公开(公告)号：US06781294B2

公开(公告)日：2004-08-24

申请号：US10098571

申请日：2002-03-18

申请人： Tadashi Sakai ,  Tomio Ono ,  Naoshi Sakuma ,  Zhang Li

发明人： Tadashi Sakai ,  Tomio Ono ,  Naoshi Sakuma ,  Zhang Li

IPC分类号： H01J105

CPC分类号： H01J61/0677

摘要： A cold cathode discharge device with high efficiency of light emission and long life is prepared by a cold cathode having both high secondary electron emission and anti-spattering property. Using carbon system cold cathodes constituted of a mixed phase of diamond and graphite, a cold cathode discharge device with high efficiency of light emission and long life is realized. It is desirable that an element having a wavelength of light emission equal to or shorter than 200 nanometers should be mixed in the discharge gas.

摘要翻译： 具有高发光效率和长寿命的冷阴极放电器件通过具有高二次电子发射和抗溅射性能的冷阴极制备。使用由金刚石和石墨的混合相构成的碳系冷阴极，冷阴极 实现了高效率的发光和长寿命的放电装置。 期望在放电气体中混合具有等于或小于200纳米的发光波长的元件。

公开(公告)号：US06456014B1

公开(公告)日：2002-09-24

申请号：US09606013

申请日：2000-06-29

申请人： Tomio Ono ,  Tadashi Sakai ,  Li Zhang

发明人： Tomio Ono ,  Tadashi Sakai ,  Li Zhang

IPC分类号： G09G310

CPC分类号： H01J1/304 ,  H01J2201/319

摘要： A field emission device comprises an anode plate, an emitter plate having a plurality of filed emission portions that face the anode plate, and a gate plate having openings corresponding to the filed emission portions. The field emission device also comprises a current limiting element composed of a J FET or a MOSFET that is integrally formed with the gate plate and that is inserted between the gate plate and a gate voltage supply terminal. The loss caused by the emitter current is small as the current limiting element is inserted into a gate input portion. If the field emission device including a number of blocks each having the above structure is constituted, a power switching device having sufficient redundancy against a short circuit between the gate and the emitter can be implemented.

摘要翻译： 场发射装置包括阳极板，具有面向阳极板的多个场发射部分的发射极板以及具有对应于场发射部分的开口的栅极板。 励磁发射装置还包括由与栅极板一体形成并且插入在栅极板和栅极电压提供端子之间的J FET或MOSFET组成的限流元件。 由于限流元件被插入到栅极输入部分中，由发射极电流引起的损耗很小。 如果构成包括多个具有上述结构的块的场发射器件，则可以实现具有足够的冗余以抵抗栅极和发射极之间的短路的功率开关器件。

公开(公告)号：US06297586B1

公开(公告)日：2001-10-02

申请号：US09263217

申请日：1999-03-05

申请人： Kazuya Nakayama ,  Tadashi Sakai ,  Naoshi Sakuma ,  Tomio Ono

发明人： Kazuya Nakayama ,  Tadashi Sakai ,  Naoshi Sakuma ,  Tomio Ono

IPC分类号： H01J116

CPC分类号： H01J21/105 ,  H01J1/3044

摘要： Disclosed herein are a cold-cathode power switching device and a method of manufacturing the same. The device has a high voltage resistance and can be manufactured with high yield though its element area is large to control large currents. In the method, arrays of miniature emitters are prepared, and the emitter arrays are adhered to a conductive substrate having trenches. The conductive substrate is cut along the trenches, forming a plurality of substrates. The gaps between these substrates are filled with insulating resin. As a result, a multi-module power switching device for controlling large currents is manufactured with high yield. Further, cold-cathode modules, each having a gate pad, are arranged on a cathode electrode made of a conducive substrate, insulating strips are formed on the cathode electrode, gate lines are formed on the insulating strips, and the gate pads are connected to the gate lines. The electrons emitted from the modules can be controlled at a time. Each module may have a cathode pad connected to a cathode line. Depressions are made in those part of an anode electrode which oppose the gate pads and cathode pads, providing a sufficient insulation distance between each emitter and the anode electrode. Hence, a cold-cathode power switching device of field emission type can be provided which has a high voltage resistance.

摘要翻译： 本文公开了一种冷阴极电力开关装置及其制造方法。 该器件具有高耐压性，并且可以以高产率制造，尽管其元件面积大以控制大电流。 在该方法中，制备微型发射体的阵列，并且发射极阵列粘附到具有沟槽的导电衬底上。 沿着沟槽切割导电衬底，形成多个衬底。 这些基板之间的间隙用绝缘树脂填充。 结果，以高产率制造用于控制大电流的多模块功率开关装置。 此外，在由导电基板制成的阴极上配置有具有栅极焊盘的冷阴极模块，在阴极上形成绝缘条，在绝缘条上形成栅极线，栅极连接到 门线。 可以一次控制从模块发射的电子。 每个模块可以具有连接到阴极线的阴极焊盘。 在与栅极焊盘和阴极焊盘相对的阳极电极的那些部分进行抑制，从而在每个发射极和阳极电极之间提供足够的绝缘距离。 因此，可以提供具有高耐电压性的场致发射型冷阴极功率开关器件。

公开(公告)号：US06281621B1

公开(公告)日：2001-08-28

申请号：US08551429

申请日：1995-11-01

申请人： Masayuki Nakamoto ,  Tomio Ono ,  Tadashi Sakai

发明人： Masayuki Nakamoto ,  Tomio Ono ,  Tadashi Sakai

IPC分类号： H01J130

CPC分类号： H01J1/3042 ,  H01J9/025

摘要： A field emission cathode having an emitter provided with a sharp point for emission of electrons and a controlling gate electrode is composed of a supporting substrate, an emitter material layer formed of an emitter material, superposed on and attached fast to the supporting substrate, and provided with an emitter hole, an insulator layer so formed on the surface of the emitter material layer as to expose the tip part of the emitter projection therethrough, and an impurity diffusion layer formed on the surface of the insulator layer and enabled to function as an etching stopper layer.

摘要翻译： 具有发射电子的尖端的发射极和控制栅电极的场发射阴极由支撑衬底，由发射极材料形成的发射极材料层叠加并紧贴在支撑衬底上，并且提供 具有发射极孔，如此形成在发射极材料层的表面上的绝缘体层，以暴露出发射极突起的顶端部分，以及形成在绝缘体层的表面上并能够用作蚀刻的杂质扩散层 塞层。

公开(公告)号：US5898258A

公开(公告)日：1999-04-27

申请号：US788695

申请日：1997-01-24

申请人： Tadashi Sakai ,  Tomio Ono ,  Li Zhang

发明人： Tadashi Sakai ,  Tomio Ono ,  Li Zhang

IPC分类号： H01J1/304 ,  H01J9/02 ,  H01J1/30

CPC分类号： H01J9/025

摘要： A field emission type cold cathode apparatus comprises a mother material layer made of an n-type silicon layer, a conical emitter having an arcuate side surface, an insulating layer formed in a surface region of the mother material layer in a manner to define the arcuate side surface of the emitter and having a concave portion formed to expose the tip portion of the conical emitter, the depth of the concave portion being determined such that the lower portion of the emitter covering a region more than half the height of the emitter is buried in the insulating layer, and a gate electrode formed over the insulating film in a manner to surround the emitter and having an open portion exposing the tip portion of the emitter, the diameter of the open portion being smaller than the diameter in the base portion of the emitter.

摘要翻译： 场致发射型冷阴极装置包括由n型硅层构成的母材层，具有弓形侧面的圆锥形发射体，以母材层的表面区域形成绝缘层，以限定弓形 并且具有形成为露出锥形发射器的尖端部分的凹部，凹部的深度被确定为使得覆盖发射器的高度的一半以上的区域的发射器的下部被掩埋 在所述绝缘层中形成有栅电极，所述栅电极以围绕所述发射极的方式形成在所述绝缘膜上方，并具有露出所述发射极的前端部的开口部，所述开口部的直径比所述绝缘膜的基部的直径小 发射器。

公开(公告)号：US5371365A

公开(公告)日：1994-12-06

申请号：US11906

申请日：1993-02-01

申请人： Miyoko Watanabe ,  Koichi Mizushima ,  Tomio Ono ,  Tsuyoshi Kobayashi ,  Satoshi Itoh

发明人： Miyoko Watanabe ,  Koichi Mizushima ,  Tomio Ono ,  Tsuyoshi Kobayashi ,  Satoshi Itoh

IPC分类号： G01B7/34 ,  G01Q10/00 ,  G01B21/30 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q30/10 ,  G01Q60/16 ,  G01Q70/04 ,  G01Q70/14 ,  G01Q70/16 ,  H01J37/252 ,  H01L41/18

CPC分类号： G01Q60/16 ,  B82Y35/00 ,  G01Q10/04 ,  Y10S977/879

摘要： There is provided a scanning probe microscopy comprising a probe 6 situated to face the surface of an sample 1, a first piezoelectric element 8 for moving the sample 1 and the probe 6 relative to each other in a first direction perpendicular to the surface of the sample, and second and third piezoelectric elements 3 and 4 for moving the probe and the sample relative to each other in second and third directions perpendicular to the first direction, thereby enabling the probe to scan the surface of the sample, wherein at least one of the first to third piezoelectric elements 8, 3 and 4, which is closest to the sample 1, is formed of a single crystal.

摘要翻译： 提供了扫描探针显微镜，其包括位于样品1的表面上的探针6，用于在垂直于样品表面的第一方向上相对于彼此移动样品1和探针6的第一压电元件8 以及用于在与第一方向垂直的第二和第三方向上相对于彼此移动探针和样品的第二和第三压电元件3和4，从而使得探针能够扫描样品的表面，其中至少一个 最靠近样品1的第一至第三压电元件8,3和4由单晶形成。

公开(公告)号：US5089740A

公开(公告)日：1992-02-18

申请号：US505131

申请日：1990-04-05

申请人： Tomio Ono

发明人： Tomio Ono

IPC分类号： H02N2/00 ,  H01L41/09

CPC分类号： H02N2/021 ,  H01L41/0946

摘要： A displacement generating apparatus having a gate-shaped structure is provided in which a plurality of bimorph-type piezoelectric elements are employed. The gate-shaped apparatus has high rigidity and a high resonance frequency, and can produce a carrying force greater than that of the conventional counterpart. Thus, the apparatus can move a heavier object at a high speed very accurately.

摘要翻译： 提供具有栅极结构的位移产生装置，其中采用多个双压电晶片型压电元件。 门形装置具有高刚性和高共振频率，并且可以产生比常规对应物更大的承载力。 因此，该装置可以非常准确地高速移动较重的物体。

公开(公告)号：US4947239A

公开(公告)日：1990-08-07

申请号：US319103

申请日：1989-03-06

申请人： Yuu Kondou ,  Tomio Ono

发明人： Yuu Kondou ,  Tomio Ono

IPC分类号： H01L27/14 ,  H01L27/148 ,  H01L41/04 ,  H04N5/335 ,  H04N5/349 ,  H04N5/369 ,  H04N5/3728

CPC分类号： H01L27/148

摘要： A swing-driven solid-state imaging device is disclosed which has a CCD image sensor for receiving incident image light and producing an electrical image signal, a stacking piezoelectric element serving as an actuator for vibrating the image sensor on a plane substantially perpendicular to the image light to thereby cause the image sensor to periodically shift to different sampling positions at different points of time in one frame period in an image sensing mode, and a package structure for receiving the image sensor and piezoelectric element. This package structure includes a base plate and a socket plate, spaced apart from and facing each other, and two arrays of flexible conductive support leads which serve as a suspension mechanism for elastically supporting the socket plate above the base plate and also serve as a part of electrical signal transmission wires for the image sensor and piezoelectric element. The image sensor is adapted to be mounted on the socket plate. The piezoelectric element is coupled to the base plate and socket plate and vibrates the latter plate. Provision of the flexible support leads prevents the weight of the image sensor from being directly applied to the piezoelectric element, thereby ensuring efficient vibration generation by the piezoelectric element.

摘要翻译： 公开了一种摆动驱动的固态成像装置，其具有用于接收入射图像光并产生电子图像信号的CCD图像传感器，用作致动器的堆叠压电元件，用于在基本垂直于图像的平面上振动图像传感器 从而使得图像传感器在图像感测模式中在一个帧周期中不同的时间点周期性地移动到不同的采样位置，以及用于接收图像传感器和压电元件的封装结构。 该封装结构包括彼此间隔开并面对的基板和插座板，以及两个柔性导电支撑引线阵列，其用作悬挂机构，用于在基板上方弹性地支撑插座板，并且还用作部件 用于图像传感器和压电元件的电信号传输线。 图像传感器适于安装在插座板上。 压电元件联接到基板和插座板并振动后者板。 提供柔性支撑引线可防止图像传感器的重量直接施加到压电元件，从而确保压电元件产生有效的振动。

公开(公告)号：US07675222B2

公开(公告)日：2010-03-09

申请号：US11781667

申请日：2007-07-23

申请人： Takashi Kawakubo ,  Ryoichi Ohara ,  Tomio Ono ,  Toshihiko Nagano ,  Michihiko Nishigaki ,  Takaaki Yasumoto ,  Kazuhide Abe ,  Kenya Sano

发明人： Takashi Kawakubo ,  Ryoichi Ohara ,  Tomio Ono ,  Toshihiko Nagano ,  Michihiko Nishigaki ,  Takaaki Yasumoto ,  Kazuhide Abe ,  Kenya Sano

IPC分类号： H01L41/08

CPC分类号： H01G7/06 ,  H01H2057/006 ,  H01L41/0933 ,  H01L41/094

摘要： A thin film piezoelectric actuator comprises a driving part at least one end of which is supported by an anchor portion. The driving part includes: a piezoelectric film, a first lower electrode provided under a first region of the piezoelectric film, a second lower electrode provided under a second region different from the first region of the piezoelectric film, a first upper electrode provided opposite to the first lower electrode on the piezoelectric film, a second upper electrode provided opposite to the second lower electrode on the piezoelectric film, a first connection part that electrically connects the first lower electrode and the second upper electrode via a first via hole formed in the piezoelectric film, and a second connection part that electrically connects the second lower electrode and the first upper electrode via a second via hole formed in the piezoelectric film.

摘要翻译： 薄膜压电致动器包括驱动部件，其至少一端由锚固部分支撑。 驱动部包括：压电膜，设置在压电膜的第一区域下方的第一下电极，设置在与压电膜的第一区不同的第二区域下方的第二下电极，与第一下电极相对设置的第一上电极 压电膜上的第一下电极，与压电膜上的第二下电极相对设置的第二上电极，经由形成在压电膜中的第一通孔电连接第一下电极和第二上电极的第一连接部 以及第二连接部，其经由形成在所述压电膜中的第二通路孔电连接所述第二下部电极和所述第一上部电极。

公开(公告)号：US20080074026A1

公开(公告)日：2008-03-27

申请号：US11846929

申请日：2007-08-29

申请人： Tadashi Sakai ,  Tomio Ono ,  Naoshi Sakuma ,  Hiroaki Yoshida ,  Mariko Suzuki

发明人： Tadashi Sakai ,  Tomio Ono ,  Naoshi Sakuma ,  Hiroaki Yoshida ,  Mariko Suzuki

IPC分类号： H01J1/312 ,  H01J9/02

CPC分类号： H01J1/304 ,  H01J9/025

摘要： A field emission electron source includes a substrate. A wiring layer is formed on the substrate, and an insulation layer is formed over the wiring layer. In the insulation layer, a plurality of through holes are provided, and conductive via plugs are disposed in the through holes. A diamond layer is formed to cover tops of the insulation layer and the conductive via plugs.

摘要翻译： 场发射电子源包括衬底。 在基板上形成布线层，在布线层上形成绝缘层。 在绝缘层中，设置有多个通孔，并且在通孔中设置导电通孔。 形成金刚石层以覆盖绝缘层和导电通孔塞的顶部。