SEMICONDUCTOR DEVICE MANUFACTURING APPARATUS
    43.
    发明申请
    SEMICONDUCTOR DEVICE MANUFACTURING APPARATUS 审中-公开
    半导体器件制造设备

    公开(公告)号:US20120305183A1

    公开(公告)日:2012-12-06

    申请号:US13590298

    申请日:2012-08-21

    IPC分类号: H01L21/308

    摘要: A semiconductor device manufacturing apparatus includes: a first pattern forming unit for forming a first pattern by patterning a first mask material layer; a trimming unit for reducing a width of the first pattern to a predetermined width; a boundary layer forming unit for forming a boundary layer, on a surface of the first pattern; a second mask material layer forming unit for forming a second mask material layer on a surface of the boundary layer; a second mask material removing unit for removing a part of the second mask material layer to expose top portions of the boundary layer; and a boundary layer etching unit for exposing the first pattern and forming a second pattern having the second mask material layer at a top portion thereof by etching the boundary layer.

    摘要翻译: 半导体器件制造装置包括:第一图案形成单元,用于通过图案化第一掩模材料层来形成第一图案; 修整单元,用于将第一图案的宽度减小到预定宽度; 边界层形成单元,用于在所述第一图案的表面上形成边界层; 第二掩模材料层形成单元,用于在所述边界层的表面上形成第二掩模材料层; 第二掩模材料去除单元,用于去除所述第二掩模材料层的一部分以暴露所述边界层的顶部; 以及边界层蚀刻单元,用于通过蚀刻边界层来暴露第一图案并在其顶部形成具有第二掩模材料层的第二图案。

    PATTERN FORMING METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING APPARATUS
    44.
    发明申请
    PATTERN FORMING METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING APPARATUS 有权
    图案形成方法,半导体器件制造方法和半导体器件制造装置

    公开(公告)号:US20090209105A1

    公开(公告)日:2009-08-20

    申请号:US12370868

    申请日:2009-02-13

    摘要: A pattern forming method for forming a pattern serving as a mask, includes a process for forming a first pattern 105, a process for trimming a width of the first pattern 105, a process for forming a boundary layer 106 on a surface of the first pattern 105, a process for forming a second mask material layer 107 on a surface of the boundary layer 106, a process for removing a part of the second mask material layer 107 to expose top portions of the boundary layer 106, and a process for exposing the first pattern 105 and forming a second pattern having the second mask material layer 107 at a top portion thereof by etching the boundary layer 106.

    摘要翻译: 用于形成用作掩模的图案的图案形成方法包括形成第一图案105的工艺,用于修整第一图案105的宽度的处理,在第一图案的表面上形成边界层106的工艺 105,在边界层106的表面上形成第二掩模材料层107的工艺,用于去除第二掩模材料层107的一部分以暴露边界层106的顶部的工艺,以及用于暴露边界层106的工艺 第一图案105,并且通过蚀刻边界层106在其顶部形成具有第二掩模材料层107的第二图案。

    Image forming apparatus
    49.
    发明授权
    Image forming apparatus 失效
    图像形成装置

    公开(公告)号:US5689778A

    公开(公告)日:1997-11-18

    申请号:US557974

    申请日:1995-11-13

    CPC分类号: G03G21/0064 G03G2221/0005

    摘要: An image forming apparatus adopting a cleaningless process using contact-type charging means, includes developer scattering means which is located between the charging means and an exposure position in contact with the surface of an image carrier. For example, the developer scattering means is a conducting brush which scatters, catches and temporarily holds the residual toner on the image carrier. With this structure, even in an image forming apparatus adopting the cleaningless process using the contact-type charging means, the residual toner on the image carrier is scattered and caught by developer catching means before the residual toner reaches the exposure position. Thus, a lowering of the image quality which is caused if the residual toner is patterned by the charging means is prevented, thereby improving the image quality. Consequently, it is possible to provide a small-sized superior image forming apparatus with high maintainability which is capable of recycling the developer and producing an image with high image quality.

    摘要翻译: 采用接触式充电装置的无清洁处理的图像形成装置包括位于充电装置和与图像载体的表面接触的曝光位置之间的显影剂散射装置。 例如,显影剂散射装置是导电刷,其将残留调色剂散布,捕捉并临时保持在图像载体上。 利用这种结构,即使在使用接触式充电装置的无刷处理的图像形成装置中,在残留调色剂到达曝光位置之前,图像载体上的残留调色剂被显影剂捕获装置散落并被捕获。 因此,防止了通过充电装置对剩余调色剂进行图案化而导致的图像质量的降低,从而提高了图像质量。 因此,可以提供一种具有高可维护性的小尺寸的上述图像形成装置,其能够再循环显影剂并产生具有高图像质量的图像。

    Image-forming apparatus
    50.
    发明授权
    Image-forming apparatus 失效
    图像形成装置

    公开(公告)号:US5563691A

    公开(公告)日:1996-10-08

    申请号:US463774

    申请日:1995-06-05

    IPC分类号: G03G15/16 G03G21/00 G03G21/10

    CPC分类号: G03G21/0041 G03G21/0058

    摘要: An image-forming apparatus including a cleaning means for selectively removing foreign matters other than developer remaining on the surface of a photoconductor drum therefrom after a transferring process. The cleaning means is provided with a foreign-matter removing roller which comes into contact with the surface of the photoconductor drum. Foreign matters, which are charged by a transferring device to have a polarity reversed to that of the charged electric potential of toner through an electric field that is exerted between the surfaces of the roller and the photoconductor drum, are allowed to adhere to the surface of the foreign-matter removing roller. As for the surface of the foreign-matter removing roller, the surface electric potential of the foreign-matter removing roller is biased farther toward the polarity of the charged toner than the surface electric potential of the photoconductor drum at the contact portion between the photoconductor drum and the foreign-matter removing roller. Thus, it becomes possible to provide an image forming apparatus which is capable of supplying images with good picture quality for a long time, by using a cleaning operation of this cleaning means.

    摘要翻译: 一种图像形成装置,其包括清洁装置,用于在转印过程之后从其上选择性除去除了在感光鼓的表面上残留的显影剂之外的异物。 清洁装置设置有与感光鼓的表面接触的异物去除辊。 通过施加在辊和感光鼓的表面之间的电场,由转印装置充电以使极性与调色剂的带电电位相反的异物被允许粘附到 异物去除辊。 对于异物去除辊的表面,除了感光鼓之间的接触部分处,异物除去辊的表面电位被偏向比带电调色剂的极性更大的方式偏压于感光鼓的表面电位 和异物去除辊。 因此,可以通过使用该清洁装置的清洁操作来提供能够长时间地提供具有良好图像质量的图像的图像形成装置。