Package structure having micro-electromechanical element and fabrication method thereof
    61.
    发明授权
    Package structure having micro-electromechanical element and fabrication method thereof 有权
    具有微机电元件的封装结构及其制造方法

    公开(公告)号:US08198689B2

    公开(公告)日:2012-06-12

    申请号:US12769041

    申请日:2010-04-28

    IPC分类号: H01L23/485

    摘要: Proposed is a package structure having a micro-electromechanical (MEMS) element, including a chip having a plurality of electrical connecting pads and a MEMS element formed thereon; a lid disposed on the chip for covering the MEMS element; a stud bump disposed on each of the electrical connecting pads; an encapsulant formed on the chip with part of the stud bumps being exposed from the encapsulant; and a metal conductive layer formed on the encapsulant and connected to the stud bumps. The invention is characterized by completing the packaging process on the wafer directly to enable thinner and cheaper package structures to be fabricated within less time. This invention further provides a method for fabricating the package structure as described above.

    摘要翻译: 提出具有微机电(MEMS)元件的封装结构,其包括具有多个电连接焊盘和形成在其上的MEMS元件的芯片; 设置在所述芯片上用于覆盖所述MEMS元件的盖; 设置在每个电连接焊盘上的螺柱凸块; 形成在芯片上的密封剂,其中一部分柱状凸块从密封剂暴露出来; 以及金属导电层,形成在密封剂上并连接到凸块上。 本发明的特征在于直接完成晶片上的封装工艺,以便在更短的时间内制造更薄和更便宜的封装结构。 本发明还提供如上所述的用于制造封装结构的方法。

    Electronic carrier board and package structure thereof
    64.
    发明申请
    Electronic carrier board and package structure thereof 有权
    电子载板及其封装结构

    公开(公告)号:US20070145561A1

    公开(公告)日:2007-06-28

    申请号:US11643147

    申请日:2006-12-20

    IPC分类号: H01L23/02

    摘要: An electronic carrier board and a package structure thereof are provided. The electronic carrier board includes a carrier, at least one pair of bond pads formed on the carrier, and a protective layer covering the carrier. The protective layer is formed with openings for exposing the bond pads. A groove is formed between the paired bond pads and has a length larger than a width of an electronic component mounted on the paired bond pads. The groove is adjacent to one of the paired bond pads and communicates with a corresponding one of the openings where this bond pad is exposed. Accordingly, a clearance between the electronic component and the electronic carrier board can be effectively filled with an insulating resin for encapsulating the electronic component, thereby preventing voids and undesirable electrical bridging between the paired bond pads from occurrence.

    摘要翻译: 提供电子载体板及其封装结构。 电子载板包括载体,形成在载体上的至少一对接合焊盘和覆盖载体的保护层。 保护层形成有用于暴露接合焊盘的开口。 在成对的接合焊盘之间形成有一个沟槽,其长度大于安装在成对接合焊盘上的电子部件的宽度。 该沟槽与一对接合焊盘相邻,并与该接合焊盘露出的相应的一个开口连通。 因此,电子部件和电子载体板之间的间隙可以有效地填充用于封装电子部件的绝缘树脂,从而防止成对焊盘之间的空隙和不期望的电桥发生。

    Method of fabricating BGA packages
    66.
    发明授权
    Method of fabricating BGA packages 有权
    球栅阵列半导体封装的制作方法

    公开(公告)号:US06830957B2

    公开(公告)日:2004-12-14

    申请号:US10452488

    申请日:2003-05-30

    IPC分类号: H01L2144

    摘要: A method of fabricating BGA (Ball Grid Array) packages is proposed, which utilizes a specially-designed carrier to serve as an auxiliary tool to package semiconductor chips on substrates. The carrier is formed with a plurality of cavities respective for receiving a substrate and in communication with an injection gate, such that no injection gate is required on the substrate, thereby not restricting the trace routability on the substrate. Moreover, a two-piece type of mold is allowed being used to form a number of encapsulation bodies at one time, making the fabrication more productive and cost-effective. Furthermore, the proposed BGA fabrication method can be implemented without having to provide an air outlet in the substrate but allows the resulted encapsulation body to be free of voids to assure the quality of the packages. The proposed BGA fabrication method is therefore more advantageous to use than the prior art.

    摘要翻译: 提出了一种制造BGA(球栅阵列)封装的方法,该封装采用专门设计的载体作为将半导体芯片封装在衬底上的辅助工具。 载体形成有多个腔体,分别用于接收衬底并与注入栅极连通,使得在衬底上不需要注入栅极,从而不限制衬底上的迹线布线性。 此外,允许两件式的模具一次用于形成多个包封体,使得制造更加生产和成本有效。 此外,可以实现所提出的BGA制造方法,而不必在衬底中提供空气出口,但是允许所得到的封装体没有空隙以确保包装的质量。 因此,提出的BGA制造方法比现有技术更有利于使用。

    Package structure having micro-electromechanical element
    67.
    发明授权
    Package structure having micro-electromechanical element 有权
    具有微机电元件的封装结构

    公开(公告)号:US08564115B2

    公开(公告)日:2013-10-22

    申请号:US13492220

    申请日:2012-06-08

    IPC分类号: H01L23/04

    摘要: Proposed is a package structure having a micro-electromechanical (MEMS) element, including a chip having a plurality of electrical connecting pads and a MEMS element formed thereon; a lid disposed on the chip for covering the MEMS element; a stud bump disposed on each of the electrical connecting pads; an encapsulant formed on the chip with part of the stud bumps being exposed from the encapsulant; and a metal conductive layer formed on the encapsulant and connected to the stud bumps. The invention is characterized by completing the packaging process on the wafer directly to enable thinner and cheaper package structures to be fabricated within less time. This invention further provides a method for fabricating the package structure as described above.

    摘要翻译: 提出具有微机电(MEMS)元件的封装结构,其包括具有多个电连接焊盘和形成在其上的MEMS元件的芯片; 设置在所述芯片上用于覆盖所述MEMS元件的盖; 设置在每个电连接焊盘上的螺柱凸块; 形成在芯片上的密封剂,其中一部分柱状凸块从密封剂暴露出来; 以及金属导电层,形成在密封剂上并连接到凸块上。 本发明的特征在于直接完成晶片上的封装工艺,以便在更短的时间内制造更薄和更便宜的封装结构。 本发明还提供如上所述的用于制造封装结构的方法。