公开(公告)号：US20120112065A1

公开(公告)日：2012-05-10

申请号：US13287281

申请日：2011-11-02

申请人： Kuen-Yu TSAI ,  Sheng-Yung Chen

发明人： Kuen-Yu TSAI ,  Sheng-Yung Chen

IPC分类号： H01J37/29 ,  G01J1/42

CPC分类号： H01J37/3177 ,  B82Y10/00 ,  B82Y40/00 ,  G01J1/4228 ,  G01J1/4257 ,  H01J2237/1501 ,  H01J2237/24465 ,  H01J2237/24475 ,  H01J2237/24528

摘要： This invention provides an apparatus for estimating change of status of a plurality of particle beams, the apparatus includes a plurality of particle detectors and an estimating unit, wherein the one or the plurality of particle beams is projected to a substrate. The particle detectors detect the one or the plurality of particle beams reflected from the substrate to generate one or a plurality of detector signals. The estimating unit estimates change of the status of the one or the plurality of particle beams by executing a mathematical programming method according to the one or the plurality of detector signals. By such arrangement and monitoring method, the apparatus could estimate the drift of beams.

摘要翻译： 本发明提供了一种用于估计多个粒子束的状态变化的装置，该装置包括多个粒子检测器和估计单元，其中一个或多个粒子束投影到基底。 粒子检测器检测从衬底反射的一个或多个粒子束以产生一个或多个检测器信号。 估计单元通过执行根据一个或多个检测器信号的数学规划方法来估计一个或多个粒子束的状态的变化。 通过这种布置和监测方法，该装置可以估计波束的漂移。

公开(公告)号：US08097848B2

公开(公告)日：2012-01-17

申请号：US12396593

申请日：2009-03-03

申请人： Michio Hatano ,  Sukehiro Ito ,  Nagahide Ishida ,  Shinichi Tomita ,  Wataru Kotake

发明人： Michio Hatano ,  Sukehiro Ito ,  Nagahide Ishida ,  Shinichi Tomita ,  Wataru Kotake

IPC分类号： H01J37/28

CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/24445 ,  H01J2237/24465 ,  H01J2237/2605

摘要： In a VP-SEM that uses gas multiplication induced within a low-vacuum sample chamber and uses a method of detecting a positive displacement current, a secondary electron detector for the VP-SEM that responds at high speed, which can acquire a TV-Scan rate image at a low cost while saving a space is provided. A secondary electron detector is formed by forming the electron supplying electrode and the detection electrode on the flexible thin film type substrate such as a polyimide film, etc., by an etching method. Thereby, the space can be saved while realizing low cost due to mass production. Further, the ion horizontally moving with respect to the surface of the secondary electron detector is detected and the ion moving in a vertical direction returned to the sample holder is not detected, making it possible to realize a high-speed response.

摘要翻译： 在使用在低真空样品室内引起的气体倍增并使用检测正位移电流的方法的VP-SEM中，用于高速响应的VP-SEM的二次电子检测器，其可以获取TV扫描 提供了节省空间的低成本的速率图像。 通过蚀刻方法在诸如聚酰亚胺膜等的柔性薄膜型基板上形成电子供给电极和检测电极来形成二次电子检测器。 由此，可以节省空间，同时由于批量生产而实现低成本。 此外，检测相对于二次电子检测器的表面水平移动的离子，并且未检测到返回到样品架的垂直方向的离子移动，使得可以实现高速响应。

公开(公告)号：US20110291007A1

公开(公告)日：2011-12-01

申请号：US12787139

申请日：2010-05-25

申请人： YI-XIANG WANG ,  JOE WANG ,  XUEDONG LIU ,  ZHONGWEI CHEN

发明人： YI-XIANG WANG ,  JOE WANG ,  XUEDONG LIU ,  ZHONGWEI CHEN

IPC分类号： G01N23/22 ,  H01J37/244

CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/024 ,  H01J2237/24465 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/24495 ,  H01J2237/2611 ,  H01J2237/2817

摘要： The present invention generally relates to a detection unit of a charged particle imaging system. More particularly, portion of the detection unit can move into or out of the detection system as imaging condition required. With the assistance of a Wein filter (also known as an E×B charged particle analyzer) and a movable detector design, the present invention provides a stereo imaging system that suitable for both low current, high resolution mode and high current, high throughput mode. Merely by way of example, the invention has been applied to a scanning electron beam inspection system. But it would be recognized that the invention could apply to other system using charged particle beam as an observation tool.

摘要翻译： 本发明一般涉及带电粒子成像系统的检测单元。 更具体地，检测单元的一部分可以作为所需的成像条件移入或移出检测系统。 在Wein滤波器（也称为E×B带电粒子分析仪）和可移动检测器设计的帮助下，本发明提供了一种适用于低电流，高分辨率模式和高电流，高通量模式的立体成像系统 。 仅作为示例，本发明已经应用于扫描电子束检查系统。 但是应当认识到，本发明可以应用于使用带电粒子束作为观测工具的其它系统。

公开(公告)号：US20110139984A1

公开(公告)日：2011-06-16

申请号：US12931899

申请日：2011-02-14

申请人： Tsuguo Kurata

发明人： Tsuguo Kurata

IPC分类号： G01N23/225 ,  G01T1/20

CPC分类号： H01J37/244 ,  H01J2237/2443 ,  H01J2237/24465 ,  H01J2237/2814

摘要： An electron detection device including: one scintillator 31 having an opening through which an electron beam emitted from an electron gun passes; a plurality of photoguides 22 of the same shape, which are bonded to the scintillator and disposed symmetrically about an optical axis; and a photomultiplier tube which is connected to one side of each of the photoguides 22, the side opposing to the optical axis side, and converts light into electrical signals, the light being emitted by the scintillator 31 receiving light through the photoguide 22. The photoguides 22 are joined so as to equally divide the scintillator 31 symmetrically about the optical axis. Moreover, a position and an area of a portion bonded to the scintillator 31, in each of the photoguides 22, are the same among the photoguides 22.

摘要翻译： 一种电子检测装置，包括：一个具有开口的闪烁体31，从电子枪发射的电子束通过该开口; 多个相同形状的光导体22，其结合到闪烁体并且围绕光轴对称设置; 以及光电倍增管，其连接到每个光导22的与光轴侧相对的一侧，并将光转换为电信号，由闪烁体31发射的光通过光导22接收光。光导体 22相接合，以使闪烁体31相对于光轴对称地分开。 此外，在光导22中，每个光导22中结合到闪烁体31的部分的位置和面积相同。

公开(公告)号：US07928383B2

公开(公告)日：2011-04-19

申请号：US12204282

申请日：2008-09-04

申请人： Joe Wang ,  Xu Zhang ,  Zhong-Wei Chen

发明人： Joe Wang ,  Xu Zhang ,  Zhong-Wei Chen

IPC分类号： H01J49/00 ,  B01D59/44

CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/2443 ,  H01J2237/24435 ,  H01J2237/2445 ,  H01J2237/24465

摘要： A charged particle detector consists of a plurality independent light guide modules assembled together to form a segmented in-lens on-axis annular detector, with a center hole for allowing the primary charged particle beam to pass through. One side of the assembly facing the specimen is coated with or bonded to scintillator material as the charged particle detection surface. Each light guide module is coupled to a photomultiplier tube to allow light signals transmitted through each light guide module to be amplified and processed separately. A charged particle detector is made from a single block of light guide material processed to have a cone shaped circular cutout from one face, terminating on the opposite face to an opening to allow the primary charged particle beam to pass through. The opposite face is coated with or bonded to scintillator material as the charged particle detection surface. The outer region of the light guide block is shaped into four separate light guide output channels and each light guide output channel is coupled to a photomultiplier tube to allow light signal output from each channel to be amplified and processed separately.

摘要翻译： 带电粒子检测器由多个独立的光导模块组成，组合在一起以形成分段的透镜内轴环形探测器，其中心孔用于允许初级带电粒子束通过。 面向样品的组件的一侧作为带电粒子检测表面涂覆或结合到闪烁体材料。 每个光导模块耦合到光电倍增管，以允许通过每个光导模块传输的光信号被单独放大和处理。 带电粒子检测器由一块光导材料制成，被处理成具有从一个面的锥形圆形切口，终止在与开口相对的面上以允许初级带电粒子束通过。 相反的面被涂覆或与闪烁体材料结合，作为带电粒子检测表面。 导光块的外部区域被成形为四个分开的光导输出通道，并且每个光导输出通道耦合到光电倍增管，以允许来自每个通道的光信号输出被单独放大和处理。

公开(公告)号：US20100282964A1

公开(公告)日：2010-11-11

申请号：US12676314

申请日：2008-08-27

申请人： Joseph Hale Bunton ,  Jesse D. Olson ,  Roger Alvis ,  Daniel R. Lenz ,  Ed Oltman

发明人： Joseph Hale Bunton ,  Jesse D. Olson ,  Roger Alvis ,  Daniel R. Lenz ,  Ed Oltman

IPC分类号： H01J49/26 ,  H01J49/00

CPC分类号： H01J37/285 ,  B82Y15/00 ,  H01J37/265 ,  H01J2237/2445 ,  H01J2237/24465 ,  H01J2237/2482

摘要： A method for aligning an energy beam to an object in an atom probe is disclosed. The method comprises monitoring at least one parameter indicative of an interaction between the energy beam and the object. A signal is generated in response to the interaction of the energy beam and the object. The signal is then used to effectuate control of the alignment of the energy beam to the object.

摘要翻译： 公开了一种用于将能量束对准原子探针中的物体的方法。 该方法包括监视指示能量束和物体之间的相互作用的至少一个参数。 响应于能量束和物体的相互作用产生信号。 然后该信号用于实现能量束对物体的对准的控制。

公开(公告)号：US20090294665A1

公开(公告)日：2009-12-03

申请号：US12382629

申请日：2009-03-19

申请人： Hirotami Koike ,  Shinichi Okada

发明人： Hirotami Koike ,  Shinichi Okada

IPC分类号： G21K7/00

CPC分类号： H01J37/28 ,  B82Y10/00 ,  B82Y40/00 ,  G01N23/225 ,  H01J37/244 ,  H01J37/3174 ,  H01J2237/24465 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/24485 ,  H01J2237/2449

摘要： To provide a scanning electron microscope that can detect with high efficiency the secondary electrons generated from the entire surface of a target, in a scanning electron microscope with an objective lens having a retarding electric field near a sample, at least two detectors are arranged with axial symmetry to electron optical axis, a target that causes secondary electrons or reflected electrons to collide with the target is disposed near the detectors, and at least one electrode member having a negative potential lower than a potential of the target is formed almost with axial symmetry to the electron optical axis.

摘要翻译： 为了提供能够高效地检测从靶的整个表面产生的二次电子的扫描电子显微镜，在具有在样品附近具有延迟电场的物镜的扫描电子显微镜中，至少两个检测器被轴向地布置 对称于电子光轴，使二次电子或反射电子与靶碰撞的靶设置在检测器附近，并且具有低于目标电位的负电位的至少一个电极部件几乎以轴对称形成 电子光轴。

公开(公告)号：US07569819B2

公开(公告)日：2009-08-04

申请号：US11873639

申请日：2007-10-17

申请人： Norihisa Mori

发明人： Norihisa Mori

IPC分类号： H01J37/26

CPC分类号： H01J37/28 ,  H01J37/222 ,  H01J37/244 ,  H01J37/248 ,  H01J2237/221 ,  H01J2237/225 ,  H01J2237/24465 ,  H01J2237/24475 ,  H01J2237/24495 ,  H01J2237/24507 ,  H01J2237/24535 ,  H01J2237/24585 ,  H01J2237/2801

摘要： An electron beam system (such as a scanning electron microscope or an electron probe microanalyzer) capable of displaying backscattered electron (BSE) images at the same brightness and same contrast at all times if the atomic number differences are the same when illumination conditions including accelerating voltage and emission current are varied or when the specimens are imaged with different instruments.

摘要翻译： 如果在包括加速电压的照射条件下原子序数差异相同时，能够一直显示相同亮度和相同对比度的背散射电子（BSE）图像的电子束系统（例如扫描电子显微镜或电子探针微量分析仪） 并且当使用不同的仪器对样本进行成像时，发射电流变化或变化。

公开(公告)号：US20060226361A1

公开(公告)日：2006-10-12

申请号：US11384044

申请日：2006-03-17

申请人： Juergen Frosien ,  Stefan Lanio

发明人： Juergen Frosien ,  Stefan Lanio

IPC分类号： G21K7/00

CPC分类号： H01J37/05 ,  G01R31/305 ,  H01J37/244 ,  H01J49/488 ,  H01J2237/24465 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/26

摘要： The present invention relates to an analyzing system with improved detection scheme and a charged particle beam device comprising the same. The analyzing system for analyzing a beam of charged particles has a divider to divide the beam of charged particles according to their energies into a low energy beam and a high energy beam; a front detector for detecting the high energy beam; and at least one reverse detector for detecting the low energy beam. The divider is positioned between the front detector and the at least one reverse detector and the front detector and/or the at least one reverse detector are segmented.

摘要翻译： 本发明涉及具有改进的检测方案的分析系统和包括该分析系统的带电粒子束装置。 用于分析带电粒子束的分析系统具有分隔器，用于将带电粒子束根据其能量分成低能量束和高能量束; 用于检测高能束的前检测器; 以及用于检测低能量束的至少一个反向检测器。 分隔器位于前检测器和至少一个反向检测器之间，并且前分辨器和/或至少一个反向检测器被分段。

公开(公告)号：US20060076489A1

公开(公告)日：2006-04-13

申请号：US11196399

申请日：2005-08-04

申请人： Takashi Ohshima ,  Mitsugu Sato ,  Soichi Katagiri

发明人： Takashi Ohshima ,  Mitsugu Sato ,  Soichi Katagiri

IPC分类号： G21K7/00

CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/0268 ,  H01J2237/04756 ,  H01J2237/1205 ,  H01J2237/121 ,  H01J2237/188 ,  H01J2237/24465 ,  H01J2237/2611 ,  H01J2237/31749

摘要： A charged particle beam apparatus in which an electrostatic lens is used as a main focusing element to obtain a subminiature high-sensitivity high-resolution SEM, a drift tube for an electron beam is located inside a column between an electron source and a sample, and a detector for secondary electrons is located inside the drift tube. This solves the problem associated with the provision of a secondary electron detector, which heretofore has been a bottleneck in making a subminiature high-resolution SEM column.

摘要翻译： 使用静电透镜作为主聚焦元件以获得超小型高灵敏度高分辨率SEM的带电粒子束装置，用于电子束的漂移管位于电子源和样品之间的列内，并且 用于二次电子的检测器位于漂移管内。 这解决了与提供二次电子检测器相关的问题，这种二次电子检测器迄今已成为制造超小型高分辨率SEM柱的瓶颈。