Method for MEMS device fabrication and device formed
    52.
    发明授权
    Method for MEMS device fabrication and device formed 有权
    MEMS器件制造方法及器件形成

    公开(公告)号:US08513043B2

    公开(公告)日:2013-08-20

    申请号:US13349696

    申请日:2012-01-13

    IPC分类号: H01L21/00

    摘要: The present invention generally relates to methods for producing MEMS or NEMS devices and the devices themselves. A thin layer of a material having a lower recombination coefficient as compared to the cantilever structure may be deposited over the cantilever structure, the RF electrode and the pull-off electrode. The thin layer permits the etching gas introduced to the cavity to decrease the overall etchant recombination rate within the cavity and thus, increase the etching rate of the sacrificial material within the cavity. The etchant itself may be introduced through an opening in the encapsulating layer that is linearly aligned with the anchor portion of the cantilever structure so that the topmost layer of sacrificial material is etched first. Thereafter, sealing material may seal the cavity and extend into the cavity all the way to the anchor portion to provide additional strength to the anchor portion.

    摘要翻译: 本发明一般涉及用于生产MEMS或NEMS装置和装置本身的方法。 与悬臂结构相比,具有较低复合系数的材料的薄层可以沉积在悬臂结构,RF电极和拉出电极上。 薄层允许引入空腔的蚀刻气体降低空腔内的整体蚀刻剂复合速率,从而提高空腔内的牺牲材料的蚀刻速率。 蚀刻剂本身可以通过与悬臂结构的锚固部分线性对准的封装层中的开口引入,使得首先蚀刻最顶层的牺牲材料。 此后,密封材料可以密封空腔并且一直延伸到空腔中,以锚定部分,以向锚固部分提供额外的强度。

    SYSTEMS AND METHODS FOR A MULTI-LEVEL CACHE
    54.
    发明申请
    SYSTEMS AND METHODS FOR A MULTI-LEVEL CACHE 有权
    多级缓存的系统和方法

    公开(公告)号:US20120210068A1

    公开(公告)日:2012-08-16

    申请号:US13288005

    申请日:2011-11-02

    IPC分类号: G06F12/08

    摘要: A multi-level cache comprises a plurality of cache levels, each configured to cache I/O request data pertaining to I/O requests of a different respective type and/or granularity. A cache device manager may allocate cache storage space to each of the cache levels. Each cache level maintains respective cache metadata that associates I/O request data with respective cache address. The cache levels monitor I/O requests within a storage stack, apply selection criteria to identify cacheable I/O requests, and service cacheable I/O requests using the cache storage device.

    摘要翻译: 多级缓存包括多个高速缓存级别,每个高速缓存级别被配置为高速缓存与不同类型和/或粒度的I / O请求有关的I / O请求数据。 高速缓存设备管理器可以将缓存存储空间分配给每个高速缓存级别。 每个高速缓存级别维护将I / O请求数据与相应缓存地址相关联的各个高速缓存元数据。 高速缓存级别监视存储堆栈内的I / O请求,应用选择标准来识别可缓存的I / O请求,以及使用高速缓存存储设备来服务可缓存的I / O请求。

    System and method of encapsulation
    55.
    发明授权
    System and method of encapsulation 有权
    系统和封装方法

    公开(公告)号:US07993950B2

    公开(公告)日:2011-08-09

    申请号:US12266457

    申请日:2008-11-06

    IPC分类号: H01L21/00 H01L21/76

    摘要: Embodiments discussed herein generally include methods of fabricating MEMS devices within a structure. The MEMS device may be formed in a cavity above the structure, and additional metallization may occur above the MEMS device. The cavity may be formed by depositing an encapsulating layer over the sacrificial layers that enclose the MEMS device. The encapsulating layer may then be etched to expose portions of the sacrificial layers. The sacrificial layers are exposed because they extend through the sidewalls of the encapsulating layer. Therefore, no release holes are etched through the top of the encapsulating layer. An etchant then removes the sacrificial layers to free the MEMS device and form the cavity and an opening through the sidewall of the encapsulating layer. Another encapsulating layer may then be deposited to seal the cavity and the opening.

    摘要翻译: 本文讨论的实施例通常包括在结构内制造MEMS器件的方法。 MEMS器件可以形成在结构上方的空腔中,并且可以在MEMS器件上方发生额外的金属化。 空腔可以通过在包围MEMS器件的牺牲层上沉积封装层来形成。 然后可以蚀刻封装层以暴露部分牺牲层。 牺牲层被暴露,因为它们延伸穿过封装层的侧壁。 因此,没有通过封装层的顶部蚀刻释放孔。 然后,蚀刻剂去除牺牲层以释放MEMS器件并形成空腔和通过封装层的侧壁的开口。 然后可以沉积另外的封装层以密封空腔和开口。

    NANOELECTRONIC CAPNOMETER ADAPTER INCLUDING A NANOELECTRONIC SENSOR SELECTIVELY SENSITIVE TO AT LEAST ONE GASEOUS CONSITUTENT OF EXHALED BREATH
    56.
    发明申请
    NANOELECTRONIC CAPNOMETER ADAPTER INCLUDING A NANOELECTRONIC SENSOR SELECTIVELY SENSITIVE TO AT LEAST ONE GASEOUS CONSITUTENT OF EXHALED BREATH 审中-公开
    包含纳米电子传感器的纳米电容式调节器适配器选择性地至少可以将一次气体渗透到呼吸道中

    公开(公告)号:US20100137731A1

    公开(公告)日:2010-06-03

    申请号:US12485793

    申请日:2009-06-16

    IPC分类号: A61B5/08

    摘要: A capnometer adaptor includes a nanostructure sensor configured to selectively respond to a gaseous constituent of exhaled breath, such as to carbon dioxide. In certain embodiments, the adaptor includes an airway adaptor having at least one channel configured for the passage of respiratory gas; at least one nanostructure sensor in fluid communication with the passage, the sensor configured to selectively respond to at least one gaseous constituent of exhaled breath comprising carbon dioxide; and electronic hardware connected to the nanostructure sensor and configured to provide a signal indicative of a response of the sensor to the at least one gaseous constituent of exhaled breath. The sensor may be provided as a compact and solid-state device, and may be adapted for a variety of respiratory monitoring applications.

    摘要翻译: 电导率计适配器包括纳米结构传感器,其被配置为选择性地响应呼出气体的气体成分,例如二氧化碳。 在某些实施例中,适配器包括气道适配器,其具有构造成用于呼吸气体通过的至少一个通道; 至少一个与所述通道流体连通的纳米结构传感器,所述传感器被配置为选择性地响应包含二氧化碳的呼出气体的至少一种气体成分; 以及连接到纳米结构传感器并被配置为提供指示传感器对呼出气体的至少一种气体成分的响应的信号的电子硬件。 传感器可以被提供为紧凑和固态设备,并且可以适用于各种呼吸监测应用。

    Nanoelectronic capnometer adaptor including a nanoelectric sensor selectively sensitive to at least one gaseous constituent of exhaled breath
    57.
    发明授权
    Nanoelectronic capnometer adaptor including a nanoelectric sensor selectively sensitive to at least one gaseous constituent of exhaled breath 失效
    包括纳米电传感器的纳米电子测温仪适配器,其选择性地对呼出气体的至少一种气体成分敏感

    公开(公告)号:US07547931B2

    公开(公告)日:2009-06-16

    申请号:US11019792

    申请日:2004-12-20

    IPC分类号: G01N1/00

    摘要: A capnometer adaptor includes a nanostructure sensor configured to selectively respond to a gaseous constituent of exhaled breath, such as to carbon dioxide. In certain embodiments, the adaptor includes an airway adaptor having at least one channel configured for the passage of respiratory gas; at least one nanostructure sensor in fluid communication with the passage, the sensor configured to selectively respond to at least one gaseous constituent of exhaled breath comprising carbon dioxide; and electronic hardware connected to the nanostructure sensor and configured to provide a signal indicative of a response of the sensor to the at least one gaseous constituent of exhaled breath. The sensor may be provided as a compact and solid-state device, and may be adapted for a variety of respiratory monitoring applications.

    摘要翻译: 电导率计适配器包括纳米结构传感器,其被配置为选择性地响应呼出气体的气体成分,例如二氧化碳。 在某些实施例中,适配器包括气道适配器,其具有构造成用于呼吸气体通过的至少一个通道; 至少一个与所述通道流体连通的纳米结构传感器,所述传感器被配置为选择性地响应包含二氧化碳的呼出气体的至少一种气体成分; 以及连接到纳米结构传感器并被配置为提供指示传感器对呼出气体的至少一种气体成分的响应的信号的电子硬件。 传感器可以被提供为紧凑和固态设备,并且可以适用于各种呼吸监测应用。

    NANOSTRUCTURES WITH ELECTRODEPOSITED NANOPARTICLES
    58.
    发明申请
    NANOSTRUCTURES WITH ELECTRODEPOSITED NANOPARTICLES 审中-公开
    具有电沉积纳米颗粒的纳米结构

    公开(公告)号:US20090101996A1

    公开(公告)日:2009-04-23

    申请号:US12268327

    申请日:2008-11-10

    IPC分类号: G01N27/403 H01L21/288

    摘要: A nanoelectronic device includes a nanostructure, such as a nanotube or network of nanotube, disposed on a substrate. Nanoparticles are disposed on or adjacent to the nanostructure so as to operatively effect the electrical properties of the nanostructure. The nanoparticles may be composed of metals, metal oxides or salts and nanoparticles composed of different materials may be present. The amount of nanoparticles may be controlled to preserve semiconductive properties of the nanostructure, and the substrate immediately adjacent to the nanostructure may remain substantially free of nanoparticles. A method for fabricating the device includes electrodeposition of the nanoparticles using one of more solutions of dissolved ions while providing an electric current to the nanostructures but not to the surrounding substrate.

    摘要翻译: 纳米电子器件包括纳米结构,例如纳米管或纳米管网络,其设置在衬底上。 将纳米颗粒设置在纳米结构上或与纳米结构相邻,以便有效地影响纳米结构的电性能。 纳米颗粒可以由金属,金属氧化物或盐组成,并且可以存在由不同材料组成的纳米颗粒。 可以控制纳米颗粒的量以保持纳米结构的半导体性质,并且紧邻纳米结构的衬底可以基本上不含纳米颗粒。 制造该器件的方法包括使用溶解离子的更多溶液中的一种电解沉积纳米颗粒,同时向纳米结构提供电流,但不向周围衬底提供电流。

    Remotely communicating, battery-powered nanostructure sensor devices
    59.
    发明授权
    Remotely communicating, battery-powered nanostructure sensor devices 有权
    远程通信,电池供电的纳米结构传感器设备

    公开(公告)号:US07522040B2

    公开(公告)日:2009-04-21

    申请号:US11111121

    申请日:2005-04-20

    IPC分类号: G08B21/00

    摘要: A portable sensor device incorporates a low-power, nanostructure sensor coupled to a wireless transmitter. The sensor uses a nanostructure conducting channel, such as a nanotube network, that is functionalized to respond to a selected analyte. A measurement circuit connected to the sensor determines a change in the electrical characteristic of the sensor, from which information concerning the present or absence of the analyte may be determined. The portable sensor device may include a portable power source, such as a battery. It may further include a transmitter for wirelessly transmitting data to a base station.

    摘要翻译: 便携式传感器装置包括耦合到无线发射器的低功率纳米结构传感器。 传感器使用纳米结构导电通道,例如纳米管网络,其被功能化以响应于所选择的分析物。 连接到传感器的测量电路确定传感器的电特性的变化,从该信号可以确定与分析物的存在或不存在有关的信息。 便携式传感器装置可以包括诸如电池的便携式电源。 它还可以包括用于向基站无线发送数据的发射机。

    Method of Customizing 3D Computer-Generated Scenes
    60.
    发明申请
    Method of Customizing 3D Computer-Generated Scenes 审中-公开
    定制3D计算机生成场景的方法

    公开(公告)号:US20090021513A1

    公开(公告)日:2009-01-22

    申请号:US12113664

    申请日:2008-05-01

    IPC分类号: G06T15/00

    CPC分类号: G06T15/005 G06T15/503

    摘要: An automated method of rapidly producing customized 3D graphics images in which various user images and video are merged into 3D computer graphics scenes, producing hybrid images that appear to have been created by a computationally intensive 3D rendering process, but which in fact have been created by a much less computationally intensive series of 2D image operations. To do this, a 3D graphics computer model is rendered into a 3D graphics image using a customized renderer designed to automatically report on some of the renderer's intermediate rendering operations, and store this intermediate data in the form of metafilm. User images and video may then be automatically combined with the metafilm, producing a 3D rendered quality final image with orders of magnitude fewer computing operations. The process can be used to inexpensively introduce user content into sophisticated images and videos suitable for many internet, advertising, cell phone, and other applications.

    摘要翻译: 一种快速生产定制3D图形图像的自动化方法,其中各种用户图像和视频被合并到3D计算机图形场景中,产生似乎已经通过计算密集型3D渲染过程创建但是实际上已经由 更少的计算密集型2D图像操作系列。 为此,3D图形计算机模型将使用自定义渲染器渲染为3D图形图像,该渲染器旨在自动报告某些渲染器的中间渲染操作,并以Metafilm的形式存储此中间数据​​。 然后,用户图像和视频可以自动与元膜相结合,从而产生3D渲染质量的最终图像,其数量级减少了计算操作。 该过程可以用于将用户内容廉价地引入适合于许多互联网,广告,手机和其他应用的复杂图像和视频。