公开(公告)号：US20090039280A1

公开(公告)日：2009-02-12

申请号：US12181199

申请日：2008-07-28

申请人： Pavel ADAMEC ,  Carlo SALVESEN ,  Ivo LISKA

发明人： Pavel ADAMEC ,  Carlo SALVESEN ,  Ivo LISKA

IPC分类号： H01J3/26 ,  H01F7/06

CPC分类号： H01J37/141 ,  H01J2237/1405 ,  Y10T29/4902

摘要： A lens assembly having a magnetic lens assembly for a charged particle beam system is provided. The lens assembly includes: a first pole piece having a connecting portion of the first pole piece and a gap portion of the first pole piece, a second pole piece having a connecting portion of the second pole piece and a gap portion of the second pole piece, wherein the first pole piece and the second pole piece provide a gap at the respective gap portions, a coil for exciting the magnetic lens assembly, a centering element comprising a material that has a smaller Young's modulus than the material of the first and the material of the second pole piece, wherein the pole pieces are connected with each other at the respective connecting portions and have a centering element receiving portion towards the respective gap portion ends of the pole pieces.

摘要翻译： 提供了一种具有用于带电粒子束系统的磁性透镜组件的透镜组件。 透镜组件包括：第一极片，其具有第一极靴的连接部分和第一极靴的间隙部分，第二极靴具有第二极靴的连接部分和第二极靴的间隙部分 ，其中所述第一极靴和所述第二极靴在相应的间隙部分处提供间隙，用于激发所述磁性透镜组件的线圈;定心元件，包括具有比所述第一材料和材料的材料更小的杨氏模量的材料 所述极片在相应的连接部分处彼此连接并且具有朝向所述极片的相应间隙部分端部的定心元件接收部分。

公开(公告)号：US20090026384A1

公开(公告)日：2009-01-29

申请号：US12181171

申请日：2008-07-28

申请人： Pavel ADAMEC ,  Carlo SALVESEN ,  Ivo LISKA

发明人： Pavel ADAMEC ,  Carlo SALVESEN ,  Ivo LISKA

IPC分类号： H01J3/18 ,  H01J3/20

CPC分类号： H01J37/12 ,  H01J37/145 ,  H01J2237/032 ,  H01J2237/038 ,  H01J2237/121 ,  H01J2237/1405 ,  H01J2237/28

摘要： A lens assembly having an electrostatic lens component for a charged particle beam system is provided. The assembly includes: a first electrode having a conically shaped portion, a second electrode having a conically shaped portion, and a first insulator having a conically shaped portion, wherein the first insulator comprises two extending portions towards each of its ends, and wherein the two extending portions are formed to generate a gap between the insulator and each of the adjacent electrodes.

摘要翻译： 提供一种具有用于带电粒子束系统的静电透镜部件的透镜组件。 组件包括：具有锥形部分的第一电极，具有锥形部分的第二电极和具有锥形部分的第一绝缘体，其中第一绝缘体包括朝向其每个端部的两个延伸部分，并且其中两个 形成延伸部分以在绝缘体和每个相邻电极之间产生间隙。

公开(公告)号：US07429740B2

公开(公告)日：2008-09-30

申请号：US11483804

申请日：2006-07-10

申请人： Carlo Salvesen ,  Ralf Degenhardt

发明人： Carlo Salvesen ,  Ralf Degenhardt

IPC分类号： H01J1/50

CPC分类号： H01J37/153 ,  H01J37/1413 ,  H01J37/145 ,  H01J2237/10 ,  H01J2237/1508 ,  Y10T29/4902

摘要： An electric-magnetic field-generating element and a multipole element comprising a plurality of these field-generating elements providing for a stable charged particle beam are described. For some embodiments, the electric-magnetic field-generating element includes a pole piece, a yoke to which the pole piece is attached, at least one coil, a vacuum-tight container accommodating the coil(s), and a holder adapted to hold the vacuum-tight container such that the vacuum-tight container is spaced from the pole piece and the yoke.

摘要翻译： 描述了包括提供稳定的带电粒子束的多个这些场产生元件的电磁场产生元件和多极元件。 对于一些实施例，电磁场产生元件包括极片，连接有极片的磁轭，至少一个线圈，容纳线圈的真空密封容器和适于保持 真空密封容器使得真空密封容器与极靴和轭架间隔开。

公开(公告)号：US20080067408A1

公开(公告)日：2008-03-20

申请号：US11752560

申请日：2007-05-23

申请人： Dieter WINKLER

发明人： Dieter WINKLER

IPC分类号： H01T23/00

CPC分类号： H01J37/08 ,  H01J2237/006 ,  H01J2237/061 ,  H01J2237/0807 ,  H01J2237/0815

摘要： The present invention provides a charged particle beam device for irradiating a specimen with ions. The charged particle beam device comprises a gas field ion source unit for generating a beam of ions, the gas field ion source having an emitter unit having an emitter unit tip; and a gas supply system for directing gas to the emitter unit tip. The gas supply system comprises an array of capillary tubes. Further, the present invention provides a method for irradiating a specimen with ions by operating a charged particle beam device having a gas field ion source, wherein the method comprises the step of directing a gas flow to an emitter unit tip, wherein the gas flow has a gas beam aperture angle of 3° or less.

摘要翻译： 本发明提供一种用离子照射样本的带电粒子束装置。 带电粒子束装置包括用于产生离子束的气体离子源单元，气体离子源具有发射极单元，其具有发射极单元尖端; 以及用于将气体引导到发射器单元尖端的气体供应系统。 气体供应系统包括一排毛细管。 此外，本发明提供了一种通过操作具有气体离子源的带电粒子束装置对离子进行照射的方法，其中该方法包括将气流引导到发射器单元尖端的步骤，其中气流具有 气束孔径角为3°以下。

公开(公告)号：US07075075B2

公开(公告)日：2006-07-11

申请号：US10871879

申请日：2004-06-18

申请人： Pavel Adamec ,  Harry Munack

发明人： Pavel Adamec ,  Harry Munack

IPC分类号： H01J37/147 ,  H01J37/256 ,  H01J37/28

CPC分类号： H01J37/153 ,  H01J37/1475 ,  H01J2237/141 ,  H01J2237/1532 ,  H01J2237/1536

摘要： The invention provides a deflecting system for deflecting a charged particle beam from a first direction to a second direction, the deflecting system comprising a first deflector for deflecting said charged particle beam off the first direction within a first deflection plane; a second deflector for deflecting the deflected charged particle beam into the second direction within the first deflection plane; and at least one deflecting pair of correcting coils comprising two correction coils which is positioned and shaped to reduce an astigmatism of the charged particle beam caused by the deflections.

摘要翻译： 本发明提供了一种用于将带电粒子束从第一方向偏转到第二方向的偏转系统，该偏转系统包括用于在第一偏转平面内将所述带电粒子束偏离第一方向的第一偏转器; 第二偏转器，用于将偏转的带电粒子束偏转到第一偏转平面内的第二方向; 以及至少一个偏转对的校正线圈，其包括两个校正线圈，其被定位和成形以减少由偏转引起的带电粒子束的像散。

公开(公告)号：US5021670A

公开(公告)日：1991-06-04

申请号：US463543

申请日：1990-01-11

申请人： Stephan Lanio ,  Maximilian Haider

发明人： Stephan Lanio ,  Maximilian Haider

IPC分类号： H01J37/145 ,  H01J37/153

CPC分类号： H01J37/145

摘要： The multipole element has an even number of pole pieces (PS, PS') which arerranged symmetrically with respect to the optical axis (OA) of an electron beam measuring device and are rigidly connected to a ring-shaped yoke (J) by bar-shaped mounting elements (PH, PH'). A beam tube (SR), which is made from an electrically insulating material and has vacuum-tight ducts to receive the mounting elements (PH, PH') which are rigidly connected to the pole pieces (PS, PS'), is arranged coaxially with respect to the optical axis (OA) inside the yoke (J) which serves to guide the magnetic flux. The coils (SP, SP') for magnetic excitation of the pole pieces (PS, PS') are arranged on the parts of the mounting elements (PH, PH') lying outside the beam tube (SR). In order to generate an electrical multipole field suitable potentials (U, U') are applied to the pole pieces (PS, PS'). The mounting elements (PH, PH') which are guided in the bores, which are lined with an insulator (IS, IS'), of the yoke (J) and are each connected to an electrical terminal (A, A') serve as a voltage supply.

摘要翻译： 多极元件具有偶数个极片（PS，PS'），它们相对于电子束测量装置的光轴（OA）对称地布置，并且通过棒材刚性连接到环形磁轭（J） 形状的安装元件（PH，PH'）。 由电绝缘材料制成并具有真空密封导管以接收刚性地连接到极片（PS，PS'）的安装元件（PH，PH'）的光束管（SR）被同轴地布置 相对于用于引导磁通量的磁轭（J）内的光轴（OA）。 用于磁极（PS，PS'）的磁激励的线圈（SP，SP'）布置在位于束管（SR）外侧的安装元件（PH，PH'）的部分上。 为了产生电多极场，合适的电位（U，U'）被施加到极片（PS，PS'）。 在孔中引导的安装元件（PH，PH'）被引导到轭（J）的绝缘体（IS，IS'）并且各自连接到电端子（A，A'） 作为电源。

公开(公告)号：US08445846B2

公开(公告)日：2013-05-21

申请号：US10587105

申请日：2004-12-13

申请人： Juergen Frosien

发明人： Juergen Frosien

IPC分类号： G01N23/00 ,  G21K7/00

CPC分类号： H01J37/14 ,  H01J37/12 ,  H01J37/15 ,  H01J2237/1501

摘要： The present invention relates to a beam optical component including a charged particle lens for focusing a charged particle beam, the charged particle lens comprising a first element having a first opening for focusing the charged particle beam; a second element having a second opening for focusing the charged particle beam and first driving means connected with at least one of the first element and the second element for aligning the first opening with respect to the second opening. With the first driving means, the first opening and the second opening can be aligned with respect to each other during beam operation to provide a superior alignment of the beam optical component for a better beam focusing. The present invention also relates to a charged particle beam device that uses said beam optical component for focusing the charged particle beam, and a method to align first opening and second opening with respect to each other.

摘要翻译： 本发明涉及一种包括用于聚焦带电粒子束的带电粒子透镜的束光学部件，该带电粒子透镜包括具有用于聚焦带电粒子束的第一开口的第一元件; 第二元件具有用于聚焦带电粒子束的第二开口和与第一元件和第二元件中的至少一个连接的第一驱动装置，用于相对于第二开口对准第一开口。 利用第一驱动装置，第一开口和第二开口可以在光束操作期间相对于彼此对准，以提供光束光学部件的优良对准以获得更好的光束聚焦。 本发明还涉及使用所述光束光学部件来聚焦带电粒子束的带电粒子束装置，以及使第一开口和第二开口相对于彼此对准的方法。

公开(公告)号：US08378299B2

公开(公告)日：2013-02-19

申请号：US13045068

申请日：2011-03-10

申请人： Jürgen Frosien

发明人： Jürgen Frosien

IPC分类号： G01B15/00

CPC分类号： H01J37/147 ,  H01J37/1471 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/0453 ,  H01J2237/04756 ,  H01J2237/1514 ,  H01J2237/153 ,  H01J2237/24465 ,  H01J2237/24592 ,  H01J2237/2817

摘要： A column for a charged particle beam device is described. The column includes a charged particle emitter for emitting a primary charged particle beam as one source of the primary charged particle beam; a biprism adapted for acting on the primary charged particle beam so that two virtual sources are generated; and a charged particle beam optics adapted to focus the charged particle beam simultaneously on two positions of a specimen corresponding to images of the two virtual sources.

摘要翻译： 描述带电粒子束装置的柱。 该柱包括用于发射初级带电粒子束作为初级带电粒子束的一个源的带电粒子发射器; 适于作用于初级带电粒子束的双棱镜，从而产生两个虚拟源; 以及带电粒子束光学器件，其适于将带电粒子束同时聚焦在对应于两个虚拟源的图像的样本的两个位置上。

公开(公告)号：US20130026385A1

公开(公告)日：2013-01-31

申请号：US13196778

申请日：2011-08-02

申请人： Dieter WINKLER ,  Stefan LANIO

发明人： Dieter WINKLER ,  Stefan LANIO

IPC分类号： H01J3/14 ,  H01S4/00

CPC分类号： H01J37/09 ,  H01J2237/0206 ,  H01J2237/026 ,  H01J2237/28

摘要： A shielding member for a charged particle beam apparatus includes a conductive substrate; and a through hole extending through the conductive substrate. The conductive substrate is comprised of a material having a specific electrical resistivity in a range from about 106 Ωcm to about 1012 Ωcm.

摘要翻译： 带电粒子束装置的屏蔽构件包括导电基板; 以及延伸穿过导电基板的通孔。 导电衬底由具有约106Ω-cm至约1012Ω-cm范围内的特定电阻率的材料组成。

公开(公告)号：US20110253893A1

公开(公告)日：2011-10-20

申请号：US13089059

申请日：2011-04-18

申请人： Helmut BANZHOF

发明人： Helmut BANZHOF

IPC分类号： G01N23/225

CPC分类号： H01J37/28 ,  H01J37/1478 ,  H01J37/153 ,  H01J37/263 ,  H01J2237/1534 ,  H01J2237/2809 ,  H01J2237/2814

摘要： A charged particle beam device is provided, including: a charged particle beam source adapted to generate a charged particle beam on an axis; an optical aberration correction device and an objective lens device, which define a corrected beam aperture angle adjusted to reduce diffraction; and a charged particle beam tilting device; wherein the optical aberration correction device and the objective lens device are adapted to provide the charged particle beam with a beam aperture angle smaller than the corrected beam aperture angle; and wherein the charged particle beam tilting device is adapted to provide a beam tilt angle which is equal or less than the corrected beam aperture angle. Further, a method of operating a charged particle beam device is provided.

摘要翻译： 提供带电粒子束装置，包括：带电粒子束源，适于在轴上产生带电粒子束; 光学像差校正装置和物镜装置，其限定校正后的光束孔径角度，以减小衍射; 和带电粒子束倾斜装置; 其中所述光学像差校正装置和所述物镜装置适于为所述带电粒子束提供小于校正的光束孔径角的光束孔径角; 并且其中所述带电粒子束倾斜装置适于提供等于或小于所述校正光束孔径角的光束倾斜角度。 此外，提供了一种操作带电粒子束装置的方法。