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    System and Method for Stimulated Raman Spectroscopy
    31.
    发明申请
    System and Method for Stimulated Raman Spectroscopy 有权
    刺激拉曼光谱的系统和方法

    公开(公告)号：US20160091429A1

    公开(公告)日：2016-03-31

    申请号：US14890109

    申请日：2014-05-09

    Applicant: LUDWIG-MAXIMILIANS-UNIVERSITÄT MÜNCHEN

    Inventor： Robert Alexander Huber ,  Thomas Klein ,  Wolfgang Wieser ,  Sebastian Karpf ,  Matthias Eibl

    IPC: G01N21/65 ,  G01J3/44

    CPC classification number: G01N21/65 ,  G01J3/44 ,  G01J3/4412 ,  G01N2021/655 ,  G01N2201/06113 ,  G01N2201/0683 ,  G01N2201/0697 ,  H01S3/0064 ,  H01S3/0078 ,  H01S3/06758 ,  H01S3/094069 ,  H01S3/09415 ,  H01S3/10015 ,  H01S3/1618 ,  H01S3/2391 ,  H01S3/302

    Abstract: Disclosed herein is a system (10) for measuring light induced transmission or reflection changes, in particular due to stimulated Raman emission. The system comprises a first light source (12) for generating a first light signal having a first wavelength, a second light source (14) for generating a second light signal having a second wavelength, an optical assembly (16) for superposing said first and second light signals at a sample location (18), and a detection means (24) for detecting a transmitted or reflected light signal, in particular a stimulated Raman signal caused by a Raman-active medium when located at said sample location. Here in at least one of the first and second light sources (12, 14) is one or both of actively controllable to emit a time controlled light pattern or operated substantially in CW mode and provided with an extra cavity modulation means (64) for generating a time controlled light pattern. The detection means (24) is capable of recording said transmitted or reflected light signal, in particular stimulated Raman signal, as a function of time.

    Abstract translation: 本文公开了一种用于测量光诱导的透射或反射变化的系统（10），特别是由于受激的拉曼发射。 该系统包括用于产生具有第一波长的第一光信号的第一光源（12），用于产生具有第二波长的第二光信号的第二光源（14），用于叠加所述第一波长的光学组件 以及检测装置（24），用于检测发射或反射的光信号，特别是当位于所述采样位置时由拉曼活性介质引起的受激拉曼信号。 这里，第一和第二光源（12,14）中的至少一个是主要可控制的一个或两个以发射时间控制的光图案或基本上以CW模式操作，并且设置有用于产生的额外的空腔调制装置（64） 时间控制的光图案。 检测装置（24）能够作为时间的函数记录特定的受激拉曼信号的所述发射或反射的光信号。

    Apparatus for testing samples using raman radiation
    32.
    发明授权
    Apparatus for testing samples using raman radiation 有权
    使用拉曼辐射测试样品的装置

    公开(公告)号：US09261404B2

    公开(公告)日：2016-02-16

    申请号：US14365699

    申请日：2012-12-12

    Applicant: GLAXO GROUP LIMITED

    Inventor： Ralf Marbach ,  Jussi Tenhunen

    IPC: G01J3/44 ,  G01N21/65 ,  G01N21/03

    CPC classification number: G01J3/4412 ,  G01N21/65 ,  G01N2021/0339 ,  G01N2021/651

    Abstract: An apparatus and method using the apparatus for measuring target samples, particularly pharmaceutical products using Raman radiation. The sample is located in an aperture in a wall structure with a reflective surface on one or both of the sides of the wall structure facing respectively the excitation radiation transmitter or the Raman radiation detector. Preferably two reflective surfaces each in hemispherical shape and facing each other in a spherical arrangement are provided, with the wall structure across the diameter of the sphere.

    Abstract translation: 一种使用该装置测量目标样品，特别是使用拉曼辐射的药物产品的装置和方法。 样品位于壁结构中的孔中，其中壁结构的一侧或两侧上的反射表面分别面对激发辐射发射器或拉曼辐射探测器。 优选地，提供两个半球形并且以球形布置彼此面对的两个反射表面，其中壁结构横跨球体的直径。

    Inspection apparatus and method
    33.
    发明授权
    Inspection apparatus and method 有权
    检验仪器及方法

    公开(公告)号：US09222834B2

    公开(公告)日：2015-12-29

    申请号：US13767769

    申请日：2013-02-14

    Applicant: ASML Netherlands B.V.

    Inventor： Arie Jeffrey Den Boef

    IPC: G01J3/44 ,  G03F7/20 ,  G03F9/00 ,  G01N21/956 ,  G01N21/47 ,  G01N21/95

    CPC classification number: G01J3/4412 ,  G01J3/44 ,  G01N21/4788 ,  G01N21/9501 ,  G01N21/956 ,  G01N21/95607 ,  G02B5/205 ,  G03F7/70591 ,  G03F7/70625 ,  G03F7/70633 ,  G03F9/7026

    Abstract: A spectroscopic scatterometer detects both zero order and higher order radiation diffracted from an illuminated spot on a target grating. The apparatus forms and detects a spectrum of zero order (reflected) radiation, and separately forms and detects a spectrum of the higher order diffracted radiation. Each spectrum is formed using a symmetrical phase grating, so as to form and detect a symmetrical pair of spectra. The pair of spectra can be averaged to obtain a single spectrum with reduced focus sensitivity. Comparing the two spectra can yield information for improving height measurements in a subsequent lithographic step. The target grating is oriented obliquely so that the zero order and higher order radiation emanate from the spot in different planes. Two scatterometers can operate simultaneously, illuminating the target from different oblique directions. A radial transmission filter reduces sidelobes in the spot and reduces product crosstalk.

    Abstract translation: 光谱散射仪检测从目标光栅上的照明光点衍射的零级和高阶辐射。 该装置形成和检测零级（反射）辐射的光谱，并分别形成和检测高阶衍射辐射的光谱。 每个光谱使用对称相位光栅形成，以便形成和检测对称的光谱对。 这对光谱可以被平均以获得具有降低的聚焦灵敏度的单个光谱。 比较两个光谱可以产生用于在随后的光刻步骤中改善高度测量的信息。 目标光栅倾斜定向，使得零级和高阶辐射从不同平面中的光点发出。 两个散射仪可以同时操作，从不同的倾斜方向照射目标。 径向传输过滤器可减少现场的旁瓣并减少产品串扰。

    Inspection Apparatus and Method
    34.
    发明申请
    Inspection Apparatus and Method 审中-公开
    检验仪器及方法

    公开(公告)号：US20150346609A1

    公开(公告)日：2015-12-03

    申请号：US14825728

    申请日：2015-08-13

    Applicant: ASML Netherlands B.V.

    Inventor： Arie Jeffrey DEN BOEF

    IPC: G03F7/20 ,  G01N21/95 ,  G02B5/20 ,  G01J3/44

    CPC classification number: G01J3/4412 ,  G01J3/44 ,  G01N21/4788 ,  G01N21/9501 ,  G01N21/956 ,  G01N21/95607 ,  G02B5/205 ,  G03F7/70591 ,  G03F7/70625 ,  G03F7/70633 ,  G03F9/7026

    Abstract: A spectroscopic scatterometer detects both zero order and higher order radiation diffracted from an illuminated spot on a target grating. The apparatus forms and detects a spectrum of zero order (reflected) radiation, and separately forms and detects a spectrum of the higher order diffracted radiation. Each spectrum is formed using a symmetrical phase grating, so as to form and detect a symmetrical pair of spectra. The pair of spectra can be averaged to obtain a single spectrum with reduced focus sensitivity. Comparing the two spectra can yield information for improving height measurements in a subsequent lithographic step. The target grating is oriented obliquely so that the zero order and higher order radiation emanate from the spot in different planes. Two scatterometers can operate simultaneously, illuminating the target from different oblique directions. A radial transmission filter reduces sidelobes in the spot and reduces product crosstalk.

    Abstract translation: 光谱散射仪检测从目标光栅上的照明光点衍射的零级和高阶辐射。 该装置形成和检测零级（反射）辐射的光谱，并分别形成和检测高阶衍射辐射的光谱。 每个光谱使用对称相位光栅形成，以便形成和检测对称的光谱对。 这对光谱可以被平均以获得具有降低的聚焦灵敏度的单个光谱。 比较两个光谱可以产生用于在随后的光刻步骤中改善高度测量的信息。 目标光栅倾斜定向，使得零级和高阶辐射从不同平面中的光点发出。 两个散射仪可以同时操作，从不同的倾斜方向照射目标。 径向传输过滤器可减少现场的旁瓣并减少产品串扰。

    METHOD AND DEVICE FOR DETERMINING AND CALCULATING A SCATTERED RADIATION SPECTRUM AND METHOD FOR COMPRESSING DATA
    35.
    发明申请
    METHOD AND DEVICE FOR DETERMINING AND CALCULATING A SCATTERED RADIATION SPECTRUM AND METHOD FOR COMPRESSING DATA 审中-公开
    用于确定和计算散射光谱的方法和装置以及用于压缩数据的方法

    公开(公告)号：US20150323386A1

    公开(公告)日：2015-11-12

    申请号：US14648010

    申请日：2013-11-26

    Applicant: LEIBNIZ-INSTITUT FÜR ATMOSPHÄRENPHYSIK E.V. AN DER UNIVERSITÄT ROSTOCK

    Inventor： Josef Hoeffner

    IPC: G01J3/44 ,  G01J3/10

    CPC classification number: G01J3/4412 ,  G01J3/10 ,  G01N21/538 ,  G01S7/484 ,  G01S7/486 ,  G01S7/497 ,  G01S17/58 ,  G01S17/95 ,  Y02A90/19

    Abstract: The invention relates to a device (1) and a method (20) for determining a spectrum (X) of scattered radiation (S). The invention further relates to a method (70) for calculating the spectrum (X) and a method for compressing unstructured data (60) of known distribution. To be able to determine the spectrum (X) as precisely as possible and to derive from this the characteristics of materials that scatter laser pulses (P), the invention proposes that at least one characteristic of the laser pulse (P) is determined and that a spectrum analyzer (5) is used for this. Frequencies (F) of laser pulses (P) and volumes (M) of backscattered radiation (S) are combined into frequency and volume values (F′, M′) to calculate the spectrum (X). The most frequent data values are deleted from the data to compress the data (60).

    Abstract translation: 本发明涉及一种用于确定散射辐射（S）的光谱（X）的装置（1）和方法（20）。 本发明还涉及用于计算频谱（X）的方法（70）和用于压缩已知分布的非结构化数据（60）的方法。 为了能够尽可能精确地确定光谱（X），并从此衍生出散射激光脉冲（P）的材料的特性，本发明提出确定激光脉冲（P）的至少一个特性，并且 为此使用频谱分析仪（5）。 将反射散射（S）的激光脉冲（P）和体积（M）的频率（F）组合成频率和体积值（F'，M'）以计算光谱（X）。 从数据中删除最频繁的数据值以压缩数据（60）。

    FLOW TYPE SINGLE-PARTICLE SPECTROMETER
    39.
    发明申请
    FLOW TYPE SINGLE-PARTICLE SPECTROMETER 有权
    流式单颗粒光谱仪

    公开(公告)号：US20150300881A1

    公开(公告)日：2015-10-22

    申请号：US14440899

    申请日：2012-11-08

    Applicant: HITACHI, LTD.

    Inventor： Kei TAKENAKA ,  Shigenori TOGASHI

    IPC: G01J3/44 ,  G01N15/14 ,  G01N21/64

    CPC classification number: G01J3/4406 ,  G01J3/4412 ,  G01N15/1434 ,  G01N21/47 ,  G01N21/645 ,  G01N2021/4707 ,  G01N2021/6417 ,  G01N2021/6493 ,  G01N2201/06113

    Abstract: A flow type single-particle spectrometer includes a sample container which holds a sample liquid containing a particle to be inspected; a detection channel which is a flow path for optically detecting the particle to be inspected; a waste liquid container which stores the sample liquid flowing out through the detection channel; a liquid feed member; a white light source which emits white light; an excitation light dispersion element which spatially disperses the white light into wavelength components; an excitation light collecting element which collects light; a fluorescence light collecting element which collects fluorescence light and side scattered light; a fluorescence light dispersion element which spatially disperses the fluorescence light into wavelength components; a dispersed light collecting element which collects the fluorescence light dispersed by the fluorescence light dispersion element; and a multi-channel light detector which detects intensity of light for each wavelength.

    Abstract translation: 流式单粒子光谱仪包括容纳待检查颗粒的样品液的样品容器; 检测通道，其是用于光学检测待检查的颗粒的流路; 废液容器，其存储通过检测通道流出的样品液体; 液体进料构件; 发出白光的白光源; 将白光空间分散成波长成分的激发光分散元件; 收集光的激发光收集元件; 收集荧光和侧向散射光的荧光聚光元件; 荧光光分散元件，其将荧光光空间分散成波长成分; 收集由荧光分散元件分散的荧光的散射光收集元件; 以及检测各波长的光强度的多通道光检测器。

    Defect inspection and photoluminescence measurement system
    40.
    发明授权
    Defect inspection and photoluminescence measurement system 有权
    缺陷检查和光致发光测量系统

    公开(公告)号：US09163987B2

    公开(公告)日：2015-10-20

    申请号：US12861894

    申请日：2010-08-24

    Applicant: Roman Sappey ,  Steven W. Meeks

    Inventor： Roman Sappey ,  Steven W. Meeks

    IPC: F21V9/16 ,  G01J3/36 ,  G01J3/44 ,  G01N21/64 ,  G01N21/95

    CPC classification number: G01J3/36 ,  G01J3/4412 ,  G01N21/6489 ,  G01N21/9501

    Abstract: A system for defect detection and photoluminescence measurement of a sample may include a radiation source configured to target radiation to the sample. The system may also include an optics assembly positioned above the sample to receive a sample radiation. The system may also include a filter module configured to receive the sample radiation collected by the optics assembly. The filter module may separate the sample radiation collected by the optics assembly into a first radiation portion and a second radiation portion. The system may also include a defect detection module configured to receive the first radiation portion from the filter module. The system may further include a photoluminescence measurement module configured to receive the second radiation portion from the filter module. The defect detection module and the photoluminescence measurement module may be configured to receive the respective first radiation portion and the second radiation portion substantially simultaneously.

    Abstract translation: 用于样品的缺陷检测和光致发光测量的系统可以包括被配置为将辐射靶向样品的辐射源。 该系统还可以包括位于样品上方以接收样品辐射的光学组件。 该系统还可以包括被配置为接收由光学组件收集的样品辐射的滤波器模块。 过滤器模块可以将由光学组件收集的样品辐射分离成第一辐射部分和第二辐射部分。 该系统还可以包括被配置为从过滤器模块接收第一辐射部分的缺陷检测模块。 该系统可以进一步包括光致发光测量模块，其被配置为从过滤器模块接收第二辐射部分。 缺陷检测模块和光致发光测量模块可以被配置为基本上同时地接收相应的第一辐射部分和第二辐射部分。

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