光学系统; 光电图像传感器，其具有布置用于将被引导的光转换成检测信号的多个光电单元; 检测信号传送单元，其具有各自由信号校正单元，转换器和图像形成单元构成的信道，并且分别对应于通过划分光电图像传感器形成的多个区域中的每一个; 以及图像合成单元，用于通过合成输出的部分图像来形成对象的表面的图像; 检查装置通过处理合成图像来检查物体的缺陷; 从而可以将来自所述光电单元的检测信号校正为接近预定的基准目标值。