ELECTROSTATIC CHUCK MEMBER
    49.
    发明申请
    ELECTROSTATIC CHUCK MEMBER 审中-公开
    静电卡会员

    公开(公告)号:US20150070815A1

    公开(公告)日:2015-03-12

    申请号:US14374537

    申请日:2012-08-03

    Abstract: There is provided an electrostatic chuck member made of a complex oxide sintered body obtained by substituting some of yttrium in yttrium aluminum oxide with a rare earth element (RE) excluding yttrium, in which a ratio [NRE/(NY+NRE)] of the number of atoms of the rare earth element excluding yttrium (NRE) to the sum (NY+NRE) of the number of yttrium atoms (NY) and the number of the atoms of the rare earth element excluding yttrium (NRE) is in a range of 0.01 to less than 0.5, and a volume resistance of the complex oxide sintered compact is in a range of 1×1010 Ω·cm to less than 1×1015 Ω·cm.

    Abstract translation: 提供了一种由复合氧化物烧结体制成的静电卡盘构件,其通过用除了钇之外的稀土元素(RE)替代钇铝氧化物中的一些钇而获得,其中[NRE /(NY + NRE)]的比率 不包括钇(NRE)的稀土元素的原子数与钇原子数(NY)的和(NY + NRE)和不包括钇(NRE)的稀土元素的原子数在一个范围内 为0.01〜小于0.5,复合氧化物烧结体的体积电阻为1×10 10Ω·cm〜·小于1×10 15Ω·cm·cm。

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