Semiconductor device including power and logic devices and related fabrication methods
    36.
    发明授权
    Semiconductor device including power and logic devices and related fabrication methods 有权
    包括电源和逻辑器件以及相关制造方法的半导体器件

    公开(公告)号:US09478467B2

    公开(公告)日:2016-10-25

    申请号:US14543668

    申请日:2014-11-17

    摘要: Semiconductor device structures and related fabrication methods are provided. An exemplary fabrication method involves forming a layer of gate electrode material overlying a semiconductor substrate, forming a layer of masking material overlying the gate electrode material, and patterning the layer of masking material to define a channel region within a well region in the semiconductor substrate that underlies the gate electrode material. Prior to removing the patterned layer of masking material, the fabrication process etches the layer of gate electrode material to form a gate structure overlying the channel region using the patterned layer of masking material as an etch mask and forms extension regions in the well region using the patterned layer of masking material as an implant mask. Thereafter, the patterned layer of masking material is removed after forming the gate structure and the extension regions.

    摘要翻译: 提供半导体器件结构和相关的制造方法。 示例性的制造方法包括形成覆盖半导体衬底的栅电极材料层,形成覆盖栅极电极材料的掩模材料层,以及图案化掩模材料层,以限定半导体衬底的阱区域内的沟道区域, 构成栅电极材料。 在去除掩模材料的图案化层之前,制造工艺蚀刻栅极电极材料层,以形成覆盖沟道区域的栅极结构,使用图案化的掩模材料层作为蚀刻掩模,并使用 掩模材料的图案化层作为植入物掩模。 此后,在形成栅极结构和延伸区域之后去除掩模材料的图案化层。

    Integrated circuit devices with counter-doped conductive gates
    37.
    发明授权
    Integrated circuit devices with counter-doped conductive gates 有权
    具有反掺杂导电栅极的集成电路器件

    公开(公告)号:US09437701B2

    公开(公告)日:2016-09-06

    申请号:US14524172

    申请日:2014-10-27

    摘要: Integrated circuit devices with counter-doped conductive gates. The devices have a semiconductor substrate that has a substrate surface. The devices also have a first well of a first conductivity type, a source of a second conductivity type, and a drain of the second conductivity type. A channel extends between the source and the drain. A conductive gate extends across the channel. The conductive gate includes a first gate region and a second gate region of the second conductivity type and a third gate region of the first conductivity type. The third gate region extends between the first and second gate regions. The devices further include a gate dielectric that extends between the conductive gate and the substrate and also include a silicide region in electrical communication with the first, second, and third gate regions. The methods include methods of manufacturing the devices.

    摘要翻译: 具有反掺杂导电栅极的集成电路器件。 这些器件具有具有衬底表面的半导体衬底。 器件还具有第一导电类型的第一阱,第二导电类型的源极和第二导电类型的漏极。 通道在源极和漏极之间延伸。 导电栅极延伸穿过通道。 导电栅极包括第一导电类型的第一栅极区域和第二栅极区域以及第一导电类型的第三栅极区域。 第三栅极区域在第一和第二栅极区域之间延伸。 器件还包括在导电栅极和衬底之间延伸并且还包括与第一,第二和第三栅极区域电连通的硅化物区域的栅极电介质。 这些方法包括制造器件的方法。

    INTEGRATED CIRCUIT DEVICES WITH COUNTER-DOPED CONDUCTIVE GATES
    39.
    发明申请
    INTEGRATED CIRCUIT DEVICES WITH COUNTER-DOPED CONDUCTIVE GATES 有权
    具有反向导电门的集成电路装置

    公开(公告)号:US20160118469A1

    公开(公告)日:2016-04-28

    申请号:US14524172

    申请日:2014-10-27

    摘要: Integrated circuit devices with counter-doped conductive gates. The devices have a semiconductor substrate that has a substrate surface. The devices also have a first well of a first conductivity type, a source of a second conductivity type, and a drain of the second conductivity type. A channel extends between the source and the drain. A conductive gate extends across the channel. The conductive gate includes a first gate region and a second gate region of the second conductivity type and a third gate region of the first conductivity type. The third gate region extends between the first and second gate regions. The devices further include a gate dielectric that extends between the conductive gate and the substrate and also include a silicide region in electrical communication with the first, second, and third gate regions. The methods include methods of manufacturing the devices.

    摘要翻译: 具有反掺杂导电栅极的集成电路器件。 这些器件具有具有衬底表面的半导体衬底。 器件还具有第一导电类型的第一阱,第二导电类型的源极和第二导电类型的漏极。 通道在源极和漏极之间延伸。 导电栅极延伸穿过通道。 导电栅极包括第一导电类型的第一栅极区域和第二栅极区域以及第一导电类型的第三栅极区域。 第三栅极区域在第一和第二栅极区域之间延伸。 器件还包括在导电栅极和衬底之间延伸并且还包括与第一,第二和第三栅极区域电连通的硅化物区域的栅极电介质。 这些方法包括制造器件的方法。