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公开(公告)号:US3899557A
公开(公告)日:1975-08-12
申请号:US41075873
申请日:1973-10-29
申请人: SIEMENS AG
发明人: DIETZE WOLFGANG
IPC分类号: C01B33/02 , C01B33/027 , C23C16/01 , C23C16/22 , C23C16/44 , C30B29/60 , C30B31/10 , H01L21/22 , C23C11/06
CPC分类号: C23C16/01 , C23C16/22 , C30B31/10 , Y10S148/007 , Y10S148/025 , Y10S148/073 , Y10S264/57
摘要: Hollow semiconductor bodies having an outer surface composed of a doped semiconductor material and an inner surface composed of a pure semiconductor material are formed by sequential deposition from a gaseous thermally decomposable semiconductor compound onto a heated carrier member. The multi-layer hollow semiconductor bodies are directly heatable during diffusion of dopants into semiconductor elements.
摘要翻译: 通过从气态热分解半导体化合物到加热的载体构件的顺序沉积,形成具有由掺杂半导体材料构成的外表面和由纯半导体材料组成的内表面的空心半导体本体。 多层中空半导体体在掺杂剂扩散到半导体元件期间是可直接加热的。
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公开(公告)号:US3859144A
公开(公告)日:1975-01-07
申请号:US37422673
申请日:1973-06-27
申请人: UNITED AIRCRAFT CORP
发明人: BASCHE MALCOLM , KUNTZ URBAN E
CPC分类号: C23C8/08 , B23K35/004 , B23K35/3033 , C23C16/22
摘要: A method for making a nickel-base interlayer alloy article having utility in the diffusion bonding of the nickel-base superalloys comprising pretreating the surface of the nickel-base article by either (1) boronizing by exposure to a gaseous stream consisting essentially of boron trichloride admixed with hydrogen, the ratio of boron trichloride to hydrogen being no greater than 15/3,500 on a volume basis, or (2) siliconizing by exposure to a gaseous stream of silicon tetrachloride admixed with hydrogen, followed by subsequent boronization of the pretreated article by exposure to a gaseous stream consisting essentially of boron trichloride and hydrogen without regard to the 15/3,500 BCl3H2 ratio limit.
摘要翻译: 一种用于制造镍基中间合金制品的方法,其用于镍基超级合金的扩散接合,包括通过(1)通过暴露于基本上由三氯化硼组成的气流来硼化而预处理镍基制品的表面 与氢混合时,三氯化硼与氢的比例不大于15 / 3,500(体积),或(2)通过暴露于与氢混合的四氯化硅气流中硅化,随后将预处理制品随后硼化 暴露于基本上由三氯化硼和氢气组成的气流,而不考虑15 / 3,500 BCl 3 + 1 {14 H 2比率限度。
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公开(公告)号:US3729335A
公开(公告)日:1973-04-24
申请号:US3729335D
申请日:1971-04-22
申请人: DOMRACHEV G , MELNIKOV V , FUKIN K , SKORIK G , KAZARINOV G
发明人: MELNIKOV V , KAZARINOV G , SKORIK G , FUKIN K , DOMRACHEV G
摘要: A METHOD OF DEPOSITING INORGANIC COATINGS FROM VAPOUR PHASE INVOLVES THE FORMATION OF VAPOUR PHASE OF LIQUID COMPOUNDS OF ELEMENTS, AS WELL AS SOLUTIONS OR SUSPENSIONS OF VOLATILE COMPOSITONS OF SAID ELEMENTS ADAPTED TO RELEASE DEPOSITED ELEMENTTS OF COMPOSITIONS TTHEREOF DURING THERMAL DECOMPOSITION DUE TO HEATING AND VAPORIZATION OF
SAID LIQUID OVER THE ENTIRE SURFACE OF A WORKPIECE BY PROPER THERMAL RADIATION OF THE WORKPIECE BEING TREATED. TO THIS END SAID LIQUID IS SUPPLIED UNDER THE FORCE OF GRAVITY ADJACENT TO AND ALONG SAID WORKPIECE.-
公开(公告)号:US3647530A
公开(公告)日:1972-03-07
申请号:US3647530D
申请日:1969-11-13
发明人: DYER LAWRENCE D
IPC分类号: C01B33/035 , C23C16/22 , H01L3/12
CPC分类号: C23C16/22 , C01B33/035
摘要: When producing semiconductor bodies by a process of depositing semiconductor material from a gaseous mixture on an elongated crystalline semiconductor starting filament held between two laterally fixed supports, lateral stresses in the filaments are removed by allowing substantially friction-free, lateral movement of the filament as it is heated prior to the vapor deposition. This movement is allowed by melting a coupling segment between the filament and at least one of the supports to thereby allow lateral deformation of the coupling segment as any lateral stress of the filament is relieved. When this method is coupled with conventional means of relieving longitudinal stress in the filament, perfection in grown semiconductor bodies is maintained.
摘要翻译: 当通过在保持在两个横向固定的支撑件之间的细长结晶半导体起始丝上沉积半导体材料从气态混合物中沉积半导体材料的过程来制造半导体本体时,通过允许丝的基本上无摩擦的横向运动来去除长丝中的横向应力 在气相沉积之前被加热。 通过熔化灯丝与支撑件中的至少一个之间的连接段来允许该移动,从而允许解除连接段的横向变形,因为灯丝的任何横向应力被释放。 当这种方法与常规消除长丝中的纵向应力的方法相结合时,保持了生长的半导体本体的完美。
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公开(公告)号:USRE26885E
公开(公告)日:1970-05-19
申请号:US26885D
申请日:1968-12-23
CPC分类号: C30B25/12 , C23C16/22 , H05B3/145 , Y10T428/2902 , Y10T428/30
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公开(公告)号:US3146123A
公开(公告)日:1964-08-25
申请号:US8788561
申请日:1961-02-08
申请人: SIEMENS AG
发明人: FRIEDRICH BISCHOFF
IPC分类号: C01B33/00 , C01B33/02 , C01B33/035 , C01B33/08 , C22B41/00 , C23C16/06 , C23C16/22 , C23C16/44 , C23C16/46 , C30B9/14 , C30B13/00 , C30B25/02 , C30B30/02 , G05D23/27 , H01L21/00 , H01L21/18 , H01L21/205 , H01L29/00
CPC分类号: C30B29/06 , C01B33/00 , C01B33/02 , C01B33/035 , C01B33/08 , C22B41/00 , C23C16/06 , C23C16/22 , C23C16/44 , C23C16/46 , C30B9/14 , C30B13/00 , C30B25/02 , C30B30/02 , G05D23/1906 , G05D23/27 , H01L21/00 , H01L21/02381 , H01L21/02532 , H01L21/0262 , H01L21/185 , H01L29/00 , Y10S117/917 , Y10T117/10
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公开(公告)号:US3058812A
公开(公告)日:1962-10-16
申请号:US73882158
申请日:1958-05-29
发明人: LI CHU TING , LONGINI RICHARD L
IPC分类号: C01B33/035 , C23C16/22
CPC分类号: C23C16/22 , C01B33/035
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公开(公告)号:US2930098A
公开(公告)日:1960-03-29
申请号:US51741455
申请日:1955-06-23
申请人: SIEMENS AG
发明人: REIMER EMEIS
CPC分类号: H01L21/185 , B22F3/105 , C04B35/64 , C23C16/22 , C30B13/00 , C30B13/16 , H01L21/00 , Y10S65/04 , Y10S264/46
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公开(公告)号:US2854318A
公开(公告)日:1958-09-30
申请号:US66820957
申请日:1957-06-26
申请人: SIEMENS AG
发明人: THEODOR RUMMEL
IPC分类号: C01B33/00 , C01B33/02 , C01B33/035 , C01B33/08 , C22B41/00 , C23C16/06 , C23C16/22 , C23C16/44 , C23C16/46 , C30B9/14 , C30B13/00 , C30B25/02 , C30B30/02 , G05D23/27 , H01L21/00 , H01L21/18 , H01L21/205 , H01L29/00
CPC分类号: C30B29/06 , C01B33/00 , C01B33/02 , C01B33/035 , C01B33/08 , C22B41/00 , C23C16/06 , C23C16/22 , C23C16/44 , C23C16/46 , C30B9/14 , C30B13/00 , C30B25/02 , C30B30/02 , G05D23/1906 , G05D23/27 , H01L21/00 , H01L21/02381 , H01L21/02532 , H01L21/0262 , H01L21/185 , H01L29/00 , Y10S117/917 , Y10T117/10
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公开(公告)号:US20240088222A1
公开(公告)日:2024-03-14
申请号:US17943137
申请日:2022-09-12
发明人: Shawn THOMAS , Saurabh CHOPRA , John TOLLE
CPC分类号: H01L29/0847 , C23C16/22 , C23C16/56 , H01L21/02532 , H01L21/02576 , H01L21/02579 , H01L21/02592 , H01L21/02598 , H01L21/02661 , H01L21/02672 , H01L21/02675 , H01L29/66439 , H01L29/66545 , H01L29/66553 , H01L29/78696
摘要: A processing system includes one or more processing chambers, and a system controller configured to cause the processing system to perform (a) a pre-clean process on exposed surfaces of a semiconductor structure, the semiconductor structure comprising a first semiconductor region, a second semiconductor region separated from the first semiconductor region by a trench, and a dielectric layer over at least a portion of the first semiconductor region and the second semiconductor region, (b) a first deposition process to form an amorphous silicon-containing layer on the exposed surfaces of the semiconductor structure, (c) a recrystallization anneal process to recrystallize at least a portion of the amorphous silicon-containing layer to form a silicon-containing crystalline layer within the trench, (d) an etch process to remove remaining portions of the amorphous silicon-containing layer, and (e) a second deposition process, to epitaxially form a source/drain region over the silicon-containing crystalline layer within the trench.
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