公开(公告)号：US08111396B2

公开(公告)日：2012-02-07

申请号：US12225904

申请日：2007-03-12

Applicant: Felix Kerstan ,  Nico Correns ,  Joerg Margraf

Inventor： Felix Kerstan ,  Nico Correns ,  Joerg Margraf

IPC: G01J3/28 ,  G01J3/36

CPC classification number: G01J3/2803 ,  G01J3/0262 ,  G01J3/36 ,  G01J3/51

Abstract: The present solution is directed to a measuring system and a method for determining spectrometric measurement results with high accuracy. The spectrometric measuring system, comprises a radiation source, an entrance slit, a dispersion element, and a detector with detector elements arranged in a linear or matrix-shaped manner in one or more planes. The detector has an even distribution of at least two different wavelength-selective filters on its detector elements. While detectors from photography and video applications are used for this purpose, use of the invention is not limited to the visible spectral region. Further, color filters on the pixels may be omitted or modified in the manufacturing process. It is also possible to use other types of detectors in which the wavelength-selective filters and associated detectors are arranged one behind each other in a plurality of planes in which complete color information is available to each individual picture point.

Abstract translation: 本解决方案涉及测量系统和用于以高精度确定光谱测量结果的方法。 光谱测量系统包括辐射源，入口狭缝，分散元件和具有在一个或多个平面中以线性或矩阵形式布置的检测器元件的检测器。 检测器在其检测器元件上具有至少两个不同波长选择滤波器的均匀分布。 虽然用于摄影和视频应用的检测器用于此目的，但是本发明的使用不限于可见光谱区域。 此外，可以在制造过程中省略或修改像素上的滤色器。 也可以使用其他类型的检测器，其中波长选择滤波器和相关联的检测器在多个平面中相互排列，其中完整的颜色信息可用于每个单独的图像点。

公开(公告)号：US08040513B2

公开(公告)日：2011-10-18

申请号：US12141378

申请日：2008-06-18

Applicant: Rainer Uhl

Inventor： Rainer Uhl

IPC: G01J3/36 ,  G01J3/51 ,  G02B21/36

CPC classification number: G02B21/0092 ,  G02B17/026 ,  G02B21/16 ,  G02B21/18

Abstract: There is provided a microscope device comprising: means for creating a collimated beam of light collected from a sample and comprising at least a first spectral range and a second spectral range, means for separating the collimated beam into a first beam containing a higher percentage of light of the first spectral range than light of the second spectral range and a second beam containing a lower percentage of light of the first spectral range than light of the second spectral range, means for reflecting the first beam, means for reflecting the second beam, means for combining the first beam and the second beam, a detector, and means for imaging the combined first and second beam onto the detector in order to create an image of the sample on the detector, wherein the means for reflecting the first beam and the means for reflecting the second beam are arranged in such a manner that the image created by the first beam and the image created by the second beam are shifted relative to each other on the detector, wherein the means for reflecting the first beam is adapted to invert handedness of the first beam, and wherein the means for reflecting the second beam is adapted to preserve handedness of the second beam.

Abstract translation: 提供了一种显微镜装置，包括：用于创建从样本收集的并且包括至少第一光谱范围和第二光谱范围的准直光束的装置，用于将准直束分离成包含较高百分比的光的第一光束的装置 所述第一光谱范围与所述第二光谱范围的光相比，以及第二光束，所述第二光束包含比所述第二光谱范围的光低的所述第一光谱范围的百分比的比率;用于反射所述第一光束的装置，用于反射所述第二光束的装置， 用于组合第一光束和第二光束，检测器和用于将组合的第一和第二光束成像到检测器上以便在检测器上产生样品的图像的装置，其中用于反射第一光束和装置的装置 用于反射第二光束的方式使得由第一光束产生的图像和由第二光束产生的图像相对于每个光束移位 其中在所述检测器上，其中用于反射所述第一光束的装置适于反转所述第一光束的手性，并且其中用于反射所述第二光束的装置适于保持所述第二光束的透视性。

公开(公告)号：US07369228B2

公开(公告)日：2008-05-06

申请号：US10544555

申请日：2003-12-19

Applicant: Felix Kerstan ,  Ullrich Klarner ,  Nico Correns ,  Gregor Tumpach

Inventor： Felix Kerstan ,  Ullrich Klarner ,  Nico Correns ,  Gregor Tumpach

IPC: G01J3/36

CPC classification number: G01J3/02 ,  G01J3/0256 ,  G01J3/0291

Abstract: The present invention is directed to a spectrometer in which the electrical and optical components are connected to one another in a compact construction. A minimal expenditure on assembly and adjustment is achieved through a small quantity of individual parts. The compact spectrometer comprises an entrance slit, an imaging grating, one or more detector elements in rows or matrices, and elements of a controlling and evaluating unit. The detector elements and the entrance slit are arranged on a shared support, the elements of the controlling and evaluating unit being arranged on the free surfaces of the support. The entrance slit and the detector elements and the imaging spherical grating recessed into the spectrometer housing are arranged symmetric to an imaginary center axis of the support. Due to its compact size and the minimized expenditure on adjustment and assembly for its manufacture, the inventive spectrometer has numerous applications.

Abstract translation: 本发明涉及一种其中电气和光学部件以紧凑的结构相互连接的光谱仪。 组装和调整的最小支出是通过少量的个别部件实现的。 紧凑型光谱仪包括入口狭缝，成像光栅，行或矩阵中的一个或多个检测器元件，以及控制和评估单元的元件。 检测器元件和入口狭缝布置在共享支撑件上，控制和评估单元的元件布置在支撑件的自由表面上。 凹入光谱仪壳体的入射狭缝和探测器元件和成像球形光栅与支撑体的假想中心轴线对称。 由于其紧凑的尺寸和用于其制造的调整和组装的最小化的支出，本发明的光谱仪具有许多应用。

公开(公告)号：US20070263208A1

公开(公告)日：2007-11-15

申请号：US11621694

申请日：2007-01-10

Applicant: Dvir Yelin ,  Seok-Hyun Yun ,  Brett Bouma ,  Guillermo Tearney

Inventor： Dvir Yelin ,  Seok-Hyun Yun ,  Brett Bouma ,  Guillermo Tearney

IPC: G01J3/36 ,  G06F17/14

CPC classification number: G01N21/4795 ,  A61B5/0066 ,  A61B5/6852 ,  A61B5/7257 ,  A61B5/726 ,  G01B9/02002 ,  G01B9/02036 ,  G01B9/02037 ,  G01B9/02044 ,  G01B9/02091 ,  G01N21/359 ,  G01N2021/1782 ,  G01N2021/1787 ,  G01N2021/3595

Abstract: Exemplary systems and methods for generating data associated with at least one portion of a sample can be provided. For example, according to one exemplary embodiment of such systems and methods, it is possible to provide a particular radiation using at least one first arrangement. The particular radiation can include at least one first electro-magnetic radiation directed to at least one sample and at least one second electro-magnetic radiation directed to a reference arrangement. The first radiation and/or the second radiation can comprise a plurality of wavelengths. The first electro-magnetic radiation can be spectrally dispersed along at least one portion of the sample. The second electro-magnetic radiation measured at two or more different lengths of the reference arrangement with respect to the first arrangement. Data can be generated which is associated with the first and second electro-magnetic radiations obtained at the two different lengths using at least one second arrangement which comprises a spectrometer arrangement.

Abstract translation: 可以提供用于产生与样品的至少一部分相关联的数据的示例性系统和方法。 例如，根据这样的系统和方法的一个示例性实施例，可以使用至少一个第一布置来提供特定的辐射。 特定的辐射可以包括被引导至至少一个样品的至少一个第一电磁辐射和指向参考装置的至少一个第二电磁辐射。 第一辐射和/或第二辐射可以包括多个波长。 第一电磁辐射可沿样品的至少一部分光谱分散。 在参考装置的两个或多个不同长度处相对于第一装置测量的第二电磁辐射。 可以生成与使用包括光谱仪布置的至少一个第二布置在两个不同长度获得的第一和第二电磁辐射相关联的数据。

公开(公告)号：US07265824B2

公开(公告)日：2007-09-04

申请号：US10756096

申请日：2004-01-13

Applicant: Alain Le Marchand

Inventor： Alain Le Marchand

IPC: G01J3/36

CPC classification number: G01J3/28 ,  G01J1/36 ,  G01J3/04 ,  G01J2003/2869

Abstract: The invention relates to a method and a device for obtaining a low-noise optical signal.According to the method, a luminous beam is injected through two apertures and after detection respectively a basic optical signal (21) and a corrective optical signal (22) are generated. Both optical signals obtained (21, 22) are subtracted, so that a resulting optical signal is generated, forming the low-noise optical signal. The apertures are preferably two slits of a spectroscope, the optical signals being expressible relative to the wavelength.

Abstract translation: 本发明涉及一种用于获得低噪声光信号的方法和装置。 根据该方法，通过两个孔注入发光束，分别检测出基本光信号（21）和校正光信号（22）。 获得的两个光信号（21,22）被减去，从而产生所得到的光信号，形成低噪声光信号。 孔优选是分光镜的两个狭缝，光信号相对于波长是可表达的。

公开(公告)号：US20050248769A1

公开(公告)日：2005-11-10

申请号：US10521516

申请日：2002-07-15

Applicant: Thilo Weitzel

Inventor： Thilo Weitzel

IPC: G01J3/12 ,  G01J3/14 ,  G01J3/18 ,  G01J3/32 ,  G01J3/36 ,  G01J3/45 ,  G01J3/453 ,  G01B9/02

CPC classification number: G01J3/453

Abstract: The present invention relates to an apparatus and a method for optical spectroscopy and for optical sensory technology and to the use of the apparatus. An apparatus having high spectral resolution with simultaneously comparatively low demands on the quality of the optical components is provided in that the apparatus for optical spectroscopy comprises means for the generation of an interference pattern, means for the coupling of the incoming light field to be examined such that only one or several individual spatial modes of the field are permitted, and a detector which can record the intensity of the generated interference pattern at a plurality of spatially different positions, with the wavefronts and/or the propagation direction of at least one of the light fields involved in the interference pattern being changed by spectrally dispersive or diffractive optical elements in dependence on the wavelength. The present invention furthermore relates to a method of determining the optical spectrum and/or of other measurands encoded or transmitted by an optical spectrum by analysis of the interference pattern measured using an apparatus in accordance with the invention or using an apparatus in accordance with the invention.

Abstract translation: 本发明涉及一种用于光学光学和光学感测技术的装置和方法以及该装置的使用。 提供了一种具有高光谱分辨率并且对光学部件的质量要求相对较低的要求的装置，其特征在于，用于光学光学的装置包括用于产生干涉图案的装置，用于耦合待检测的入射光场的装置 允许场的只有一个或几个单独的空间模式，以及可以在多个空间不同的位置记录生成的干涉图案的强度的检测器，其中波前和/或传播方向至少是 根据波长，通过光谱色散或衍射光学元件改变涉及干涉图案的光场。 本发明还涉及一种通过分析使用根据本发明的装置或使用根据本发明的装置测量的干涉图案来确定由光谱编码或传输的其他被测量的光谱和/或其他被测量的方法 。

公开(公告)号：US06961124B2

公开(公告)日：2005-11-01

申请号：US10133654

申请日：2002-04-26

Applicant: Johann Engelhardt ,  Juergen Hoffmann

Inventor： Johann Engelhardt ,  Juergen Hoffmann

IPC: G01J3/36 ,  G01N21/64 ,  G02B21/00 ,  G02B21/06 ,  G01J3/30

CPC classification number: G01N21/6458 ,  G01J3/36 ,  G01N2021/6441 ,  G02B21/0048 ,  G02B21/0064 ,  G02B21/0076 ,  G02B2207/114

Abstract: A method for examining a specimen (27) that exhibits at least two optical transition lines and is optically excitable at least with light of a first and light of a second wavelength is characterized by the step of illuminating the specimen (27) with illuminating light (15) that generates at least a multiple of the first wavelength and a multiple of the second wavelength; and by the step of detecting the detected light (29) proceeding from the specimen (27).Also disclosed is a scanning microscope system (1) having at least one light source (3) that emits illuminating light (15) for illumination of a specimen (27), the specimen (27) exhibiting at least two optical transition lines and being optically excitable at least with light of a first and light of a second wavelength, having at least one detector (41, 43, 65, 77, 79) for detection of the detected light (29) proceeding from the specimen (27) and an objective (25) for focusing the illuminating light (15) onto a subregion of the specimen (27). The scanning microscope system is characterized in that the illuminating light (15) generates at least a multiple of the first wavelength and a multiple of the second wavelength.

Abstract translation: 用于检查至少具有第一和第二波长的光的至少两个光学过渡线并且是光学上可激发的检测器（27）的方法的特征在于用照明光照射样品（27）的步骤 15），其产生所述第一波长的至少一倍和所述第二波长的倍数; 并且通过检测从样本（27）进行的检测光（29）的步骤。 还公开了一种扫描显微镜系统（1），其具有发射用于照射样本（27）的照明光（15）的至少一个光源（3），所述检体（27）显示出至少两个光学过渡线并且是光学的 至少具有第一和第二波长的光的可兴奋的，具有用于检测从样本（27）进行的检测光（29）的至少一个检测器（41,43,65,77,79）和一个目标 （25），用于将照明光（15）聚焦到样本（27）的子区域上。 扫描显微镜系统的特征在于，照明光（15）产生第一波长的倍数和第二波长的倍数。

公开(公告)号：US20050203423A1

公开(公告)日：2005-09-15

申请号：US11058045

申请日：2005-02-14

Applicant: Haishan Zeng ,  Stephen Lam ,  Branko Palcic

Inventor： Haishan Zeng ,  Stephen Lam ,  Branko Palcic

IPC: G01N21/64 ,  A61B1/00 ,  A61B1/04 ,  G01J3/02 ,  G01J3/10 ,  G01J3/36 ,  G01N23/223 ,  G21K1/12 ,  A61B6/00 ,  G01N23/00 ,  H05G1/60

CPC classification number: G01J3/02 ,  G01J3/021 ,  G01J3/0218 ,  G01J3/0235 ,  G01J3/0243 ,  G01J3/0289 ,  G01J3/10 ,  G01J3/36 ,  G01N23/223 ,  G01N2223/076

Abstract: Optical systems that provide for simultaneous images and spectra from an object, such as a tissue sample, an industrial object such as a computer chip, or any other object that can be viewed with an optical system such as a microscope, endoscope, telescope or camera. In some embodiments, the systems provide multiple images corresponding to various desired wavelength ranges within an original image of the object, as well as, if desired, directional pointer(s) that can provide both an identification of the precise location from which a spectrum is being obtained, as well as enhancing the ability to point the device.

Abstract translation: 提供来自物体的同时图像和光谱的光学系统，例如组织样本，诸如计算机芯片的工业对象或可以用诸如显微镜，内窥镜，望远镜或照相机的光学系统观察的任何其它物体 。 在一些实施例中，系统提供对应于对象的原始图像内的各种期望波长范围的多个图像，以及如果需要的方向指针，其可以提供频谱的精确位置的识别 获得，以及增强指向设备的能力。

公开(公告)号：US06930775B1

公开(公告)日：2005-08-16

申请号：US10303172

申请日：2002-11-22

Applicant: Stevan M. Spremo ,  Peter L. Fuhr ,  John F. Schipper

Inventor： Stevan M. Spremo ,  Peter L. Fuhr ,  John F. Schipper

IPC: G01J3/18 ,  G01J3/28 ,  G01J3/36 ,  G01J3/457 ,  G01N21/64 ,  G01N21/77

CPC classification number: G01J3/18 ,  G01J3/2889 ,  G01J3/36 ,  G01J3/457 ,  G01N21/6408 ,  G01N21/645 ,  G01N21/77 ,  G01N2021/6463

Abstract: Method and system for wavelength-based processing of a light beam. A light beam, produced at a chemical or physical reaction site and having at least first and second wavelengths, λ1 and λ2, is received and diffracted at a first diffraction grating to provide first and second diffracted beams, which are received and analyzed in terms of wavelength and/or time at two spaced apart light detectors. In a second embodiment, light from first and second sources is diffracted and compared in terms of wavelength and/or time to determine if the two beams arise from the same source. In a third embodiment, a light beam is split and diffracted and passed through first and second environments to study differential effects. In a fourth embodiment, diffracted light beam components, having first and second wavelengths, are received sequentially at a reaction site to determine whether a specified reaction is promoted, based on order of receipt of the beams. In a fifth embodiment, a cylindrically shaped diffraction grating (uniform or chirped) is rotated and translated to provide a sequence of diffracted beams with different wavelengths. In a sixth embodiment, incident light, representing one or more symbols, is successively diffracted from first and second diffraction gratings and is received at different light detectors, depending upon the wavelengths present in the incident light.

Abstract translation: 光束波长处理方法及系统。 在化学或物理反应部位产生并具有至少第一和第二波长λ1和λ2的光束在第一衍射光栅处被接收和衍射，以提供第一和第二衍射光束，其被接收和分析为 波长和/或时间在两个间隔开的光检测器。 在第二实施例中，来自第一和第二源的光被衍射并且在波长和/或时间方面进行比较以确定两个光束是否源自相同的光源。 在第三实施例中，光束被分裂并衍射并通过第一和第二环境以研究差异效应。 在第四实施例中，具有第一和第二波长的衍射光束分量在反应位置被顺序地接收，以基于接收光束的顺序来确定是否促进指定的反应。 在第五实施例中，旋转并平移圆柱形衍射光栅（均匀或啁啾）以提供具有不同波长的衍射光束序列。 在第六实施例中，代表一个或多个符号的入射光从第一和第二衍射光栅连续衍射，并且根据存在于入射光中的波长在不同的光检测器处被接收。

公开(公告)号：US20050174583A1

公开(公告)日：2005-08-11

申请号：US11056350

申请日：2005-02-10

Applicant: Scott Chalmers ,  Randall Geels

Inventor： Scott Chalmers ,  Randall Geels

IPC: G01B11/06 ,  G01J3/02 ,  G01J3/28 ,  G01J3/36 ,  G01N21/21 ,  G01N21/27 ,  G01N21/47 ,  G01N21/55 ,  G01N21/84 ,  G01N21/95 ,  G01N21/956 ,  G03F7/20 ,  G01B11/28

CPC classification number: G01J3/36 ,  G01B11/0625 ,  G01B11/0641 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/28 ,  G01J3/2823 ,  G01N21/211 ,  G01N21/274 ,  G01N21/4788 ,  G01N21/55 ,  G01N21/8422 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/4792 ,  G03F7/70483

Abstract: An apparatus or method captures reflectance spectrum for each of a plurality of spatial locations on the surface of a patterned wafer. A spectrometer system having a wavelength-dispersive element receives light reflected from the locations and separates the light into its constituent wavelength components. A one-dimensional imager scans the reflected light during translation of the wafer with respect to the spectrometer to obtain a set of successive, spatially contiguous, one-spatial dimension spectral images. A processor aggregates the images to form a two-spatial dimension spectral image. One or more properties of the wafer, such as film thickness, are determined from the spectral image. The apparatus or method may generate a wavelength-dependent correction factor to correct for diffraction errors introduced in reflectance spectra by the wavelength-dispersive element. The invention provides for automatic rotation of a patterned wafer to determine Goodness of Alignment during a measurement process. The invention may include a dual Offner optical system disposed between the wafer and imager.

Abstract translation: 装置或方法捕获图案化晶片的表面上的多个空间位置中的每一个的反射光谱。 具有波长分散元件的光谱仪系统接收从位置反射的光并将光分离成其组成的波长分量。 一维成像器在晶片相对于光谱仪的平移期间扫描反射光，以获得一组连续的，空间上连续的一维空间维度的光谱图像。 处理器聚集图像以形成二维尺度的光谱图像。 从光谱图像确定晶片的一个或多个特性，例如膜厚度。 该装置或方法可以产生波长依赖的校正因子来校正由波长分散元件引入的反射光谱中的衍射误差。 本发明提供了图案化晶片的自动旋转以确定测量过程中的对准质量。 本发明可以包括设置在晶片和成像器之间的双偏光学系统。