LIGHT EMITTING DIODE
    32.
    发明申请
    LIGHT EMITTING DIODE 审中-公开
    发光二极管

    公开(公告)号:US20160233386A1

    公开(公告)日:2016-08-11

    申请号:US15132887

    申请日:2016-04-19

    Abstract: A light emitting diode includes a first conductive type semiconductor layer and a mesa disposed on the first conductive type semiconductor layer. The mesa includes an active layer and a second conductive type semiconductor layer. A reflective electrode is disposed on the mesa to be in ohmic-contact with the second conductive type semiconductor layer. A current spreading layer is disposed on the mesa and the reflective electrode. A first portion of the current spreading layer is in ohmic-contact with an upper surface of an end portion of the first conductive type semiconductor layer. A lower insulating layer is disposed between the mesa and the current spreading layer, and the reflective electrode and the current spreading layer. An upper insulating layer covers the current spreading layer and includes a first hole exposing a second portion of the current spreading layer that is disposed on an upper portion of the mesa.

    Abstract translation: 发光二极管包括设置在第一导电类型半导体层上的第一导电类型半导体层和台面。 台面包括有源层和第二导电类型半导体层。 反射电极设置在台面上以与第二导电类型半导体层欧姆接触。 电流扩散层设置在台面和反射电极上。 电流扩散层的第一部分与第一导电类型半导体层的端部的上表面欧姆接触。 下部绝缘层设置在台面与电流扩散层之间,反射电极和电流扩展层之间。 上绝缘层覆盖电流扩展层,并且包括暴露设置在台面上部的电流扩展层的第二部分的第一孔。

    Method for separating epitaxial layer from growth substrate
    34.
    发明授权
    Method for separating epitaxial layer from growth substrate 有权
    从生长衬底分离外延层的方法

    公开(公告)号:US09218967B2

    公开(公告)日:2015-12-22

    申请号:US14361117

    申请日:2012-11-27

    CPC classification number: H01L21/02664 H01L21/0254 H01L21/02587 H01L33/0079

    Abstract: The present invention provides a method for separating an epitaxial layer from a growth substrate, comprising growing an epitaxial layer including a plurality of layers on a growth substrate; etching an edge of at least one layer in the epitaxial layer to form a notch; forming a bonding layer on the epitaxial layer, contacting a bonding substrate onto the bonding layer, and then heating the bonding layer to a bonding temperature for joining the epitaxial layer and the bonding substrate; and cooling the bonding layer after the heating of the boding layer, so that the epitaxial layer and the bonding substrate are joined by the bonding layer, and the epitaxial layer is separated from the growth substrate, wherein the separating the epitaxial layer from the growth substrate starts with separation from the at least one layer where the notch is formed.

    Abstract translation: 本发明提供了一种用于从生长衬底分离外延层的方法,包括在生长衬底上生长包括多个层的外延层; 蚀刻外延层中的至少一层的边缘以形成凹口; 在所述外延层上形成接合层,将接合基板接触到所述接合层上,然后将所述接合层加热至接合所述外延层和所述接合基板的接合温度; 并且在加热所述粘合层之后冷却所述接合层,使得所述外延层和所述接合基板通过所述接合层接合,并且所述外延层与所述生长基板分离,其中所述外延层与所述生长基板分离 从形成有凹口的至少一个层分离开始。

    METHOD OF SEPARATING SUBSTRATE AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME
    36.
    发明申请
    METHOD OF SEPARATING SUBSTRATE AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME 有权
    分离基板的方法和使用其制造半导体器件的方法

    公开(公告)号:US20140179043A1

    公开(公告)日:2014-06-26

    申请号:US14138923

    申请日:2013-12-23

    Abstract: A method of fabricating a semiconductor device, the method including: forming a first mask pattern including a masking region and an open region on a substrate; forming a sacrificial layer to cover the substrate and the first mask pattern; patterning the sacrificial layer to form a seed layer and to expose the first mask pattern; forming a second mask pattern on the exposed first mask pattern; forming an epitaxial layer on the seed layer and the second mask pattern, and forming a void between the second mask pattern and the epitaxial layer; and separating the substrate from the epitaxial layer.

    Abstract translation: 一种制造半导体器件的方法,所述方法包括:在衬底上形成包括掩模区域和开放区域的第一掩模图案; 形成覆盖衬底和第一掩模图案的牺牲层; 图案化所述牺牲层以形成种子层并暴露所述第一掩模图案; 在所述暴露的第一掩模图案上形成第二掩模图案; 在种子层和第二掩模图案上形成外延层,并在第二掩模图案和外延层之间形成空隙; 以及将衬底与外延层分离。

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