Carbon nano-tube film with a transformed substrate structure and a manufacturing method thereof
    65.
    发明授权
    Carbon nano-tube film with a transformed substrate structure and a manufacturing method thereof 有权
    具有转化的衬底结构的碳纳米管膜及其制造方法

    公开(公告)号:US08173217B2

    公开(公告)日:2012-05-08

    申请号:US12854386

    申请日:2010-08-11

    Abstract: A carbon nanotube (CNT) film having a transformed substrate structure and a manufacturing method thereof. The CNT film includes a transparent substrate, a plurality of three-dimensional (3D) structures formed distant from each other on the transparent substrate, and carbon nanotubes (CNTs) deposited on the transparent substrate where the plurality of 3D structures is not formed. The method includes forming a plurality of 3D structures distant from each other on a transparent substrate, and depositing a CNT solution on the substrate with the plurality of 3D structures formed thereon, wherein the CNT solution is deposited into a portion of the transparent substrate where the 3D structures are not formed. Thus, the deposition mechanism of the CNT solution is controlled to thereby increase the transparency of the CNT film and the electrical conductivity of an electrode including the CNT film.

    Abstract translation: 具有转化基板结构的碳纳米管(CNT)膜及其制造方法。 CNT膜包括透明基板,在透明基板上彼此远离形成的多个三维(3D)结构以及沉积在不形成多个3D结构的透明基板上的碳纳米管(CNT)。 该方法包括在透明基板上形成彼此远离的多个3D结构,并且在其上形成有多个3D结构的基板上沉积CNT溶液,其中将CNT溶液沉积到透明基板的一部分中, 没有形成3D结构。 因此,控制CNT溶液的沉积机理,从而提高CNT膜的透明度和包括CNT膜的电极的导电性。

    Multi-functional cyclic silicate compound, siloxane-based polymer prepared from the compound and process of producing insulating film using the polymer
    70.
    发明授权
    Multi-functional cyclic silicate compound, siloxane-based polymer prepared from the compound and process of producing insulating film using the polymer 有权
    多功能环状硅酸盐化合物,由该化合物制备的硅氧烷基聚合物和使用聚合物制备绝缘膜的方法

    公开(公告)号:US07867574B2

    公开(公告)日:2011-01-11

    申请号:US12318650

    申请日:2009-01-05

    Abstract: A multi-functional cyclic silicate compound, a siloxane-based polymer prepared from the silicate compound and a process of producing an insulating film using the siloxane-based polymer. The silicate compound of the present invention is highly compatible with conventional pore-generating substances and hardly hygroscopic, so it is useful for the preparation of a siloxane-based polymer suitable to a SOG process. Furthermore, a film produced by the use of such siloxane-based polymer is excellent in mechanical properties, thermal stability and crack resistance and enhanced in insulating properties by virtue of its low hygroscopicity. Therefore, in the field of semiconductor production, this film is of great use as an insulating film.

    Abstract translation: 多官能环状硅酸盐化合物,由硅酸盐化合物制备的硅氧烷类聚合物和使用硅氧烷类聚合物制造绝缘膜的方法。 本发明的硅酸盐化合物与常规的孔产生物质高度相容,几乎不吸湿,因此可用于制备适用于SOG工艺的硅氧烷类聚合物。 此外,通过使用这种硅氧烷基聚合物制成的膜由于其低吸湿性而具有优异的机械性能,热稳定性和抗裂纹性以及增强的绝缘性能。 因此,在半导体制造领域中,该膜作为绝缘膜具有很大的用途。

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