公开(公告)号：US08686614B2

公开(公告)日：2014-04-01

申请号：US12639260

申请日：2009-12-16

申请人： Jan H. Kuypers ,  Reimund Rebel ,  Alexei Gaidarzhy ,  David M. Chen ,  Guiti Zolfagharkhani ,  Klaus Juergen Schoepf

发明人： Jan H. Kuypers ,  Reimund Rebel ,  Alexei Gaidarzhy ,  David M. Chen ,  Guiti Zolfagharkhani ,  Klaus Juergen Schoepf

IPC分类号： H01L41/08

CPC分类号： H03H9/0095 ,  H03H9/02102 ,  H03H9/02228

摘要： Multi-port devices having multiple electrical ports are described, as are related methods. Some of the multi-port devices may have two input ports and two output ports, and may be driven differentially, in a single-ended mode, in a single-ended to differential mode, or in a differential to single-ended mode. The multi-port devices may include one or more transducers coupled to the electrical ports.

摘要翻译： 具有多个电端口的多端口设备也被描述为相关方法。 一些多端口设备可以具有两个输入端口和两个输出端口，并且可以以单端模式，单端到差分模式或差分到单端模式在差分地驱动。 多端口设备可以包括耦合到电端口的一个或多个换能器。

公开(公告)号：US08648670B2

公开(公告)日：2014-02-11

申请号：US12582032

申请日：2009-10-20

申请人： Motoaki Hara ,  Shogo Inoue ,  Masafumi Iwaki ,  Jun Tsutsumi ,  Masanori Ueda

发明人： Motoaki Hara ,  Shogo Inoue ,  Masafumi Iwaki ,  Jun Tsutsumi ,  Masanori Ueda

IPC分类号： H03H9/70 ,  H03H9/72 ,  H03H9/54 ,  H03H9/64

CPC分类号： H03H9/542 ,  H03H9/009 ,  H03H9/0095 ,  H03H9/46 ,  H03H9/605 ,  H03H9/64 ,  H03H9/6483 ,  H03H9/706 ,  H03H9/725

摘要： According to an aspect of the invention, each of a filter, a duplexer and a communication module includes a plurality of series resonators connected to a signal line in series and a plurality of parallel resonators connected to the signal line in parallel. At least two of the plurality of parallel resonators are connected to the signal line between two of the plurality of series resonators in parallel, inductors are respectively connected to the at least two parallel resonators, and the inductors have different inductances from each other.

摘要翻译： 根据本发明的一个方面，滤波器，双工器和通信模块中的每一个包括串联连接到信号线的多个串联谐振器和并联连接到信号线的多个并联谐振器。 多个并联谐振器中的至少两个并联连接到多个串联谐振器中的两个之间的信号线，电感器分别连接到至少两个并联谐振器，并且电感器具有彼此不同的电感。

公开(公告)号：US08610516B2

公开(公告)日：2013-12-17

申请号：US12547633

申请日：2009-08-26

申请人： Keiichi Umeda

发明人： Keiichi Umeda

IPC分类号： H03H9/15 ,  H03H9/54

CPC分类号： H03H9/173 ,  H03H9/0095 ,  H03H9/0211 ,  H03H9/02118 ,  H03H9/132 ,  H03H9/174 ,  H03H9/175 ,  H03H9/564 ,  H03H9/568

摘要： A piezoelectric thin-film filter reduces insertion loss and deterioration of steepness of a shoulder characteristic and reduces the ripple in the passband. In a first vibration portion, a piezoelectric thin film is disposed between a pair of electrodes along one main surface of a substrate. In a second vibration portion, the piezoelectric thin film is disposed between a pair of electrodes along the one main surface of the substrate. The vibration portions are both acoustically isolated from the substrate. In the first resonator, an additional film is disposed outside the electrode constituting half or more the overall length of the perimeter of the first vibration portion that is in contact with the electrode when seen from a thickness direction. In the second resonator, the external shape of the vibration portion when seen from a thickness direction is a polygon, and each side of the polygon is not parallel with any of the other sides thereof.

摘要翻译： 压电薄膜滤波器减小了插入损耗和肩部特性的陡度的劣化，并且减小了通带中的纹波。 在第一振动部分中，压电薄膜沿着基板的一个主表面设置在一对电极之间。 在第二振动部分中，压电薄膜沿着基板的一个主表面设置在一对电极之间。 振动部分与基板隔声隔离。 在第一谐振器中，当从厚度方向观察时，另外的膜设置在电极的外部，构成与电极接触的第一振动部分的周边的总长度的一半以上。 在第二谐振器中，从厚度方向观察时的振动部的外形为多边形，多边形的各侧与其任一侧不平行。

公开(公告)号：US08531083B2

公开(公告)日：2013-09-10

申请号：US12391490

申请日：2009-02-24

申请人： Rajarishi Sinha ,  L. Richard Carley ,  Deok-Yang Kim

发明人： Rajarishi Sinha ,  L. Richard Carley ,  Deok-Yang Kim

IPC分类号： H01L41/08

CPC分类号： H01L41/083 ,  H01L41/18 ,  H03H9/0095 ,  H03H9/15 ,  H03H9/171 ,  H03H9/205 ,  H03H9/38 ,  H03H9/584 ,  H03H9/589 ,  H03H9/605 ,  H03H2009/02173

摘要： A tunable acoustic resonator device has a piezoelectric medium as a first thin film layer and a tunable crystal medium as a second thin film layer. The tunable crystal medium has a first acoustic behavior over an operating temperature range under a condition of relatively low applied stress and a second acoustic behavior under a condition of relatively high applied stress. The acoustic behaviors are substantially different and, consequently, the different levels of applied stress are used to tune the acoustic resonator device. Compared with the tunable resonator device consisting of only tunable crystal medium, a device having both the piezoelectric and tunable crystal medium has advantages such as larger inherent bandwidth and less nonlinearity with AC signals. The device also requires a smaller applied stress (i.e. bias voltage) to achieve the required frequency tuning.

公开(公告)号：US20130057360A1

公开(公告)日：2013-03-07

申请号：US13642155

申请日：2011-04-21

申请人： Johanna Meltaus ,  Tuomas Pensala

发明人： Johanna Meltaus ,  Tuomas Pensala

IPC分类号： H03H9/54

CPC分类号： H03H9/02228 ,  H03H9/0095 ,  H03H9/02007 ,  H03H9/02125 ,  H03H9/175 ,  H03H9/177 ,  H03H9/205 ,  H03H9/564 ,  H03H9/584 ,  H03H2003/0414 ,  Y10T29/42

摘要： In a bulk acoustic wave (BAW) filter based on laterally acoustically coupled resonators on piezoelectric thin films, one can utilize two distinct acoustic plate wave modes of different nature, for example the thickness extensional (longitudinal) TE1 and the second harmonic thickness shear (TS2) mode to form a bandpass response. The invention is based on the excitation of at least two lateral standing wave resonances belonging to different plate wave modes that facilitate the transmission of signal. The passband is designed by tailoring the wave propagation characteristics in the device such that the resonances are excited at suitable frequencies to form a passband of a desired shape. The bandwidth of the filter described herein may therefore be more than twice that of the existing state-of-the-art microacoustic filters. Consequently, it has significant commercial and technological value.

摘要翻译： 在基于压电薄膜上的横向声耦合谐振器的体声波（BAW）滤波器中，可以利用不同性质的两种不同的声板波模，例如厚度延伸（纵向）TE1和二次谐波厚度剪切（TS2 ）模式以形成带通响应。 本发明基于属于促进信号传输的不同平板波模式的至少两个横向驻波共振的激发。 该通带是通过调整装置中的波传播特性来设计的，使得谐振在合适的频率被激发以形成所需形状的通带。 因此，这里描述的滤波器的带宽可以是现有的最先进的微声滤波器的两倍以上。 因此，具有重要的商业和技术价值。

公开(公告)号：US20130033337A1

公开(公告)日：2013-02-07

申请号：US13556881

申请日：2012-07-24

申请人： Tokihiro NISHIHARA ,  Shinji TANIGUCHI ,  Masanori UEDA

发明人： Tokihiro NISHIHARA ,  Shinji TANIGUCHI ,  Masanori UEDA

IPC分类号： H03H9/54 ,  H03H9/70

CPC分类号： H03H9/0095 ,  H03H9/02102 ,  H03H9/131 ,  H03H9/173 ,  H03H9/175 ,  H03H9/542 ,  H03H9/583 ,  H03H9/585 ,  H03H9/605 ,  H03H9/706 ,  H03H2003/0471

摘要： An acoustic wave filter including piezoelectric thin film resonators, in which at least two of the piezoelectric thin film resonators including: a substrate; a piezoelectric film located on the substrate; a lower electrode and an upper electrode located across at least a part of the piezoelectric film; a mass load film for a frequency control located in a resonance region where the lower electrode and the upper electrode face each other, and having a shape different from that of the resonance region; and a temperature compensation film having a temperature coefficient of an elastic constant opposite in sign to that of the piezoelectric film, at least a part of the temperature compensation film being located between the lower electrode and the upper electrode in the resonance region, and areas of mass load films of said at least two of the piezoelectric thin film resonators are different from each other.

摘要翻译： 一种包括压电薄膜谐振器的声波滤波器，其中至少两个压电薄膜谐振器包括：基板; 位于所述基板上的压电薄膜; 位于所述压电膜的至少一部分的下电极和上电极; 用于频率控制的质量负载膜，位于下电极和上电极彼此面对的共振区域中，具有与谐振区域不同的形状; 以及温度补偿膜，其具有与压电膜的弹性常数相反的弹性常数的温度系数，所述温度补偿膜的至少一部分位于所述共振区域中的下部电极和上部电极之间， 所述至少两个压电薄膜谐振器的质量负载薄膜彼此不同。

公开(公告)号：US08228138B2

公开(公告)日：2012-07-24

申请号：US13177797

申请日：2011-07-07

申请人： Motoaki Hara ,  Shinji Taniguchi ,  Takeshi Sakashita ,  Tsuyoshi Yokoyama ,  Masafumi Iwaki ,  Tokihiro Nishihara ,  Masanori Ueda

发明人： Motoaki Hara ,  Shinji Taniguchi ,  Takeshi Sakashita ,  Tsuyoshi Yokoyama ,  Masafumi Iwaki ,  Tokihiro Nishihara ,  Masanori Ueda

IPC分类号： H03H9/54 ,  H03H9/70

CPC分类号： H03H9/584 ,  H03H9/0095 ,  H03H9/542 ,  H03H9/60 ,  H03H9/706

摘要： A filter element includes a plurality of multilayer filters that are connected in cascade, each of the plurality of multilayer filters including a plurality of piezoelectric thin-film resonators stacked vertically, each of the piezoelectric thin-film resonators including a piezoelectric film and a pair of first electrodes between which the piezoelectric film is interposed, and a capacitor connected between an input terminal of one of the plurality of multilayer filters of a preceding stage and an input terminal of another one of the plurality of multilayer filters of a following stage, exciting directions of piezoelectric thin-film resonators to which the input terminals of the multilayer filters of the preceding and following stages are connected being opposite to each other.

摘要翻译： 滤波器元件包括串联连接的多个多层滤波器，多个多层滤波器中的每一个包括垂直堆叠的多个压电薄膜谐振器，每个压电薄膜谐振器包括压电薄膜和一对 插入压电膜的第一电极和连接在前级的多个多层滤波器中的一个的输入端子和后级的多个多层滤波器中的另一个的输入端子之间的电容器，激励方向 压电薄膜谐振器彼此相反地连接有前级和后级的多层滤波器的输入端。

公开(公告)号：US20120086523A1

公开(公告)日：2012-04-12

申请号：US13272390

申请日：2011-10-13

申请人： Johanna Meltaus ,  Tuomas Pensala ,  Markku Ylilammi ,  Tommi Riekkinen ,  Tomi Mattila

发明人： Johanna Meltaus ,  Tuomas Pensala ,  Markku Ylilammi ,  Tommi Riekkinen ,  Tomi Mattila

IPC分类号： H03H9/54 ,  H01L41/22

CPC分类号： H03H9/0095 ,  H03H3/02 ,  H03H9/02125 ,  H03H9/562 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49155

摘要： The invention describes a manufacturing method for an acoustic balanced-unbalanced (balun) or balanced-balanced thin-film BAW filter based on lateral acoustic coupling. In laterally acoustically coupled thin-film BAW filters (LBAW) one can realize transformation from unbalanced to balanced electric signal if the electrodes of the balanced port are placed on the opposite sides of the piezoelectric film. The manufacturing process is simpler than in the corresponding component based on vertical acoustical coupling. The device can also realize impedance transformation.

摘要翻译： 本发明描述了一种基于横向声耦合的声平衡不平衡（balun）或平衡平衡薄膜BAW滤波器的制造方法。 在横向声耦合薄膜BAW滤波器（LBAW）中，如果平衡端口的电极放置在压电膜的相对侧上，则可以实现从不平衡到平衡电信号的转换。 制造过程比基于垂直声耦合的相应部件更简单。 该器件还可实现阻抗变换。

公开(公告)号：US20120062336A1

公开(公告)日：2012-03-15

申请号：US13199866

申请日：2011-09-12

申请人： Susumu Yoshimoto

发明人： Susumu Yoshimoto

IPC分类号： H03H9/72

CPC分类号： H03H9/725 ,  H03H9/0038 ,  H03H9/0095 ,  H03H9/706

摘要： Disclosed is a receiving side filter in a pass band of a duplexer's transmitting side filter. Output balancing is performed by the receiving side filter, which includes a longitudinal mode resonator type filter. A pass band of the receiving side filter is set on a lower band side than the pass band of the transmitting side filter. Between an antenna port and a pair of balanced reception ports, first and second ladder-type filters are provided. The first includes a series arm and a parallel arm, each formed of a SAW resonator and a longitudinal mode resonator type filter. The second ladder-type filter has series arms, formed of SAW resonators respectively provided in signal paths that connect the respective balanced reception ports and the longitudinal mode resonator type filter, and a parallel arm formed of a SAW resonator and connecting between these signal paths.

摘要翻译： 公开了双工器发送侧滤波器的通带中的接收侧滤波器。 输出平衡由包括纵模谐振器型滤波器的接收侧滤波器执行。 接收侧滤波器的通带设置在比发送侧滤波器的通带更低的带侧。 在天线端口和一对平衡接收端口之间，提供第一和第二梯形滤波器。 第一个包括串联臂和平行臂，每个臂由SAW谐振器和纵向模式谐振器型滤波器形成。 第二梯形滤波器具有分别设置在连接相应的平衡接收端口和纵向谐振器型滤波器的信号路径中的SAW谐振器的串联臂，以及由SAW谐振器形成的并联臂，并在这些信号路径之间连接。

公开(公告)号：US20120050236A1

公开(公告)日：2012-03-01

申请号：US13094707

申请日：2011-04-26

申请人： Chi Shun Lo ,  Jonghae Kim ,  Sang-June Park ,  Sanghoon Joo ,  Chengjie Zuo ,  Changhan Yun

发明人： Chi Shun Lo ,  Jonghae Kim ,  Sang-June Park ,  Sanghoon Joo ,  Chengjie Zuo ,  Changhan Yun

IPC分类号： H01P7/00 ,  H04B1/04 ,  H04B1/06 ,  H01P5/12 ,  G09G5/00

CPC分类号： H03H9/0095 ,  G09G3/3493 ,  G09G2310/0267 ,  G09G2310/027 ,  H01P1/2135 ,  H03H9/0014 ,  H03H9/02228 ,  H03H9/2431 ,  H03H9/2436 ,  H03H9/2463 ,  H03H9/564 ,  H03H2003/027 ,  H03H2009/02496 ,  H03H2009/02527 ,  H03H2009/241

摘要： This disclosure provides implementations of electromechanical systems resonator structures, devices, apparatus, systems, and related processes. In one aspect, a contour mode resonator device includes a first conductive layer with a plurality of first layer electrodes including a first electrode at which a first input signal can be provided and a second electrode at which a first output signal can be provided. A second conductive layer includes a plurality of second layer electrodes including a first electrode proximate the first electrode of the first conductive layer and a second electrode proximate the second electrode of the first conductive layer. A second signal can be provided at the first electrode or the second electrode of the second conductive layer to cooperate with the first input signal or the first output signal to define a differential signal. A piezoelectric layer is disposed between the first conductive layer and the second conductive layer. The piezoelectric layer includes a piezoelectric material. The piezoelectric layer is substantially oriented in a plane and capable of movement in the plane responsive to an electric field between the first electrodes or the second electrodes.

摘要翻译： 本公开提供了机电系统谐振器结构，设备，装置，系统和相关过程的实现。 一方面，轮廓模式谐振器装置包括具有多个第一层电极的第一导电层，所述第一导电层包括能够提供第一输入信号的第一电极和可以提供第一输出信号的第二电极。 第二导电层包括多个第二层电极，其包括靠近第一导电层的第一电极的第一电极和靠近第一导电层的第二电极的第二电极。 可以在第二导电层的第一电极或第二电极处提供第二信号，以与第一输入信号或第一输出信号配合以限定差分信号。 压电层设置在第一导电层和第二导电层之间。 压电层包括压电材料。 压电层基本上定向在平面中并且能够响应于第一电极或第二电极之间的电场在平面中移动。