公开(公告)号：US07291805B2

公开(公告)日：2007-11-06

申请号：US10789557

申请日：2004-02-27

申请人： C. Brent Dane ,  Lloyd A. Hackel ,  Fritz Harris

发明人： C. Brent Dane ,  Lloyd A. Hackel ,  Fritz Harris

IPC分类号： B23K26/06

CPC分类号： H01S3/235 ,  B23K26/032 ,  B23K26/0622 ,  B23K26/064 ,  B23K26/0648 ,  B23K26/0665 ,  C21D10/005 ,  H01S3/10076

摘要： A system for applying a laser beam to work pieces, includes a laser system producing a high power output beam. Target delivery optics are arranged to deliver the output beam to a target work piece. A relay telescope having a telescope focal point is placed in the beam path between the laser system and the target delivery optics. The relay telescope relays an image between an image location near the output of the laser system and an image location near the target delivery optics. A baffle is placed at the telescope focal point between the target delivery optics and the laser system to block reflections from the target in the target delivery optics from returning to the laser system and causing damage.

摘要翻译： 用于将激光束施加到工件上的系统包括产生高功率输出光束的激光系统。 目标传送光学器件被布置成将输出光束传送到目标工件。 具有望远镜焦点的中继望远镜被放置在激光系统和目标传送光学器件之间的光束路径中。 继电器望远镜在激光系统的输出附近的图像位置与目标输送光学系统附近的图像位置之间中继图像。 挡板放置在目标输送光学器件和激光系统之间的望远镜焦点处，以阻挡来自目标输送光学器件中的目标物的反射，从返回到激光系统并造成损坏。

公开(公告)号：US20070201532A1

公开(公告)日：2007-08-30

申请号：US11364121

申请日：2006-02-28

申请人： Jian Zhang ,  Jie Song ,  Bo Guo ,  Kuo-Ching Liu

发明人： Jian Zhang ,  Jie Song ,  Bo Guo ,  Kuo-Ching Liu

IPC分类号： H01S3/093 ,  H01S3/081

CPC分类号： H01S3/09415 ,  H01S3/025 ,  H01S3/0405 ,  H01S3/042 ,  H01S3/0606 ,  H01S3/0612 ,  H01S3/081 ,  H01S3/0815 ,  H01S3/117 ,  H01S3/235

摘要： A laser apparatus for producing a laser light beam can include a gain medium; a pump light source to provide a pump light beam to the gain medium; a first reflector disposed between the first gain medium and the first pump light source and spaced apart from a gain portion of the first gain medium; a second reflector; and an output coupler. The first reflector is substantially reflective to the laser light beam and substantially transmissive to the pump light beam. The first and second reflectors and the output coupler define a folded beam path having a first portion and a second portion. The first portion of the beam path extends from the first reflector to the second reflector through the gain medium and the second portion of the beam path extends from the first reflector to the output coupler through the gain medium. The first and second beam paths define, within the gain medium, a non-zero folding angle. Optionally, the laser apparatus can include a second pump light source that can pump the same, or a second, gain medium.

摘要翻译： 用于产生激光束的激光装置可以包括增益介质; 泵浦光源，用于向增益介质提供泵浦光束; 布置在第一增益介质和第一泵浦光源之间并与第一增益介质的增益部分间隔开的第一反射器; 第二反射器; 和输出耦合器。 第一反射器基本上反射激光束并基本上对泵浦光束透射。 第一和第二反射器和输出耦合器限定具有第一部分和第二部分的折叠光束路径。 光束路径的第一部分通过增益介质从第一反射器延伸到第二反射器，并且光束路径的第二部分通过增益介质从第一反射器延伸到输出耦合器。 第一和第二光束路径在增益介质内限定非零折叠角度。 可选地，激光装置可以包括能够泵送相同或第二增益介质的第二泵浦光源。

公开(公告)号：US20070098025A1

公开(公告)日：2007-05-03

申请号：US11425840

申请日：2006-06-22

申请人： Kyung HONG ,  Tae YU ,  Do KO ,  Jong LEE

发明人： Kyung HONG ,  Tae YU ,  Do KO ,  Jong LEE

IPC分类号： H01S3/117

CPC分类号： H01S3/0057 ,  H01S3/094 ,  H01S3/1625 ,  H01S3/1636 ,  H01S3/235

摘要： Provided is a high-repetition-rate femtosecond regenerative amplification system. The regenerative amplification system includes: a laser oscillator emitting pulses; a stretcher stretching the pulses with negative dispersion; a regenerative amplifier amplifying the pulses, the regenerative amplifier comprising an acousto-optic modulator for pulse switching, a pulsed pump laser for pumping a gain medium, a resonator for reciprocating the pulses between a plurality of mirrors, and at least one chirped mirror for providing negative dispersion; and a glass compressor compressing the pulses. Accordingly, the 100 kHz-class high-repetition-rate femtosecond regenerative amplification system can produce an output energy of tens of μJ, higher than a few μJ provided by a conventional system.

摘要翻译： 提供了一种高重复率飞秒再生放大系统。 再生放大系统包括：发射脉冲的激光振荡器; 担架用负色散拉伸脉冲; 放大脉冲的再生放大器，再生放大器包括用于脉冲切换的声光调制器，用于泵浦增益介质的脉冲泵浦激光器，用于使多个反射镜之间的脉冲往复运动的谐振器和至少一个啁啾反射镜，用于提供 负分散; 和压缩脉冲的玻璃压缩机。 因此，100kHz级的高重复率飞秒再生放大系统可以产生几十μJ的输出能量，高于常规系统提供的几个μJ的输出能量。

公开(公告)号：US20060274795A1

公开(公告)日：2006-12-07

申请号：US11407712

申请日：2006-04-20

申请人： Hitoshi Sekita ,  Kazuya Takasago ,  Nobuo Nakata ,  Arata Nakamura

发明人： Hitoshi Sekita ,  Kazuya Takasago ,  Nobuo Nakata ,  Arata Nakamura

IPC分类号： H01S3/13 ,  H01S3/098

CPC分类号： H01S3/005 ,  H01S3/1301 ,  H01S3/235

摘要： A femtosecond laser with stabilized output, and a method for stabilizing the output of a femtosecond laser. The femtosecond laser comprises a regenerative amplifier, a photodetector, a control portion and a variable attenuator, wherein the variable attenuator is provided so as to be capable of controlling an output beam of the regenerative amplifier, the photodetector is provided between the regenerative amplifier and the variable attenuator, the photodetector detects an output beam of the regenerative amplifier and transmits the results of the detection to a power controller, and the power controller controls the variable attenuator depending on the a difference between a predetermined target value and the results.

摘要翻译： 具有稳定输出的飞秒激光器和用于稳定飞秒激光器的输出的方法。 飞秒激光器包括再生放大器，光电检测器，控制部分和可变衰减器，其中可变衰减器被设置为能够控制再生放大器的输出光束，光电检测器设置在再生放大器和 可变衰减器，光电检测器检测再生放大器的输出光束，并将检测结果发送到功率控制器，功率控制器根据预定目标值与结果之间的差异来控制可变衰减器。

公开(公告)号：US20060187535A1

公开(公告)日：2006-08-24

申请号：US11405199

申请日：2006-04-17

申请人： Alexander Betin ,  Oleg Efimov

发明人： Alexander Betin ,  Oleg Efimov

IPC分类号： H01S3/00

CPC分类号： H01S3/235 ,  H01S3/08009 ,  H01S3/083 ,  H01S3/10076 ,  H01S3/2316 ,  H01S5/50

摘要： An outcoupler having a wavelength selective, angle sensitive element or Bragg grating and an arrangement for maintaining the element in a predetermined orientation relative to an incident beam of electromagnetic energy. The Bragg grating may be reflective or transmissive. The inventive outcoupler may be used to implement a phase conjugate master oscillator power amplifier with an oscillator; a resonator in operational alignment with the oscillator; and an outcoupler in alignment with the oscillator. In the best mode, second and third Bragg gratings are included within the oscillator and the resonator, respectively.

摘要翻译： 具有波长选择性，角度敏感元件或布拉格光栅的输出耦合器和用于将元件相对于电磁能的入射光束保持在预定取向的布置。 布拉格光栅可以是反射的或透射的。 本发明的输出耦合器可用于实现具有振荡器的相位共轭主振荡器功率放大器; 与振荡器工作对准的谐振器; 以及与振荡器对准的输出耦合器。 在最佳模式下，第二和第三布拉格光栅分别包括在振荡器和谐振器内。

公开(公告)号：US20060171439A1

公开(公告)日：2006-08-03

申请号：US11371411

申请日：2006-03-09

申请人： Sergei Govorkov ,  Rainer Paetzel

发明人： Sergei Govorkov ,  Rainer Paetzel

IPC分类号： H01S3/22

CPC分类号： H01S3/2366 ,  H01S3/005 ,  H01S3/0057 ,  H01S3/225 ,  H01S3/2325 ,  H01S3/2333 ,  H01S3/235

摘要： A Master Oscillator (MO)—Power Amplifier (PA) configuration (MOPA) can be used advantageously in an excimer laser system for micro-lithography applications, where semiconductor manufacturers demand powers of 40 W or more in order to support the throughput requirements of advanced lithography scanner systems. A MOPA-based laser system can provide both high pulse energies and high spectral purity. A MOPA system can utilize a multi-pass PA, as well as a special beam path capable of reducing the amount of ASE (Amplified Spontaneous Emission) and feedback to the MO. Lithography scanner optics are primarily fused silica, such that the peak pulse power must be kept low to avoid material compaction when a MOPA system is used with lithography applications. This conflict between the demand for high average power and the low peak power requirement of the pulsed excimer laser source can be resolved by using a novel beam path to generate a sufficiently long pulse length.

摘要翻译： 主振荡器（MO） - 功率放大器（PA）配置（MOPA）可以有利地用于微光刻应用的准分子激光系统，其中半导体制造商需要40W或更高的功率，以支持先进的吞吐量要求 光刻扫描仪系统。 基于MOPA的激光系统可以提供高脉冲能量和高光谱纯度。 MOPA系统可以利用多通道PA，以及能够减少ASE（放大自发发射）量和向MO的反馈的特殊光束路径。 平版印刷扫描仪光学器件主要是熔融石英，使得峰值脉冲功率必须保持较低，以避免当MOPA系统与光刻应用一起使用时的材料压实。 可以通过使用新颖的光束路径来产生足够长的脉冲长度来解决脉冲准分子激光源的高平均功率需求和低峰值功率需求之间的这种冲突。

公开(公告)号：US20060126679A1

公开(公告)日：2006-06-15

申请号：US11112256

申请日：2005-04-22

申请人： James Brennan ,  Laurent Vaissie ,  Michael Mielke

发明人： James Brennan ,  Laurent Vaissie ,  Michael Mielke

IPC分类号： H01S3/13

CPC分类号： G02B6/02266 ,  G02B6/02304 ,  G02B6/02357 ,  G02B6/02361 ,  G02B6/02371 ,  H01S3/0057 ,  H01S3/08013 ,  H01S3/235

摘要： The present invention generally concerns the use of Bragg optical fibers in chirped pulse amplification systems for the production of high-pulse-energy ultrashort optical pulses. A gas-core Bragg optical fiber waveguide can be advantageously used in such systems to stretch the duration of pulses so that they can be amplified, and/or Bragg fibers can be used to compress optical signals into much shorter duration pulses after they have been amplified. Bragg fibers can also function as near-zero-dispersion delay lines in amplifier sections.

公开(公告)号：US20060056468A1

公开(公告)日：2006-03-16

申请号：US11177940

申请日：2005-07-08

申请人： Marcos Dantus ,  Igor Pastirk ,  Vadim Lozovoy ,  Matthew Comstock

发明人： Marcos Dantus ,  Igor Pastirk ,  Vadim Lozovoy ,  Matthew Comstock

IPC分类号： H01S3/10

CPC分类号： H01J49/164 ,  A61B5/0066 ,  A61B5/0073 ,  G01B9/02014 ,  G01B9/02091 ,  G01J11/00 ,  G01N21/6428 ,  H01S3/0057 ,  H01S3/1307 ,  H01S3/2325 ,  H01S3/235

摘要： A control system and apparatus for use with an ultra-fast laser is provided. In another aspect of the present invention, the apparatus includes a laser, pulse shaper, detection device and control system. A multiphoton intrapulse interference method is used to characterize the spectral phase of laser pulses and to compensate for any distortions in an additional aspect of the present invention. In another aspect of the present invention, a system employs multiphoton intrapulse interference phase scan. Furthermore, another aspect of the present invention locates a pulse shaper and/or MIIPS unit between a spectral dispersion point in a laser oscillator and an output of a laser amplifier.

公开(公告)号：US20050157381A1

公开(公告)日：2005-07-21

申请号：US10762216

申请日：2004-01-20

申请人： James Kafka ,  Jianping Zhou ,  Kevin Holsinger

发明人： James Kafka ,  Jianping Zhou ,  Kevin Holsinger

IPC分类号： H01S3/00 ,  H01S3/16 ,  H01S3/23

CPC分类号： H01S3/235 ,  H01S3/0064 ,  H01S3/0085 ,  H01S3/107 ,  H01S3/1611 ,  H01S3/1618

摘要： A regenerative amplifier system that is optimized for low-gain gain media is provided. The system is configured to include a minimum number of intra-cavity elements while still eliminating the leakage of the seed pulses from the output beam. In addition, the contrast ratio of the amplified pulses is increased even considering the long build-up time that is required in low-gain regenerative amplifiers. This is accomplished using a single Pockels cell between the oscillator and amplifier to select a single seed pulse for the cavity, instead of using a Faraday isolator. This directs the unwanted seed pulses in a separate direction from the output pulse. When the amplified pulse exits the cavity, it is directed in a direction away from the oscillator by the same Pockels cell. Only one additional Pockels cell and one polarizer are required inside the regenerative amplifier cavity.

摘要翻译： 提供了针对低增益增益介质进行了优化的再生放大器系统。 该系统被配置为包括最小数量的腔内元件，同时仍然消除种子脉冲从输出光束的泄漏。 此外，即使考虑到低增益再生放大器所需的长的积聚时间，放大脉冲的对比度也增加。 这是使用振荡器和放大器之间的单个Pockels单元来实现的，以便为腔体选择单个种子脉冲，而不是使用法拉第隔离器。 这将不需要的种子脉冲与输出脉冲分开的方向。 当放大的脉冲离开空腔时，它通过相同的Pockels单元被导向远离振荡器的方向。 再生放大器腔内只需要一个额外的Pockels单元和一个偏振器。

公开(公告)号：US20050002425A1

公开(公告)日：2005-01-06

申请号：US10881103

申请日：2004-06-30

申请人： Sergei Govorkov ,  Gongxue Hua ,  Timur Misuryaev ,  Alexander Wiessner ,  Thomas Schmidt ,  Rainer Paetzel

发明人： Sergei Govorkov ,  Gongxue Hua ,  Timur Misuryaev ,  Alexander Wiessner ,  Thomas Schmidt ,  Rainer Paetzel

IPC分类号： H01S3/00 ,  H01S3/10 ,  H01S3/22

CPC分类号： G03F7/7055 ,  H01S3/0057 ,  H01S3/0835 ,  H01S3/235

摘要： The lifetime of optical components used in deep-UV (DUV) excimer laser systems, including systems in a MOPA configuration, can be increased by reducing the intensity of pulses incident upon these components. In one approach, an output pulse can be “stretched” in order to reduce the peak power of the pulse. A pulse stretching component can be used, which can be mounted outside the laser enclosure with a horizontal beam path in order to provide a delay line with a minimum impact on the laser system footprint. The horizontal beam path also can minimize the number of optical components in the arm containing the high power beam. A beamsplitting prism can be used with the delay line to avoid the rapid degradation of coatings otherwise exposed to intense UV beams. The prism can expand the beam in the delay line in order to minimize beam intensity and losses due to reflection.

摘要翻译： 包括在MOPA配置中的系统的深UV（DUV）准分子激光系统中使用的光学部件的寿命可以通过降低入射到这些部件上的脉冲的强度来增加。 在一种方法中，输出脉冲可以被“拉伸”，以便降低脉冲的峰值功率。 可以使用脉冲拉伸部件，其可以安装在具有水平光束路径的激光外壳外部，以便提供对激光系统占地面积具有最小影响的延迟线。 水平光束路径还可以使包含高功率光束的臂中的光学部件的数量最小化。 分束棱镜可以与延迟线一起使用，以避免涂层的快速退化，否则暴露于强烈的UV光束。 棱镜可以在延迟线中扩展光束，以便最小化光束强度和由于反射引起的损耗。