公开(公告)号：US20150188291A1

公开(公告)日：2015-07-02

申请号：US14642950

申请日：2015-03-10

Applicant: Hewlett-Packard Development Company, L.P.

Inventor： Michael Renne Ty Tan ,  David A. Fattal ,  Wayne Victor Sorin ,  Sagi Mathai

IPC: H01S5/42 ,  H01S5/187 ,  H01S5/183 ,  H01S5/02 ,  G02B6/124 ,  H01S5/022 ,  H01S5/024 ,  H01S5/068 ,  G02B6/12 ,  G02B6/13 ,  H01S5/40 ,  H01S5/343

CPC classification number: H01S5/423 ,  B82Y20/00 ,  G02B6/12016 ,  G02B6/12019 ,  G02B6/12026 ,  G02B6/124 ,  G02B6/13 ,  G02B2006/12107 ,  G02B2006/12164 ,  H01S5/0215 ,  H01S5/02248 ,  H01S5/02461 ,  H01S5/0268 ,  H01S5/068 ,  H01S5/1092 ,  H01S5/183 ,  H01S5/18319 ,  H01S5/18363 ,  H01S5/18386 ,  H01S5/187 ,  H01S5/3412 ,  H01S5/34313 ,  H01S5/3434 ,  H01S5/4087

Abstract: Apparatuses and methods for high density laser optics are provided. An example, of a laser optics apparatus includes a plurality of vertical cavity surface emitting lasers (VCSELs) in a monolithically integrated array, a high contrast grating (HCG) integrated with an aperture of a vertical cavity of each of the plurality of the VCSELs to enable emission of a single lasing wavelength of a plurality of lasing wavelengths, and a plurality of single mode waveguides, each integrated with a grating coupler, that are connected to each of the plurality of the integrated VCSELs and the HCGs, where each of the grating couplers is aligned to an integrated VCSEL and HCG.

Abstract translation: 提供了用于高密度激光光学器件的设备和方法。 激光光学装置的示例包括在单片集成阵列中的多个垂直腔表面发射激光器（VCSEL），与多个VCSEL中的每一个VCSEL的垂直腔的孔集成的高对比度光栅（HCG），以及 使得能够发射多个激光波长的单个激光波长的发射，以及与光栅耦合器集成的多个单模波导，其连接到多个集成VCSEL和HCG中的每一个，其中每个光栅 耦合器与集成的VCSEL和HCG对齐。

公开(公告)号：US20140348195A1

公开(公告)日：2014-11-27

申请号：US14149368

申请日：2014-01-07

Applicant: ROHM CO., LTD.

Inventor： Takui SAKAGUCHI ,  Seita IWAHASHI ,  Eiji MIYAI ,  Wataru KUNISHI ,  Dai ONISHI ,  Yoshikatsu MIURA

IPC: H01S5/10 ,  H01S5/068 ,  H01S5/183

CPC classification number: H01S5/105 ,  H01S5/18319 ,  H01S5/1835 ,  H01S5/423 ,  H01S2301/18

Abstract: The 2D-PC vertical cavity surface emitting laser includes: a PC layer; and a lattice point for forming resonant-state arranged in the photonic crystal layer, and configured so that a light wave in a band edge in photonic band structure in the PC layer is diffracted in a plane of the PC layer, and is diffracted in a surface vertical direction of the PC layer. The perturbation for diffracting the light wave in the surface vertical direction of the PC layer is applied to the lattice point for forming resonant-state. The term “perturbation” means that modulation is periodically applied to the lattice point for forming resonant-state. For example, the periodic modulation may be refractive index modulation, hole-diameter modulation, or hole-depth modulation.

Abstract translation: 2D-PC垂直腔表面发射激光器包括：PC层; 以及用于形成布置在光子晶体层中的共振态的晶格点，并且被配置为使得PC层中的光子带结构中的带边缘中的光波在PC层的平面中衍射，并且在 PC层的垂直方向。 将用于将PC层的垂直方向上的光波衍射的扰动施加到用于形成共振态的晶格点。 术语“扰动”意味着调制被周期地施加到用于形成谐振状态的晶格点。 例如，周期性调制可以是折射率调制，空穴直径调制或空穴深度调制。

公开(公告)号：US20140219306A1

公开(公告)日：2014-08-07

申请号：US14171231

申请日：2014-02-03

Applicant: Sandia Corporation

Inventor： Jeremy B. Wright ,  Igal Brener ,  Ganapathi S. Subramania ,  George T. Wang ,  Qiming Li

IPC: H01S5/323 ,  H01S5/343

CPC classification number: H01S5/187 ,  H01S5/10 ,  H01S5/105 ,  H01S5/1228 ,  H01S5/18 ,  H01S5/18319 ,  H01S5/341 ,  H01S5/3428 ,  H01S5/34333 ,  H01S5/42

Abstract: A multicolor photonic crystal laser array comprises pixels of monolithically grown gain sections each with a different emission centre wavelength. As an example, two-dimensional surface-emitting photonic crystal lasers comprising broad gain-bandwidth III-nitride multiple quantum well axial heterostructures were fabricated using a novel top-down nanowire fabrication method. Single-mode lasing was obtained in the blue-violet spectral region with 60 nm of tuning (or 16% of the nominal centre wavelength) that was determined purely by the photonic crystal geometry. This approach can be extended to cover the entire visible spectrum.

Abstract translation: 多色光子晶体激光器阵列包括具有不同发射中心波长的单片生长增益部分的像素。 作为示例，使用新颖的自顶向下纳米线制造方法制造包括宽增益带宽III族氮化物多量子阱轴向异质结构的二维表面发射光子晶体激光器。 在具有60nm调谐（或标称中心波长的16％）的蓝紫色光谱区域中获得单模激光，其通过光子晶体几何形状来确定。 这种方法可以扩展到覆盖整个可见光谱。

公开(公告)号：US08526471B2

公开(公告)日：2013-09-03

申请号：US13593407

申请日：2012-08-23

Applicant: Connie Chang-Hasnain ,  Weijian Yang ,  Christopher Chase ,  Forrest G. Sedgwick

Inventor： Connie Chang-Hasnain ,  Weijian Yang ,  Christopher Chase ,  Forrest G. Sedgwick

IPC: H01S3/113 ,  H01S3/098 ,  G02B5/18

CPC classification number: G02B5/1809 ,  H01S5/18319 ,  H01S5/18361

Abstract: A saturable absorber (SA) based on a high-contrast grating (HCG) having a buried layer of quantum structures for absorption, and which is particularly well suited for use in a mode-locked application. The HCG-SA provides three times the bandwidth compared with traditional DBR structures, while exhibiting a lower saturation fluence due to the field enhancement inside the grating. Varying grating bar width over one or two axis provides lensing effects on the optical output, while chirping of the period and duty cycle changes optical phase relationships. Novel VCSEL embodiments with external or internal cavities are described using the HCG-SA.

Abstract translation: 基于具有用于吸收的量子结构的掩埋层的高对比度光栅（HCG）的可饱和吸收体（SA），特别适用于锁模应用。 与传统的DBR结构相比，HCG-SA提供了三倍的带宽，同时由于光栅内的场增强而呈现较低的饱和能量密度。 在一个或两个轴上变化的光栅条宽度对光输出提供透镜效应，而周期和占空比的啁啾会改变光学相位关系。 使用HCG-SA描述具有外部或内部空腔的新型VCSEL实施例。

公开(公告)号：US08488646B2

公开(公告)日：2013-07-16

申请号：US13593375

申请日：2012-08-23

Applicant: Connie Chang-Hasnain ,  Christopher Chase ,  Igor Karagodsy

Inventor： Connie Chang-Hasnain ,  Christopher Chase ,  Vadim Karagodsky

IPC: H01S5/00

CPC classification number: G02B5/1809 ,  H01S5/18319 ,  H01S5/18361

Abstract: Enhanced reflectivity High-Contrast Gratings are described which operate in different medium. An HCG is described with a deep/buried metallization layer separated at a distance of least three to four grating thicknesses from the grating. Reflective bandwidth of the HCG is substantially increased, such as by a factor or five, by inclusion of the deep/buried metallization layer. An HCG is described which provides high reflectivity, even when embedded into materials of a moderate to high index of refraction, such as semiconductor material. Vertical cavity surface emitting laser embodiments are described which utilize these reflectivity enhancements, and preferably utilize HCG reflectors for top and/or bottom mirrors.

Abstract translation: 增强的反射率描述了在不同介质中工作的高对比度光栅。 HCG被描述为具有从光栅至少三到四个光栅厚度的距离分开的深/掩埋金属化层。 HCG的反射带宽通过包含深/掩埋金属化层而显着增加，例如通过因子或五。 描述了提供高反射率的HCG，即使当嵌入中等至高折射率的材料（例如半导体材料）时也是如此。 描述了利用这些反射率增强的垂直腔表面发射激光器实施例，并且优选地使用用于顶部和/或底部反射镜的HCG反射器。

公开(公告)号：US20130064262A1

公开(公告)日：2013-03-14

申请号：US13698733

申请日：2011-05-24

Applicant: Daniel Kopf

Inventor： Daniel Kopf

IPC: H01S5/34 ,  H01S5/30 ,  H01S3/14

CPC classification number: H01S3/0627 ,  H01S3/0604 ,  H01S3/0612 ,  H01S3/094038 ,  H01S3/094084 ,  H01S3/1022 ,  H01S3/113 ,  H01S3/1611 ,  H01S3/1671 ,  H01S5/041 ,  H01S5/0657 ,  H01S5/183 ,  H01S5/18316 ,  H01S5/18319 ,  H01S5/18358 ,  H01S5/2027

Abstract: The invention relates to an optically pumped ultrashort pulse microchip laser for generating a laser emission having femto- or picosecond pulses, comprising a substrate, an amplifying laser medium, a first resonator mirror that is at least partially transparent to optical pump radiation, and in particular a saturable absorber structure. The laser medium is applied to the resonator mirror and the substrate and subsequently reduced from the original material thickness to a thickness of less than 200 μm. In order to achieve satisfactory power absorption despite said low thickness, the optical pump radiation is coupled into the laser medium such that resonance occurs for the laser emission and excess intensity increases occur for the pump radiation.

Abstract translation: 本发明涉及一种用于产生具有毫微微秒或皮秒脉冲的激光发射的光泵浦超短脉冲微芯片激光器，包括衬底，放大激光介质，对光泵辐射至少部分透明的第一谐振镜，尤其涉及 可饱和的吸收体结构。 将激光介质施加到谐振器反射镜和基板，随后从原始材料厚度减小到小于200μm的厚度。 为了实现尽可能低的厚度的令人满意的功率吸收，光泵浦辐射被耦合到激光介质中，使得激光发射发生共振，并且对于泵浦辐射发生过量的强度增加。

公开(公告)号：US08217410B2

公开(公告)日：2012-07-10

申请号：US12412628

申请日：2009-03-27

Applicant: Zhenqiang Ma ,  Weidong Zhou

Inventor： Zhenqiang Ma ,  Weidong Zhou

IPC: H01L29/66 ,  H01S5/00

CPC classification number: H01S5/18366 ,  B82Y10/00 ,  B82Y20/00 ,  H01S5/105 ,  H01S5/18319 ,  H01S5/18341 ,  H01S5/1838 ,  H01S5/34306

Abstract: Vertical cavity light emitting sources that utilize patterned membranes as reflectors are provided. The vertical cavity light emitting sources have a stacked structure that includes an active region disposed between an upper reflector and a lower reflector. The active region, upper reflector and lower reflector can be fabricated from single or multi-layered thin films of solid states materials (“membranes”) that can be separately processed and then stacked to form a vertical cavity light emitting source.

Abstract translation: 提供了利用图案化膜作为反射器的垂直腔发光源。 垂直腔发光源具有包括设置在上反射器和下反射器之间的有源区的堆叠结构。 有源区域，上部反射器和下部反射器可以由固态材料（“膜”）的单层或多层薄膜制成，其可被分开处理，然后堆叠形成垂直腔发光源。

公开(公告)号：US20110306156A1

公开(公告)日：2011-12-15

申请号：US13210306

申请日：2011-08-15

Applicant: Ralph H. Johnson ,  James K. Guenter

Inventor： Ralph H. Johnson ,  James K. Guenter

IPC: H01L21/302

CPC classification number: H01S5/18355 ,  H01S5/18311 ,  H01S5/18319 ,  H01S5/18386

Abstract: Methods for manufacturing a polarization pinned vertical cavity surface emitting laser (VCSEL). Steps include growing a lower mirror on a substrate; growing an active region on the lower mirror; growing an upper mirror on the active region; depositing a grating layer on the upper minor; and etching a grating into the grating layer.

Abstract translation: 用于制造偏振锁定垂直腔表面发射激光器（VCSEL）的方法。 步骤包括在基材上生长下反射镜; 在下镜上生长活跃区域; 在活跃地区生长上镜; 在上部小型物体上沉积光栅层; 并将光栅蚀刻到光栅层中。

公开(公告)号：US07885312B2

公开(公告)日：2011-02-08

申请号：US12219997

申请日：2008-07-31

Applicant: Tomofumi Kise ,  Noriyuki Yokouchi

Inventor： Tomofumi Kise ,  Noriyuki Yokouchi

IPC: H01S3/08

CPC classification number: H01S5/18305 ,  B82Y20/00 ,  H01S5/0425 ,  H01S5/105 ,  H01S5/18319 ,  H01S5/18377 ,  H01S5/34306 ,  H01S2301/166 ,  H01S2302/00

Abstract: A surface emitting laser is provided with an upper reflecting mirror having a photonic crystal structure with a point defect at the center, and emits a laser beam from the side of a lower reflecting mirror. An upper electrode is formed on the point defect at the center, and element resistance is reduced. A material transparent to a wavelength of the laser beam is used for a substrate. The emission efficiency is improved by reducing the element resistance of the photonic crystal surface emitting laser.

Abstract translation: 表面发射激光器设置有具有在中心具有点缺陷的光子晶体结构的上反射镜，并且从下反射镜侧发射激光束。 在中心的点缺陷处形成上电极，并且元件电阻降低。 将对激光束的波长透明的材料用于基板。 通过降低光子晶体表面发射激光器的元件电阻来提高发射效率。

公开(公告)号：US07883914B2

公开(公告)日：2011-02-08

申请号：US12302554

申请日：2007-05-27

Applicant: Dan Birkedal ,  Svend Bischoff ,  Michael Juhl ,  Magnus Hald Madsen ,  Francis Pascal Romstad

Inventor： Dan Birkedal ,  Svend Bischoff ,  Michael Juhl ,  Magnus Hald Madsen ,  Francis Pascal Romstad

IPC: H01L21/00

CPC classification number: H01S5/18341 ,  H01S5/105 ,  H01S5/18311 ,  H01S5/18319 ,  H01S5/18369 ,  H01S5/18377 ,  H01S5/209 ,  H01S2301/166

Abstract: The invention relates to fabrication of VCSELs. It provides a method for fabricating a VCSEL that contains a micro/nano-structured mode selective lateral layer, where the micro/nano-structured layer is obtained by well controlled local etching. The invention enables control of the micro/nano-structured layer thickness with very high precision. In particular, the invention relates to a method for fabricating a VCSEL with a micro/nano-structured mode selective layer for controlling the VCSELs transverse electromagnetic modes.

Abstract translation: 本发明涉及VCSEL的制造。 它提供了一种用于制造包含微/纳米结构化模式选择性横向层的VCSEL的方法，其中通过良好控制的局部蚀刻获得微/纳米结构化层。 本发明能够以非常高的精度控制微/纳米结构层厚度。 特别地，本发明涉及一种用于制造具有用于控制VCSEL的横向电磁模式的微/纳米结构化模式选择层的VCSEL的方法。