Systems Comprising Silicon Coated Gas Supply Conduits and Methods for Applying Coatings
    45.
    发明申请
    Systems Comprising Silicon Coated Gas Supply Conduits and Methods for Applying Coatings 审中-公开
    包括硅涂层气体供应管道和应用涂料方法的系统

    公开(公告)号:US20170040147A1

    公开(公告)日:2017-02-09

    申请号:US15232214

    申请日:2016-08-09

    Abstract: In one embodiment, a plasma etching system may include a process gas source, a plasma processing chamber, and a gas supply conduit. A plasma can be formed from a process gas recipe in the plasma processing chamber. The gas supply conduit may include a corrosion resistant layered structure forming an inner recipe contacting surface and an outer environment contacting surface. The corrosion resistant layered structure may include a protective silicon layer, a passivated coupling layer and a stainless steel layer. The inner recipe contacting surface can be formed by the protective silicon layer. The passivated coupling layer can be disposed between the protective silicon layer and the stainless steel layer. The passivated coupling layer can include chrome oxide and iron oxide. The chrome oxide can be more abundant in the passivated coupling layer than the iron oxide.

    Abstract translation: 在一个实施例中,等离子体蚀刻系统可以包括处理气体源,等离子体处理室和气体供应导管。 等离子体可以由等离子体处理室中的处理气体配方形成。 气体供应管道可以包括形成内部配方接触表面和外部环境接触表面的耐腐蚀层状结构。 耐腐蚀层状结构可以包括保护硅层,钝化耦合层和不锈钢层。 内部配方接触表面可以由保护性硅层形成。 钝化的耦合层可以设置在保护硅层和不锈钢层之间。 钝化的偶联层可包括氧化铬和氧化铁。 钝化偶联层中的氧化铬可以比氧化铁更丰富。

    STRUCTURE AND METHOD FOR JOINING NOZZLE VANE AND LEVER, AND VARIABLE GEOMETRY TURBOCHARGER
    46.
    发明申请
    STRUCTURE AND METHOD FOR JOINING NOZZLE VANE AND LEVER, AND VARIABLE GEOMETRY TURBOCHARGER 审中-公开
    用于接收喷嘴和叶片的结构和方法以及可变几何涡轮增压器

    公开(公告)号:US20170022891A1

    公开(公告)日:2017-01-26

    申请号:US15039278

    申请日:2013-12-16

    Abstract: An object is to provide a structure and a method of joining a nozzle vane and a lever, and a variable geometry turbocharger, capable of reducing breakage of a welded part between a shaft portion of the nozzle vane and the lever during usage of the same by reducing generation of a hot crack in weld metal at the welded part. A joint structure includes: a nozzle vane 2 disposed in an exhaust passage for guiding exhaust gas to a turbine wheel 34 of a variable geometry turbocharger 500, and including a shaft portion 2a; and a lever 1 including a fitting surface 42a fitted with a peripheral surface 72 on one end side of the shaft portion, for transmitting torque to the shaft portion to adjust a vane angle of the nozzle vane. Weld metal 50 at a welded part 40 between the lever and the nozzle vane is formed so that a center position 64 of the weld metal is disposed inside a position 17 of the fitting surface with respect to a radial direction of the shaft portion.

    Abstract translation: 本发明的目的是提供一种将喷嘴叶片和杠杆以及可变几何形状的涡轮增压器相结合的结构和方法,其能够在使用该喷嘴叶片和杠杆期间减少喷嘴叶片的轴部与杠杆之间的焊接部分的断裂 减少焊接部位焊缝金属热裂纹的产生。 接头结构包括:设置在排气通道中的喷嘴叶片2,用于将废气引导到可变几何涡轮增压器500的涡轮机轮34,并且包括轴部分2a; 以及杠杆1,其包括在轴部的一端侧装配有周向表面72的装配表面42a,用于将扭矩传递到轴部分以调节喷嘴叶片的叶片角度。 在杠杆和喷嘴叶片之间的焊接部分40处的焊接金属50形成为使得焊接金属的中心位置64相对于轴部的径向设置在配合表面的位置17内。

    MASK TENSION WELDING DEVICE FOR THIN FILM DEPOSITION
    48.
    发明申请
    MASK TENSION WELDING DEVICE FOR THIN FILM DEPOSITION 审中-公开
    用于薄膜沉积的掩模拉伸焊接装置

    公开(公告)号:US20170001259A1

    公开(公告)日:2017-01-05

    申请号:US14994941

    申请日:2016-01-13

    Abstract: A mask tension welding device for welding a mask for thin film deposition on a mask frame, the mask tension welding device including a tension unit to pull the mask in one direction; a pressurizing unit to press the mask to the mask frame, the pressuring unit including an upper housing, a lower housing coupled to the upper housing, a window between the upper housing and the lower housing, a space in the lower housing into which a fluid is injectable, and an inlet and an outlet to provide a passage through which the fluid is injected and discharged; and a laser welding unit to weld the mask and the mask frame to each other.

    Abstract translation: 一种用于在掩模框架上焊接用于薄膜沉积的掩模的掩模张力焊接装置,所述掩模张力焊接装置包括在一个方向上拉动所述掩模的张力单元; 加压单元,用于将掩模按压到掩模框架,加压单元包括上壳体,联接到上壳体的下壳体,上壳体和下壳体之间的窗口,下壳体中的空间,流体 是可注射的;以及入口和出口,用于提供流体注入和排出的通道; 以及将掩模和掩模框架彼此焊接的激光焊接单元。

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