公开(公告)号：US6057525A

公开(公告)日：2000-05-02

申请号：US926657

申请日：1997-09-10

申请人： Jim Chang ,  Bruce E. Warner ,  Ernest P. Dragon

发明人： Jim Chang ,  Bruce E. Warner ,  Ernest P. Dragon

IPC分类号： B23K26/04 ,  B23K26/06 ,  B23K26/08 ,  B23K26/14 ,  B23K26/16 ,  B23K26/18 ,  B23K26/38

CPC分类号： B23K26/0626 ,  B23K26/0054 ,  B23K26/032 ,  B23K26/046 ,  B23K26/0643 ,  B23K26/0665 ,  B23K26/082 ,  B23K26/123 ,  B23K26/142 ,  B23K26/16 ,  B23K26/18 ,  B23K26/382 ,  B23K26/384 ,  B23K26/388 ,  B23K26/40 ,  B23K2203/05 ,  B23K2203/10 ,  B23K2203/16 ,  B23K2203/172 ,  B23K2203/50 ,  B23K2203/52

摘要： A method and apparatus for micromachining and microdrilling which results in a machined part of superior surface quality is provided. The system uses a near diffraction limited, high repetition rate, short pulse length, visible wavelength laser. The laser is combined with a high speed precision tilting mirror and suitable beam shaping optics, thus allowing a large amount of energy to be accurately positioned and scanned on the workpiece. As a result of this system, complicated, high resolution machining patterns can be achieved. A cover plate may be temporarily attached to the workpiece. Then as the workpiece material is vaporized during the machining process, the vapors condense on the cover plate rather than the surface of the workpiece. In order to eliminate cutting rate variations as the cutting direction is varied, a randomly polarized laser beam is utilized. A rotating half-wave plate is used to achieve the random polarization. In order to correctly locate the focus at the desired location within the workpiece, the position of the focus is first determined by monitoring the speckle size while varying the distance between the workpiece and the focussing optics. When the speckle size reaches a maximum, the focus is located at the first surface of the workpiece. After the location of the focus has been determined, it is repositioned to the desired location within the workpiece, thus optimizing the quality of the machined area.

摘要翻译： 提供了一种微加工和微钻孔的方法和装置，其产生了具有优异表面质量的加工部分。 该系统采用近衍射限制，高重复率，短脉冲长度，可见波长激光。 激光与高速精密倾斜镜和合适的光束整形光学元件相结合，从而允许大量的能量精确地定位和扫描工件。 作为该系统的结果，可以实现复杂的高分辨率加工图案。 盖板可临时附接到工件上。 然后当工件材料在加工过程中蒸发时，蒸汽会冷凝在盖板而不是工件的表面上。 为了消除切割方向变化时的切割速度变化，使用随机偏振的激光束。 旋转半波片用于实现随机极化。 为了正确地将焦点定位在工件内的所需位置，首先通过在改变工件和聚焦光学器件之间的距离的同时监视散斑尺寸来确定焦点的位置。 当斑点大小达到最大值时，焦点位于工件的第一个表面。 确定焦点的位置后，将其重新定位到工件内的所需位置，从而优化加工区域的质量。

公开(公告)号：US5910261A

公开(公告)日：1999-06-08

申请号：US849149

申请日：1997-05-29

申请人： Atsushi Mori ,  Yoshinori Nakata

发明人： Atsushi Mori ,  Yoshinori Nakata

IPC分类号： B23K26/00 ,  B23K26/08 ,  B23K26/38

CPC分类号： B23K26/08 ,  B23K26/082 ,  B23K26/388

摘要： In a laser machining device for cutting a round hole in a workpiece employing a machining program, a movement path includes a section from point P.sub.1 to point P.sub.2 (passing a hole previously formed in a workpiece) and reaches point P.sub.3 on a circle (40) to be cut. A section P.sub.2 -P.sub.3 of the path is not a simple circular arc but is a curve whose radius of curvature gradually becomes approximate to the radius of a circle 40 to be cut as it gradually decreases towards the end point (P.sub.3) from the start point (P.sub.2) where the radius of the curvature is largest. Thus, the change in acceleration at points P.sub.2 and P.sub.3 of the section P.sub.1 -P.sub.2 -P.sub.3 of the path can be controlled to low levels.

摘要翻译： PCT No.PCT / JP96 / 02862 Sec。 371日期：1996年5月29日 102（e）日期1996年5月29日PCT提交1996年10月2日PCT公布。 出版物WO97 / 12717 日期1997年04月10日在使用加工程序切削工件中的圆孔的激光加工装置中，移动路径包括从点P1到点P2的部分（通过预先形成在工件中的孔）并到达点P3 要切割的圆（40）。 路径的部分P2-P3不是简单的圆弧，而是曲率半径随着从起始点（P3）朝向终点（P3）逐渐减小而逐渐变得接近要切割的圆40的半径 （P2），曲率半径最大。 因此，路径的部分P1-P2-P3的点P2和P3处的加速度变化可以被控制到低水平。

公开(公告)号：US5841099A

公开(公告)日：1998-11-24

申请号：US651036

申请日：1996-05-17

申请人： Mark D. Owen ,  Bonnie A. Larson ,  Jozef Van Puymbroeck

发明人： Mark D. Owen ,  Bonnie A. Larson ,  Jozef Van Puymbroeck

IPC分类号： B23K26/00 ,  B23K26/38 ,  B23K26/40 ,  B23K101/36 ,  B23K101/42 ,  C23C14/04 ,  C23C14/28 ,  H01L23/12 ,  H05K3/00 ,  H05K3/02 ,  H05K3/40 ,  H05K3/42 ,  H05K3/46

CPC分类号： C23C14/046 ,  B23K26/384 ,  B23K26/386 ,  B23K26/388 ,  B23K26/40 ,  B23K26/402 ,  C23C14/048 ,  C23C14/28 ,  H05K3/0035 ,  H05K3/0038 ,  H05K3/4076 ,  B23K2203/08 ,  B23K2203/10 ,  B23K2203/12 ,  B23K2203/16 ,  B23K2203/172 ,  B23K2203/26 ,  B23K2203/40 ,  B23K2203/42 ,  B23K2203/50 ,  H05K2203/107 ,  H05K2203/108 ,  H05K3/027 ,  H05K3/427

摘要： The output of a continuously pumped, Q-switched, Nd:YAG laser (10) is frequency converted to provide ultraviolet light (62) for forming vias (72, 74) in targets (40) having metallic layers (64,68) and a dielectric layer (66). The invention employs a first laser output of high power density to ablate the metallic layer and a second laser output of a lower power density to ablate the dielectric layer. The parameters of the output pulses (62) are selected to facilitate substantially clean, sequential drilling or via formation. These parameters typically include at least two of the following criteria: power density first above and then below the ablation threshold of the conductor, wavelength less than 400 nm, a temporal pulse width shorter than about 100 nanoseconds, and a repetition rate of greater than about one kilohertz. The ability to generate ultraviolet light output pulses at two power densities facilitates the formation of depthwise self-limiting blind vias in multilayer targets, such as a target composed of a layer dielectric material covered on either surface by a layer of metal.

摘要翻译： 连续泵浦的Q开关Nd：YAG激光器（10）的输出被频率转换以提供用于在具有金属层（64,68）的靶（40）中形成通孔（72,74）的紫外光（62）和 介电层（66）。 本发明采用高功率密度的第一激光输出来烧蚀金属层和较低功率密度的第二激光输出以消融电介质层。 选择输出脉冲（62）的参数以便于基本上清洁，顺序钻孔或通孔形成。 这些参数通常包括以下标准中的至少两个：功率密度先于导体的消融阈值，然后低于导体的消融阈值，波长小于400nm，时间脉冲宽度短于约100纳秒，重复率大于约 一千赫兹 以两个功率密度产生紫外光输出脉冲的能力有助于在多层靶中形成深度自限制的盲孔，例如由由金属层在任一表面上覆盖的层介电材料构成的靶。

公开(公告)号：US4737613A

公开(公告)日：1988-04-12

申请号：US88446

申请日：1987-08-24

申请人： Richard W. Frye

发明人： Richard W. Frye

IPC分类号： B23K26/08 ,  B23K26/38 ,  F01D5/18 ,  B23K26/00

CPC分类号： B23K26/0853 ,  B23K26/382 ,  B23K26/388 ,  B23K26/389 ,  F01D5/186

摘要： Air diffuser openings are machined in hollow gas turbine blades. The blade is supported in alignment with a laser machining beam and rotatable around several perpendicular axes. It is simultaneously rotated about both axes whereby a substantially hourglass shape is machined out of the blade. The root of the hourglass shape may thereafter be enlarged.

摘要翻译： 空气扩散器开口在中空燃气涡轮机叶片中加工。 刀片被支撑成与激光加工梁对准，并可围绕几个垂直轴线旋转。 它同时围绕两个轴旋转，从而从叶片中加工出基本上沙漏的形状。 此后沙漏形状的根部可以被扩大。

公开(公告)号：US20230339047A1

公开(公告)日：2023-10-26

申请号：US17796444

申请日：2021-01-28

申请人： Fraunhofer-Gesellschaft zur Föderung der angewandten Forschung e.V.

发明人： Dennis HAASLER ,  Johannes FINGER

IPC分类号： B23K26/388 ,  B23K26/06 ,  B23K26/0622 ,  B23K26/082 ,  B23K26/046

CPC分类号： B23K26/388 ,  B23K26/0648 ,  B23K26/0624 ,  B23K26/082 ,  B23K26/0643 ,  B23K26/046

摘要： The present invention relates to an assembly for material processing using a laser beam, in particular for laser drilling, comprising a dynamic deflection device (AE) for the laser beam (LS), and an optical assembly, with which a laser beam (LS) exiting the deflection device (AE) is focused onto a processing plane (W). Along an optical axis, the optical assembly has a first optical system (OS1) and a second optical system (OS2), which are designed and arranged such that the laser beam (LS) forms an intermediate focus (ZF) between the first and the second optical system (OS1, OS2), and intersects the optical axis when entering the first optical system (OS1) at an angle to the optical axis and at a distance therefrom between the second optical system (OS2) and the processing plane (W). The suggested assembly has a simple, stable structure, with which efficient ablation of large and deep boreholes or cuts in a workpiece is enabled.

公开(公告)号：US09950392B2

公开(公告)日：2018-04-24

申请号：US14196727

申请日：2014-03-04

申请人： Rohr, Inc.

发明人： Sean Tiwari ,  Song Chiou

IPC分类号： B23K26/38 ,  B23K26/388 ,  B23K26/402 ,  B23K26/082 ,  B23K26/382 ,  B23K26/40 ,  B23K103/16 ,  B23K103/00

CPC分类号： B23K26/388 ,  B23K26/082 ,  B23K26/382 ,  B23K26/389 ,  B23K26/40 ,  B23K26/402 ,  B23K2103/16 ,  B23K2103/50

摘要： A process is provided for forming a plurality of apertures in a fiber-reinforced composite object using a laser. The apertures include at least a first aperture and a second aperture. During the process, a scanner head of the laser is operated from a location to selectively scan a laser beam over the object to form a first portion of the first aperture and to form a first portion of the second aperture. The scanner head is also operated from the location to selectively scan the laser beam over the object to form a second portion of the first aperture and to form a second portion of the second aperture.

公开(公告)号：US09764426B2

公开(公告)日：2017-09-19

申请号：US14559709

申请日：2014-12-03

申请人： Microlution Inc.

发明人： Andrew Honegger ,  Andrew Phillip ,  Onik Bhattacharyya ,  Grzegorz Nowobilski ,  Brendon DiVincenzo ,  Alexander Kim ,  Michael Howard ,  Jeremy VonHatten ,  Daniel Roti

IPC分类号： B23K26/382 ,  B23K26/388 ,  B23K26/00 ,  B23K26/06 ,  B23P23/04 ,  B23K26/384

CPC分类号： B23K26/388 ,  B23K26/0093 ,  B23K26/0604 ,  B23K26/382 ,  B23K26/384 ,  B23K26/389 ,  B23P23/04 ,  Y10T408/05

摘要： The present disclosure is directed toward a machine tool configured to perform small-scale, high-accuracy drilling operations for small-hole applications. The small-hole applications for which the machine tool is designed includes holes with one or more diameters. A part may have a larger-diameter hole that penetrates through a fraction of the thickness of a part and a smaller-diameter hole that penetrates from the bottom of the larger-diameter hole through the remainder of the part thickness. Additionally, the machine tool may be used with parts in any of the following categories: (i) both the step-hole and the flow-hole are created using the machine tool; or, (ii) the step-hole is created with an up-stream process and the machine tool may accept the part, measure the step-holes and create the flow-holes; or, (iii) no step-hole is used and the machine tool may accept the part, measure the raw surface and create the flow-holes.

公开(公告)号：US20170261208A1

公开(公告)日：2017-09-14

申请号：US15606514

申请日：2017-05-26

申请人： General Electric Company

发明人： John Howard Starkweather ,  William Thomas Bennett ,  John Franklin Gibbons ,  Anthony Stephen Urbanski

IPC分类号： F23R3/02 ,  B23K26/388 ,  B23K26/382 ,  B23K26/384

CPC分类号： F23R3/02 ,  B23K20/12 ,  B23K20/129 ,  B23K20/227 ,  B23K26/384 ,  B23K26/388 ,  B23K26/389 ,  B23K2101/003 ,  B23K2101/006 ,  B23K2103/04 ,  F01D5/186 ,  F05D2260/202 ,  F23R3/002 ,  F23R3/06 ,  F23R2900/00018 ,  F23R2900/03041 ,  Y02T50/673 ,  Y02T50/676

摘要： A substrate having one or more shaped effusion cooling holes formed therein. Each shaped cooling hole has a bore angled relative to an exit surface of the combustor liner. One end of the bore is an inlet formed in an inlet surface of the combustor liner. The other end of the bore is an outlet formed in the exit surface of the combustor liner. The outlet has a shaped portion that expands in only one dimension. Also methods for making the shaped cooling holes.

公开(公告)号：US09724782B2

公开(公告)日：2017-08-08

申请号：US14211162

申请日：2014-03-14

申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC.

发明人： Mark A. Unrath

IPC分类号： B23K26/03 ,  B23K26/08 ,  B23K26/38 ,  B23K26/386 ,  G02B26/10 ,  B23K26/082 ,  B23K26/0622 ,  B23K26/388

CPC分类号： B23K26/032 ,  B23K26/0622 ,  B23K26/082 ,  B23K26/0853 ,  B23K26/38 ,  B23K26/386 ,  B23K26/388 ,  B23K26/389 ,  G02B26/101 ,  G02B26/105

摘要： Laser systems and methods insert a settling time before and after each tooling action. A peak AOD excursion generally occurs at the transition in velocity between inter-feature moves and tooling moves. This transition occurs both before tooling (on the approach to the tooling location) and after tooling (on the departure from the completed tooling location to the next location). By adding a settling delay on each end of the tooling period, the AOD excursion is allowed to settle to a lower value. This then allows higher inter-tooling velocities (for high throughput) while keeping the AOD travel excursion within the bounds of the system's AOD configuration.

公开(公告)号：US20170182597A1

公开(公告)日：2017-06-29

申请号：US15389244

申请日：2016-12-22

申请人： Universität Stuttgart

发明人： MARWAN ABDOU-AHMED ,  RUDOLF WEBER ,  VOLKHER ONUSEIT

IPC分类号： B23K26/388 ,  G02B27/42 ,  B23K26/067

CPC分类号： B23K26/388 ,  B23K26/0643 ,  B23K26/0648 ,  B23K26/0676 ,  B23K26/082 ,  B23K26/382 ,  B23K26/389 ,  G02B5/1814 ,  G02B5/1861 ,  G02B5/1871 ,  G02B27/4233

摘要： The invention relates to a drilling device comprising a light source configured to provide a light beam and a diffractive beam propagation device having a substantially planar surface, wherein the light source is configured such that the light beam is incident on the planar surface of the diffractive beam propagation device, and wherein the diffractive beam propagation device is configured to propagate the light beam as one or more propagated beams such that the one or more propagated beams, at least when being integrated over time, surround an area with a substantially circular shape. A use of the drilling device for drilling a hole in a work piece and a method suitable for drilling a hole in a work piece are also provided.