公开(公告)号：US20210233769A1

公开(公告)日：2021-07-29

申请号：US16972413

申请日：2019-05-31

Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.

Inventor： Shunpei YAMAZAKI ,  Tetsuya KAKEHATA ,  Yuji EGI ,  Yasuhiro JINBO ,  Yujiro SAKURADA

IPC: H01L21/02

Abstract: A semiconductor device having favorable electrical characteristics is provided. A metal oxide is formed over a substrate by the steps of: introducing a first precursor into a chamber in which the substrate is provided; introducing a first oxidizer after the introduction of the first precursor; introducing a second precursor after the introduction of the first oxidizer; and introducing a second oxidizer after the introduction of the second precursor.

公开(公告)号：US20200057330A1

公开(公告)日：2020-02-20

申请号：US16346660

申请日：2017-11-01

Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.

Inventor： Shunpei YAMAZAKI ,  Kohei YOKOYAMA ,  Takaaki NAGATA ,  Tatsuya SAKUISHI ,  Akio YAMASHITA ,  Yasuhiro JINBO ,  Hideaki SHISHIDO ,  Tetsuji ISHITANI

IPC: G02F1/1368 ,  G02F1/1333 ,  G02F1/1362

Abstract: A display device that can switch between normal display and see-through display is provided. Visibility in see-through display is improved. A liquid crystal element overlaps with a light-emitting element. The light-emitting element, a transistor, and the like overlapping with the liquid crystal element transmit visible light. When the liquid crystal element blocks external light, an image is displayed with the light-emitting element. When the liquid crystal element transmits external light, an image displayed with the light-emitting element is superimposed on a transmission image through the liquid crystal element.

公开(公告)号：US20190220128A1

公开(公告)日：2019-07-18

申请号：US16366315

申请日：2019-03-27

Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.

Inventor： Yasuhiro JINBO ,  Akio ENDO

IPC: G06F3/041 ,  G06F1/16 ,  G06F3/044

CPC classification number: G06F3/0412 ,  G06F1/1616 ,  G06F1/1626 ,  G06F1/163 ,  G06F1/1641 ,  G06F1/1652 ,  G06F1/1681 ,  G06F3/044 ,  G06F2203/04102 ,  G06F2203/04103

Abstract: A novel functional panel, a novel device, or a novel data processor is provided. A structure in which a first plane, a second plane that is opposite the first plane, and a neutral plane between the first plane and the second plane are provided and a portion of a functional layer having a thickness greater than or equal to half of the thickness of the functional layer is in a region between the first plane and the neutral plane was conceived.

公开(公告)号：US20180047946A1

公开(公告)日：2018-02-15

申请号：US15670318

申请日：2017-08-07

Applicant: Semiconductor Energy Laboratory Co., Ltd.

Inventor： Kazuki TSUDA ,  Kohei YOKOYAMA ,  Yasuhiro JINBO

IPC: H01L51/56 ,  H01L27/12 ,  G02F1/1368

CPC classification number: H01L51/56 ,  G02F1/1368 ,  H01L27/1214 ,  H01L27/322 ,  H01L27/3232 ,  H01L29/66007 ,  H01L51/5253

Abstract: A highly reliable display device or electronic device is provided. The display device includes a first electrode, a second electrode, a light-emitting layer between the first electrode and the second electrode, and a protective film over the second electrode. The protective film includes a first insulating film and a second insulating film over the first insulating film. The first insulating film includes one or more of aluminum oxide, hafnium oxide, and zirconium oxide, and the second insulating film includes one or more of aluminum oxide, hafnium oxide, and zirconium oxide. A composition of the first insulating film is different from a composition of the second insulating film. A water vapor transmission rate of the protective film is lower than 1×10−2 g/(m2·day).

公开(公告)号：US20170334187A1

公开(公告)日：2017-11-23

申请号：US15610890

申请日：2017-06-01

Applicant: Semiconductor Energy Laboratory Co., Ltd.

Inventor： Kayo KUMAKURA ,  Tomoya AOYAMA ,  Akihiro CHIDA ,  Kohei YOKOYAMA ,  Masakatsu OHNO ,  Satoru IDOJIRI ,  Hisao IKEDA ,  Hiroki ADACHI ,  Yoshiharu HIRAKATA ,  Shingo EGUCHI ,  Yasuhiro JINBO

IPC: B32B43/00 ,  H01L21/67 ,  H01L51/56 ,  G02B6/00 ,  B26D1/04 ,  B26D1/00 ,  H01L27/32 ,  H01L27/12 ,  B32B38/10

CPC classification number: B32B43/006 ,  B26D1/04 ,  B26D2001/006 ,  B32B38/10 ,  B32B2457/00 ,  G02B6/00 ,  H01L21/67092 ,  H01L27/1248 ,  H01L27/3258 ,  H01L27/3262 ,  H01L51/56 ,  H01L2221/68327 ,  H01L2227/323 ,  H01L2251/5338 ,  Y10T156/1126 ,  Y10T156/1132 ,  Y10T156/1168 ,  Y10T156/1179 ,  Y10T156/1184 ,  Y10T156/1928 ,  Y10T156/1933 ,  Y10T156/1944 ,  Y10T156/1961 ,  Y10T156/1967 ,  Y10T156/1989

Abstract: A processing apparatus of a stack is provided. The stack includes two substrates attached to each other with a gap provided between their end portions. The processing apparatus includes a fixing mechanism that fixes part of the stack, a plurality of adsorption jigs that fix an outer peripheral edge of one of the substrates of the stack, and a wedge-shaped jig that is inserted into a corner of the stack. The plurality of adsorption jigs include a mechanism that allows the adsorption jigs to move separately in a vertical direction and a horizontal direction. The processing apparatus further includes a sensor sensing a position of the gap between the end portion in the stack. A tip of the wedge-shaped jig moves along a chamfer formed on an end surface of the stack. The wedge-shaped jig is inserted into the gap between the end portions in the stack.

公开(公告)号：US20170170200A1

公开(公告)日：2017-06-15

申请号：US15366255

申请日：2016-12-01

Applicant: Semiconductor Energy Laboratory Co., Ltd.

Inventor： Hisao IKEDA ,  Kouhei TOYOTAKA ,  Hideaki SHISHIDO ,  Hiroyuki MIYAKE ,  Kohei YOKOYAMA ,  Yasuhiro JINBO ,  Yoshitaka DOZEN ,  Takaaki NAGATA ,  Shinichi HIRASA

IPC: H01L27/12 ,  G09G3/20 ,  H01L27/32 ,  G09G3/3233

Abstract: Provided is a display device with extremely high resolution, a display device with higher display quality, a display device with improved viewing angle characteristics, or a flexible display device. Same-color subpixels are arranged in a zigzag pattern in a predetermined direction. In other words, when attention is paid to a subpixel, another two subpixels exhibiting the same color as the subpixel are preferably located upper right and lower right or upper left and lower left. Each pixel includes three subpixels arranged in an L shape. In addition, two pixels are combined so that pixel units including subpixel are arranged in matrix of 3×2.

公开(公告)号：US20170152594A1

公开(公告)日：2017-06-01

申请号：US15428625

申请日：2017-02-09

Applicant: Semiconductor Energy Laboratory Co., Ltd.

Inventor： Kohei Yokoyama ,  Hisao IKEDA ,  Shinichi HIRASA ,  Yasuhiro JINBO ,  Natsuko TAKASE

IPC: C23C14/24 ,  H01L51/00 ,  A63F13/327 ,  H01J49/42 ,  H01J49/00 ,  C23C14/54 ,  H01L51/56

CPC classification number: C23C14/24 ,  A63F13/327 ,  C23C14/54 ,  C23C14/564 ,  F21S6/002 ,  F21Y2115/20 ,  H01J49/004 ,  H01J49/42 ,  H01L51/001 ,  H01L51/56 ,  H05B33/10

Abstract: In order to provide a highly reliable organic EL element, a first step in which a deposition material is heated and vaporized in a deposition chamber in which the pressure is reduced and a second step in which a layer included in an EL layer is deposited in the deposition chamber are performed while exhaustion is performed and the partial pressure of water in the deposition chamber is measured with a mass spectrometer. Alternatively, the deposition chamber in the deposition apparatus includes a deposition material chamber and is connected to an exhaust mechanism. The deposition material chamber is separated from the deposition chamber by a sluice valve, includes a deposition material holding portion including a heating mechanism, and is connected to a mass spectrometer and an exhaust mechanism.

公开(公告)号：US20160372356A1

公开(公告)日：2016-12-22

申请号：US15254623

申请日：2016-09-01

Applicant: Semiconductor Energy Laboratory Co., Ltd.

Inventor： Yasuhiro JINBO ,  Masafumi MORISUE ,  Hajime KIMURA ,  Shunpei YAMAZAKI

IPC: H01L21/683

CPC classification number: H01L27/1266 ,  G02F1/133305 ,  G02F1/133603 ,  H01L21/6835 ,  H01L27/1214 ,  H01L27/153 ,  H01L33/0079 ,  H01L33/62 ,  H01L51/003 ,  H01L2221/68318 ,  H01L2221/68386

Abstract: The present invention provides a manufacturing technique of a semiconductor device and a display device using a peeling process, in which a transfer process can be conducted with a good state in which a shape and property of an element before peeling are kept. Further, the present invention provides a manufacturing technique of more highly reliable semiconductor devices and display devices with high yield without complicating the apparatus and the process for manufacturing. According to the present invention, an organic compound layer including a photocatalyst substance is formed over a first substrate having a light-transmitting property, an element layer is formed over the organic compound layer including a photocatalyst substance, the organic compound layer including a photocatalyst substance is irradiated with light which has passed through the first substrate, and the element layer is peeled from the first substrate.

公开(公告)号：US20160226019A1

公开(公告)日：2016-08-04

申请号：US15046753

申请日：2016-02-18

Applicant: Semiconductor Energy Laboratory Co., Ltd.

Inventor： Shunpei YAMAZAKI ,  Yasuhiro JINBO ,  Shingo EGUCHI

IPC: H01L51/52 ,  H01L27/32 ,  H01L51/00

CPC classification number: H01L51/5246 ,  H01L27/323 ,  H01L27/3244 ,  H01L33/56 ,  H01L51/0097 ,  H01L51/5237 ,  H01L51/5253 ,  H01L51/5256 ,  H01L2251/5338 ,  H01L2251/5361 ,  Y02E10/549

Abstract: A lightweight flexible light-emitting device that is less likely to be broken is provided. The light-emitting device includes a first flexible substrate, a second flexible substrate, an element layer, a first bonding layer, and a second bonding layer. The element layer includes a light-emitting element. The element layer is provided between the first flexible substrate and the second flexible substrate. The first bonding layer is provided between the first flexible substrate and the element layer. The second bonding layer is provided between the second flexible substrate and the element layer. The first and second bonding layers are in contact with each other on the outer side of an end portion of the element layer. The first and second flexible substrates are in contact with each other on the outer side of the end portions of the element layer, the first bonding layer, and the second bonding layer.

公开(公告)号：US20160190055A1

公开(公告)日：2016-06-30

申请号：US14978357

申请日：2015-12-22

Applicant: Semiconductor Energy Laboratory Co., Ltd.

Inventor： Yasuhiro JINBO ,  Kenichi OKAZAKI

IPC: H01L23/498 ,  H01L51/52 ,  G06F3/044 ,  H01L31/02 ,  H01L31/042 ,  H01L27/32 ,  H01L31/0203

CPC classification number: G06F3/044 ,  G06F3/012 ,  G06F3/013 ,  G06F2203/04112 ,  H01L27/323 ,  H01L27/3251 ,  H01L27/3276 ,  H01L31/02005 ,  H01L31/0203 ,  H01L31/042 ,  H01L51/0096 ,  H01L51/5203 ,  H01L51/524 ,  H01L51/5253 ,  H01L2251/301 ,  H01L2251/303 ,  H01L2251/5338 ,  H01L2924/0002 ,  Y02E10/549 ,  H01L2924/00

Abstract: A functional panel is provided. The functional panel includes a first substrate, a second substrate, a bonding layer, a functional element, a protective layer, and a terminal. The bonding layer is positioned between the first and second substrates. The functional element is surrounded by the first substrate, the second substrate, and the bonding layer. The terminal is electrically connected to the functional element and provided not to overlap with one of the first and second substrates. The protective layer is provided to be in contact with side surfaces of the first and second substrates and an exposed surface of the bonding layer. A surface of the terminal is partly exposed without being covered with the protective layer. The surface of the terminal partly includes a material having a lower ionization tendency than hydrogen.

Abstract translation: 提供功能面板。 功能面板包括第一基板，第二基板，接合层，功能元件，保护层和端子。 接合层位于第一和第二基板之间。 功能元件被第一基板，第二基板和接合层包围。 端子电连接到功能元件，并且不与第一和第二基板之一重叠。 保护层设置成与第一和第二基板的侧表面和接合层的暴露表面接触。 端子的表面部分地暴露而不被保护层覆盖。 端子的表面部分地包括具有比氢更低的电离倾向的材料。