公开(公告)号：US07372632B2

公开(公告)日：2008-05-13

申请号：US11517924

申请日：2006-09-07

申请人： Todd E. Lizotte

发明人： Todd E. Lizotte

IPC分类号： G02B27/10 ,  G06K9/00 ,  H04N9/47 ,  G01N21/00

CPC分类号： G01N21/95692 ,  G01N21/8806 ,  G01N2021/646 ,  G01N2021/95653 ,  G01N2201/0638 ,  G02B3/0006 ,  G02B3/0031 ,  G02B3/005 ,  G02B3/0056 ,  G02B3/0062

摘要： An imaging method and imaging system for inspecting features located at a known inter-feature pitch on portions of a target surface. The system includes a lens array having a plurality of lenses wherein the lenses of the lens array have an inter-lens pitch and an inter-field of view pitch corresponding to the inter-feature pitch, and an array of imaging elements having an inter-element pitch corresponding to the inter-feature pitch, whereby the imaging system images only field of view areas of the target surface containing features.

摘要翻译： 一种成像方法和成像系统，用于检查位于目标表面的部分上的已知特征间距的特征。 该系统包括具有多个透镜的透镜阵列，其中透镜阵列的透镜具有对应于特征间间距的透镜间距和视场间距，以及具有相互间的间隔的成像元件阵列， 元素间距对应于特征间距，由此成像系统仅对包含特征的目标表面的视野区域进行成像。

公开(公告)号：US20080073329A1

公开(公告)日：2008-03-27

申请号：US11843807

申请日：2007-08-23

申请人： Hidenori Tateishi ,  Masaru Futaana ,  Yuki Saeki ,  Yasunobu Ueno

发明人： Hidenori Tateishi ,  Masaru Futaana ,  Yuki Saeki ,  Yasunobu Ueno

IPC分类号： B23K26/00

CPC分类号： B23K26/046 ,  B23K26/382 ,  B23K2103/50 ,  Y10T408/567

摘要： A drilling method and a laser machining apparatus which can shorten the measuring time of workpiece surface height and improve the machining efficiency in spite of irregularities of about 10-30 μm high in the surface of a table. Surface heights of the table is measured at lattice points in advance. Top surface height at a desired point of the workpiece mounted on the table is measured. Surface height of the point is arithmetically obtained using heights of four points surrounding the point. The difference between the measured height and the arithmetically obtained height is set as the plate thickness of the workpiece. Top surface height of the workpiece at a machining position is regarded as the sum of the plate thickness and the height at that position obtained from the table surface heights.

摘要翻译： 一种能够缩短工件表面高度的测量时间并且提高加工效率的钻孔方法和激光加工装置，尽管表的表面高度约为10-30mum。 表格的表面高度预先在格点测量。 测量安装在工作台上的工件的所需点上的顶部表面高度。 使用围绕点的四个点的高度算术地获得点的表面高度。 将测得的高度与算术获得的高度之差设定为工件的板厚度。 在加工位置的工件的顶面高度被认为是从台面高度获得的板厚度和该位置处的高度之和。

公开(公告)号：US20070279609A1

公开(公告)日：2007-12-06

申请号：US11755361

申请日：2007-05-30

申请人： Yoshitada OSHIDA ,  Yoshitatsu Naito ,  Mituhiro Suzuki ,  Tsuyoshi Yamaguchi ,  Shigenobu Maruyama

发明人： Yoshitada OSHIDA ,  Yoshitatsu Naito ,  Mituhiro Suzuki ,  Tsuyoshi Yamaguchi ,  Shigenobu Maruyama

IPC分类号： G03B27/42

CPC分类号： G03F7/70791 ,  G02B5/045 ,  G02B17/04 ,  G02B26/12 ,  G03F7/7005 ,  G03F7/70391 ,  G03F7/704

摘要： A parallel glass which is a prism having a parallelogram-shaped cross section in an x-y direction, and parallel glasses which are prisms having a parallelogram-shaped cross section in the x-y direction and each include grooves formed in one surface in a z direction perpendicular to the x-y direction, are stacked in direct contact with each other such that the grooves are located on the inside, and light trying to enter the grooves is subjected is total reflection, thereby changing incident parallel beams with a pitch of 13 mm into emergent parallel beams with a pitch of 1 mm.

摘要翻译： 在xy方向上具有平行四边形横截面的棱镜的平行玻璃和在xy方向上具有平行四边形横截面的棱镜的平行玻璃，每个平行玻璃包括在垂直于xy方向的az方向的一个表面中形成的凹槽 xy方向彼此直接接触地堆叠，使得凹槽位于内侧，并且试图进入凹槽的光被全反射，从而将具有13mm间距的入射平行光束改变为具有 间距为1毫米。

公开(公告)号：US07205501B2

公开(公告)日：2007-04-17

申请号：US10927185

申请日：2004-08-27

申请人： Kunio Arai ,  Kazuhisa Ishii ,  Hiroaki Ashizawa

发明人： Kunio Arai ,  Kazuhisa Ishii ,  Hiroaki Ashizawa

IPC分类号： B23K26/38

CPC分类号： H05K3/0038 ,  B23K26/04 ,  B23K26/0622 ,  B23K26/384 ,  B23K2101/42 ,  B23K2103/12

摘要： A laser machining method and a laser machining apparatus superior in hole position accuracy and hole quality. An outgoing beam outputted as short pulses is shaped by a pulse shaping unit so as to form a #1 branch beam. The #1 branch beam is supplied to a portion to be machined, so as to machine the portion. In this case, the #1 branch beam may be controlled to synchronize with the outgoing beam. When a piece to be machined is made from a metal material and at least one of an organic material and an inorganic material, the metal material is machined with a laser beam shaped to have a pulse width not shorter than 100 ns, and at least one of the organic material and the inorganic material is machined with a laser beam shaped to have a pulse width shorter than 100 ns.

摘要翻译： 激光加工方法和激光加工装置，其孔位精度和孔质量优异。 作为短脉冲输出的输出光束通过脉冲整形单元成形，从而形成＃1分支光束。 将＃1分支光束供给到要加工的部分，以便加工该部分。 在这种情况下，可以控制＃1分支光束与输出光束同步。 当要被加工的零件由金属材料和有机材料和无机材料中的至少一种制成时，金属材料被加工成具有不小于100ns的脉冲宽度的激光束，并且至少一个 的有机材料和无机材料用激光束加工成具有短于100ns的脉冲宽度。

公开(公告)号：US07130715B2

公开(公告)日：2006-10-31

申请号：US10679408

申请日：2003-10-07

申请人： Kazuo Watanabe ,  Takahiko Yamashita ,  Yasushi Ito ,  Katsuhiro Nagasawa

发明人： Kazuo Watanabe ,  Takahiko Yamashita ,  Yasushi Ito ,  Katsuhiro Nagasawa

IPC分类号： G06F19/00

CPC分类号： G05B19/402 ,  B23Q17/2233 ,  G05B2219/41192 ,  G05B2219/45035 ,  H05K3/0008 ,  H05K3/0047 ,  H05K2203/163 ,  Y10T29/49778

摘要： In a machining method and a machining apparatus, prior to machining, an NC control unit makes an X-axis drive unit move a table based on examination conditions specified in advance. Thus, the NC control unit obtains a stabilization time required from the command-reach time of a poisoning command and till the stabilization of position response of the table within a predetermined allowable range. Likewise, for moving a drill in a Y-axis direction, the NC control unit obtains a stabilization time required till the stabilization of position response within a predetermined allowable range. At the time of machining, the drill is moved in a Z-axis direction to cut into a printed wiring board as soon as the obtained stabilization time has passed.

摘要翻译： 在加工方法和加工装置中，在加工之前，NC控制单元使X轴驱动单元基于预先规定的检查条件移动台。 因此，NC控制单元获得从中毒命令的命令到达时间所需的稳定时间，并且获得在预定允许范围内使表的位置响应稳定。 类似地，为了在Y轴方向上移动钻头，NC控制单元在预定的允许范围内获得稳定位置响应所需的稳定时间。 在加工时，一旦获得的稳定时间过去，钻头就沿Z轴方向移动，从而切割成印刷线路板。

公开(公告)号：US20060202115A1

公开(公告)日：2006-09-14

申请号：US11077023

申请日：2005-03-10

申请人： Todd Lizotte ,  Orest Ohar

发明人： Todd Lizotte ,  Orest Ohar

IPC分类号： H01J40/14

CPC分类号： B23K26/04 ,  B23K26/043 ,  B23K26/702 ,  G01S5/16 ,  H04N1/047

摘要： An apparatus and method for maintaining a desired position of a collimated light beam are provided. An optical system includes one or more passive optical elements movably positioned in the beam path. Beam position is responsive to movement of at least one of the passive optical elements. The actual position of the beam is detected and compared with the desired beam position. An error signal is generated and the beam path is altered responsive to movement of one or more of the passive optical elements. In further aspects, beam shaping optics, such diffractive optics, are provided to shape the sensed beam portion. In still other aspects, thermal conditions of the laser may be monitored and a thermal map is provided to automatically compensate for estimated beam drift due to thermal conditions.

摘要翻译： 提供了用于保持准直光束的期望位置的装置和方法。 光学系统包括可移动地定位在光束路径中的一个或多个无源光学元件。 光束位置响应至少一个无源光学元件的移动。 检测光束的实际位置并将其与期望的光束位置进行比较。 产生误差信号，响应于一个或多个无源光学元件的移动而改变光束路径。 在另外的方面，光束成形光学器件，这种衍射光学器件被提供以对感测的光束部分进行成形。 在其他方面，可以监测激光器的热条件，并提供热图以自动补偿由于热条件引起的估计的光束漂移。

公开(公告)号：US07075724B2

公开(公告)日：2006-07-11

申请号：US10958712

申请日：2004-10-05

申请人： Todd E. Lizotte

发明人： Todd E. Lizotte

IPC分类号： G02B27/10

CPC分类号： G02B27/0068 ,  G02B27/09

摘要： A compensator/remapper and method for compensation and remapping of a laser beam for control and correction of laser pointing and thermal drift instability in a laser beam delivery system including a laser generating a laser beam and a plurality of optical elements for directing, shaping and focusing the laser beam along a beam path to a target. A compensator/remapper includes a compensator element and a remapper element. The compensator element receives an input laser beam having a range of input angles and lateral displacements and redirects components of the input laser beam into an aligned laser beam having evenly distributed and parallel components. The remapper element is illuminated by the aligned laser beam from the compensator element and remaps the components of the aligned laser beam into a shaped laser beam having a profile that is optimum for remapping into a flat top laser beam.

摘要翻译： 一种用于激光束补偿和重映射的补偿器/再映射器和方法，用于激光束传送系统中的激光指向和热漂移不稳定性的控制和校正，包括产生激光束的激光和用于引导，成形和聚焦的多个光学元件 激光束沿着到目标的光束路径。 补偿器/再映射器包括补偿元件和再映射元件。 补偿元件接收具有输入角范围和横向位移的输入激光束，并将输入激光束的分量重定向成具有均匀分布和平行分量的对准的激光束。 重新映射元件由来自补偿元件的对准的激光束照亮，并将对准的激光束的分量重新映射成具有最佳以用于重新映射成平顶激光束的轮廓的成形激光束。

公开(公告)号：US20060104320A1

公开(公告)日：2006-05-18

申请号：US11274273

申请日：2005-11-16

申请人： Goichi Ohmae ,  Hiroshi Aoyama

发明人： Goichi Ohmae ,  Hiroshi Aoyama

IPC分类号： H01S3/10

CPC分类号： G02F1/37 ,  B23K26/064 ,  B23K26/0673

摘要： The invention provides a method and an apparatus for forming a plurality of ultraviolet-wavelength laser beams, and a laser machining apparatus, in which the machining efficiency can be improved due to easy maintenance and inspection while deterioration of wavelength conversion means can be prevented to reduce the running cost. A laser beam with a near infrared wavelength output from a laser oscillator is branched into a plurality of laser beams by a laser distribution unit. Each branched laser beam is partially converted into a laser beam whose wavelength is ½ of the near infrared wavelength by a wavelength converter. An ultraviolet laser beam whose wavelength is ⅓ of the near infrared wavelength of the laser beam is formed out of the branched laser beam and the laser beam with the wavelength which is ½ of the near infrared wavelength by another wavelength converter, both the branched laser beam and the laser beam with the wavelength which is ½ of the near infrared wavelength being output from the wavelength converter. The ultraviolet laser beam is extracted and supplied to a portion to be machined, by a wavelength separator.

摘要翻译： 本发明提供一种用于形成多个紫外波长激光束的方法和装置，以及激光加工装置，其中由于易于维护和检查而可以提高加工效率，同时可以防止波长转换装置的劣化降低 运行成本。 从激光振荡器输出的具有近红外波长的激光束通过激光分配单元分支成多个激光束。 每个分支的激光束被波长转换器部分地转换成其波长为近红外波长的1/2的激光束。 波长为激光束的近红外波长的1/3的紫外激光束由分支激光束和波长为近红外波长的1/2的激光束由另一波长转换器形成， 激光束和波长为近红外波长1/2的波长的激光束从波长转换器输出。 通过波长分离器将紫外线激光束提取并供给到待加工的部分。

公开(公告)号：US20050219496A1

公开(公告)日：2005-10-06

申请号：US11075245

申请日：2005-03-09

申请人： Yoshitada Oshida ,  Yoshitatsu Naito ,  Mituhiro Suzuki ,  Bunji Uchiyama ,  Tsuyoshi Yamaguchi

发明人： Yoshitada Oshida ,  Yoshitatsu Naito ,  Mituhiro Suzuki ,  Bunji Uchiyama ,  Tsuyoshi Yamaguchi

IPC分类号： G02B26/10 ,  G02B26/12 ,  G03B27/54 ,  G03F7/20 ,  G03F7/22

CPC分类号： G03F7/70791 ,  G02B26/123 ,  G03F7/70383 ,  G03F7/70391 ,  G03F7/70466

摘要： A pattern exposure method and a pattern exposure apparatus in which the throughput is improved with an inexpensive apparatus and without a low running cost. Output faces of a plurality of laser beams emitted from a plurality of semiconductor lasers respectively are arranged in two directions. One of the directions is the same direction as the scanning direction of a polygon mirror while the other is a direction crossing the scanning direction of the polygon mirror. In this event, the array pitch of the output faces arranged in the direction crossing the scanning direction of the polygon mirror is made equal to resolution of an exposure pattern. In this event, the wavelength of each laser may be made not longer than 410 nm.

摘要翻译： 图案曝光方法和图案曝光装置，其中通过廉价的装置提高生产量并且没有低的运行成本。 从多个半导体激光器分别发射的多个激光束的输出面分别布置在两个方向上。 方向之一是与多面镜的扫描方向相同的方向，而另一方向是与多面镜的扫描方向交叉的方向。 在这种情况下，使排列在与多面镜的扫描方向交叉的方向上的输出面的阵列间距等于曝光图案的分辨率。 在这种情况下，每个激光器的波长可以不超过410nm。

公开(公告)号：US20050155958A1

公开(公告)日：2005-07-21

申请号：US10927185

申请日：2004-08-27

申请人： Kunio Arai ,  Kazuhisa Ishii ,  Hiroaki Ashizawa

发明人： Kunio Arai ,  Kazuhisa Ishii ,  Hiroaki Ashizawa

IPC分类号： B23K26/04 ,  B23K26/06 ,  B23K26/073 ,  B23K101/40 ,  B23K101/42 ,  H05K3/00 ,  B23K26/40

CPC分类号： H05K3/0038 ,  B23K26/04 ,  B23K26/0622 ,  B23K26/384 ,  B23K2101/42 ,  B23K2103/12

摘要： A laser machining method and a laser machining apparatus superior in hole position accuracy and hole quality. An outgoing beam outputted as short pulses is shaped by a pulse shaping unit so as to form a #1 branch beam. The #1 branch beam is supplied to a portion to be machined, so as to machine the portion. In this case, the #1 branch beam may be controlled to synchronize with the outgoing beam. When a piece to be machined is made from a metal material and at least one of an organic material and an inorganic material, the metal material is machined with a laser beam shaped to have a pulse width not shorter than 100 ns, and at least one of the organic material and the inorganic material is machined with a laser beam shaped to have a pulse width shorter than 100 ns.

摘要翻译： 激光加工方法和激光加工装置，其孔位精度和孔质量优异。 作为短脉冲输出的输出光束通过脉冲整形单元成形，从而形成＃1分支光束。 将＃1分支光束供给到要加工的部分，以便加工该部分。 在这种情况下，可以控制＃1分支光束与输出光束同步。 当要被加工的零件由金属材料和有机材料和无机材料中的至少一种制成时，金属材料被加工成具有不小于100ns的脉冲宽度的激光束，并且至少一个 的有机材料和无机材料用激光束加工成具有短于100ns的脉冲宽度。