Refractory metal substrate with improved thermal conductivity
    42.
    发明申请
    Refractory metal substrate with improved thermal conductivity 有权
    具有改善导热性的耐火金属基材

    公开(公告)号:US20060091552A1

    公开(公告)日:2006-05-04

    申请号:US10978940

    申请日:2004-11-01

    IPC分类号: H01L23/48

    摘要: A substrate for semiconductor and integrated circuit components including: a core plate containing a Group VIB metal from the periodic table of the elements and/or an anisotropic material, having a first major surface and a second major surface and a plurality of openings extending, at least partially, from the first major surface to the second major surface; and a Group IB metal from the periodic table of the elements or other high thermally conductive material filling at least a portion of the space encompassed by at least some of the openings; and optionally, a layer containing a Group IB metal from the periodic table or other high thermally conductive material disposed over at least a portion of the first major surface and at least a portion of the second major surface. The substrate can be used in electronic devices, which can also include one or more semiconductor components.

    摘要翻译: 一种用于半导体和集成电路部件的衬底,包括:含有来自元件的周期表的VIB族金属和/或各向异性材料的芯板,具有第一主表面和第二主表面,以及多个开口, 最少部分地从第一主表面到第二主表面; 和来自元件周期表的IB族金属或其它高导​​热材料填充由至少一些开口包围的空间的至少一部分; 以及任选地,包含来自周期表的IB族金属或设置在第一主表面的至少一部分和第二主表面的至少一部分上的其它高导热材料的层。 该基板可用于电子设备中,其也可包括一个或多个半导体部件。

    IMPROVED WAFER COATING
    46.
    发明申请
    IMPROVED WAFER COATING 审中-公开
    改进的涂层

    公开(公告)号:US20150221505A1

    公开(公告)日:2015-08-06

    申请号:US14658102

    申请日:2015-03-13

    摘要: Improved wafer coating processes, apparatuses, and systems are described. In one embodiment, an improved spin-coating process and system is used to form a mask for dicing a semiconductor wafer with a laser plasma dicing process. In one embodiment, a spin-coating apparatus for forming a film over a semiconductor wafer includes a rotatable stage configured to support the semiconductor wafer. The rotatable stage has a downward sloping region positioned beyond a perimeter of the semiconductor wafer. The apparatus includes a nozzle positioned above the rotatable stage and configured to dispense a liquid over the semiconductor wafer. The apparatus also includes a motor configured to rotate the rotatable stage.

    摘要翻译: 描述了改进的晶片涂布工艺,装置和系统。 在一个实施例中,改进的旋涂工艺和系统用于形成用激光等离子体切割工艺切割半导体晶片的掩模。 在一个实施例中,用于在半导体晶片上形成膜的旋涂装置包括被配置为支撑半导体晶片的可旋转台。 可旋转台具有位于半导体晶片周边之外的向下倾斜区域。 该设备包括位于可旋转台上方并被配置为在半导体晶片上分配液体的喷嘴。 该装置还包括构造成旋转可旋转台的马达。

    PATTERNED ALUMINUM BACK CONTACTS FOR REAR PASSIVATION
    47.
    发明申请
    PATTERNED ALUMINUM BACK CONTACTS FOR REAR PASSIVATION 审中-公开
    图案化的铝合金后退联系人

    公开(公告)号:US20130233379A1

    公开(公告)日:2013-09-12

    申请号:US13784043

    申请日:2013-03-04

    IPC分类号: H01L31/18 H01L31/0224

    摘要: Embodiments of the invention generally relate to solar cells having reduced carrier recombination and methods of forming the same. The solar cells have eutectic local contacts and passivation layers which reduce recombination by facilitating formation of a back surface field (BSF). A patterned aluminum back contact is disposed on the passivation layer for removing current form the solar cell. The patterned back contact reduces the cost-per-watt of the solar cell by using less material than a full-surface back contact. The methods of forming the solar cells include depositing a passivation layer including aluminum oxide and silicon nitride on a back surface of a solar cell, and then forming openings through the passivation layer. A patterned aluminum back contact is disposed on the passivation layer over the holes, and thermally processed to form a silicon-aluminum eutectic within the openings.

    摘要翻译: 本发明的实施方案通常涉及具有减少的载体重组的太阳能电池及其形成方法。 太阳能电池具有共晶的局部接触和钝化层,通过促进背面场(BSF)的形成来减少复合。 图案化的铝背接触设置在钝化层上以去除太阳能电池的电流。 图案化的背面接触通过使用比全表面背面接触更少的材料来降低太阳能电池的每瓦成本。 形成太阳能电池的方法包括在太阳能电池的背面上沉积包括氧化铝和氮化硅的钝化层,然后通过钝化层形成开口。 图案化的铝背接触器设置在孔上的钝化层上,并且被热处理以在开口内形成硅铝共晶体。