公开(公告)号：US4954142A

公开(公告)日：1990-09-04

申请号：US285435

申请日：1989-03-07

申请人： Jeffrey W. Carr ,  Lawrence D. David ,  William L. Guthrie ,  Frank B. Kaufman ,  William J. Patrick ,  Kenneth P. Rodbell ,  Robert W. Pasco ,  Anton Nenadic

发明人： Jeffrey W. Carr ,  Lawrence D. David ,  William L. Guthrie ,  Frank B. Kaufman ,  William J. Patrick ,  Kenneth P. Rodbell ,  Robert W. Pasco ,  Anton Nenadic

IPC分类号： B24B37/00 ,  C09G1/02 ,  H01L21/304 ,  H01L21/306 ,  H01L21/48

CPC分类号： H01L21/4871 ,  C09G1/02 ,  H01L21/4864

摘要： Disclosed is a method of chem-mech polishing an electronic component substrate. The method includes the following steps;obtaining a substrate having at least two features thereon or therein which have a different etch rate with respect to a particular etchant; andcontacting the substrate with a polishing pad while contacting the substrate with a slurry containing the etchant wherein the slurry includes abrasive particles, a transition metal chelated salt and a solvent for the salt.The chem-mech polishing causes the at least two features to be substantially coplanar. Also disclosed is the chem-mech polishing slurry.

摘要翻译： 公开了电子部件基板的化学研磨方法。 该方法包括以下步骤： 获得其上具有至少两个特征的衬底，其中相对于特定蚀刻剂具有不同的蚀刻速率; 以及使所述基板与抛光垫接触，同时使所述基板与含有所述蚀刻剂的浆料接触，其中所述浆料包括磨料颗粒，过渡金属螯合盐和所述盐的溶剂。 化学铣削使得至少两个特征基本上共面。 还公开了化学研磨浆料。

公开(公告)号：US08492897B2

公开(公告)日：2013-07-23

申请号：US13232085

申请日：2011-09-14

申请人： Cyril Cabral, Jr. ,  Jeffrey P. Gambino ,  Qiang Huang ,  Takeshi Nogami ,  Kenneth P. Rodbell

发明人： Cyril Cabral, Jr. ,  Jeffrey P. Gambino ,  Qiang Huang ,  Takeshi Nogami ,  Kenneth P. Rodbell

IPC分类号： H01L23/48

CPC分类号： H01L21/7684 ,  H01L21/2885 ,  H01L21/76841 ,  H01L21/76873 ,  H01L21/76877 ,  H01L21/76883 ,  H01L23/53233 ,  H01L23/53238 ,  H01L23/535 ,  H01L2924/0002 ,  H01L2924/00

摘要： A metal interconnect structure and a method of manufacturing the metal interconnect structure. Manganese (Mn) is incorporated into a copper (Cu) interconnect structure in order to modify the microstructure to achieve bamboo-style grain boundaries in sub-90 nm technologies. Preferably, bamboo grains are separated at distances less than the “Blech” length so that copper (Cu) diffusion through grain boundaries is avoided. The added Mn also triggers the growth of Cu grains down to the bottom surface of the metal line so that a true bamboo microstructure reaching to the bottom surface is formed and the Cu diffusion mechanism along grain boundaries oriented along the length of the metal line is eliminated.

摘要翻译： 金属互连结构和金属互连结构的制造方法。 锰（Mn）被掺入到铜（Cu）互连结构中，以便在90nm以下的技术中改变微观结构以实现竹型晶界。 优选地，竹颗粒在小于“漂白”长度的距离处分离，以便避免通过晶界的铜（Cu）扩散。 添加的Mn还触发Cu颗粒向金属线底部的生长，从而形成达到底面的真正的竹结构，消除沿着金属线长度取向的晶界的Cu扩散机理 。

公开(公告)号：US08476683B2

公开(公告)日：2013-07-02

申请号：US13569745

申请日：2012-08-08

申请人： Michael S. Gordon ,  Kenneth P. Rodbell ,  Jeng-Bang Yau

发明人： Michael S. Gordon ,  Kenneth P. Rodbell ,  Jeng-Bang Yau

IPC分类号： H01L27/14 ,  G01T1/02 ,  G01T1/24

CPC分类号： H01L21/26533 ,  H01L21/3115 ,  H01L21/76243 ,  H01L21/84 ,  H01L27/1203 ,  H01L31/119 ,  H01L2924/0002 ,  H01L2924/00

摘要： A semiconductor device includes a first field effect transistor (FET) located on a substrate; and a second FET located on the substrate, the second FET comprising a first buried oxide (BOX) region located underneath a channel region of the second FET, wherein the first BOX region of the second FET is configured to cause the second FET to have a higher radiation sensitivity that the first FET.

摘要翻译： 半导体器件包括位于衬底上的第一场效应晶体管（FET）; 以及位于所述衬底上的第二FET，所述第二FET包括位于所述第二FET的沟道区下方的第一掩埋氧化物（BOX）区域，其中所述第二FET的所述第一BOX区域被配置为使所述第二FET具有 第一FET的辐射灵敏度更高。

公开(公告)号：US20130049130A1

公开(公告)日：2013-02-28

申请号：US13569745

申请日：2012-08-08

申请人： Michael S. Gordon ,  Kenneth P. Rodbell ,  Jeng-Bang Yau

发明人： Michael S. Gordon ,  Kenneth P. Rodbell ,  Jeng-Bang Yau

IPC分类号： H01L27/092

CPC分类号： H01L21/26533 ,  H01L21/3115 ,  H01L21/76243 ,  H01L21/84 ,  H01L27/1203 ,  H01L31/119 ,  H01L2924/0002 ,  H01L2924/00

摘要： A semiconductor device includes a first field effect transistor (FET) located on a substrate; and a second FET located on the substrate, the second FET comprising a first buried oxide (BOX) region located underneath a channel region of the second FET, wherein the first BOX region of the second FET is configured to cause the second FET to have a higher radiation sensitivity that the first FET.

摘要翻译： 半导体器件包括位于衬底上的第一场效应晶体管（FET）; 以及位于所述衬底上的第二FET，所述第二FET包括位于所述第二FET的沟道区下方的第一掩埋氧化物（BOX）区域，其中所述第二FET的所述第一BOX区域被配置为使所述第二FET具有 第一FET的辐射灵敏度更高。

公开(公告)号：US20130026544A1

公开(公告)日：2013-01-31

申请号：US13189848

申请日：2011-07-25

申请人： Michael S. Gordon ,  Kenneth P. Rodbell ,  Jeng-Bang Yau

发明人： Michael S. Gordon ,  Kenneth P. Rodbell ,  Jeng-Bang Yau

IPC分类号： H01L31/119 ,  H01L31/18

CPC分类号： H01L31/119

摘要： A method for forming a neutron detector comprises thinning a backside silicon substrate of a radiation detector; and forming a neutron converter layer on the thinned backside silicon substrate of the radiation detector to form the neutron detector. The neutron converter layer comprises one of boron-10 (10B), lithium-6 (6Li), helium-3 (3He), and gadolinium-157 (157Gd).

摘要翻译： 一种形成中子检测器的方法，包括使辐射检测器的背面硅衬底变薄; 并在辐射检测器的薄化的背面硅衬底上形成中子转换层以形成中子检测器。 中子转换层包括硼-10（10B），锂-6（6Li），氦-3（3He）和钆-157（157Gd）中的一种。

公开(公告)号：US20110127438A1

公开(公告)日：2011-06-02

申请号：US12627076

申请日：2009-11-30

申请人： Cyril Cabral, JR. ,  Michael S. Gordon ,  Steven J. Koester ,  Conal E. Murray ,  Kenneth P. Rodbell ,  Stephen M. Rossnagel ,  Robert L. Wisnieff ,  Jeng-bang Yau

发明人： Cyril Cabral, JR. ,  Michael S. Gordon ,  Steven J. Koester ,  Conal E. Murray ,  Kenneth P. Rodbell ,  Stephen M. Rossnagel ,  Robert L. Wisnieff ,  Jeng-bang Yau

IPC分类号： G01T1/02 ,  G01T3/00

CPC分类号： G01T1/026

摘要： A system for determining an amount of radiation includes a dosimeter configured to receive the amount of radiation, the dosimeter comprising a circuit having a resonant frequency, such that the resonant frequency of the circuit changes according to the amount of radiation received by the dosimeter, the dosimeter further configured to absorb RF energy at the resonant frequency of the circuit; a radio frequency (RF) transmitter configured to transmit the RF energy at the resonant frequency to the dosimeter; and a receiver configured to determine the resonant frequency of the dosimeter based on the absorbed RF energy, wherein the amount of radiation is determined based on the resonant frequency.

摘要翻译： 用于确定辐射量的系统包括配置成接收辐射量的剂量计，该剂量计包括具有谐振频率的电路，使得电路的谐振频率根据剂量计接收的辐射量而改变， 剂量计还被配置为吸收电路的谐振频率处的RF能量; 射频（RF）发射器，被配置为以共振频率将所述RF能量传输到所述剂量计; 以及接收器，被配置为基于所吸收的RF能量来确定所述剂量计的谐振频率，其中所述辐射量基于所述谐振频率来确定。

公开(公告)号：US20090243053A1

公开(公告)日：2009-10-01

申请号：US12483364

申请日：2009-06-12

申请人： Cyril Cabral, JR. ,  Michael S. Gordon ,  Kenneth P. Rodbell

发明人： Cyril Cabral, JR. ,  Michael S. Gordon ,  Kenneth P. Rodbell

IPC分类号： H01L23/556

CPC分类号： H01L23/556 ,  H01L21/76801 ,  H01L21/76834 ,  H01L21/76838 ,  H01L23/5329 ,  H01L23/53295 ,  H01L23/585 ,  H01L24/03 ,  H01L24/05 ,  H01L24/12 ,  H01L24/16 ,  H01L24/45 ,  H01L24/48 ,  H01L2224/0401 ,  H01L2224/04042 ,  H01L2224/05006 ,  H01L2224/05554 ,  H01L2224/05572 ,  H01L2224/05599 ,  H01L2224/13007 ,  H01L2224/13022 ,  H01L2224/131 ,  H01L2224/13111 ,  H01L2224/16 ,  H01L2224/451 ,  H01L2224/48227 ,  H01L2224/48465 ,  H01L2224/85399 ,  H01L2924/00014 ,  H01L2924/0002 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01007 ,  H01L2924/01013 ,  H01L2924/01014 ,  H01L2924/01015 ,  H01L2924/01019 ,  H01L2924/0102 ,  H01L2924/01022 ,  H01L2924/01024 ,  H01L2924/01027 ,  H01L2924/01028 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01044 ,  H01L2924/01046 ,  H01L2924/01047 ,  H01L2924/0105 ,  H01L2924/01055 ,  H01L2924/01057 ,  H01L2924/01063 ,  H01L2924/01073 ,  H01L2924/01074 ,  H01L2924/01078 ,  H01L2924/01082 ,  H01L2924/01084 ,  H01L2924/01092 ,  H01L2924/014 ,  H01L2924/04941 ,  H01L2924/04953 ,  H01L2924/05042 ,  H01L2924/10253 ,  H01L2924/1305 ,  H01L2924/1306 ,  H01L2924/14 ,  H01L2924/15174 ,  H01L2924/15312 ,  H01L2924/15787 ,  H01L2924/19041 ,  H01L2924/19042 ,  H01L2924/19043 ,  H01L2924/30107 ,  H01L2924/3025 ,  H01L2224/45099 ,  H01L2924/00 ,  H01L2224/05552

摘要： A structure for reduction of soft error rates in integrated circuits. The structure including: a semiconductor substrate; and a stack of one or more wiring levels stacked from a lowermost wiring level to an uppermost wiring level, the lowermost wiring level nearer the semiconductor substrate than the uppermost wiring level; and an alpha particle blocking layer on a top surface of the uppermost wiring level of the one or more wiring levels, the blocking layer comprising metal wires and a dielectric material, the blocking layer having a combination of a thickness of the blocking layer and a volume percent of metal wires in the blocking layer sufficient to stop a predetermined percentage of alpha particles of a selected energy or less striking the blocking layer from penetrating into the stack of one or more wiring levels or the substrate.

摘要翻译： 用于降低集成电路中软错误率的结构。 该结构包括：半导体衬底; 以及从最下布线电平堆叠到最上布线电平的一个或多个布线电平的堆叠，比最上布线电平更靠近半导体基板的最下布线电平; 以及在所述一个或多个布线层的最上布线层的顶表面上的α粒子阻挡层，所述阻挡层包括金属线和介电材料，所述阻挡层具有阻挡层的厚度和体积 阻挡层中的金属线的百分比足以阻止预定百分比的选定能量的α粒子或更少的击穿阻挡层的金属线穿透到一个或多个布线层或衬底的堆叠中。

公开(公告)号：US20090206484A1

公开(公告)日：2009-08-20

申请号：US12031103

申请日：2008-02-14

申请人： Brett C. Baker-O'Neal ,  Cyril Cabral, Jr. ,  Qiang Huang ,  Kenneth P. Rodbell

发明人： Brett C. Baker-O'Neal ,  Cyril Cabral, Jr. ,  Qiang Huang ,  Kenneth P. Rodbell

IPC分类号： H01L21/768 ,  H01L23/538

CPC分类号： H01L21/76877 ,  H01L21/76873 ,  H01L23/53233 ,  H01L23/53238 ,  H01L2924/0002 ,  H01L2924/00

摘要： Cobalt is added to a copper seed layer, a copper plating layer, or a copper capping layer in order to modify the microstructure of copper lines and vias. The cobalt can be in the form of a copper-cobalt alloy or as a very thin cobalt layer. The grain boundaries configured in bamboo microstructure in the inventive metal interconnect structure shut down copper grain boundary diffusion. The composition of the metal interconnect structure after grain growth contains from about 1 ppm to about 10% of cobalt in atomic concentration. Grain boundaries extend from a top surface of a copper-cobalt alloy line to a bottom surface of the copper-cobalt alloy line, and are separated from any other grain boundary by a distance greater than a width of the copper-cobalt alloy line.

摘要翻译： 为了改变铜线和通孔的微观结构，将钴添加到铜种子层，铜镀层或铜覆盖层。 钴可以是铜 - 钴合金的形式或作为非常薄的钴层。 本发明金属互连结构中竹结构中晶界的结构关闭了铜晶界扩散。 晶粒生长后的金属互连结构的组成含有约1ppm至约10原子浓度的钴。 晶粒边界从铜 - 钴合金线的顶表面延伸到铜 - 钴合金线的底表面，并且与任何其它晶界分开大于铜 - 钴合金线的宽度的距离。

公开(公告)号：US20090108212A1

公开(公告)日：2009-04-30

申请号：US12326198

申请日：2008-12-02

申请人： Michael S. Gordon ,  Kenneth P. Rodbell ,  Robert L. Wisnieff

发明人： Michael S. Gordon ,  Kenneth P. Rodbell ,  Robert L. Wisnieff

IPC分类号： G01T1/00

CPC分类号： G01T1/04

摘要： Personal radiation detection devices, methods of obtaining radiation exposure data, and networks of personal radiation devices. The detection devices may include passive devices and active devices. The passive detection devices may have the same form factor as credit cards or be included in common types of credit card form factor sized cards.

摘要翻译： 个人辐射检测装置，获得辐射照射数据的方法和个人辐射装置的网络。 检测设备可以包括无源设备和有源设备。 被动检测设备可以具有与信用卡相同的形式，或者被包括在常规类型的信用卡形状因子大小的卡中。

公开(公告)号：US07491948B2

公开(公告)日：2009-02-17

申请号：US11342429

申请日：2006-01-30

申请人： Michael S. Gordon ,  Kenneth P. Rodbell ,  Robert L. Wisnieff

发明人： Michael S. Gordon ,  Kenneth P. Rodbell ,  Robert L. Wisnieff

IPC分类号： G01T3/00

CPC分类号： G01T1/04

摘要： A method of detecting and transmitting radiation detection information to a network. The method including: communicating with one or more personal radiation detection devices, each device including, a host memory, an event memory, a microprocessor, a global positioning unit and a transceiver or a transmitter; a radiation shield around the host memory and the event memory; a radiation detection memory, the radiation detection memory, responsive to alpha radiation and including two or more SRAM arrays including cross-coupled invertors coupled to wordlines through different value capacitors; a conversion device including a material able to convert neutron and/or gamma radiation into alpha radiation; and an event detection circuit configured to detect and to store data relative to detection of the alpha radiation events by the radiation detection memory; storing the data in the event memory; and retrieving, in a reading device of the network, the data stored in the event memory.

摘要翻译： 一种检测和发射辐射检测信息到网络的方法。 该方法包括：与一个或多个个人辐射检测设备通信，每个设备包括主机存储器，事件存储器，微处理器，全球定位单元和收发器或发射器; 围绕主机存储器和事件存储器的辐射屏蔽; 辐射检测存储器，所述辐射检测存储器响应于α辐射并且包括两个或更多个SRAM阵列，包括通过不同值电容器耦合到字线的交叉耦合的反相器; 转换装置，其包括能够将中子和/或γ辐射转换为α辐射的材料; 以及事件检测电路，被配置为检测并存储相对于所述辐射检测存储器对所述α辐射事件的检测的数据; 将数据存储在事件存储器中; 以及在所述网络的读取设备中检索存储在所述事件存储器中的数据。