公开(公告)号：US20120107996A1

公开(公告)日：2012-05-03

申请号：US12916526

申请日：2010-10-30

Applicant: Shuran Sheng ,  Lin Zhang ,  Zheng Yuan ,  Yong Kee Chae

Inventor： Shuran Sheng ,  Lin Zhang ,  Zheng Yuan ,  Yong Kee Chae

IPC: H01L31/18

CPC classification number: H01L31/076 ,  H01L31/022466 ,  H01L31/022483 ,  H01L31/1884 ,  Y02E10/548

Abstract: Embodiments of the invention provide methods of a surface treatment process performing on a transparent conductive oxide layer used in solar cell devices. In one embodiment, a method of performing a surface treatment process includes providing a substrate having a transparent conductive oxide layer disposed thereon in a processing chamber, supplying a gas mixture including an oxygen containing gas into the processing chamber, and performing a surface treatment process using the gas mixture on the surface of the transparent conductive oxide layer.

Abstract translation: 本发明的实施方案提供了在用于太阳能电池器件的透明导电氧化物层上进行表面处理工艺的方法。 在一个实施例中，执行表面处理工艺的方法包括提供在处理室中设置有透明导电氧化物层的衬底，将包含含氧气体的气体混合物供应到处理室中，并且使用 在透明导电氧化物层的表面上的气体混合物。

公开(公告)号：US07741144B2

公开(公告)日：2010-06-22

申请号：US12263253

申请日：2008-10-31

Applicant: Soo Young Choi ,  Yong-Kee Chae ,  Shuran Sheng ,  Liwei Li

Inventor： Soo Young Choi ,  Yong-Kee Chae ,  Shuran Sheng ,  Liwei Li

IPC: H01L27/142

CPC classification number: H01L21/0262 ,  H01L21/02532 ,  H01L21/02576 ,  H01L21/02595 ,  H01L21/02667 ,  H01L31/0236 ,  H01L31/02366 ,  H01L31/075 ,  H01L31/076 ,  H01L31/186 ,  H01L31/202 ,  Y02E10/548 ,  Y02P70/521

Abstract: Embodiments of the present invention include an improved method of forming a thin film solar cell device using a plasma processing treatment between two or more deposition steps. Embodiments of the invention also generally provide a method and apparatus for forming the same. The present invention may be used to advantage to form other single junction, tandem junction, or multi-junction solar cell devices.

Abstract translation: 本发明的实施例包括使用在两个或更多个沉积步骤之间的等离子体处理处理来形成薄膜太阳能电池器件的改进方法。 本发明的实施例还通常提供用于形成该方法和装置的方法和装置。 本发明可用于形成其它单结，串联结或多结太阳能电池器件。

公开(公告)号：US07655542B2

公开(公告)日：2010-02-02

申请号：US11426127

申请日：2006-06-23

Applicant: Soo Young Choi ,  Takako Takehara ,  John M. White ,  Yong Kee Chae

Inventor： Soo Young Choi ,  Takako Takehara ,  John M. White ,  Yong Kee Chae

IPC: H01L21/20 ,  H01L21/36

CPC classification number: H01L21/02579 ,  C23C16/24 ,  C30B25/105 ,  C30B29/06 ,  H01J37/32082 ,  H01J37/32449 ,  H01J37/32495 ,  H01L21/0237 ,  H01L21/02532 ,  H01L21/02576 ,  H01L21/0262 ,  H01L31/1824 ,  Y02E10/545 ,  Y02P70/521

Abstract: Methods for depositing a microcrystalline silicon film layer with improved deposition rate and film quality are provided in the present invention. Also, photovoltaic (PV) cell having a microcrystalline silicon film is provided. In one embodiment, the method produces a microcrystalline silicon film on a substrate at a deposition rate greater than about 20 nm per minute, wherein the microcrystalline silicon film has a crystallized volume between about 20 percent to about 80 percent.

Abstract translation: 在本发明中提供了具有改进的沉积速率和膜质量的沉积微晶硅膜层的方法。 此外，提供具有微晶硅膜的光伏（PV）电池。 在一个实施例中，该方法以大于约20nm /分钟的沉积速率在衬底上产生微晶硅膜，其中微晶硅膜的结晶体积在约20％至约80％之间。

公开(公告)号：US20090238972A1

公开(公告)日：2009-09-24

申请号：US12410063

申请日：2009-03-24

Applicant: Daniel O. Clark ,  Mehran Moalem ,  Robbert M. Vermeulen ,  Yong Kee Chae ,  Charles Gay ,  John M. White ,  Robert Z. Bachrach ,  Jay J. Jung

Inventor： Daniel O. Clark ,  Mehran Moalem ,  Robbert M. Vermeulen ,  Yong Kee Chae ,  Charles Gay ,  John M. White ,  Robert Z. Bachrach ,  Jay J. Jung

IPC: C23C16/42

CPC classification number: C23C16/24 ,  C23C16/4402 ,  C23C16/4412 ,  C23C16/45593

Abstract: In one aspect, a method of forming a silicon layer on a substrate is provided, including the steps providing a substrate; and introducing hydrogen and silane into a chamber containing the substrate such that a layer of silicon is deposited on the substrate; wherein the silane is less than about 99.999% pure. Numerous other aspects are provided.

Abstract translation: 一方面，提供了在基板上形成硅层的方法，包括提供基板的步骤; 并将氢和硅烷引入到含有所述衬底的室中，使得硅层沉积在所述衬底上; 其中所述硅烷的纯度小于约99.999％。 提供了许多其他方面。

公开(公告)号：US20090077804A1

公开(公告)日：2009-03-26

申请号：US12201840

申请日：2008-08-29

Applicant: Robert Z. Bachrach ,  Yong-Kee Chae ,  Soo Young Choi ,  Nicholas G.J. De Vries ,  Yacov Elgar ,  Eric A. Englhardt ,  Michel R. Frei ,  Charles Gay ,  Parris Hawkins ,  Choi (Gene) Ho ,  James Craig Hunter ,  Penchala N. Kankanala ,  Liwei Li ,  Wing Hoo (Hendrick) Lo ,  Danny Cam Toan Lu ,  Fang Mei ,  Stephen P. Murphy ,  Srujal (Steve) Patel ,  Matthew J.B. Saunders ,  Asaf Schlezinger ,  Shuran Sheng ,  Tzay-Fa (Jeff) Su ,  Jeffrey S. Sullivan ,  David Tanner ,  Teresa Trowbridge ,  Brice Walker ,  John M. White ,  Tae K. Won

Inventor： Robert Z. Bachrach ,  Yong-Kee Chae ,  Soo Young Choi ,  Nicholas G.J. De Vries ,  Yacov Elgar ,  Eric A. Englhardt ,  Michel R. Frei ,  Charles Gay ,  Parris Hawkins ,  Choi (Gene) Ho ,  James Craig Hunter ,  Penchala N. Kankanala ,  Liwei Li ,  Wing Hoo (Hendrick) Lo ,  Danny Cam Toan Lu ,  Fang Mei ,  Stephen P. Murphy ,  Srujal (Steve) Patel ,  Matthew J.B. Saunders ,  Asaf Schlezinger ,  Shuran Sheng ,  Tzay-Fa (Jeff) Su ,  Jeffrey S. Sullivan ,  David Tanner ,  Teresa Trowbridge ,  Brice Walker ,  John M. White ,  Tae K. Won

IPC: H01L31/18 ,  H01L21/304 ,  B26F3/00

CPC classification number: H01L21/67236 ,  B23K26/364 ,  B26F3/002 ,  B26F3/004 ,  B65G49/064 ,  B65G2249/02 ,  B65G2249/04 ,  C03B33/03 ,  C03B33/033 ,  H01L21/67132 ,  H01L21/67712 ,  H01L21/67715 ,  H01L21/67721 ,  H01L21/67727 ,  H01L21/6776 ,  H01L31/022425 ,  H01L31/03921 ,  H01L31/0504 ,  H01L31/075 ,  H02S50/00 ,  H02S50/10 ,  Y02E10/548 ,  Y02P40/57 ,  Y10T29/49002 ,  Y10T29/49355 ,  Y10T29/5196 ,  Y10T29/53113 ,  Y10T29/5313 ,  Y10T29/5317 ,  Y10T29/53187 ,  Y10T29/53365 ,  Y10T29/53417 ,  Y10T225/10 ,  Y10T225/325 ,  Y10T225/329

Abstract: The present invention generally relates to a sectioning module positioned within an automated solar cell device fabrication system. The solar cell device fabrication system is adapted to receive a single large substrate and form multiple silicon thin film solar cell devices from the single large substrate.

Abstract translation: 本发明一般涉及一种位于自动化太阳能电池器件制造系统内的切片模块。 太阳能电池器件制造系统适于接收单个大型衬底并从单个大衬底形成多个硅薄膜太阳能电池器件。

公开(公告)号：US20080289686A1

公开(公告)日：2008-11-27

申请号：US11752794

申请日：2007-05-23

Applicant: TAE KYUNG WON ,  Soo Young Choi ,  Yong Kee Chae ,  Liwei Li ,  Shuran Sheng

Inventor： TAE KYUNG WON ,  Soo Young Choi ,  Yong Kee Chae ,  Liwei Li ,  Shuran Sheng

IPC: H01L31/04 ,  C23C16/00

CPC classification number: H01L31/1884 ,  H01L31/022466 ,  H01L31/04 ,  Y02E10/50

Abstract: Methods and apparatus for reducing defects on transmitting conducting oxide (TCO) layer are provided. In one embodiment, a method for depositing a silicon layer on a transmitting conducting oxide (TCO) layer may include providing a substrate having a TCO layer disposed thereon, wherein the TCO layer has a peripheral region and a cell integrated region, the cell integrated region having laser scribing patterns disposed thereon, positioning the substrate on a substrate support assembly disposed in a processing chamber, wherein the substrate support assembly has a roughened surface in contact with the substrate, contacting a shadow frame to the peripheral region of the TCO layer and to the substrate support assembly thereby creating an electrical ground path between the TCO layer and substrate support through the shadow frame, and depositing a silicon containing layer on the TCO layer through an aperture of the shadow frame.

Abstract translation: 提供了减少传导导电氧化物（TCO）层缺陷的方法和装置。 在一个实施例中，用于在透射导电氧化物（TCO）层上沉积硅层的方法可以包括提供其上设置有TCO层的衬底，其中TCO层具有外围区域和电池集成区域，电池集成区域 其具有设置在其上的激光划线图案，将所述基板定位在设置在处理室中的基板支撑组件上，其中所述基板支撑组件具有与所述基板接触的粗糙表面，将阴影框架接触所述TCO层的周边区域， 衬底支撑组件，从而通过阴影框架在TCO层和衬底支撑件之间形成电接地路径，并且通过阴影框架的孔口在TCO层上沉积含硅层。

公开(公告)号：US20080188033A1

公开(公告)日：2008-08-07

申请号：US11671988

申请日：2007-02-06

Applicant: Soo-Young Choi ,  Yong-Kee Chae ,  Shuran Sheng

Inventor： Soo-Young Choi ,  Yong-Kee Chae ,  Shuran Sheng

IPC: H01L31/20 ,  H01L31/04

CPC classification number: H01L31/076 ,  H01L31/0236 ,  H01L31/18 ,  H01L31/1804 ,  Y02E10/547 ,  Y02E10/548 ,  Y02P70/521

Abstract: Embodiments of the present invention generally relate to solar cells and methods and apparatuses for forming the same. More particularly, embodiments of the present invention relate to thin film multi-junction solar cells and methods and apparatuses for forming the same.

Abstract translation: 本发明的实施例一般涉及太阳能电池及其形成方法和装置。 更具体地，本发明的实施例涉及薄膜多结太阳能电池及其形成方法和装置。