公开(公告)号：US09410986B2

公开(公告)日：2016-08-09

申请号：US14557879

申请日：2014-12-02

Applicant: MPI CORPORATION

Inventor： Wei-Cheng Ku ,  Hao Wei ,  Chia-Nan Chou ,  Chih-Hao Ho

IPC: G01R1/04

CPC classification number: G01R1/0466

Abstract: A testing jig includes a substrate, a carrier provided on the substrate, two conductive members made of a conductive material, and a compensation member made of a conductive material. The substrate has a signal circuit and a grounding circuit thereon. The carrier has a base board made of an insulating material and a conductive circuit made of a conductive material provided thereon. The base board has a signal perforation aligning with the signal circuit, a grounding perforation aligning with the grounding circuit, and multiple compensation holes. The conductive members both have an end exposed out of the carrier, and are respectively fitted in the signal perforation and the grounding perforation to make another end thereof contact the signal circuit or the grounding circuit. The compensation member is fitted in one of the compensation holes to be electrically connected to the conductive member in the grounding perforation through the conductive circuit.

Abstract translation: 测试夹具包括衬底，设置在衬底上的载体，由导电材料制成的两个导电构件和由导电材料制成的补偿构件。 衬底上具有信号电路和接地电路。 载体具有由绝缘材料制成的基板和设置在其上的由导电材料制成的导电电路。 基板具有与信号电路对准的信号穿孔，与接地电路对准的接地穿孔，以及多个补偿孔。 导电构件都具有暴露在载体外的端部，并且分别装配在信号穿孔和接地穿孔中，以使另一端与信号电路或接地电路接触。 补偿部件安装在一个补偿孔中，以通过导电电路与接地穿孔中的导电部件电连接。

公开(公告)号：US20160210028A1

公开(公告)日：2016-07-21

申请号：US14996282

申请日：2016-01-15

Applicant: MPI Corporation

Inventor： Stojan Kanev ,  Yung-Chin Liu ,  Andrej Rumiantsev ,  YAO-CHUAN CHIANG

IPC: G06F3/0484 ,  G06F3/0488 ,  G06F3/041

CPC classification number: G06F3/04845 ,  G01N21/9501 ,  G01R31/2808 ,  G03F7/7065 ,  G03F7/708 ,  G06F3/0412 ,  G06F3/04847 ,  G06F3/04883 ,  G06F2203/04806

Abstract: The instant disclosure provides an operating method of inspecting equipment, with the method applicable to semiconductor inspecting equipment having a movable element. The method includes: displaying a wafer graphic by a touch display; detecting a touch signal generated by the touch display; detecting the magnification of the wafer graphic when the touch signal is generated; and determining the moving speed of the movable element based on the magnification of the wafer graphic when the touch signal is generated. In addition, the moving direction of the movable element can be determined according to the touch signal. Through the instant disclosure, the operator can more intuitively operate each movable element of semiconductor inspecting equipment.

Abstract translation: 本公开提供了一种可用于具有可移动元件的半导体检查设备的方法来检查设备的操作方法。 该方法包括：通过触摸显示器显示晶片图形; 检测由所述触摸显示器产生的触摸信号; 当生成触摸信号时检测晶片图形的放大率; 以及当产生所述触摸信号时，基于所述晶片图形的放大率来确定所述可移动元件的移动速度。 此外，可以根据触摸信号来确定可移动元件的移动方向。 通过本公开，操作者可以更直观地操作半导体检查设备的每个可移动元件。

公开(公告)号：US20160143141A1

公开(公告)日：2016-05-19

申请号：US14619944

申请日：2015-02-11

Applicant: MPI CORPORATION

Inventor： WEI-CHENG KU ,  JUN-LIANG LAI ,  CHIH-HAO HO

IPC: H05K1/11

CPC classification number: H05K1/112 ,  H05K1/0268 ,  H05K1/113 ,  H05K2201/10265 ,  H05K2201/10295

Abstract: A multilayer circuit board includes a first substrate and a second substrate in stack. The first substrate first substrate a first pad, and a first circuit, wherein the first circuit is embedded in the first substrate, and the first pad is electrically connected to the first circuit. The second substrate has a first through hole, a second pad, and a second circuit, wherein the first through hole is opened at both sides of the second substrate, and the first pad of the first substrate is in the first through hole; the second circuit is embedded in the second substrate, and the second pad is electrically connected to the second circuit. The pads on each substrate are exposed by the through hole(s) of the above substrate(s) to shorten the null sections of the interconnectors and reduce the interference from the null sections.

Abstract translation: 多层电路板包括第一衬底和堆叠中的第二衬底。 第一衬底第一衬底是第一衬垫和第一电路，其中第一电路嵌入在第一衬底中，并且第一衬垫电连接到第一电路。 第二基板具有第一通孔，第二焊盘和第二电路，其中第一通孔在第二基板的两侧开口，第一基板的第一焊盘位于第一通孔中; 第二电路嵌入第二衬底中，第二衬垫电连接到第二电路。 每个衬底上的焊盘由上述衬底的通孔暴露，以缩短互连器的零部分，并减少无效部分的干扰。

公开(公告)号：US09244018B2

公开(公告)日：2016-01-26

申请号：US13940870

申请日：2013-07-12

Applicant: MPI Corporation

Inventor： Chia-Tai Chang ,  Chin-Yi Tsai ,  Chiu-Kuei Chen ,  Chen-Chih Yu ,  Chien-Chang Lai ,  Chin-Tien Yang ,  Hui-Pin Yang ,  Keng-Shieng Chang ,  Yun-Ru Huang

IPC: G01N21/88 ,  G01R1/04 ,  G01R1/06 ,  H01L21/68 ,  G01R1/073 ,  G01R1/067

CPC classification number: G01N21/88 ,  G01R1/04 ,  G01R1/06711 ,  G01R1/073 ,  G01R1/07342 ,  H01L21/68

Abstract: A probe holding structure includes a substrate and a plurality of holding modules. The substrate has an opening and a plurality of grooves arranged around a periphery of the opening. The holding modules are connected with the grooves, respectively. Each holding modules includes a fixing member and a plurality of probes. The fixing member is connected with a corresponding groove. The probes are connected with the fixing member and pass through the corresponding groove. The probe holding structure is combined with a lens adjusting mechanism having a lens to form an optical inspection device for testing electric characteristics of chips.

Abstract translation: 探针保持结构包括基板和多个保持模块。 基板具有围绕开口的周边布置的开口和多个槽。 保持模块分别与凹槽连接。 每个保持模块包括固定构件和多个探针。 固定构件与相应的凹槽连接。 探针与固定部件连接并通过相应的凹槽。 探头保持结构与具有透镜的透镜调节机构组合，以形成用于测试芯片的电特性的光学检查装置。

公开(公告)号：US20150276800A1

公开(公告)日：2015-10-01

申请号：US14668374

申请日：2015-03-25

Applicant: MPI CORPORATION

Inventor： Tsung-Yi CHEN ,  Horng-Kuang FAN ,  Ching-Hung YANG ,  Chung-Tse LEE ,  Chia-Yuan KUO ,  Tien-Chia LI ,  Ting-Ju WU ,  Shang-Jung HSIEH

IPC: G01R1/04 ,  G01R31/28 ,  G01R1/067

CPC classification number: G01R1/0408 ,  G01R1/067 ,  G01R1/07357 ,  G01R1/07371 ,  G01R31/2891

Abstract: A vertical probe device includes a lower die having engaging holes and needle holes, a positioning film having limiting holes and needle holes, probe needles inserted through the needle holes, and supporters having at least an upper stopping surface and at least a lower stopping surface for moveably limiting the positioning film therebetween. Each supporter has a head, a neck passing through the limiting hole and having a length longer than the thickness of the positioning film, a body, and a tail inserted into the engaging hole, which are connected in order, and at least one of the upper and lower stopping surfaces. The supporters can prevent the positioning film from being lifted and flipped over and enables the positioning film to move so that the probe needles are reliable.

Abstract translation: 垂直探针装置包括具有接合孔和针孔的下模具，具有限制孔和针孔的定位膜，穿过针孔插入的探针，以及至少具有上止动面和至少下停止面的支撑件， 可动地限制其间的定位膜。 每个支撑件具有头部，颈部穿过限制孔并且具有长于定位膜的厚度，插入到接合孔中的主体和尾部的长度，所述定位膜的主体和尾部按顺序连接，并且至少一个 上下止动面。 支持者可以防止定位胶片被提起并翻转，并使定位胶片移动，使得探针是可靠的。

公开(公告)号：US20150253356A1

公开(公告)日：2015-09-10

申请号：US14605776

申请日：2015-01-26

Applicant: MPI CORPORATION

Inventor： Ting-Hsin KUO ,  Tsung-Yi CHEN ,  Tien-Chia LI ,  Yi-Lung LEE ,  Chien-Chou WU

IPC: G01R1/067 ,  G01R1/073

CPC classification number: G01R1/06722 ,  G01R1/07307

Abstract: A spring probe includes a needle, a spring sleeve sleeved onto the needle, and a protrusion. The spring sleeve has upper and lower non-spring sections, and at least a spring section therebetween. The needle has a bottom end portion protruding out from the lower non-spring section, and a top end portion located in the upper non-spring section. The protrusion is located at one of the top end portion and the upper non-spring section. The needle is movable relative to the upper non-spring section from an initial position to a connected position where the upper non-spring section is electrically connected with the needle through the protrusion when receiving an external force. As a result, the spring probe effectively prevents signals from being transmitted through the spring section, thereby improving stability of signal transmission and preventing the spring section from fracture.

Abstract translation: 弹簧探针包括针，套在针上的弹簧套和突起。 弹簧套筒具有上下非弹簧部分，并且至少在其间具有弹簧部分。 针具有从下部非弹簧部分突出的底端部分和位于上部非弹簧部分中的顶端部分。 突起位于顶端部分和上部非弹性部分中的一个处。 针可以相对于上部非弹簧部分从初始位置移动到连接位置，在接收外部力时上部非弹簧部分通过突起与针体电连接。 结果，弹簧探针有效地防止信号通过弹簧部分传递，从而提高信号传输的稳定性并防止弹簧部分断裂。

公开(公告)号：US20150204906A1

公开(公告)日：2015-07-23

申请号：US14558302

申请日：2014-12-02

Applicant: MPI CORPORATION

Inventor： WEI-CHENG KU ,  HAO WEI ,  CHIA-NAN CHOU ,  CHIH-HAO HO

IPC: G01R1/04 ,  G01R31/04

CPC classification number: G01R31/041 ,  G01R1/0466

Abstract: A testing jig includes a substrate and a plurality of conductive elastic pieces, wherein the substrate has a recess and a plurality of circuits; the recess is located on a top surface of the substrate, while the circuits are provided on the top surface of the substrate. The conductive elastic pieces are provided on the substrate, and are respectively electrically connected to the circuits. Each of the conductive elastic pieces has a contact portion located within an orthographic projection range of the recess, wherein each of the contact portions contacts a pad of a DUT. Whereby, attenuation happens while transmitting test signals with high frequency can be effectively reduces by using the conductive elastic pieces to transmit test signals.

Abstract translation: 测试夹具包括基板和多个导电弹性件，其中所述基板具有凹部和多个电路; 凹部位于基板的顶表面上，而电路设置在基板的顶表面上。 导电弹性片设置在基板上，分别电连接到电路。 每个导电弹性片具有位于凹部的正投影范围内的接触部分，其中每个接触部分接触DUT的焊盘。 由此，通过使用导电弹性片传输测试信号，可以有效地降低传输高频测试信号的衰减。

公开(公告)号：US20150033553A1

公开(公告)日：2015-02-05

申请号：US14515537

申请日：2014-10-16

Applicant: MPI CORPORATION

Inventor： Chien-Chou Wu ,  Ming-Chi Chen ,  Tsung-Yi Chen ,  Chung-Che Li

IPC: G01R3/00 ,  G01R31/28

CPC classification number: G01R3/00 ,  B23K2103/42 ,  G01R31/2853 ,  G01R31/2887 ,  G01R31/2889 ,  Y10T29/49004 ,  Y10T29/49128 ,  Y10T29/49155 ,  Y10T29/49204 ,  Y10T29/49208 ,  Y10T29/49222

Abstract: An assembly method of direct-docking probing device is provided. First, a space transforming plate made by back-end-of-line semiconductor manufacturing process is provided, so the thickness of the space transforming plate is predetermined by the client of probe card manufacturer. Then a reinforcing plate in which a plurality of circuits disposed is provided, which has larger mechanical strength than the space transforming plate. After that the reinforcing plate and the space transforming plate are joined and electrically connected by a plurality of solders so as to form a space transformer. Then, a conductive elastic member and a probe interface board are provided. Thereafter, the space transformer and the conductive elastic member are mounted on the probe interface board. After that, at least one vertical probe assembly having a plurality of vertical probes is mounted on the space transforming plate, and the vertical probes is electrically connected with the space transforming plate.

Abstract translation: 提供了直接对接探测装置的装配方法。 首先，提供由后端半导体制造工艺制成的空间变换板，因此空间变换板的厚度由探针卡制造商的客户预先确定。 然后，设置有设置多个电路的加强板，其具有比空间转换板更大的机械强度。 之后，加强板和空间变换板通过多个焊料接合并电连接，形成空间变换器。 然后，提供导电弹性构件和探针接口板。 此后，空间变压器和导电弹性构件安装在探针接口板上。 之后，具有多个垂直探针的至少一个垂直探针组件安装在空间变换板上，垂直探针与空间转换板电连接。

公开(公告)号：US20140306729A1

公开(公告)日：2014-10-16

申请号：US14253336

申请日：2014-04-15

Applicant: MPI CORPORATION

Inventor： Tsung-Yi CHEN ,  Chung-Tse LEE ,  Shih-Shin CHEN

IPC: G01R1/04

CPC classification number: G01R31/2889 ,  G01R1/07378

Abstract: A position adjustable probing device adapted for being mounted to a circuit board includes a frame, a probe head, a space transformer module and an elevation adjusting structure. The frame has a first surface, a second surface opposite to the first surface, and a first opening penetrating through the first and second surfaces. The probe head is coupled to the frame. The space transformer module is disposed in the first opening. The elevation adjusting structure is provided at the frame and has a plurality of spacers for adjusting a position of the frame relative to a reference surface in a vertical direction.

Abstract translation: 适于安装到电路板的位置可调探测装置包括框架，探针头，空间变换器模块和仰角调节结构。 框架具有第一表面，与第一表面相对的第二表面和穿过第一表面和第二表面的第一开口。 探头连接到框架。 空间变压器模块设置在第一开口中。 高度调节结构设置在框架处，并且具有多个间隔件，用于调节框架相对于参考表面在垂直方向上的位置。

公开(公告)号：US20140176177A1

公开(公告)日：2014-06-26

申请号：US14140294

申请日：2013-12-24

Applicant: MPI CORPORATION

Inventor： Wei-Cheng Ku ,  JUN-LIANG LAI

IPC: G01R1/073

CPC classification number: G01R1/06772 ,  G01R31/31716 ,  G01R31/31905

Abstract: A probe card which is capable of transmitting high-frequency signals provided by a DUT, and the DUT includes an output pin group and an input pin group for sending and receiving the high-frequency signals respectively. The probe card includes a first signal pin group, a second signal pin group, and a multiband circuit. The first signal pin group is made of a conductive material, and is used to contact the output pin group; the second signal pin group is made of a conductive material too, and is used to contact the input pin group; the multiband circuit is electrically connected to the first signal pin group and the second signal pin group to allow signals within a first bandwidth and a second bandwidth to pass therethrough.

Abstract translation: 能够发送由DUT提供的高频信号的探针卡，DUT包括分别发送和接收高频信号的输出引脚组和输入引脚组。 探针卡包括第一信号引脚组，第二信号引脚组和多频带电路。 第一个信号引脚组由导电材料制成，用于接触输出引脚组; 第二信号引脚组也由导电材料制成，用于接触输入引脚组; 多频带电路电连接到第一信号引脚组和第二信号引脚组，以允许第一带宽和第二带宽内的信号通过。