公开(公告)号：US09257285B2

公开(公告)日：2016-02-09

申请号：US13591291

申请日：2012-08-22

Applicant: Frank Goerbing

Inventor： Frank Goerbing

IPC: H01J17/26 ,  H01J61/28 ,  H01J1/14 ,  H01L21/265 ,  H01J37/08 ,  H01J37/317 ,  H01J27/08

CPC classification number: H01J37/08 ,  H01J27/08 ,  H01J37/317 ,  H01J37/3171 ,  H01L21/265

Abstract: An ion source includes a chamber defining an interior cavity for ionization, an electron beam source at a first end of the interior cavity, an inlet for introducing ionizable gas into the chamber, and an arc slit for extracting ions from the chamber. The chamber includes an electrically conductive ceramic.

Abstract translation: 离子源包括限定用于电离的内腔的腔室，在内腔的第一端处的电子束源，用于将可电离气体引入腔室的入口和用于从腔室中提取离子的弧缝。 该腔室包括导电陶瓷。

公开(公告)号：US09099292B1

公开(公告)日：2015-08-04

申请号：US12787827

申请日：2010-05-26

Applicant: Ilya Bezel ,  Anatoly Shchemelinin ,  Yanming Zhao ,  Gildardo R. Delgado

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Yanming Zhao ,  Gildardo R. Delgado

IPC: H01J1/02 ,  H01J61/28 ,  H01J61/52 ,  H01J61/54

CPC classification number: H05H1/24 ,  H01J1/025 ,  H01J23/033 ,  H01J61/09 ,  H01J61/28 ,  H01J61/52 ,  H01J61/54 ,  H01J61/545 ,  H01J65/042

Abstract: A laser sustained plasma light source having a cell formed as a continuous tube with a circular cross section, a gas volume contained within the cell, at least one laser directed into the gas volume, for sustaining a plasma within the gas volume, the plasma producing a light, where the gas volume is heated as it leaves the plasma, cools as it circulates around the continuous tube of the cell, and reenters the plasma cooler than when it left the plasma and in a laminar flow, and a reflector for collecting the light and providing the light to a desired location.

Abstract translation: 一种激光持续等离子体光源，其具有形成为圆形横截面的连续管的单元，容纳在该单元内的气体体积，至少一个引导到气体体积中的激光，用于维持气体体积内的等离子体，等离子体产生 气体体积在离开等离子体时被加热的光在其围绕电池的连续管周围循环时冷却，并且比等离子体离开等离子体和层流时重新进入等离子体冷却器，以及用于收集等离子体的反射器 光并将光提供到所需位置。

公开(公告)号：US09048083B2

公开(公告)日：2015-06-02

申请号：US13635156

申请日：2011-03-14

Applicant: Alex Voronov

Inventor： Alex Voronov

IPC: H01J7/24 ,  H01J61/28 ,  H01J61/52 ,  H01J61/72

CPC classification number: H01J61/28 ,  H01J61/523 ,  H01J61/72

Abstract: In a known method for operating an amalgam lamp having a nominal power Poptimum, it is provided that a lamp voltage Uoptimum designed for a maximum UVC emission is applied between electrodes or a lamp current Ioptimum designed for a maximum UVC emission flows between electrodes. The discharge space is accessible for an amalgam deposit, which is heatable by a heating element in which a heating current Iheating is conducted through the heating element. Starting from this background, in order to provide an operating mode that ensures a stable operation in the region of the optimum power, it is proposed that a target value of the lamp current Itarget is set that is less than Ioptimum and that the heating current Iheating is turned on or increased when the lamp current falls below a lower limit I1 and is turned off or reduced when it exceeds an upper limit I2 for the lamp current.

Abstract translation: 在用于操作具有标称功率Poptimum的汞齐灯的已知方法中，提供了设计用于最大UVC发射的灯电压U最佳值被施加在电极之间或设计用于电极之间的最大UVC发射流动的灯电流Ioptimum。 放电空间可用于汞齐沉积物，其可通过加热元件加热，其中通过加热元件进行加热电流加热。 从该背景开始，为了提供确保在最佳功率区域中的稳定操作的操作模式，提出将灯电流目标值设定为小于最大值，并且加热电流Iheating 当灯电流下降到下限I1以下时，导通或增加，并且当灯电流超过灯电流的上限I2时，其被关断或减小。

公开(公告)号：US08427051B2

公开(公告)日：2013-04-23

申请号：US12936388

申请日：2010-07-07

Applicant: Mauro Riva ,  Alessio Corazza ,  Stefano Paolo Giorgi ,  Werner Juhr

Inventor： Mauro Riva ,  Alessio Corazza ,  Stefano Paolo Giorgi ,  Werner Juhr

IPC: H01J17/22 ,  H01J17/24 ,  H01J19/70 ,  H01J61/26 ,  H01J17/26 ,  H01J61/28

CPC classification number: H01J7/186 ,  H01J7/20 ,  H01J61/26 ,  H01J61/28

Abstract: A support for filiform elements containing an active material in form of powders is described, comprising anchoring means of the support and blocking means for the filiform element, a method for manufacturing said support and lamps wherein said supports are employed.

Abstract translation: 描述了包含粉末形式的活性材料的丝状元件的支撑件，其包括用于丝状元件的支撑件和阻挡装置的锚定装置，用于制造所述支撑件的方法和使用所述支撑件的灯。

公开(公告)号：US08264153B2

公开(公告)日：2012-09-11

申请号：US12852804

申请日：2010-08-09

Applicant: Hongseub Kim

Inventor： Hongseub Kim

IPC: H01J7/24 ,  H01J17/26 ,  H01J61/28 ,  H05B31/26

CPC classification number: H05H1/46 ,  H01J37/32091 ,  H01J37/32183 ,  H05H2001/4682

Abstract: A plasma source for a substrate is provided. The plasma source may include a source electrode and an impedance box. The source electrode receives a source Radio Frequency (RF) from the external and generates plasma based on capacitive coupling within a vacuum chamber. The impedance box connects at one end to an outer circumference surface of the source electrode, and is grounded at the other end to the vacuum chamber, and controls an electric current flowing from the source electrode to the vacuum chamber by the source RF.

Abstract translation: 提供了一种用于衬底的等离子体源。 等离子体源可以包括源电极和阻抗盒。 源电极从外部接收源射频（RF），并根据真空室内的电容耦合产生等离子体。 阻抗箱的一端与源电极的外周面连接，另一端与真空室接地，通过源RF控制从源电极流向真空室的电流。

公开(公告)号：US20120035766A1

公开(公告)日：2012-02-09

申请号：US12852375

申请日：2010-08-06

Applicant: Ali Shajii ,  Richard Gottscho ,  Souheil Benzerrouk ,  Andrew Cowe ,  Siddharth P. Nagarkatti ,  William R. Entley

Inventor： Ali Shajii ,  Richard Gottscho ,  Souheil Benzerrouk ,  Andrew Cowe ,  Siddharth P. Nagarkatti ,  William R. Entley

IPC: H01L21/3065 ,  H05B31/26 ,  G05B13/02 ,  H01J61/28

CPC classification number: H01J37/32174 ,  H01J37/321 ,  H01J37/3244 ,  H01J37/32467 ,  H01J37/32642 ,  H01J37/3266 ,  H01J2237/334

Abstract: A plasma source includes a ring plasma chamber, a primary winding around an exterior of the ring plasma chamber, multiple ferrites, wherein the ring plasma chamber passes through each of the ferrites and multiple plasma chamber outlets coupling the plasma chamber to a process chamber. Each one of the plasma chamber outlets having a respective plasma restriction. A system and method for generating a plasma are also described.

Abstract translation: 等离子体源包括环等离子体室，围绕环等离子体室的外部的初级绕组，多个铁氧体，其中环等离子体室穿过将等离子体室耦合到处理室的每个铁氧体和多个等离子体室出口。 每个等离子体室出口具有相应的等离子体限制。 还描述了用于产生等离子体的系统和方法。

公开(公告)号：US20110000529A1

公开(公告)日：2011-01-06

申请号：US12920303

申请日：2008-04-08

Applicant: Masayasu Suzuki

Inventor： Masayasu Suzuki

IPC: H01L31/0256 ,  H01J61/28 ,  H01L31/18

CPC classification number: C23C16/505 ,  C23C16/45565 ,  H01J37/32091 ,  H01J37/3244 ,  H01J37/32449 ,  H01J37/32541

Abstract: An arrangement of a cathode electrode for plasma CVD forms a radio frequency capacity coupled plasma by applying radio frequency radiation, in which the cathode electrode is disposed so as to face an anode electrode. The facing surface which faces the anode electrode is formed to have a concavo-convex shape comprising concaves constituted by a bottom surface and convexes constituted by a plurality of protrusions protruding toward the anode electrode from the bottom surface constituting the concaves. At least one of the protrusions forming the convexes has at least one reactive gas ejection nozzle on a side surface, which is capable of ejecting a reactive gas. An ejection direction of the reactive gas from the reactive gas ejection nozzle is substantially parallel to the bottom surface constituting the concaves. The optimization of the cathode electrode allows generation of dense plasma.

Abstract translation: 用于等离子体CVD的阴极电极的布置通过施加射频辐射形成射频容量耦合等离子体，其中阴极设置为面对阳极电极。 面对阳极电极的面对面形成为凹凸形状，其包括由底面构成的凹部和由构成凹部的底面的朝向阳极电极突出的多个突起构成的凸部。 形成凸起的突起中的至少一个在侧表面上具有至少一个能够喷射反应性气体的反应性气体喷射喷嘴。 来自反应性气体喷射喷嘴的反应气体的喷射方向基本上平行于构成凹部的底面。 阴极电极的优化允许产生致密等离子体。

公开(公告)号：US07786455B2

公开(公告)日：2010-08-31

申请号：US11695348

申请日：2007-04-02

Applicant: Donald K. Smith

Inventor： Donald K. Smith

IPC: H05B31/26 ,  G01J3/10 ,  G21G4/00 ,  H01J61/28

CPC classification number: G03F7/70033 ,  B82Y10/00 ,  H01J61/025 ,  H01J61/54 ,  H01J65/042

Abstract: An apparatus for producing light includes a chamber and an ignition source that ionizes a gas within the chamber. The apparatus also includes at least one laser that provides energy to the ionized gas within the chamber to produce a high brightness light. The laser can provide a substantially continuous amount of energy to the ionized gas to generate a substantially continuous high brightness light.

Abstract translation: 一种用于制造光的装置包括一个室和一个使室内的气体电离的点火源。 该装置还包括至少一个激光器，其向室内的电离气体提供能量以产生高亮度光。 激光器可以向电离气体提供基本连续的能量以产生基本连续的高亮度光。

公开(公告)号：US20070075617A1

公开(公告)日：2007-04-05

申请号：US11536882

申请日：2006-09-29

Applicant: Byeong-Ju PARK

Inventor： Byeong-Ju PARK

IPC: H01J17/26 ,  H01J61/28 ,  H01J61/30

CPC classification number: H01J61/82 ,  H01J61/0732 ,  H01J61/0735 ,  H01J61/0737 ,  H01J61/12

Abstract: A sulfur lamp, is provided, including a power supply that supplies electrical power, a transparent bulb having a space inside that contains sulfur and a plurality of electrodes. Additionally, a portion of each electrode may be inserted into the space and an end of each electrode may be connected to the power supply such that the sulfur is excited by an electric discharge thereby emitting light. A portion of the electrode inserted into the space may be coated with a protective layer to prevent a chemical reaction of between the electrode and the sulfur. Further, the changing of the sulfur (contained in the space of the bulb) into a plasma phase may be accomplished by utilizing the electrodes (not microwaves). Therefore, a need to utilize a magnetron (which is low in energy transfer rate) may be eliminated, thereby increasing a system efficacy and saving a cost of replacing the magnetron.

Abstract translation: 提供了一种硫灯，包括供电电源，具有内部空间的透明灯泡，其中包含硫和多个电极。 此外，每个电极的一部分可以插入到空间中，并且每个电极的端部可以连接到电源，使得硫被放电激发，从而发光。 插入空间的电极的一部分可以涂覆有保护层，以防止电极和硫之间的化学反应。 此外，可以通过利用电极（不是微波）来实现将硫（包含在灯泡的空间中）变为等离子体相的变化。 因此，可以消除使用磁控管（其能量传递速率低）的需要，从而提高系统功效并节省更换磁控管的成本。

公开(公告)号：US07122949B2

公开(公告)日：2006-10-17

申请号：US10870992

申请日：2004-06-21

Applicant: Mikhail Strikovski

Inventor： Mikhail Strikovski

IPC: H01J17/26 ,  H01J61/28

CPC classification number: H01J3/025

Abstract: A surface discharge device performing functions of a trigger and electron beam generator includes a cylinder shaped member formed from a dielectric material with dielectric constant ε>100, in which a central opening is formed having a conical or cylindrical shape. An internal electrode is electrically coupled to the internal surface of the cylinder shaped member. An external electrode covers the external surface of the cylinder shaped member. A triggering pulse is applied between the external and internal electrodes to generate emission of electrons in the central opening and formation of the conducting plasma to ignite the device and serve as a source of electrons for generating an electron beam. The conducting plasma charges a capacitor formed by the cylinder shaped dielectric member and the external electrode. The cylinder shaped member is positioned in a hollow cathode having a central bore hole in the bottom. An anode is positioned remotely from the cathode and an electric field exists dynamically in space between the cathode and anode for at least a portion of the duration of the triggering pulse.

Abstract translation: 执行触发和电子束发生器的功能的表面放电装置包括由介电常数ε> 100的电介质材料形成的圆柱形构件，其中形成具有圆锥形或圆柱形形状的中心开口。 内部电极电耦合到圆筒形构件的内表面。 外部电极覆盖圆筒形构件的外表面。 在外部和内部电极之间施加触发脉冲以在中心开口中产生电子的发射并且形成导电等离子体以点燃该器件并且用作用于产生电子束的电子源。 导电等离子体对由圆柱形电介质构成的电容器和外部电极进行充电。 圆筒形构件位于底部具有中心孔的空心阴极中。 阳极远离阴极定位，并且电场在触发脉冲的持续时间的至少一部分之间动态地存在于阴极和阳极之间的空间中。