公开(公告)号：US20160005567A1

公开(公告)日：2016-01-07

申请号：US14851692

申请日：2015-09-11

申请人： Lawrence Livermore National Security, LLC

发明人： Bryan W. REED ,  William J. DEHOPE ,  Glenn HUETE ,  Thomas B. LAGRANGE ,  Richard M. SHUTTLESWORTH

IPC分类号： H01J37/075 ,  H01J37/26 ,  H01J37/147

CPC分类号： H01J37/075 ,  H01J37/1472 ,  H01J37/22 ,  H01J37/244 ,  H01J37/26 ,  H01J37/265 ,  H01J2237/0432 ,  H01J2237/06333 ,  H01J2237/15 ,  H01J2237/151 ,  H01J2237/24455 ,  H01J2237/2447 ,  H01J2237/2449 ,  H01J2237/24495

摘要： An electron microscope is disclosed which has a laser-driven photocathode and an arbitrary waveform generator (AWG) laser system (“laser”). The laser produces a train of temporally-shaped laser pulses of a predefined pulse duration and waveform, and directs the laser pulses to the laser-driven photocathode to produce a train of electron pulses. An image sensor is used along with a deflector subsystem. The deflector subsystem is arranged downstream of the target but upstream of the image sensor, and has two pairs of plates arranged perpendicular to one another. A control system controls the laser and a plurality of switching components synchronized with the laser, to independently control excitation of each one of the deflector plates. This allows each electron pulse to be directed to a different portion of the image sensor, as well as to be provided with an independently set duration and independently set inter-pulse spacings.

摘要翻译： 公开了一种具有激光驱动光电阴极和任意波形发生器（AWG）激光系统（“激光”）的电子显微镜。 激光器产生预定脉冲持续时间和波形的时间上形状的激光脉冲串，并将激光脉冲引导到激光驱动的光电阴极以产生一系列电子脉冲。 图像传感器与偏转器子系统一起使用。 偏转器子系统布置在目标的下游，但是在图像传感器的上游，并且具有彼此垂直布置的两对板。 控制系统控制激光器和与激光器同步的多个切换部件，以独立地控制每个偏转板的激励。 这允许每个电子脉冲被引导到图像传感器的不同部分，并且被提供有独立设置的持续时间并且独立设置脉冲间隔。

公开(公告)号：US20150255241A1

公开(公告)日：2015-09-10

申请号：US14202646

申请日：2014-03-10

申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION

发明人： Ravi K. Bonam

IPC分类号： H01J37/073 ,  H01J9/12 ,  H01J37/317 ,  H01J1/34

CPC分类号： H01J1/34 ,  H01J9/12 ,  H01J37/073 ,  H01J37/3174 ,  H01J2237/06333 ,  H01J2237/31774 ,  H01J2237/31779

摘要： A scalable, integrated photoemitter device and method of manufacture using conventional CMOS manufacturing techniques. The photoemitter device has a first semiconductor substrate having a plurality of photonic sources formed on top in a first material layer, the plurality of photonic sources and the material layer forming a planar surface. A second substrate is bonded to the planar surface, the second substrate having a plurality of photoemitter structures formed on top in a second material layer, each photoemitter structure in alignment with a respective photonic source of the first substrate and configured to generate particle beams responsive to light from a respective light source. Additionally provided is a multi-level photoemitter of tapered design for implementation in the scalable, integrated photoemitter device. Conventional CMOS manufacturing techniques are also implemented to build the multi-level photoemitter of tapered design.

摘要翻译： 可扩展的集成光电发生器装置和使用常规CMOS制造技术的制造方法。 光电发射器件具有第一半导体衬底，其具有形成在第一材料层的顶部上的多个光子源，多个光子源和材料层形成平坦表面。 第二衬底被结合到平面表面，第二衬底具有形成在第二材料层顶部的多个光发射器结构，每个光发射器结构与第一衬底的相应光子源对准，并且被配置为产生响应于 来自相应光源的光。 另外提供了一种用于在可扩展的集成光电发生器装置中实现的锥形设计的多级光电发生器。 还实现了传统的CMOS制造技术来构建锥形设计的多级光电发生器。

公开(公告)号：US20150235800A1

公开(公告)日：2015-08-20

申请号：US14181321

申请日：2014-02-14

申请人： LAWRENCE LIVERMORE NATIONAL SECURITY, LLC

发明人： Bryan W. REED ,  William J. DEHOPE ,  Glenn HUETE ,  Thomas B. LAGRANGE ,  Richard M. SHUTTLESWORTH

IPC分类号： H01J37/075 ,  H01J37/147 ,  H01J37/26

CPC分类号： H01J37/075 ,  H01J37/1472 ,  H01J37/22 ,  H01J37/244 ,  H01J37/26 ,  H01J37/265 ,  H01J2237/0432 ,  H01J2237/06333 ,  H01J2237/15 ,  H01J2237/151 ,  H01J2237/24455 ,  H01J2237/2447 ,  H01J2237/2449 ,  H01J2237/24495

摘要： An electron microscope is disclosed which has a laser-driven photocathode and an arbitrary waveform generator (AWG) laser system (“laser”). The laser produces a train of temporally-shaped laser pulses of a predefined pulse duration and waveform, and directs the laser pulses to the laser-driven photocathode to produce a train of electron pulses. An image sensor is used along with a deflector subsystem. The deflector subsystem is arranged downstream of the target but upstream of the image sensor, and has two pairs of plates arranged perpendicular to one another. A control system controls the laser and a plurality of switching components synchronized with the laser, to independently control excitation of each one of the deflector plates. This allows each electron pulse to be directed to a different portion of the image sensor, as well as to be provided with an independently set duration and independently set inter-pulse spacings.

摘要翻译： 公开了一种具有激光驱动光电阴极和任意波形发生器（AWG）激光系统（“激光”）的电子显微镜。 激光器产生预定的脉冲持续时间和波形的时间激光脉冲串，并将激光脉冲引导到激光驱动的光电阴极以产生一系列电子脉冲。 图像传感器与偏转器子系统一起使用。 偏转器子系统布置在目标的下游，但是在图像传感器的上游，并且具有彼此垂直布置的两对板。 控制系统控制激光器和与激光器同步的多个切换部件，以独立地控制每个偏转板的激励。 这允许每个电子脉冲被引导到图像传感器的不同部分，并且被提供有独立设置的持续时间并且独立设置脉冲间隔。

公开(公告)号：US08884225B2

公开(公告)日：2014-11-11

申请号：US13665623

申请日：2012-10-31

申请人： Ebara Corporation

发明人： Tsutomu Karimata ,  Tatsuya Kohama ,  Shoji Yoshikawa ,  Masahiro Hatakeyama

IPC分类号： H01J37/28 ,  H01J37/26 ,  H01J37/073 ,  H01J37/12

CPC分类号： H01J37/261 ,  H01J37/073 ,  H01J37/12 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/036 ,  H01J2237/062 ,  H01J2237/06333 ,  H01J2237/1205 ,  H01J2237/1518 ,  H01J2237/186 ,  H01J2237/2443 ,  H01J2237/2817

摘要： An electron beam inspection device observes a sample by irradiating the sample set on a stage with electron beams and detecting the electron beams from the sample. The electron beam inspection device has one electron column which irradiates the sample with the electron beams, and detects the electron beams from the sample. In this one electron column, a plurality of electron beam irradiation detecting systems are formed which each form electron beam paths in which the electron beams with which the sample is irradiated and the electron beams from the sample pass. The electron beam inspection device inspects the sample by simultaneously using a plurality of electron beam irradiation detecting systems and simultaneously irradiating the sample with the plurality of electron beams.

摘要翻译： 电子束检查装置通过用电子束照射载物台上的样品并检测来自样品的电子束来观察样品。 电子束检查装置具有一个电子管，用电子束照射样品，并检测来自样品的电子束。 在该一个电子柱中，形成多个电子束照射检测系统，每个电子束照射检测系统形成电子束路径，其中照射样品的电子束和来自样品的电子束通过。 电子束检查装置通过同时使用多个电子束照射检测系统来检查样品，同时用多个电子束照射样品。

公开(公告)号：US08841615B2

公开(公告)日：2014-09-23

申请号：US13637227

申请日：2011-02-22

申请人： Nobuo Tanaka ,  Tsutomu Nakanishi ,  Yoshikazu Takeda ,  Hidefumi Asano ,  Koh Saitoh ,  Toru Ujihara ,  Makoto Kuwahara

发明人： Nobuo Tanaka ,  Tsutomu Nakanishi ,  Yoshikazu Takeda ,  Hidefumi Asano ,  Koh Saitoh ,  Toru Ujihara ,  Makoto Kuwahara

IPC分类号： H01J37/26 ,  H01J37/073

CPC分类号： H01J37/26 ,  H01J37/073 ,  H01J37/265 ,  H01J37/266 ,  H01J2237/06333 ,  H01J2237/06383 ,  H01J2237/24557

摘要： An electron microscope which utilizes a polarized electron beam and can obtain a high contrast image of a sample is provided. The microscope includes: a laser; a polarization apparatus that polarizes a laser beam into a circularly polarized laser beam; a semiconductor photocathode that is provided with a strained superlattice semiconductor layer and generates a polarized electron beam when irradiated with the circularly polarized laser beam; a transmission electron microscope that utilizes the polarized electron beam; an electron beam intensity distribution recording apparatus arranged at a face reached by the polarized electron beam that has transmitted through the sample. An electron beam intensity distribution recording apparatus records an intensity distribution before and after the polarization of the electron beam is reversed, and a difference acquisition apparatus calculates a difference therebetween.

摘要翻译： 提供了利用偏振电子束并且可以获得样品的高对比度图像的电子显微镜。 显微镜包括：激光; 将激光束偏振成圆偏振激光束的偏振装置; 半导体光电阴极，其设置有应变超晶格半导体层，并且当被圆偏振激光束照射时产生偏振电子束; 利用偏振电子束的透射电子显微镜; 电子束强度分布记录装置，布置在透过样品的偏振电子束所达到的面上。 电子束强度分布记录装置记录电子束的偏振前后的强度分布，差分获取装置计算其间的差。

公开(公告)号：US08674320B2

公开(公告)日：2014-03-18

申请号：US13795291

申请日：2013-03-12

申请人： Attolight SA

发明人： Jean Berney

IPC分类号： H01J29/58 ,  H01J49/08 ,  G21K1/00

CPC分类号： G21K1/00 ,  G01N23/2254 ,  H01J37/222 ,  H01J37/28 ,  H01J2237/06333 ,  H01J2237/226 ,  H01J2237/2611 ,  H01J2237/2808 ,  H01J2237/30472

摘要： A method for generating a cathodoluminescence map comprising the steps of: generating an intensity modulated charged particle beam; focusing said charged particle beam on a specimen; gating temporally the cathodoluminescence emitted by said specimen to provide time-gated cathodoluminescence; measuring the time-gated cathodoluminescence for different charged particle beam positions on the specimen to generate a cathodoluminescence map; deconvoluting the cathodoluminescence map to improve the resolution of said cathodoluminescence map. The invention further provides devices for carrying out such methods.

摘要翻译： 一种用于产生阴极发光图的方法，包括以下步骤：产生强度调制带电粒子束; 将所述带电粒子束聚焦在样品上; 定时地选择由所述样品发射的阴极发光，以提供时间门控的阴极发光; 测量样品上不同带电粒子束位置的时间门阴极发光以产生阴极发光图; 解卷积阴极发光图以改善所述阴极发光图的分辨率。 本发明还提供了用于执行这种方法的装置。

公开(公告)号：US20130341527A1

公开(公告)日：2013-12-26

申请号：US14003030

申请日：2012-03-15

申请人： Jean Berney

发明人： Jean Berney

IPC分类号： G21K5/04

CPC分类号： G21K5/04 ,  H01J37/073 ,  H01J2201/342 ,  H01J2237/06333 ,  H01J2237/065

摘要： A method suitable for preparing a specimen for inspection, the method comprising the steps of: irradiating a photocathode so that the photocathode emits electrons from a surface of the photocathode, wherein the emitted electrons each follow a trajectory, and the trajectories of the electrons are such that they can be extrapolated to intersect at a region within the photocathode, the region defining a virtual source, and wherein the photocathode comprises a rounded tip which has a radius of curvature; configuring the emitted electrons so that they form an electron beam; focusing the electron beam onto a specimen to form an image of the virtual source on the specimen. There is further provided a corresponding electron beam apparatus.

摘要翻译： 一种适于制备用于检查的样品的方法，所述方法包括以下步骤：照射光电阴极，使得光电阴极从光电阴极的表面发射电子，其中发射的电子各自遵循轨迹，并且电子的轨迹为 它们可以外推到在光电阴极内的区域相交，所述区域限定虚拟源，并且其中所述光电阴极包括具有曲率半径的圆形尖端; 配置发射的电子，使它们形成电子束; 将电子束聚焦到样本上以形成样本上的虚拟源的图像。 还提供了相应的电子束装置。

公开(公告)号：US08530853B2

公开(公告)日：2013-09-10

申请号：US13369008

申请日：2012-02-08

申请人： Adam V. Steele ,  Brenton J. Knuffman ,  Jabez J. McClelland

发明人： Adam V. Steele ,  Brenton J. Knuffman ,  Jabez J. McClelland

IPC分类号： H01J27/24

CPC分类号： H01J27/022 ,  G21K1/00 ,  H01J27/24 ,  H01J37/065 ,  H01J37/08 ,  H01J2237/061 ,  H01J2237/06333 ,  H01J2237/0815 ,  H05H3/02

摘要： A system for producing a charged particle beam from a photoionized cold atom beam. A vapor of neutral atoms is generated. From these atoms, an atom beam having axial and transverse velocity distributions controlled by the application of laser light is produced. The produced atom beam is spatially compressed along each transverse axis, thus reducing the cross-sectional area of the produced beam and reducing a velocity spread of the produced beam along directions transverse to the beam's direction of propagation. Laser light is directed onto at least a portion of the neutral atoms in the atom beam, thereby producing ions and electrons. An electric field is generated at the location of the produced ions and electrons, thereby producing a beam of ions traveling in a first direction and electrons traveling in substantially the opposite direction. A vacuum chamber contains the atom beam, the ion beam and the electron beam.

摘要翻译： 用于从光电离冷原子束产生带电粒子束的系统。 产生中性原子的蒸汽。 由这些原子产生具有通过应用激光控制的轴向和横向速度分布的原子束。 所产生的原子束沿着每个横向轴线被空间压缩，从而减小所产生的光束的横截面面积，并且减小所产生的光束沿横向于光束传播方向的方向的速度扩展。 激光被引导到原子束中的至少一部分中性原子，从而产生离子和电子。 在产生的离子和电子的位置处产生电场，从而产生沿第一方向行进的离子束和基本上相反方向行进的电子。 真空室包含原子束，离子束和电子束。

公开(公告)号：US08278813B2

公开(公告)日：2012-10-02

申请号：US12481995

申请日：2009-06-10

申请人： Yong Woon Park ,  Hyotcherl Ihee ,  Chang Bum Kim ,  In Soo Ko

发明人： Yong Woon Park ,  Hyotcherl Ihee ,  Chang Bum Kim ,  In Soo Ko

IPC分类号： H01J29/46

CPC分类号： H01J37/045 ,  H01J3/18 ,  H01J37/063 ,  H01J37/073 ,  H01J37/295 ,  H01J2237/0432 ,  H01J2237/06333

摘要： An apparatus and method for generating femtosecond electron beam are disclosed. The apparatus for generating electron beam by discharging an electron generated via a cathode to an anode includes a transmission window provided at one side of the cathode to allow incident laser to pass therethrough, a pinhole formed on the anode such that the pinhole corresponds to the position of the electron generated from the transmission window, and a focusing unit provided at one side of the cathode and generating an electric field to accelerate and at the same time concentrate the electron to the pinhole. Electrons are simultaneously concentrated and accelerated to the pinhole by an electric field generated by the focusing unit positioned at the cathode to generate femtosecond electron beam.

摘要翻译： 公开了一种用于产生飞秒电子束的装置和方法。 通过将通过阴极发射的电子放电到阳极来产生电子束的装置包括设置在阴极的一侧以允许入射激光通过的透射窗口，形成在阳极上的针孔，使得针孔对应于位置 的发射窗产生的电子，以及设置在阴极一侧的聚焦单元，产生电场以加速并同时将电子集中到针孔。 通过由位于阴极处的聚焦单元产生的电场，电子同时集中并加速到针孔，以产生飞秒电子束。

公开(公告)号：US07915583B2

公开(公告)日：2011-03-29

申请号：US12234567

申请日：2008-09-19

申请人： Ahmed Zewail ,  Vladimir Lobastov

发明人： Ahmed Zewail ,  Vladimir Lobastov

IPC分类号： H01J37/26 ,  H01J37/252

CPC分类号： H01J37/26 ,  H01J37/065 ,  H01J37/073 ,  H01J37/24 ,  H01J37/243 ,  H01J37/265 ,  H01J2237/0432 ,  H01J2237/06333 ,  H01J2237/06341 ,  H01J2237/206 ,  H01J2237/2065 ,  H01J2237/24585 ,  H01J2237/2482 ,  H01J2237/2803 ,  H01J2237/2809 ,  H01J2237/2813 ,  H01J2237/2855

摘要： An ultrafast system (and methods) for characterizing one or more samples. The system includes a stage assembly, which has a sample to be characterized. The system has a laser source that is capable of emitting an optical pulse of less than 1 ps in duration. The system has a cathode coupled to the laser source. In a specific embodiment, the cathode is capable of emitting an electron pulse less than 1 ps in duration. The system has an electron lens assembly adapted to focus the electron pulse onto the sample disposed on the stage. The system has a detector adapted to capture one or more electrons passing through the sample. The one or more electrons passing through the sample is representative of the structure of the sample. The detector provides a signal (e.g., data signal) associated with the one or more electrons passing through the sample that represents the structure of the sample. The system has a processor coupled to the detector. The processor is adapted to process the data signal associated with the one or more electrons passing through the sample to output information associated with the structure of the sample. The system has an output device coupled to the processor. The output device is adapted to output the information associated with the structure of the sample.

摘要翻译： 用于表征一个或多个样品的超快系统（和方法）。 该系统包括具有要表征的样品的载物台组件。 该系统具有能够发射持续时间小于1ps的光脉冲的激光源。 该系统具有耦合到激光源的阴极。 在具体实施例中，阴极能够发射持续时间小于1ps的电子脉冲。 该系统具有适于将电子脉冲聚焦到设置在载物台上的样品上的电子透镜组件。 该系统具有适于捕获穿过样品的一个或多个电子的检测器。 通过样品的一个或多个电子代表样品的结构。 检测器提供与通过样品的一个或多个电子相关联的信号（例如，数据信号），其表示样品的结构。 该系统具有耦合到检测器的处理器。 处理器适于处理与通过样本的一个或多个电子相关联的数据信号，以输出与样本的结构相关联的信息。 该系统具有耦合到处理器的输出设备。 输出设备适于输出与样本结构相关联的信息。